JP7184460B2 - blade with base - Google Patents

Description

TECHNICAL FIELD The present invention relates to a blade with a base for cutting that is used by being attached to a spindle that serves as a rotating shaft.

A semiconductor wafer on which electronic circuits such as ICs and LSIs are formed is cut, for example, along dividing lines (streets) to be divided into a plurality of chips. Known blades used for this cutting include hub-type blades in which abrasive grains are hardened with a plating material such as nickel, and washer-type blades in which abrasive grains are hardened with a bonding material such as resin. ing.

The above-mentioned hub-type blade is usually formed integrally with a disk-shaped base made of aluminum or the like, and is attached to the spindle, which is the rotating shaft, via a dedicated mount corresponding to this base. be done. On the other hand, a washer-type blade that is not integrated with the base is attached to the spindle so as to be sandwiched between two jigs.

Therefore, for example, when a hub-type blade is replaced with a washer-type blade, the mount fixed to the spindle must also be replaced, resulting in poor workability. On the other hand, in recent years, there has been proposed a blade with a base in which a washer-type blade is adhered to a disk-shaped base (see, for example, Patent Document 1).

JP 2012-135833 A

By the way, in the above blade with a base, since the washer-type blade is adhered to the base with an adhesive, the adhesive may protrude from the base and adhere to the blade during manufacture. If the adhesive protrudes from the base, the appearance becomes unsightly and there is a risk of affecting the processing accuracy.

Therefore, when the adhesive protruded from the base, the protruding adhesive was manually removed by an operator. However, the work involved in removing the adhesive is complicated, which is a factor in lowering productivity. As a result, the blade with the base from which the adhesive protrudes has sometimes been discarded without being shipped.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object of the present invention is to provide a blade with a base capable of suppressing a decrease in yield due to the squeeze-out of adhesive.

According to the present invention, there is provided a blade with a base for cutting, which is used by being attached to a rotating shaft , and has a first surface and a second surface which are substantially parallel to each other, and the first surface and the second surface are separated from each other. A disc-shaped base in which an opening penetrating on two sides is formed in the center, and an annular blade fixed to the first side of the base, the first side of the base On the side, there is a recess formed in an annular shape surrounding the opening and coated with an adhesive for fixing the blade to the base; A contact surface that contacts the blade on the outer peripheral side of the base is provided, and the annular side surface of the recess located on the outer peripheral side of the base extends from the bottom surface of the recess toward the edge of the recess. A base blade is provided that is angled with respect to the contact surface such that the side diameter increases.

In the present invention, it is preferable that the bottom surface of the recess is provided with an anchor portion that enhances the adhesion of the adhesive to the base. Further, the surface roughness of the bottom surface of the recess is preferably larger than the surface roughness of the contact surface.

A blade with a base according to the present invention includes a disk-shaped base having an annular recess to which an adhesive for fixing the blade is applied, and a contact surface that contacts the blade on the outer peripheral side of the recess. The side surface of the recess located on the side is inclined with respect to the contact surface so that the outer diameter of the recess increases from the bottom surface of the recess toward the edge of the recess.

Therefore, for example, when supplying an amount of adhesive corresponding to the bottom surface of the recess, even if the amount of adhesive supplied becomes excessive, the excess adhesive is accommodated in the area corresponding to the side surface of the recess, The possibility of the adhesive protruding from the In other words, it is possible to suppress the decrease in yield due to the overflow of the adhesive.

FIG. 3 is an exploded perspective view showing a configuration example of a blade with a base; FIG. 4 is a cross-sectional view showing a configuration example of a blade with a base; It is sectional drawing which expands and shows a part of base. 1 is a perspective view showing a configuration example of a cutting device in which a blade with a base is used; FIG. FIG. 4 is a perspective view showing how the blade with a base is attached to the cutting unit; FIG. 4 is a partial cross-sectional side view showing a cutting unit to which a blade with a base is attached; FIG. 11 is a cross-sectional view showing a configuration example of a blade with a base according to a modified example;

Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is an exploded perspective view showing a configuration example of a blade 2 with a base, and FIG. 2 is a cross-sectional view showing a configuration example of the blade 2 with a base. In addition, in FIG. 2, the cross section which cut|disconnected the blade 2 with a disk-shaped base with a radial direction is shown.

As shown in FIGS. 1 and 2, a cutting blade 2 with a base according to this embodiment includes a disk-shaped (annular) base 4 made of aluminum or the like. The base 4 has a first surface 4a and a second surface 4b that are substantially parallel to each other, and an opening 4c that penetrates the base 4 from the first surface 4a to the second surface 4b is formed near the center thereof. ing. The shape of the opening 4c is, for example, circular when viewed from the first surface 4a side.

