JP7430447B2 - blade with base - Google Patents

Description

The present invention relates to a blade with a base used for cutting a workpiece.

By dividing a semiconductor wafer on which a plurality of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed, a plurality of device chips each having a device are manufactured. In addition, by dividing a package substrate formed by covering a plurality of device chips mounted on a substrate with a resin sealing material (mold resin), a plurality of device chips each having a device chip covered with a mold resin can be created. of packaged devices are manufactured. Device chips and package devices are installed in various electronic devices such as mobile phones and personal computers.

Cutting equipment is used to divide semiconductor wafers and package substrates. The cutting device includes a holding table that holds a workpiece, and a cutting unit that cuts the workpiece with an annular blade. The workpiece is cut and divided by rotating the blade and cutting into the workpiece held by the holding table.

Blades used for cutting workpieces include hub-type blades with a cutting edge in which abrasive grains made of diamond, etc. are fixed by nickel plating, etc., and blades with abrasive grains made of bond material made of metal, ceramics, resin, etc. A washer type blade consisting of a fixed annular cutting edge is used. When cutting a workpiece, an appropriate blade is appropriately selected depending on the material of the workpiece.

A hub type blade is made up of a disc-shaped base and a cutting edge formed along the outer periphery of the base. Attached to a fixed blade mount. Further, the washer type blade is attached to the tip of the rotating shaft by a flange portion (fixed flange) provided on the blade mount and a detachable flange that sandwiches the blade with the fixed flange.

As described above, hub type blades and washer type blades are attached to the rotating shaft in different ways, and the shape, dimensions, etc. of the blade mount fixed to the rotating shaft also differ depending on the type of blade. Therefore, for example, when replacing a hub-type blade attached to the tip of the rotating shaft with a washer-type blade, the blade mount must also be replaced, making the blade replacement work complicated.

Therefore, in recent years, a blade with a base in which a washer type blade is bonded to a disc-shaped base has been proposed (for example, see Patent Document 1). When this blade with a base is used, a washer type blade can be attached to a blade mount for a hub type blade, which simplifies blade replacement work.

Japanese Patent Application Publication No. 2012-135833

The above-mentioned blade with a base is manufactured by integrating a separately formed base and a blade. Specifically, after applying adhesive to one side of the base, one side of the base and one side of the blade are made to face each other, and the base and blade are attached to each other via adhesive. . As a result, the base and the blade are joined and integrated.

In the blade with a base obtained through the above steps, the blade is attached only to one surface of the base, but in this state, the strength of the bond between the base and the blade may be insufficient. In particular, when a thick blade is fixed to a base, it is often difficult to firmly integrate the base and the blade only with adhesive applied to one surface of the base.

The present invention was made in view of this problem, and an object of the present invention is to provide a blade with a base in which the base and the blade are firmly connected.

According to one aspect of the present invention, the present invention includes a disc-shaped base and an annular blade having an opening in the center, and the base has an annular convex portion protruding from the surface of the base. The blade has a concave portion formed from the side surface exposed at the opening toward the outer peripheral edge, and the base and the blade are connected to each other with the convex portion fitted into the opening. They are bonded together via a first adhesive attached to the surface of the base, and are bonded by a second adhesive that fills the recess and permeates the gap between the convex part and the side surface. A blade with a base is provided in which the adhesive has a lower viscosity than the first adhesive .

Preferably, a groove filled with the first adhesive is formed in a region of the front surface of the base where the convex portion is not formed .

In the blade with a base according to one aspect of the present invention, the base and the blade are bonded together via the first adhesive attached to the surface of the base, and the concave portion of the blade is filled with the convex portion of the base. They are joined by a second adhesive that has penetrated into the gap between the part and the side surface of the blade. As a result, a blade with a base in which the base and the blade are firmly connected can be obtained.

