SG11202108577UA - Sensor metrology data integration - Google Patents

Sensor metrology data integration

Info

Publication number
SG11202108577UA
SG11202108577UA SG11202108577UA SG11202108577UA SG11202108577UA SG 11202108577U A SG11202108577U A SG 11202108577UA SG 11202108577U A SG11202108577U A SG 11202108577UA SG 11202108577U A SG11202108577U A SG 11202108577UA SG 11202108577U A SG11202108577U A SG 11202108577UA
Authority
SG
Singapore
Prior art keywords
data integration
metrology data
sensor metrology
sensor
integration
Prior art date
Application number
SG11202108577UA
Inventor
Sidharth Bhatia
Garrett H Sin
Heng-Cheng Pai
Pramod Nambiar
Ganesh Balasubramanian
Irfan Jamil
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11202108577UA publication Critical patent/SG11202108577UA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0286—Modifications to the monitored process, e.g. stopping operation or adapting control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0286—Modifications to the monitored process, e.g. stopping operation or adapting control
    • G05B23/0294—Optimizing process, e.g. process efficiency, product quality
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/3089—Monitoring arrangements determined by the means or processing involved in sensing the monitored data, e.g. interfaces, connectors, sensors, probes, agents
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3447—Performance evaluation by modeling
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3466—Performance evaluation by tracing or monitoring
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F11/00—Error detection; Error correction; Monitoring
    • G06F11/30—Monitoring
    • G06F11/34—Recording or statistical evaluation of computer activity, e.g. of down time, of input/output operation ; Recording or statistical evaluation of user activity, e.g. usability assessment
    • G06F11/3466—Performance evaluation by tracing or monitoring
    • G06F11/3495—Performance evaluation by tracing or monitoring for systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31357—Observer based fault detection, use model
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32194—Quality prediction
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32201—Build statistical model of past normal proces, compare with actual process
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
SG11202108577UA 2019-02-19 2020-02-18 Sensor metrology data integration SG11202108577UA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962807619P 2019-02-19 2019-02-19
US16/791,081 US11592812B2 (en) 2019-02-19 2020-02-14 Sensor metrology data integration
PCT/US2020/018673 WO2020172186A1 (en) 2019-02-19 2020-02-18 Sensor metrology data integration

Publications (1)

Publication Number Publication Date
SG11202108577UA true SG11202108577UA (en) 2021-09-29

Family

ID=72043419

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202108577UA SG11202108577UA (en) 2019-02-19 2020-02-18 Sensor metrology data integration

Country Status (7)

Country Link
US (2) US11592812B2 (en)
JP (1) JP7471312B2 (en)
KR (2) KR20230169475A (en)
CN (1) CN113454552B (en)
SG (1) SG11202108577UA (en)
TW (2) TWI818153B (en)
WO (1) WO2020172186A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9606519B2 (en) * 2013-10-14 2017-03-28 Applied Materials, Inc. Matching process controllers for improved matching of process
US11940488B2 (en) 2017-01-05 2024-03-26 Xcalipr Corporation Systems and methods for high precision optical characterization of carrier transport properties in semiconductor manufacturing
US11592812B2 (en) 2019-02-19 2023-02-28 Applied Materials, Inc. Sensor metrology data integration
US11375582B2 (en) * 2020-10-16 2022-06-28 Verizon Patent And Licensing Inc. Systems and methods for scalable edge-based microcontrollers
CN112364561B (en) * 2020-10-26 2022-07-26 上海感探号信息科技有限公司 Vehicle control action correction method and device, electronic equipment and storage medium
TWI777317B (en) * 2020-11-30 2022-09-11 智慧貼紙股份有限公司 Multi-point measurement system and method thereof
US11853042B2 (en) 2021-02-17 2023-12-26 Applied Materials, Inc. Part, sensor, and metrology data integration
US11961030B2 (en) * 2022-01-27 2024-04-16 Applied Materials, Inc. Diagnostic tool to tool matching methods for manufacturing equipment
US20240012399A1 (en) * 2022-07-08 2024-01-11 The Boeing Company Property Prediction For Unconsolidated Composite Materials
US11731317B1 (en) * 2022-07-08 2023-08-22 The Boeing Company System and method for material manufacturing based on predicted properties of unconsolidated composite material
CN115314995B (en) * 2022-08-08 2023-08-04 深圳市海曼科技股份有限公司 Wireless cascading fire-fighting positioning method and device, electronic equipment and storage medium
JP7274655B1 (en) 2022-09-09 2023-05-16 Dmg森精機株式会社 Mobile terminal and measurement management program
CN117234170B (en) * 2023-11-16 2024-01-12 中钢集团武汉安全环保研究院有限公司 Method and device for monitoring and managing key technological parameters of steel

