CN113454552B - 传感器计量数据整合 - Google Patents

传感器计量数据整合 Download PDF

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Publication number
CN113454552B
CN113454552B CN202080015312.3A CN202080015312A CN113454552B CN 113454552 B CN113454552 B CN 113454552B CN 202080015312 A CN202080015312 A CN 202080015312A CN 113454552 B CN113454552 B CN 113454552B
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data
sensor
identifier
metering
metrology
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CN113454552A (zh
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S·巴蒂亚
G·H·西恩
白恒祯
P·南比亚尔
G·巴拉苏布拉马尼恩
I·贾米尔
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Applied Materials Inc
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Applied Materials Inc
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0286—Modifications to the monitored process, e.g. stopping operation or adapting control
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    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
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    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
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    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
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    • G06N3/09—Supervised learning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
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  • Engineering & Computer Science (AREA)
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  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Automation & Control Theory (AREA)
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  • Computational Linguistics (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Factory Administration (AREA)
  • Image Analysis (AREA)
  • Atmospheric Sciences (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Ecology (AREA)
  • Environmental Sciences (AREA)
  • Electric Propulsion And Braking For Vehicles (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
CN202080015312.3A 2019-02-19 2020-02-18 传感器计量数据整合 Active CN113454552B (zh)

Priority Applications (1)

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Applications Claiming Priority (5)

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US201962807619P 2019-02-19 2019-02-19
US62/807,619 2019-02-19
US16/791,081 2020-02-14
US16/791,081 US11592812B2 (en) 2019-02-19 2020-02-14 Sensor metrology data integration
PCT/US2020/018673 WO2020172186A1 (en) 2019-02-19 2020-02-18 Sensor metrology data integration

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CN113454552B true CN113454552B (zh) 2024-03-12

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US (3) US11592812B2 (https=)
JP (2) JP7471312B2 (https=)
KR (2) KR102611824B1 (https=)
CN (2) CN113454552B (https=)
SG (1) SG11202108577UA (https=)
TW (2) TW202538611A (https=)
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