It is an exploded sectional view showing a blade with a base. FIG. 3 is a cross-sectional view showing how the base and the blade are coupled. FIG. 3 is a cross-sectional view showing a blade with a base in which the base and the blade are combined. FIG. 3 is a cross-sectional view showing a blade with a base in which a concave portion of the blade is filled with an adhesive. FIG. 3 is a cross-sectional view showing a blade with a base in which a groove-formed base and a blade are combined. It is a perspective view showing a cutting device. It is a perspective view showing a cutting unit.

Embodiments of the present invention will be described below with reference to the accompanying drawings. First, a configuration example of the blade with a base according to the present embodiment will be described. FIG. 1 is an exploded perspective view showing the blade 2 with a base.

The blade with a base 2 includes a disc-shaped base 4 and an annular blade 6. The base 4 is made of metal such as an aluminum alloy, and includes a first surface (front surface) 4a and a second surface (back surface) 4b that are generally parallel to each other, and an outer peripheral edge (outer peripheral surface) 4c. Furthermore, a columnar opening 4d is provided at the center of the base 4, passing through the base 4 from the first surface 4a to the second surface 4b.

An annular convex portion 4e protruding from the first surface 4a toward the blade 6 is provided on the first surface 4a side of the base 4 so as to surround the opening 4d. The convex portion 4e is formed with a predetermined width along the contour of the opening 4d, and includes an outer circumferential surface 4f that is generally perpendicular to the first surface 4a.

The blade 6 is formed into an annular shape by fixing abrasive grains made of diamond, cubic boron nitride (cBN), or the like with a bonding material made of metal, ceramics, resin, or the like. Note that the materials of the abrasive grains and bond material contained in the blade 6 are appropriately selected depending on the specifications of the blade 2 with a base.

The blade 6 includes a first surface (front surface) 6a and a second surface (back surface) 6b that are generally parallel to each other, and an outer peripheral edge (outer peripheral surface) 6c connected to the first surface 6a and the second surface 6b. Furthermore, a cylindrical opening 6d is provided at the center of the blade 6, passing through the blade 6 from the first surface 6a to the second surface 6b. The opening 6d defines a side surface (inner peripheral surface) 6e of the blade 6 that is exposed at the opening 6d.

Further, the blade 6 has a plurality of recesses 6f formed from the side surface 6e of the blade 6 toward the outer peripheral edge 6c side. The plurality of recesses 6f are formed from the first surface 6a to the second surface 6b of the blade 6, and are arranged at approximately equal intervals along the circumferential direction of the side surface 6e. FIG. 1 shows an example in which the blade 6 has six recesses 6f.

By combining the base 4 and the blade 6, a blade 2 with a base in which the base 4 and the blade 6 are integrated can be obtained. FIG. 2 is a sectional view showing how the base 4 and the blade 6 are coupled.

When bonding the base 4 and the blade 6, first, a first adhesive (bonding adhesive) is applied to the first surface 4a of the base 4. Specifically, the first adhesive is applied to a region of the first surface 4a of the base 4 that is located on the outer side of the base 4 in the radial direction than the convex portion 4e. For example, a sheet-like adhesive (adhesive sheet) may be attached to the first surface 4a, or an epoxy resin adhesive or the like may be applied to the first surface 4a. Note that the first adhesive may be attached to the blade 6.

Thereafter, the first surface 4a of the base 4 and the first surface 6a of the blade 6 are made to face each other, and the base 4 and the blade 6 are bonded together via the first adhesive. Thereby, the base 4 and the blade 6 are joined.

Here, the convex portion 4e of the base 4 has a shape corresponding to the opening 6d of the blade 6. Specifically, the convex portion 4e is formed such that the diameter of the outer circumferential surface 4f of the convex portion 4e and the diameter of the side surface 6e of the blade 6 are approximately equal, and the shape of the outer circumferential surface 4f and the shape of the side surface 6e generally match. has been done. Then, the base 4 and the blade 6 are bonded together such that the convex portion 4e of the base 4 is fitted into the opening 6d of the blade 6. As a result, the base 4 and the blade 6 are arranged concentrically with each other, and the base 4 and the blade 6 are aligned.