A convex portion 4 d that protrudes from the first surface 4 a is provided in a region outside the opening 4 c in the radial direction of the base 4 . The convex portion 4d is configured, for example, in an annular shape concentric with the opening portion 4c. That is, the convex portion 4d is formed so as to surround the opening portion 4c when viewed from the side of the first surface 4a.

A recessed portion 4e recessed from the first surface 4a is provided in a region adjacent to the outside of the protruding portion 4d in the radial direction of the base 4. As shown in FIG. The concave portion 4e is, for example, formed in an annular shape concentric with the opening portion 4c and the convex portion 4d. That is, the concave portion 4e is formed in a manner surrounding the opening portion 4c and the convex portion 4d when viewed from the side of the first surface 4a. An adhesive 8 for fixing the blade 6 to the base 4 is applied to the recess 4e. Note that the adhesive 8 may be made of either a non-conductive material or a conductive material.

A contact surface 4 f that contacts the blade 6 is provided in a region adjacent to the outside of the recess 4 e in the radial direction of the base 4 . The contact surface 4f is, for example, generally parallel and flat to the first surface 4a. Further, the contact surface 4f is formed in an annular shape concentric with the opening 4c, the projection 4d, and the recess 4e. That is, the contact surface 4f is formed so as to surround the opening 4c, the protrusion 4d, and the recess 4e when viewed from the first surface 4a side.

A blade 6 is adhered and fixed to the first surface 4 a side of the base 4 . The blade 6 is formed in a disk shape (annular shape) by, for example, mixing abrasive grains such as diamond, CBN (Cubic Boron Nitride), or the like with a binding material such as metal, ceramics, or resin. However, the binding material and abrasive grains constituting the blade 6 are not limited, and the binding material and abrasive grains are selected and changed according to the specifications of the blade 2 with a base.

The blade 6 has a first surface 6a and a second surface 6b that are generally parallel to each other, and an opening 6c that penetrates the blade 6 from the first surface 6a to the second surface 6b is formed near the center thereof. . The shape of the opening 6c is, for example, circular when viewed from the first surface 6a side, and its diameter is the same as the outer diameter of the projection 4d of the base 4. As shown in FIG.

The protrusion 4d is inserted into the opening 6c from the first surface 6a side while the adhesive 8 is applied to the recess 4e. As a result, the contact surface 4f of the base 4 contacts a portion of the first surface 6a of the blade 6, and the blade 6 is supported by the contact surface 4f and the convex portion 4d. Further, the blade 6 is fixed to the base 4 by the adhesive 8 applied to the concave portion 4e.

In addition, the outer diameter of the blade 6 is larger than the outer diameter of the base 4 . Therefore, when the blade 6 is adhered and fixed to the base 4 , the outer circumference 6 d of the blade 6 is located outside the base 4 in the radial direction of the base 4 . In other words, a portion of the blade 6 on the side of the outer circumference 6 d protrudes outward from the base 4 .

FIG. 3 is a cross-sectional view showing an enlarged recess 4e of the base 4. As shown in FIG. In addition, in FIG. 3, the cross section which cut|disconnected the base 4 to the radial direction is shown. As shown in FIGS. 1, 2, and 3, the recess 4e has a bottom surface 4g substantially parallel to the contact surface 4f and a side surface 4h located on the inner peripheral side of the base 4 (on the side of the protrusion 4d). , and a side surface 4 i located on the outer peripheral side (contact surface 4 f ) of the base 4 .

For example, the adhesive 8 is applied to the concave portion 4e according to the area of the bottom surface 4g. The bottom surface 4g may be formed flat, but it is desirable to be rougher than the contact surface 4f and the like. That is, the surface roughness of the bottom surface 4g of the recess 4e may be greater than the surface roughness of the contact surface 4f. In this case, since the contact area between the adhesive 8 and the bottom surface 4g increases, the adhesive strength of the adhesive 8 to the base 4 increases.

The inner side surface 4h includes, for example, a region substantially perpendicular to the bottom surface 4g and is connected to the outer peripheral surface of the protrusion 4d. Also, the connecting portion between the bottom surface 4g and the side surface 4h is slightly rounded. However, the shape of the side surface 4h is not particularly limited. For example, the connecting portion between the bottom surface 4g and the side surface 4h does not necessarily have to be rounded.

The outer side surface 4i is inclined with respect to the contact surface 4f and the bottom surface 4g, for example, so that the outer diameter of the recess 4e increases from the bottom surface 4g of the recess 4e toward the edge of the recess 4e. That is, the upper end portion of the side surface 4i is positioned closer to the outer periphery of the base 4 than the base end portion (bottom surface 4g side) of the side surface 4i.

