JP7462133B2 - 磁気センサユニット - Google Patents
磁気センサユニット Download PDFInfo
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- JP7462133B2 JP7462133B2 JP2020559696A JP2020559696A JP7462133B2 JP 7462133 B2 JP7462133 B2 JP 7462133B2 JP 2020559696 A JP2020559696 A JP 2020559696A JP 2020559696 A JP2020559696 A JP 2020559696A JP 7462133 B2 JP7462133 B2 JP 7462133B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 326
- 238000001514 detection method Methods 0.000 claims description 35
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 230000005415 magnetization Effects 0.000 description 4
- 239000003302 ferromagnetic material Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
- G01R33/0076—Protection, e.g. with housings against stray fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/091—Constructional adaptation of the sensor to specific applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Toxicology (AREA)
- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
図13は、実施の形態における変形例である他の磁気センサユニット200の拡大断面図である。図13において、図1から図12に示す磁気センサユニット100と同じ部分には同じ参照符号を付して説明を簡略化する。また、磁気センサユニット200は、磁気センサユニット100の磁気シールド40の代わりに磁気シールド70を備え、磁気シールド70の他の構造については磁気センサユニット100と同じである。
1a 回転軸線
10 磁石
11,12 着磁領域
20 磁気センサ
30 磁気ヨーク
40,70 磁気シールド
60 ベース基板
100,200 磁気センサユニット
P1a,P1b,P2a,P2b 磁極
MR1~MR8 磁気抵抗
BR1,BR2 ブリッジ回路
BR1a,BR1b,BR2a,BR2b 直列体
Claims (2)
- 上面と、下面と、前記上面と前記下面とに繋がる側面とを有する磁石と、前記磁石の前記下面と対向するように配置される磁気センサと、前記磁気センサの上下方向と交差する側方向において前記磁気センサを囲むように配置された磁気シールドと、前記磁石の前記上面と前記側面とを覆う磁気ヨークと、を備え、前記磁気センサは、前記磁石で発生する検出磁界が印加される異方性磁気抵抗を含み、前記磁石は、前記上下方向に着磁されており、前記磁石の前記下面に第1の磁極を形成する第1の着磁領域と、前記第1の着磁領域と逆方向に着磁されており、前記磁石の前記下面に第2の磁極を形成する第2の着磁領域と、を有し、前記第1の磁極の中心から前記第2の磁極の中心までの距離LAと、前記第1の磁極の前記中心から前記磁気シールドまでの距離LBと、前記第2の磁極の前記中心から前記磁気シールドまでの距離LCとは、LA<LB+LCの関係を満たしているとともに、上面視において、前記磁気シールドの外周端は前記磁気ヨークの外周端より内側に配置されている磁気センサユニット。
- 上面と、下面と、前記上面と前記下面とに繋がる側面とを有する磁石と、前記磁石の前記下面と対向するように配置される磁気センサと、前記磁気センサの上下方向と交差する側方向において前記磁気センサを囲むように配置された磁気シールドと、前記磁石の前記上面と前記側面とを覆う磁気ヨークと、を備え、前記磁気センサは、前記磁石で発生する検出磁界が印加される異方性磁気抵抗を含み、前記磁石は、前記上下方向に着磁されており、前記磁石の前記下面に第1の磁極を形成する第1の着磁領域と、前記第1の着磁領域と逆方向に着磁されており、前記磁石の前記下面に第2の磁極を形成する第2の着磁領域と、を有し、前記第1の磁極の中心から前記第2の磁極の中心までの距離LAと、前記第1の磁極の前記中心から前記磁気シールドまでの距離LBと、前記第2の磁極の前記中心から前記磁気シールドまでの距離LCとは、LA<LB+LCの関係を満たしているとともに、上面視において、前記磁気シールドの外周端は前記磁気ヨークの外周端より外側に配置されており、前記磁気シールドの上端は前記磁気ヨークの下端より上方に位置しており、かつ、前記磁気シールドの内径LDと、前記磁気ヨークの外径LEと、前記上下方向での前記磁気ヨークの下端から前記磁気シールドの上端までの高低差LFと、磁石の高さLGとは、LE×1.5>LD>LE×1.2、かつLG×0.5>LF>0の関係を満たしている磁気センサユニット。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018234033 | 2018-12-14 | ||
JP2018234033 | 2018-12-14 | ||
JP2018244045 | 2018-12-27 | ||
JP2018244045 | 2018-12-27 | ||
PCT/JP2019/026875 WO2020121566A1 (ja) | 2018-12-14 | 2019-07-05 | 磁気センサユニット |
Publications (2)
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JPWO2020121566A1 JPWO2020121566A1 (ja) | 2021-10-21 |