Note that the diameter of the outer peripheral surface 4f of the protrusion 4e is set to be slightly smaller than the diameter of the side surface 6e of the blade 6 so that the protrusion 4e can be smoothly inserted into the opening 6d of the blade 6. However, for highly accurate alignment between the base 4 and the blade 6, it is preferable that the difference between the diameter of the outer peripheral surface 4f of the convex portion 4e and the diameter of the side surface 6e of the blade 6 is 100 μm or less.

FIG. 3 is a sectional view showing the blade 2 with a base in which the base 4 and the blade 6 are combined. The blade 2 with a base is obtained by joining and integrating the base 4 and the blade 6 with the protrusion 4e of the base 4 fitted into the opening 6d of the blade 6. Note that the diameter of the outer peripheral edge 6c of the blade 6 is larger than the diameter of the outer peripheral edge 4c of the base 4. Therefore, when the base 4 and the blade 6 are joined, the outer circumferential edge 6c of the blade 6 is disposed radially outward of the base 4 than the outer circumferential edge 4c of the base 4, and protrudes from the outer circumferential edge 4c. .

Note that the height of the convex portion 4e (the amount of protrusion from the first surface 4a) is preferably equal to or less than the thickness of the blade 6. In this case, even if the protrusion 4e is inserted into the opening 6d of the blade 6, the protrusion 4e does not protrude from the second surface 6b of the blade 6. As a result, when the blade 2 with a base is attached to the blade mount 44 (see FIG. 7) fixed to the rotating shaft 40, the convex portion 4e comes into contact with the blade mount 44, preventing the attachment of the blade 2 with a base. This can be prevented.

Next, the recess 6f of the blade 6 attached to the base 4 is filled with a second adhesive (filling adhesive). FIG. 4 is a sectional view showing the blade 2 with a base in which the recess 6f of the blade 6 is filled with the second adhesive 8. As the second adhesive 8, for example, an acrylic resin adhesive or an epoxy resin adhesive is used.

Note that the material of the second adhesive 8 may be the same as or different from the material of the first adhesive used to bond the base 4 and the blade 6 together. When the first adhesive and the second adhesive are made of different materials, it is preferable to use an adhesive with lower viscosity and higher fluidity than the first adhesive as the second adhesive 8.

Here, a slight gap of, for example, 50 μm or less is formed between the convex portion 4e of the base 4 and the side surface 6e of the blade 6. Then, when the recess 6f is filled with the second adhesive 8, the second adhesive 8 flows through the gap between the outer peripheral surface 4f of the convex part 4e and the side surface 6e of the blade 6 due to capillary action, and the second adhesive 8 flows into the gap. The adhesive 8 penetrates. As a result, the outer circumferential surface 4f and the side surface 6e are joined by the second adhesive 8 filled in the gap between the outer circumferential surface 4f and the side surface 6e.

When the second adhesive 8 penetrates into the gap between the convex portion 4e and the side surface 6e, the first surface 4a of the base 4 and the first surface 6a of the blade 6 are not only joined by the first adhesive. Furthermore, the convex portion 4e and the side surface 6e are bonded with the second adhesive 8. Thereby, the base 4 and the blade 6 are firmly joined.

In particular, when the blade 6 is thick, by increasing the height (protrusion amount) of the convex portion 4e of the base 4 according to the thickness of the blade 6, the joining area between the outer circumferential surface 4f and the side surface 6e is widened. be able to. Thereby, the base 4 and the blade 6 are more firmly joined. For example, the height of the convex portion 4e is set to be approximately the same as the thickness of the blade 6.

The number, position (interval), shape, size, etc. of the recesses 6f filled with the second adhesive 8 are such that the second adhesive 8 filled in the recesses 6f forms a convex portion 4e and a side surface 6e due to capillary action. It is set so that it penetrates throughout the gap. However, if the recessed portion 6f is excessively large, the strength of the blade 6 may be affected. Therefore, the depth of the recess 6f is preferably 1/4 or less of the width of the blade 6 (the distance between the outer peripheral edge 6c and the side surface 6e).

