JP7433042B2 - 研磨用組成物 - Google Patents
研磨用組成物 Download PDFInfo
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- JP7433042B2 JP7433042B2 JP2019233278A JP2019233278A JP7433042B2 JP 7433042 B2 JP7433042 B2 JP 7433042B2 JP 2019233278 A JP2019233278 A JP 2019233278A JP 2019233278 A JP2019233278 A JP 2019233278A JP 7433042 B2 JP7433042 B2 JP 7433042B2
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- 238000005498 polishing Methods 0.000 title claims description 98
- 239000000203 mixture Substances 0.000 title claims description 56
- 229920003169 water-soluble polymer Polymers 0.000 claims description 24
- 239000006061 abrasive grain Substances 0.000 claims description 19
- 150000007514 bases Chemical class 0.000 claims description 15
- 239000003822 epoxy resin Substances 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 15
- 229920000647 polyepoxide Polymers 0.000 claims description 15
- -1 water Chemical class 0.000 claims description 14
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 claims description 13
- 239000004354 Hydroxyethyl cellulose Substances 0.000 claims description 13
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 239000007864 aqueous solution Substances 0.000 claims description 12
- 230000003746 surface roughness Effects 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 description 16
- 239000004372 Polyvinyl alcohol Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229920002451 polyvinyl alcohol Polymers 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 229930182470 glycoside Natural products 0.000 description 6
- 150000002338 glycosides Chemical class 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- HOVAGTYPODGVJG-UVSYOFPXSA-N (3s,5r)-2-(hydroxymethyl)-6-methoxyoxane-3,4,5-triol Chemical class COC1OC(CO)[C@@H](O)C(O)[C@H]1O HOVAGTYPODGVJG-UVSYOFPXSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- GLUUGHFHXGJENI-UHFFFAOYSA-N diethylenediamine Natural products C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000010790 dilution Methods 0.000 description 4
- 239000012895 dilution Substances 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 125000002947 alkylene group Chemical group 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000001641 gel filtration chromatography Methods 0.000 description 3
- HOVAGTYPODGVJG-UHFFFAOYSA-N methyl beta-galactoside Natural products COC1OC(CO)C(O)C(O)C1O HOVAGTYPODGVJG-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920001451 polypropylene glycol Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L sodium carbonate Substances [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 2
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- ORTVZLZNOYNASJ-UPHRSURJSA-N (z)-but-2-ene-1,4-diol Chemical compound OC\C=C/CO ORTVZLZNOYNASJ-UPHRSURJSA-N 0.000 description 1
- PVOAHINGSUIXLS-UHFFFAOYSA-N 1-Methylpiperazine Chemical compound CN1CCNCC1 PVOAHINGSUIXLS-UHFFFAOYSA-N 0.000 description 1
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 description 1
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerol Natural products OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 229920001479 Hydroxyethyl methyl cellulose Polymers 0.000 description 1
- 229920002153 Hydroxypropyl cellulose Polymers 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 229910001860 alkaline earth metal hydroxide Inorganic materials 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 description 1
- IMUDHTPIFIBORV-UHFFFAOYSA-N aminoethylpiperazine Chemical compound NCCN1CCNCC1 IMUDHTPIFIBORV-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- STIAPHVBRDNOAJ-UHFFFAOYSA-N carbamimidoylazanium;carbonate Chemical compound NC(N)=N.NC(N)=N.OC(O)=O STIAPHVBRDNOAJ-UHFFFAOYSA-N 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 235000010980 cellulose Nutrition 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 229920006184 cellulose methylcellulose Polymers 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 125000003976 glyceryl group Chemical group [H]C([*])([H])C(O[H])([H])C(O[H])([H])[H] 0.000 description 1
- 150000004687 hexahydrates Chemical class 0.000 description 1
- MSQACBWWAIBWIC-UHFFFAOYSA-N hydron;piperazine;chloride Chemical compound Cl.C1CNCCN1 MSQACBWWAIBWIC-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 1