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06301690A (en) * 1993-04-13 1994-10-28 Hitachi Ltd Production line and condition setting method for the same
IT1272036B (en) * 1993-11-05 1997-06-11 Marelli Autronica REGISTRATION SYSTEM FOR A PRODUCTION LINE.
US7401066B2 (en) 2002-03-21 2008-07-15 Applied Materials, Inc. Correlation of end-of-line data mining with process tool data mining
US6751518B1 (en) 2002-04-29 2004-06-15 Advanced Micro Devices, Inc. Dynamic process state adjustment of a processing tool to reduce non-uniformity
US6773931B2 (en) 2002-07-29 2004-08-10 Advanced Micro Devices, Inc. Dynamic targeting for a process control system
US7359759B2 (en) 2005-10-31 2008-04-15 Taiwan Semiconductor Manufacturing Company Method and system for virtual metrology in semiconductor manufacturing
US7765020B2 (en) 2007-05-04 2010-07-27 Applied Materials, Inc. Graphical user interface for presenting multivariate fault contributions
CN101621016B (en) 2008-07-02 2011-10-05 中芯国际集成电路制造(上海)有限公司 Method and system for detecting defects in manufacture of integrated circuit
US9915940B2 (en) * 2011-10-31 2018-03-13 Applied Materials, Llc Bi-directional association and graphical acquisition of time-based equipment sensor data and material-based metrology statistical process control data
DE112013001521T9 (en) * 2012-03-18 2015-03-19 Manufacturing System Insights (India) Pvt. Ltd. A system and apparatus that identifies, records, classifies, and employs stored knowledge unique to each operator in a semi-automatic manufacturing arrangement to perform automatic technical supervision operations to improve performance of the manufacturing system, and the method (s) therefor
US20140149296A1 (en) 2012-11-29 2014-05-29 Applied Materials, Inc. Enhanced preventative maintenance utilizing direct part marking
US9372922B2 (en) * 2013-07-11 2016-06-21 Neura, Inc. Data consolidation mechanisms for internet of things integration platform
US10284651B2 (en) * 2014-02-27 2019-05-07 Harman International Industries, Incorporated Data aggregation and delivery
US9881072B2 (en) * 2014-08-14 2018-01-30 McAFEE, LLC. Dynamic feature set management
US20160342147A1 (en) 2015-05-19 2016-11-24 Applied Materials, Inc. Methods and systems for applying run-to-run control and virtual metrology to reduce equipment recovery time
CN106663169B (en) 2015-07-24 2021-03-09 策安保安有限公司 System and method for high speed threat intelligence management using unsupervised machine learning and priority algorithms
NL2017123A (en) 2015-07-24 2017-01-24 Asml Netherlands Bv Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
US10824618B2 (en) * 2015-09-09 2020-11-03 Intel Corporation Separated application security management
US20170090866A1 (en) * 2015-09-25 2017-03-30 Robert L. Vaughn Universal sensor and/or sensor cluster to provide a detection pattern
US10289949B2 (en) * 2015-09-29 2019-05-14 International Business Machines Corporation Incident prediction and response using deep learning techniques and multimodal data
JP6059375B1 (en) * 2016-02-09 2017-01-11 ファナック株式会社 Production control system and integrated production control system