As described above, in the blade with base 2 according to the present embodiment, the base 4 and the blade 6 are bonded together via the first adhesive attached to the first surface 4a of the base 4, and The second adhesive fills the recess 6f of the blade 6 and permeates the gap between the protrusion 4e of the base 4 and the side surface 6e of the blade 6, and the blade 6 is bonded with the second adhesive. As a result, a blade 2 with a base in which the base 4 and the blade 6 are firmly connected is obtained.

Note that, in the above description, the case where the second adhesive 8 is filled in the recess 6f of the blade 6 after the base 4 and the blade 6 are bonded together via the first adhesive has been described. The method of joining 4 and blade 6 is not limited to this. For example, when the base 4 and the blade 6 are bonded together, the recess 6f of the blade 6 may be filled with an adhesive.

Specifically, when bonding the base 4 and the blade 6 together, a region (first region) of the first surface 4a of the base 4 that overlaps with the concave portion 6f of the blade 6 is covered with other parts of the first surface 4a. A larger amount of the first adhesive is applied than the area (second area). When the base 4 and the blade 6 are bonded together in this state, the recess 6f of the blade 6 is filled with the first adhesive applied to the first area. Then, the first adhesive filled in the recess 6f flows through the gap between the outer peripheral surface 4f of the convex part 4e and the side surface 6e of the blade 6 due to capillary action, and the first adhesive infiltrates the gap.

When using the above method, a portion of the first adhesive corresponds to the second adhesive 8 shown in FIG. Therefore, the material of the first adhesive and the material of the second adhesive 8 are the same. Note that in order to make it easier for the first adhesive to penetrate into the gap between the outer peripheral surface 4f of the convex portion 4e and the side surface 6e of the blade 6, a highly fluid adhesive (for example, acrylic resin type or It is preferable to use an epoxy resin adhesive. Further, the amount of the first adhesive applied to the first region of the first surface 4a of the base 4 is adjusted as appropriate so that the recess 6f of the blade 6 is filled with the first adhesive.

Furthermore, in the above description, an example has been described in which, when bonding the base 4 and the blade 6 together, the first adhesive is applied to the first surface 4a of the base 4, which is formed in a planar shape. However, the base 4 may be formed with a groove filled with the first adhesive. FIG. 5 is a sectional view showing the blade 2 with a base in which the blade 6 is coupled to the base 4 in which the groove 4g is formed.

In FIG. 5, an annular groove 4g is formed on the first surface 4a side of the base 4. For example, the groove 4g is formed from the first surface 4a toward the second surface 4b so as to surround the convex portion 4e. The outer peripheral edge of the groove 4g (one end in the width direction of the groove 4g) does not reach the outer peripheral edge 4c of the base 4, and the inner peripheral edge of the groove 4g (the other end in the width direction of the groove 4g) does not reach the convex portion 4e. has reached the outer peripheral surface 4f.

Note that there is no restriction on the specific shape of the groove 4g. For example, in the base 4, one band-shaped groove 4g may be continuously formed along the circumferential direction of the base 4, or a plurality of grooves 4g may be formed approximately equally along the circumferential direction of the base 4. It may be formed at intervals.

When bonding the base 4 and the blade 6 together (see FIG. 2), the groove 4g is filled with a first adhesive (bonding adhesive) 10. The amount of the first adhesive 10 is adjusted according to the volume of the groove 4g, and the surface of the first adhesive 10 filled in the groove 4g is positioned approximately on the same plane as the first surface 4a of the base 4. It will be done.

Here, the first adhesive 10 is applied to a region of the groove 4g that overlaps with the recess 6f of the blade 6 so as to protrude from the first surface 4a of the base 4. The amount of the first adhesive 10 applied to this area is adjusted so that the volume of the first adhesive 10 protruding from the first surface 4a of the base 4 is greater than or equal to the volume of the recess 6f of the blade 6. be done.