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- LSHROXHEILXKHM-UHFFFAOYSA-N n'-[2-[2-[2-(2-aminoethylamino)ethylamino]ethylamino]ethyl]ethane-1,2-diamine Chemical compound NCCNCCNCCNCCNCCN LSHROXHEILXKHM-UHFFFAOYSA-N 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
A×B/C < 2.8
A×B/C < 2.8
A×B/C < 2.8
表1に示す配合のベース剤に対して、表2に示す負荷抑制剤(配合量0.005質量%)を添加した研磨用組成物(実施例1~6、及び比較例1~6)を作製した。さらに、表3に示す実施例7~9の研磨用組成物を作製した。表3に示す配合量(%)は質量%である。
表1及び表2に記載された研磨用組成物、並びに表3に記載された研磨用組成物を41倍に希釈し、研磨装置としてG&P社製POLI762を用いて、12インチのガラスエポキシ樹脂板を被研磨材としてフリクション解析を実施した。ここで、ガラスエポキシ樹脂板を被研磨材としたのは、ガラスエポキシ樹脂製キャリアを用いた両面研磨の摩擦状態を模擬するためである。研磨パッドは、ニッタ・ハース株式会社製EXTERION(登録商標)SL-31を使用した。研磨用組成物の供給速度は300mL/分、面圧は150g/cm2、ガイド圧は220g/cm2とした。CoFは、上記の研磨装置で測定した。CoFは、研磨時の研磨ヘッドの垂直荷重に対する研磨ヘッドの水平方向の力の比率である。研磨負荷が小さいほど、CoFは小さくなる。ΔCoFは、負荷抑制剤の添加前後のCoFの差である。例えば、表2のΔCoFは、表1に示す配合のベース剤を用いて上記条件で研磨した場合のCoFと、ベース剤に表2に示す負荷抑制剤を添加した研磨用組成物を用いて上記条件で研磨した場合のCoFとの差分である。ΔCoFの値は、負荷抑制剤の負荷抑制効果を示すと考えられる。ΔCoFが0.03以上の場合に負荷抑制効果が得られたと判断した(表2及び表3において丸印で示す判定結果)。ΔCoFが1.0以上の場合に優れた負荷抑制効果が得られると判断した(表2及び表3において二重丸印で示す判定結果)。
表1及び表2に記載された研磨用組成物、並びに表3に記載された研磨用組成物を41倍に希釈し、スピードファム社製DSM20B-5P-4Dを用いて12インチのシリコンウェーハの両面研磨を実施した。研磨パッドは、ニッタ・ハース株式会社製EXTERION(登録商標)SL-31を使用した。3分間の研磨を実施し、装置鳴き・振動発生の有無を調査した。
Claims (2)
- 砥粒と、
負荷抑制剤と、
水溶性高分子と、
塩基性化合物と、
水とを含み、
表面粗さRa=3.0nmのガラスエポキシ樹脂板の面に対する前記負荷抑制剤の0.1質量%水溶液の接触角A、前記負荷抑制剤の0.1質量%水溶液の表面張力B、及び前記負荷抑制剤の分子量Cは、下記式を満たしている、研磨用組成物。
A×B/C < 2.8 - 前記水溶性高分子は、ヒドロキシエチルセルロースである、請求項1に記載の研磨用組成物。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019233278A JP7433042B2 (ja) | 2019-12-24 | 2019-12-24 | 研磨用組成物 |
KR1020227021235A KR20220119036A (ko) | 2019-12-24 | 2020-11-19 | 연마용 조성물 |
CN202080089552.8A CN114846109B (zh) | 2019-12-24 | 2020-11-19 | 研磨用组合物 |
EP20905421.2A EP4083152A4 (en) | 2019-12-24 | 2020-11-19 | POLISHING COMPOSITION |
PCT/JP2020/043156 WO2021131434A1 (ja) | 2019-12-24 | 2020-11-19 | 研磨用組成物 |
TW109144663A TW202134361A (zh) | 2019-12-24 | 2020-12-17 | 研磨用組合物 |
Applications Claiming Priority (1)
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JP2019233278A JP7433042B2 (ja) | 2019-12-24 | 2019-12-24 | 研磨用組成物 |
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JP2021102666A JP2021102666A (ja) | 2021-07-15 |
JP7433042B2 true JP7433042B2 (ja) | 2024-02-19 |
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JP2019233278A Active JP7433042B2 (ja) | 2019-12-24 | 2019-12-24 | 研磨用組成物 |
Country Status (5)
Country | Link |
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EP (1) | EP4083152A4 (ja) |
JP (1) | JP7433042B2 (ja) |
KR (1) | KR20220119036A (ja) |
TW (1) | TW202134361A (ja) |
WO (1) | WO2021131434A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002075928A (ja) | 2000-05-22 | 2002-03-15 | Samsung Electronics Co Ltd | 化学機械的研磨(cmp)工程用スラリー及びこれを用いた半導体素子の製造方法 |
JP2011515023A (ja) | 2008-02-29 | 2011-05-12 | エルジー・ケム・リミテッド | 化学的機械的研磨用水系スラリー組成物及び化学的機械的研磨方法 |
JP2014036206A (ja) | 2012-08-10 | 2014-02-24 | Fujimi Inc | 研磨用組成物、当該研磨用組成物の製造方法、及び当該研磨用組成物を用いた半導体基板の製造方法 |
JP2019117907A (ja) | 2017-12-27 | 2019-07-18 | ニッタ・ハース株式会社 | 研磨用組成物 |
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JP4115562B2 (ja) * | 1997-10-14 | 2008-07-09 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
KR101178714B1 (ko) * | 2008-12-12 | 2012-08-31 | 제일모직주식회사 | 향상된 연마 선택비와 분산 안정성을 갖는 cmp 슬러리 |
JP5822356B2 (ja) * | 2012-04-17 | 2015-11-24 | 花王株式会社 | シリコンウェーハ用研磨液組成物 |
WO2013176122A1 (ja) * | 2012-05-25 | 2013-11-28 | 日産化学工業株式会社 | ウェーハ用研磨液組成物 |
JP2016124943A (ja) | 2014-12-26 | 2016-07-11 | ニッタ・ハース株式会社 | 研磨用組成物 |
EP3366746B1 (en) * | 2015-10-23 | 2023-02-22 | NITTA DuPont Incorporated | Polishing composition |
JP7077236B2 (ja) * | 2016-12-28 | 2022-05-30 | ニッタ・デュポン株式会社 | 研磨用組成物 |
JP6978933B2 (ja) * | 2017-12-27 | 2021-12-08 | ニッタ・デュポン株式会社 | 研磨用組成物 |
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JP2002075928A (ja) | 2000-05-22 | 2002-03-15 | Samsung Electronics Co Ltd | 化学機械的研磨(cmp)工程用スラリー及びこれを用いた半導体素子の製造方法 |
JP2011515023A (ja) | 2008-02-29 | 2011-05-12 | エルジー・ケム・リミテッド | 化学的機械的研磨用水系スラリー組成物及び化学的機械的研磨方法 |
JP2014036206A (ja) | 2012-08-10 | 2014-02-24 | Fujimi Inc | 研磨用組成物、当該研磨用組成物の製造方法、及び当該研磨用組成物を用いた半導体基板の製造方法 |
JP2019117907A (ja) | 2017-12-27 | 2019-07-18 | ニッタ・ハース株式会社 | 研磨用組成物 |
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KR20220119036A (ko) | 2022-08-26 |
JP2021102666A (ja) | 2021-07-15 |
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