JP7464665B2 - 基板処理装置及び方法 - Google Patents
基板処理装置及び方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 188
- 238000012545 processing Methods 0.000 title claims description 162
- 238000000034 method Methods 0.000 title claims description 43
- 239000007788 liquid Substances 0.000 claims description 86
- 239000012530 fluid Substances 0.000 claims description 74
- 238000012937 correction Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000003672 processing method Methods 0.000 claims description 11
- 230000003111 delayed effect Effects 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 27
- 230000032258 transport Effects 0.000 description 25
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 24
- 239000000872 buffer Substances 0.000 description 12
- 229910002092 carbon dioxide Inorganic materials 0.000 description 12
- 239000001569 carbon dioxide Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 239000003960 organic solvent Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- 238000013021 overheating Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
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- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
502 処理空間
520 超臨界チャンバー
522 上部ハウジング
524 下部ハウジング
550 排気ライン
560 流体供給ユニット
562 メーン供給ライン
564 上部供給ライン
566 下部供給ライン
570 加熱手段
580 支持ユニット
Claims (19)
- 基板を処理する方法において、
超臨界チャンバー内に第1基板を搬入して前記超臨界チャンバー内で第1基板を超臨界処理する第1超臨界処理段階と、
前記第1基板を前記超臨界チャンバーから搬出入した後に前記超臨界チャンバーを開放して前記超臨界チャンバー内の温度が既設定された温度になる時まで第1時間の間に前記超臨界チャンバーを空き状態に維持する休止段階と、
前記超臨界チャンバー内に第2基板を搬入して前記超臨界チャンバー内で前記第2基板を超臨界処理する第2超臨界処理段階と、を含み、
前記第1時間は、前記第2超臨界処理段階で前記第2基板を処理するための初期設定温度に基づいて設定される、基板処理方法。 - 前記第2超臨界処理段階は、
前記超臨界チャンバー内に第1温度の流体を供給して前記流体を加圧する加圧段階と、
前記流体で前記基板を処理する処理段階と、を含み、
前記初期設定温度は、前記第1温度と同一であるか、或いはそれより低い温度に提供される請求項1に記載の基板処理方法。 - 前記第1超臨界処理段階の前に、
液処理チャンバー内で液処理された前記第1基板を前記超臨界チャンバーに搬送する搬送段階をさらに含み、
前記搬送段階が既設定された時間より遅延される場合、
前記超臨界チャンバー内の温度を上昇させる温度補正段階を遂行する請求項2に記載の基板処理方法。 - 前記温度補正段階は、
前記超臨界チャンバー内部の温度が前記初期設定温度になるための時間の間に遂行される請求項3に記載の基板処理方法。 - 前記温度補正段階は、
前記超臨界チャンバー内に前記第1温度の流体を供給して行われる請求項3に記載の基板処理方法。 - 前記温度補正段階の後に、
前記休止段階が遂行される請求項3乃至請求項5のいずれかの一項に記載の基板処理方法。 - 基板を処理する方法において、
液処理チャンバー内で基板を液処理した後に、前記基板を高圧の超臨界チャンバーに搬送して前記超臨界チャンバー内で超臨界処理し、
前記搬送が既設定された時間より遅延される場合、前記超臨界チャンバーの内部温度を補正する温度補正段階が遂行され、
前記温度補正段階は、
前記超臨界チャンバー内部の温度が前記超臨界チャンバー内で前記基板を処理するための初期設定温度になるための時間の間に遂行される基板処理方法。 - 前記温度補正段階は、