In this state, when the first surface 4a side of the base 4 and the first surface 6a side of the blade 6 are bonded together, the base 4 and the blade 6 are joined via the first adhesive 10, and The first adhesive 10 protruding from the first surface 4a of the base 4 fills the recess 6f of the blade 6. The first adhesive 10 filled in the recess 6f flows through the gap between the outer circumferential surface 4f of the convex part 4e and the side surface 6e of the blade 6 due to capillary action, and the first adhesive 10 penetrates into the gap. .

As described above, when the first adhesive 10 is filled inside the groove 4g, the first adhesive 10 is applied to the first surface 4a of the base 4 where the groove 4g is not formed. , the contact area between the first adhesive 10 and the base 4 increases. Thereby, the adhesive force of the first adhesive 10 to the base 4 can be strengthened. Furthermore, by filling the groove 4g with the first adhesive 10, when the base 4 and the blade 6 are bonded together, the first adhesive 10 is crushed and spread, and the outer peripheral edge 4c of the base 4 is Prevents it from protruding outward.

However, the area where the groove 4g is formed can be changed as appropriate. For example, the groove 4g may be formed such that the inner peripheral edge of the groove 4g does not overlap the recess 6f of the blade 6. In this case, after the groove 4g is filled with the first adhesive 10 and the base 4 and the blade 6 are bonded together, the second adhesive 8 is separately filled into the recess 6f of the blade.

The blade 2 with a base is attached to a cutting device and cuts a workpiece. Hereinafter, a configuration example of a cutting device that cuts a workpiece using the blade 2 with a base will be described. FIG. 6 is a perspective view showing a cutting device 20 that cuts the workpiece 11. As shown in FIG.

Examples of the workpiece 11 cut by the cutting device 20 include a semiconductor wafer on which a plurality of devices such as IC (Integrated Circuit) and LSI (Large Scale Integration) are formed, a CSP (Chip Size Package) substrate, and a QFN ( Examples include package substrates such as Quad Flat Non-leaded Package (Quad Flat Non-leaded Package) substrates. However, there are no restrictions on the type, material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a disk-shaped or rectangular parallelepiped-shaped substrate made of glass, sapphire, ceramics, resin, metal, or the like.

The cutting device 20 includes a base 22 that supports each component constituting the cutting device 20, and a cover 24 that covers the upper surface of the base 22 is provided above the base 22. A space (processing space) in which the workpiece 11 is processed is formed inside the cover 24, and a cutting unit 26 to which the blade 2 with a base is mounted is arranged in this space. A moving mechanism (not shown) is connected to the cutting unit 26, and this moving mechanism moves the cutting unit 26 along the Y-axis direction (index feed direction, front-back direction) and the Z-axis direction (vertical direction, up-down direction). move it.

A holding table (chuck table) 28 that holds the workpiece 11 is provided below the cutting unit 26 . The upper surface of the holding table 28 constitutes a holding surface that holds the workpiece 11, and this holding surface is connected to a suction source (not shown) such as an ejector through a suction path (not shown) formed inside the holding table 28. (not shown). When the workpiece 11 is placed on the holding surface of the holding table 28 and a negative pressure from a suction source is applied to the holding surface, the workpiece 11 is suction-held by the holding table 28 .

A moving mechanism (not shown) is connected to the holding table 28, and this moving mechanism moves the holding table 28 along the X-axis direction (processing feed direction, left-right direction). Further, a rotation mechanism (not shown) is connected to the holding table 28, and this rotation mechanism rotates the holding table 28 around a rotation axis that is generally parallel to the Z-axis direction.

A cassette elevator 30 is installed at the front corner of the base 22. A cassette 32 that can accommodate a plurality of workpieces 11 is placed on the upper surface of the cassette elevator 30. The cassette elevator 30 is configured to be able to move up and down, and the height of the cassette 32 (Z-axis direction position). Further, a touch panel type monitor 34 serving as a user interface is provided on the front surface 24a side of the cover 24.