In this way, by inclining the side surface 4i with respect to the contact surface 4f and the bottom surface 4g, for example, when supplying an amount of the adhesive 8 corresponding to the bottom surface 4g, the amount of the adhesive 8 supplied becomes excessive. However, the excess adhesive 8 is accommodated in the area corresponding to the side surface 4i. Therefore, it is possible to reduce the possibility that the adhesive 8 overflows from the recessed portion 4e, thereby suppressing a decrease in the production yield of the blade 2 with a base.

From the viewpoint of suppressing the protrusion of the adhesive 8 while keeping the concave portion 4e at an appropriate size, in a cross section (FIG. 3) obtained by cutting the base 4 in the radial direction, the side surface 4i is larger than the contact surface 4f and the bottom surface 4g. It is desirable that the angle θ formed by the two is 10° or more and 45° or less. Note that FIG. 3 shows a case where the angle θ is about 20°.

FIG. 4 is a perspective view showing a configuration example of a cutting device 12 in which the blade 2 with a base is used. As shown in FIG. 4, the cutting device 12 has a base 14 that supports each structure. A cover 16 that covers the base 14 is provided above the base 14 . A space is formed inside the cover 16 and accommodates a cutting unit 18 including the blade 2 with the base described above.

The cutting unit 18 is moved in the front-rear direction (Y-axis direction, index feed direction) by a cutting unit moving mechanism (not shown). A chuck table 20 for holding the workpiece 11 is provided below the cutting unit 18 . The chuck table 20 is moved in the X-axis direction (processing feed direction) by a chuck table moving mechanism (not shown), and rotated around a rotation axis parallel to the Z-axis direction (vertical direction) by a rotating mechanism (not shown). .

The workpiece 11 is typically a disk-shaped wafer made of a semiconductor material such as silicon. The surface of the workpiece 11 is partitioned into a plurality of regions by dividing lines (streets) arranged in a lattice, for example, and each region includes an IC (Integrated Circuit), a MEMS (Micro Electro Mechanical Systems) ) and other devices are formed.

The material, shape, structure, size, etc. of the workpiece 11 are not limited. For example, a substrate made of other materials such as semiconductors, ceramics, resins, and metals can be used as the workpiece 11 . Similarly, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the device. Devices may not be formed on the workpiece 11 .

A cassette support base 22 is installed at the corner of the base 14 . A cassette 24 capable of accommodating a plurality of workpieces 11 is placed on the upper surface of the cassette support table 22 . The height (position in the Z-axis direction) of the cassette support table 22 is controlled by an elevating mechanism (not shown) or the like so that the workpiece 11 can be appropriately carried out and carried in. As shown in FIG.

A touch panel type monitor 26 serving as a user interface is provided on the front surface 16a of the cover 16 . This monitor 26 is a control unit (not shown) that controls each part of the cutting device 12 together with the above-described cutting unit 18, cutting unit moving mechanism, chuck table 20, chuck table moving mechanism, rotating mechanism, cassette support base 22, lifting mechanism, and the like. shown).

5 is a perspective view showing how the blade 2 with a base is attached to the cutting unit 18, and FIG. 6 is a partially cross-sectional side view schematically showing the cutting unit 18 to which the blade 2 with a base is attached. It is a diagram. As shown in FIGS. 5 and 6, the cutting unit 18 has a spindle (rotating shaft) 32 that rotates around the Y-axis.

The spindle 32 is housed in a tubular spindle housing 34 . A tip (one end) of the spindle 32 is exposed to the outside of the spindle housing 34, and a blade mount 40 is attached to the tip of the spindle 32 via a washer 36, a bolt 38 and the like. On the other hand, a motor (not shown) for rotating the spindle 32 is connected to the other end side (base end side) of the spindle 32 .

The blade mount 40 includes a radially outwardly flared flange portion 42 and a boss portion 44 projecting from the center of a first surface 42 a of the flange portion 42 . An annular protrusion 42b protruding from the first surface 42a is provided in a region near the outer peripheral edge of the first surface 42a. The convex portion 42b is formed, for example, at a position and in a shape corresponding to the contact surface 4f of the blade 2 with a base. Further, the tip surface 42c of the convex portion 42b is formed substantially parallel to and flat with respect to the first surface 42a.

The boss portion 44 is formed in a cylindrical shape, and a screw thread is provided on an outer peripheral surface 44a on the tip side thereof. The blade 2 with base is attached to the blade mount 40 by passing (engaging) the boss 44 through the opening 4c of the blade 2 with base.

A fixing nut 46 is fastened to the boss portion 44 in a state in which the blade 2 with the base is attached (engaged) to the blade mount 40 . A circular opening 46 a corresponding to the diameter of the boss portion 44 is formed in the fixing nut 46 . A thread groove corresponding to the thread formed on the outer peripheral surface 44a of the boss portion 44 is provided on the inner peripheral surface of the opening 46a.