前記超臨界チャンバー内に高温の流体を供給して行われる請求項7に記載の基板処理方法。 - 前記温度補正段階で、前記高温の流体で前記超臨界チャンバー内部を洗浄する請求項8に記載の基板処理方法。
- 前記超臨界処理は、
前記超臨界チャンバー内に第1温度の流体を供給して前記流体を加圧する加圧段階と、
前記流体で前記基板を処理する処理段階と、を含み、
前記初期設定温度は、前記第1温度と同一であるか、或いはそれより低い温度に提供される請求項7乃至請求項9のいずれかの一項に記載の基板処理方法。 - 前記温度補正段階で、
前記超臨界チャンバー内に前記第1温度の流体を供給する請求項10に記載の基板処理方法。 - 前記超臨界処理は、
超臨界チャンバー内に第1基板を搬入して前記超臨界チャンバー内で第1基板を超臨界処理する第1超臨界処理段階と、
前記第1基板を前記超臨界チャンバーから搬出入した後に前記超臨界チャンバーを開放して前記超臨界チャンバー内の温度が既設定された温度になる時まで第1時間の間に前記超臨界チャンバーを空き状態に維持する休止段階と、
前記超臨界チャンバー内に第2基板を搬入して前記超臨界チャンバー内で前記第2基板を超臨界処理する第2超臨界処理段階と、を含む請求項10に記載の基板処理方法。 - 前記温度補正段階の後に前記休止段階が遂行される請求項12に記載の基板処理方法。
- 前記第1時間は、
前記第2超臨界処理段階で前記第2基板を処理するための初期設定温度に基づいて設定される請求項13に記載の基板処理方法。 - 基板を処理する装置において、
内部で前記基板を液処理する液処理チャンバーと、
内部の処理空間で前記基板を超臨界処理する超臨界チャンバーと、
前記液処理チャンバー内の前記基板を前記超臨界チャンバーに搬送する搬送手段と、
前記液処理チャンバー、前記超臨界チャンバー、そして前記搬送手段を制御する制御器と、を含み、
前記超臨界チャンバーは、
前記処理空間内で基板を支持する支持ユニットと、
前記処理空間を提供するハウジングと、
前記処理空間に流体を供給する流体供給ユニットと、
前記流体を加熱する加熱手段と、を含み、
前記制御器は、
前記搬送手段が前記液処理チャンバーから前記超臨界チャンバーに前記基板を搬送する時間が既設定された時間より遅延される場合、前記処理空間に高温の前記流体を供給して前記超臨界チャンバーの内部温度を第1温度まで上昇させる温度補正段階が既設定された時間の間に遂行されるように前記超臨界チャンバーを制御する基板処理装置。 - 前記第1温度は、前記基板を処理するための初期設定温度である請求項15に記載の基板処理装置。
- 前記制御器は、
超臨界チャンバー内に第1基板を搬入して前記超臨界チャンバー内で第1基板を超臨界処理した後に、
前記第1基板を前記超臨界チャンバーから搬出入した後に、前記超臨界チャンバーを開放して前記超臨界チャンバー内の温度が既設定された温度になる時まで第1時間の間に前記超臨界チャンバーを空き状態に維持し、
その後に、前記超臨界チャンバー内に第2基板を搬入して前記超臨界チャンバー内で前記第2基板を超臨界処理するように前記超臨界チャンバーを制御する請求項15に記載の基板処理装置。 - 前記第1時間は、
前記超臨界処理段階で前記第2基板を処理するための初期設定温度に基づいて設定される請求項17に記載の基板処理装置。 - 前記加熱手段は、前記ハウジングの外部に提供される請求項15に記載の基板処理装置。
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Citations (4)
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JP2010161165A (ja) | 2009-01-07 | 2010-07-22 | Tokyo Electron Ltd | 超臨界処理装置、基板処理システム及び超臨界処理方法 |
JP2011009299A5 (ja) | 2009-06-23 | 2011-09-08 | ||
US20190393028A1 (en) | 2018-06-25 | 2019-12-26 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
JP2021086857A (ja) | 2019-11-25 | 2021-06-03 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
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JP2010161165A (ja) | 2009-01-07 | 2010-07-22 | Tokyo Electron Ltd | 超臨界処理装置、基板処理システム及び超臨界処理方法 |
JP2011009299A5 (ja) | 2009-06-23 | 2011-09-08 | ||
US20190393028A1 (en) | 2018-06-25 | 2019-12-26 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
JP2020004757A (ja) | 2018-06-25 | 2020-01-09 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
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