Each component constituting the cutting device 20 (the cutting unit 26, the moving mechanism connected to the cutting unit 26, the holding table 28, the moving mechanism and rotating mechanism connected to the holding table 28, the cassette elevator 30, the monitor 34, etc.) , connected to a control unit (not shown). The control unit is configured by a computer or the like, and controls the operations of the components of the cutting device 20.

FIG. 7 is a perspective view showing the cutting unit 26. The cutting unit 26 includes a cylindrical rotating shaft (spindle) 40 arranged along the Y-axis direction. The rotating shaft 40 is housed in a cylindrical housing 42. A tip (one end) of the rotating shaft 40 is exposed to the outside of the housing 42, and a blade mount 44 is fixed to the tip of the rotating shaft 40. Further, a rotary drive source (not shown) such as a motor that rotates the rotary shaft 40 is connected to the base end (the other end side) of the rotary shaft 40 .

The blade mount 44 includes a disk-shaped flange portion 46 and a cylindrical support shaft 48 protruding from the center of a surface 46a of the flange portion 46. An annular convex portion 46b protruding from the surface 46a is provided on the surface 46a side of the outer peripheral portion of the flange portion 46. The convex portion 46b has a distal end surface 46c at its distal end, and the distal end surface 46c is formed approximately parallel to the surface 46a.

A threaded portion 48a is formed on the outer peripheral surface of the distal end of the support shaft 48, and an annular fixing nut 50 is fastened to this threaded portion 48a. A cylindrical opening 50a is formed in the center of the fixing nut 50, passing through the fixing nut 50 in the thickness direction. The opening 50a is formed to have approximately the same diameter as the support shaft 48, and a thread groove corresponding to the threaded portion 48a of the support shaft 48 is provided in the opening 50a.

When the support shaft 48 is inserted into the opening 4d of the base 4 of the blade 2 with a base, the blade 2 with a base is mounted on the blade mount 44. In this state, when the fixing nut 50 is fastened to the threaded portion 48a of the support shaft 48, the blade 6 is attached to the first surface 4a of the base 4 (see FIG. 1, etc.) and the tip surface 46c of the convex portion 46b of the flange portion 46. Being pinched. In this way, the blade 2 with a base is fixed to the tip of the rotating shaft 40.

When the rotary shaft 40 is rotated by a rotational drive source with the blade 2 with a base attached to the cutting unit 26, the blade 2 with a base rotates about the axis of the rotary shaft 40. Then, the workpiece 11 is cut by causing the blade 6 of the rotating blade 2 with a base to cut into the workpiece 11 held by the holding table 28 (see FIG. 6).

Note that the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

2 Blade with base 4 Base 4a First surface (front surface)
4b 2nd side (back side)
4c Outer periphery (outer periphery)
4d Opening 4e Convex 4f Outer surface 4g Groove 6 Blade 6a First surface (front)
6b 2nd side (back side)
6c Outer periphery (outer periphery)
6d Opening 6e Side (inner peripheral surface)
6f Recessed portion 8 Second adhesive 10 First adhesive (bonding adhesive)
20 Cutting device 22 Base 24 Cover 24a Front 26 Cutting unit 28 Holding table (chuck table)
30 Cassette elevator 32 Cassette 34 Monitor 40 Rotating shaft (spindle)
42 Housing 44 Blade mount 46 Flange portion 46a Surface 46b Convex portion 46c Tip surface 48 Support shaft 48a Threaded portion 50 Fixing nut 50a Opening portion 11 Workpiece

Claims (2)

It has a disc-shaped base and an annular blade with an opening in the center,
The base has an annular convex portion protruding from the surface of the base,
The blade has a recess formed from the side surface exposed at the opening toward the outer peripheral edge,
The base and the blade are bonded together via a first adhesive attached to the surface of the base with the convex part fitted into the opening, and the concave part is filled and the convex part is attached to the base. joined by a second adhesive that penetrates into the gap between the part and the side surface ,
A blade with a base , wherein the second adhesive has a lower viscosity than the first adhesive . The base according to claim 1, wherein a groove filled with the first adhesive is formed in a region of the surface side of the base where the convex portion is not formed. blade.

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