US10747768B2 (en) * 2016-06-14 2020-08-18 Fuji Xerox Co., Ltd. Data processing system and data processing method
US10571899B2 (en) 2016-08-18 2020-02-25 i Smart Technologies Corporation Operating state acquisition apparatus, production management system, and production management method for manufacturing line
JP6382911B2 (en) 2016-11-01 2018-08-29 ファナック株式会社 Wire electric discharge machine
DE112017006552T5 (en) * 2016-12-26 2020-08-13 Mitsubishi Electric Corporation MACHINING PROCESS GENERATING DEVICE, MACHINING PROCESS GENERATING METHOD AND PROGRAM
WO2018204410A1 (en) * 2017-05-04 2018-11-08 Minds Mechanical, Llc Metrology system for machine learning-based manufacturing error predictions
TWI644190B (en) 2017-06-29 2018-12-11 台灣積體電路製造股份有限公司 Processing system and processing method
WO2019023565A1 (en) * 2017-07-27 2019-01-31 Upstream Security Ltd. System and method for connected vehicle cybersecurity
TWI647564B (en) 2017-11-07 2019-01-11 先智雲端數據股份有限公司 Method and system for diagnosing remaining life of data center storage devices
KR20200120958A (en) 2018-03-13 2020-10-22 어플라이드 머티어리얼스, 인코포레이티드 Machine learning systems for monitoring semiconductor processing
US11037573B2 (en) * 2018-09-05 2021-06-15 Hitachi, Ltd. Management and execution of equipment maintenance
US20200104639A1 (en) * 2018-09-28 2020-04-02 Applied Materials, Inc. Long short-term memory anomaly detection for multi-sensor equipment monitoring
US11263737B2 (en) 2019-01-10 2022-03-01 Lam Research Corporation Defect classification and source analysis for semiconductor equipment
US11592812B2 (en) 2019-02-19 2023-02-28 Applied Materials, Inc. Sensor metrology data integration
CN113874993A (en) 2019-03-29 2021-12-31 朗姆研究公司 Model-based scheduling for substrate processing systems
US11279032B2 (en) * 2019-04-11 2022-03-22 Applied Materials, Inc. Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots
US11610076B2 (en) * 2019-08-07 2023-03-21 Applied Materials, Inc. Automatic and adaptive fault detection and classification limits
US20210088867A1 (en) * 2019-09-20 2021-03-25 Kinestral Technologies, Inc. Quality control of an electrochromic device
US11513504B2 (en) * 2019-10-18 2022-11-29 Applied Materials, Inc. Characterizing and monitoring electrical components of manufacturing equipment
US11749543B2 (en) * 2020-07-06 2023-09-05 Applied Materials, Inc. Chamber matching and calibration
US11371148B2 (en) * 2020-08-24 2022-06-28 Applied Materials, Inc. Fabricating a recursive flow gas distribution stack using multiple layers
US11853042B2 (en) 2021-02-17 2023-12-26 Applied Materials, Inc. Part, sensor, and metrology data integration

Also Published As

Publication number Publication date
US11592812B2 (en) 2023-02-28
CN113454552B (en) 2024-03-12
KR20230169475A (en) 2023-12-15
US20230205196A1 (en) 2023-06-29
TWI818153B (en) 2023-10-11
US20200264335A1 (en) 2020-08-20
KR102611824B1 (en) 2023-12-07
CN113454552A (en) 2021-09-28
KR20210118243A (en) 2021-09-29
JP7471312B2 (en) 2024-04-19
WO2020172186A1 (en) 2020-08-27
TW202040500A (en) 2020-11-01
TW202403658A (en) 2024-01-16
JP2022520247A (en) 2022-03-29

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