JP7462133B2 true JP7462133B2 (ja) | 2024-04-05 |
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JP2020559696A Active JP7462133B2 (ja) | 2018-12-14 | 2019-07-05 | 磁気センサユニット |
Country Status (4)
Country | Link |
---|---|
US (1) | US11982525B2 (ja) |
JP (1) | JP7462133B2 (ja) |
CN (1) | CN113167601A (ja) |
WO (1) | WO2020121566A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003214896A (ja) | 2002-01-21 | 2003-07-30 | Asahi Kasei Corp | 回転角度センサ |
JP2007263585A (ja) | 2006-03-27 | 2007-10-11 | Denso Corp | 回転角度検出装置 |
US20080164867A1 (en) | 2007-01-08 | 2008-07-10 | Klaus Manfred Steinich | Angle sensor |
WO2011001984A1 (ja) | 2009-06-30 | 2011-01-06 | 株式会社トーメンエレクトロニクス | 回転角度検出装置 |
US20110080162A1 (en) | 2009-10-06 | 2011-04-07 | Asm Automation Sensorik Messtechnik Gmbh | Assembly for detecting more than one rotation through a position encoder magnet |
JP2012013669A (ja) | 2010-06-02 | 2012-01-19 | Denso Corp | 回転角度検出装置 |
WO2013145644A1 (ja) | 2012-03-29 | 2013-10-03 | 株式会社デンソー | 回転角検出装置 |
JP2018503840A (ja) | 2015-01-28 | 2018-02-08 | フラバ ベスローテン ヴェンノーツハップFraba B.V. | 磁石式角変位計測システム |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0299823A (ja) | 1988-10-07 | 1990-04-11 | Tdk Corp | 磁気回転センサ |
WO2014135453A1 (de) * | 2013-03-05 | 2014-09-12 | Walter Mehnert | Magnetischer linear- oder drehgeber |
US10759276B2 (en) * | 2016-07-12 | 2020-09-01 | Panasonic Intellectual Property Management Co., Ltd. | Magnetic sensor and detection device using same |
-
2019
- 2019-07-05 WO PCT/JP2019/026875 patent/WO2020121566A1/ja active Application Filing
- 2019-07-05 JP JP2020559696A patent/JP7462133B2/ja active Active
- 2019-07-05 CN CN201980078195.2A patent/CN113167601A/zh active Pending
- 2019-07-05 US US17/295,425 patent/US11982525B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003214896A (ja) | 2002-01-21 | 2003-07-30 | Asahi Kasei Corp | 回転角度センサ |
JP2007263585A (ja) | 2006-03-27 | 2007-10-11 | Denso Corp | 回転角度検出装置 |
US20080164867A1 (en) | 2007-01-08 | 2008-07-10 | Klaus Manfred Steinich | Angle sensor |
WO2011001984A1 (ja) | 2009-06-30 | 2011-01-06 | 株式会社トーメンエレクトロニクス | 回転角度検出装置 |
US20110080162A1 (en) | 2009-10-06 | 2011-04-07 | Asm Automation Sensorik Messtechnik Gmbh | Assembly for detecting more than one rotation through a position encoder magnet |
JP2012013669A (ja) | 2010-06-02 | 2012-01-19 | Denso Corp | 回転角度検出装置 |
WO2013145644A1 (ja) | 2012-03-29 | 2013-10-03 | 株式会社デンソー | 回転角検出装置 |
JP2018503840A (ja) | 2015-01-28 | 2018-02-08 | フラバ ベスローテン ヴェンノーツハップFraba B.V. | 磁石式角変位計測システム |
Also Published As
Publication number | Publication date |
---|---|
US20220011086A1 (en) | 2022-01-13 |
US11982525B2 (en) | 2024-05-14 |
JPWO2020121566A1 (ja) | 2021-10-21 |
CN113167601A (zh) | 2021-07-23 |
WO2020121566A1 (ja) | 2020-06-18 |
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