When the fixing nut 46 is fastened to the boss portion 44 , the fixing nut 46 comes into contact with the second surface 4 b of the blade 2 with the base, and the blade 2 with the base is pressed against the flange portion 42 of the blade mount 40 . As a result, the second surface 6b of the blade 6 contacts the tip surface 42c of the flange portion 42. As shown in FIG. That is, the blade 6 is sandwiched and fixed between the contact surface 4f of the base 4 and the tip surface 42c of the flange portion 42. As shown in FIG.

As described above, the blade 2 with a base according to the present embodiment includes an annular recess 4e to which the adhesive 8 for fixing the blade 6 is applied, and a contact surface 4f that contacts the blade 6 on the outer peripheral side of the recess 4e. and the side surface 4i of the recess 4e located on the outer peripheral side contacts such that the outer diameter of the recess 4e increases from the bottom surface 4g of the recess 4e toward the edge of the recess 4e. It is inclined with respect to the surface 4f (or the bottom surface 4g).

Therefore, for example, when supplying an amount of adhesive 8 corresponding to the bottom surface 4g of the recess 4e, even if the supply amount of the adhesive 8 becomes excessive, the surplus adhesive 8 corresponds to the side surface 4i of the recess 4e. The adhesive 8 is housed in a region where the recess 4e is located, and the possibility that the adhesive 8 protrudes from the recess 4e can be reduced. In other words, it is possible to suppress the decrease in yield due to the overflow of the adhesive 8 .

Furthermore, in the blade 2 with the base according to the present embodiment, the blade 6 is clamped and fixed between the contact surface 4f of the base 4 and the tip surface 42c of the blade mount 40 (flange portion 42), so vibration of the blade 6 etc. can be suppressed to maintain high machining accuracy.

It should be noted that the present invention is not limited to the description of the above embodiments, and can be implemented with various modifications. For example, the bottom surface of the recess of the base that constitutes the blade with base may be provided with some structure that enhances the adhesion of the adhesive to the base. FIG. 7 is a cross-sectional view showing a configuration example of a blade with a base according to a modification.

The basic structure of the base-equipped blade according to this modification is the same as the structure of the base-equipped blade 2 according to the above embodiment. Therefore, the parts in FIG. 7 that are common to those in FIG. 3 and the like are denoted by the same reference numerals, and only the points of difference will be described here.

As shown in FIG. 7, grooves (anchor portions) 4j are provided in the bottom surface 4g of the concave portion 4e of the base 4 constituting the blade with base according to the modification. By filling the grooves 4 j with the adhesive 8 , the adhesive 8 filled in the grooves 4 j functions like an anchor, and the adhesion of the adhesive 8 to the base 4 is enhanced.

The groove 4j of this modified example is formed in an annular shape along the recess 4e. Moreover, the side surface of this groove 4j is substantially perpendicular to the bottom surface of the groove 4j. The adhesive force of the adhesive 8 to the base 4 can be sufficiently enhanced by such grooves 4j. However, there are no restrictions on the specific shape, arrangement, etc. of the grooves formed in the recess.

In addition, the structures, methods, and the like according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention.

2 blade with base 4 base 4a first surface 4b second surface 4c opening 4d projection 4e recess 4f contact surface 4g bottom 4h side 4i side 4j groove (anchor)
6 blade 6a first surface 6b second surface 6c opening 6d outer periphery 12 cutting device 14 base 16 cover 18 cutting unit 20 chuck table 22 cassette support 24 cassette 26 monitor 32 spindle (rotating shaft)
34 Spindle housing 36 Washer 38 Bolt 40 Blade mount 42 Flange 42a First surface 42b Projection 42c Tip surface 44 Boss 44a Peripheral surface 46 Fixing nut 46a Opening 11 Workpiece

Claims (3)

A blade with a base for cutting used by being attached to a rotating shaft,
a disk-shaped base having a first surface and a second surface substantially parallel to each other and having an opening penetrating from the first surface side to the second surface side formed in the center;
an annular blade fixed to the first surface side of the base;
On the side of the first surface of the base, there is a concave portion which is formed in an annular shape surrounding the opening and coated with an adhesive for fixing the blade to the base, and which is substantially parallel to the first surface. and a contact surface that contacts the blade on the outer peripheral side of the base from the recess,
The annular side surface of the recess located on the outer peripheral side of the base is inclined with respect to the contact surface so that the diameter of the side surface increases from the bottom surface of the recess toward the edge of the recess. A blade with a base characterized by 2. The blade with a base according to claim 1, wherein the bottom surface of the concave portion is provided with an anchor portion for increasing the adhesion of the adhesive to the base. 2. The blade with a base according to claim 1, wherein the surface roughness of the bottom surface of the recess is greater than the surface roughness of the contact surface.

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