JP7471312B2 - センサ計測データ統合 - Google Patents

センサ計測データ統合 Download PDF

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JP7471312B2
JP7471312B2 JP2021547158A JP2021547158A JP7471312B2 JP 7471312 B2 JP7471312 B2 JP 7471312B2 JP 2021547158 A JP2021547158 A JP 2021547158A JP 2021547158 A JP2021547158 A JP 2021547158A JP 7471312 B2 JP7471312 B2 JP 7471312B2
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data
sensor
identifier
metrology
measurement
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JP2022520247A (ja
JP2022520247A5 (https=
JPWO2020172186A5 (https=
Inventor
シドハース バーティア，
ギャレット エイチ． シン，
ヘン チェン パイ，
プラモド ナンビア，
ガネーシュ バラスブラマニアン，
イルファン ジャミール，
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Applied Materials Inc
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Applied Materials Inc
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Priority to JP2024015763A priority Critical patent/JP2024059663A/ja
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0286—Modifications to the monitored process, e.g. stopping operation or adapting control
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    • G05B19/02—Program-control systems electric
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    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
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    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
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    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
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    • G06F11/3495—Performance evaluation by tracing or monitoring for systems
    • G—PHYSICS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Manufacturing & Machinery (AREA)
  • Software Systems (AREA)
  • Mathematical Physics (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Computing Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Computer Hardware Design (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Medical Informatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • Human Computer Interaction (AREA)
  • General Health & Medical Sciences (AREA)
  • Computational Linguistics (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Factory Administration (AREA)
  • Image Analysis (AREA)
  • Atmospheric Sciences (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Ecology (AREA)
  • Environmental Sciences (AREA)
  • Electric Propulsion And Braking For Vehicles (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
JP2021547158A 2019-02-19 2020-02-18 センサ計測データ統合 Active JP7471312B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024015763A JP2024059663A (ja) 2019-02-19 2024-02-05 センサ計測データ統合

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962807619P 2019-02-19 2019-02-19
US62/807,619 2019-02-19
US16/791,081 2020-02-14
US16/791,081 US11592812B2 (en) 2019-02-19 2020-02-14 Sensor metrology data integration
PCT/US2020/018673 WO2020172186A1 (en) 2019-02-19 2020-02-18 Sensor metrology data integration

Related Child Applications (1)

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JP2024015763A Division JP2024059663A (ja) 2019-02-19 2024-02-05 センサ計測データ統合

Publications (4)

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JP2022520247A JP2022520247A (ja) 2022-03-29
JP2022520247A5 JP2022520247A5 (https=) 2023-03-01
JPWO2020172186A5 JPWO2020172186A5 (https=) 2023-03-01
JP7471312B2 true JP7471312B2 (ja) 2024-04-19

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JP2024015763A Pending JP2024059663A (ja) 2019-02-19 2024-02-05 センサ計測データ統合

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US (3) US11592812B2 (https=)
JP (2) JP7471312B2 (https=)
KR (2) KR102611824B1 (https=)
CN (2) CN113454552B (https=)
SG (1) SG11202108577UA (https=)
TW (2) TW202538611A (https=)
WO (1) WO2020172186A1 (https=)

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