JP2021065980A - Blade with base and cutting device - Google Patents

Abstract

To provide a blade with a base that can suppress deterioration in processing efficiency and occurrence of processing failure.SOLUTION: The blade with a base comprises an annular base having an opening part formed at a center thereof and an annular blade fixed to a first surface side of the base. The base has an annular first protruding portion provided along an outer peripheral edge of the base and protruding from the first surface, and a second protruding portion provided closer to inside in a radial direction of the base than the first protruding portion to surround the opening part and protruding from the first surface. On a tip surface of the first protruding part is provided a member made of demented carbide. The base and the blade are joined to each other through an adhesive adhering to the tip surface of the second protruding portion.SELECTED DRAWING: Figure 1

Description

The present invention relates to a cutting device including a blade with a base for cutting a workpiece and a cutting unit on which the blade with the base is mounted.

By dividing a semiconductor wafer having a plurality of devices such as an IC (Integrated Circuit) and an LSI (Large Scale Integration), a plurality of device chips including the devices are manufactured. Further, by dividing the package substrate formed by coating a plurality of device chips mounted on the substrate with a sealing material (mold resin) made of resin, a plurality of device chips covered with the mold resin are provided. Packaged devices are manufactured.

For dividing a work piece represented by the above-mentioned semiconductor wafer or package substrate, for example, a cutting device equipped with a spindle (rotary shaft) in which a blade (cutting blade) for cutting the work piece is mounted on the tip portion is used. Used. The blade is rotated by rotating the spindle with the blade attached to the tip of the spindle. Then, the workpiece is cut by cutting the rotating blade into the workpiece.

Blades used for cutting workpieces include electroformed hub blades equipped with cutting blades in which abrasive grains made of diamond or the like are fixed by nickel plating or the like, or bond materials in which the abrasive grains are made of metal, ceramics, resin, etc. An annular blade or the like made of a fixed cutting blade is known. When cutting a work piece, an appropriate blade is appropriately selected according to the material of the work piece and the like.

The electrocast hub blade is composed of an annular base made of aluminum or the like and an annular cutting edge formed along the outer peripheral edge of the base, and is fixed to the tip of the spindle. The base is attached to the blade mount. On the other hand, the annular blade is mounted on the tip of the spindle so as to be sandwiched between the flange portion (fixed flange) included in the blade mount and the detachable flange.

As described above, the method of mounting the electrocast hub blade and the annular blade on the tip of the spindle is different, and the shape, dimensions, etc. of the blade mount fixed to the spindle are also different depending on the type of blade. Therefore, for example, when replacing the electrocast hub blade with an annular blade, it is necessary to replace the blade mount, which deteriorates the efficiency of the blade replacement work.

Therefore, in recent years, a blade with a base in which an annular blade is bonded to an annular base has been proposed (see Patent Document 1). By using this blade with a base, it is possible to mount an annular blade on a blade mount for an electrocast hub blade, and it is not necessary to replace the blade mount.

Further, when the blade is fixed to the blade mount, the region (contact region) in contact with the blade of the blade mount may be damaged by the abrasive grains contained in the blade, and the flatness of the contact region may be lowered. When the flatness of the contact area is lowered, the blade is not fixed sufficiently, and the blade is liable to shake (vibrate) during cutting of the workpiece. As a result, the processing accuracy of the workpiece by the blade is lowered, and processing defects are likely to occur.

Therefore, a method is used in which the contact area of the blade mount is flattened by polishing the contact area of the blade mount to correct the end face of the blade mount after the work piece is processed by the blade for a certain period of time. (See Patent Documents 2, 3 and 4). Further, Patent Document 5 discloses a method of making the blade mount less likely to be damaged by coating the contact region of the blade mount with a thin film made of diamond-like carbon (DLC).

Japanese Unexamined Patent Publication No. 2012-135833 Japanese Unexamined Patent Publication No. 8-339977 JP-A-2009-297855 Japanese Unexamined Patent Publication No. 2011-11299 Japanese Unexamined Patent Publication No. 2000-61804

When the area of the blade with a base or the blade mount that comes into contact with the blade (contact area) is damaged, the contact area is flattened by performing a treatment such as polishing on the contact area as described above. To. However, in order to flatten the contact area, it is necessary to prepare a dedicated jig for polishing the contact area and separately carry out a step of modifying the shape of the contact area. Therefore, when the contact area is flattened, the processing efficiency of the workpiece is lowered.

On the other hand, if the contact area of the base of the blade with the base or the blade mount is coated with a thin film made of DLC, the contact area is less likely to be damaged, so that the frequency of performing the process for flattening the contact area is reduced. However, it is difficult to form a thin film made of DLC thick, and it is easily deformed when it comes into contact with the abrasive grains contained in the blade, and as a result, the contact region of the blade mount is also easily deformed. If the work piece is cut while the blade is fixed to such a blade mount, the blade tends to shake. As a result, the processing accuracy of the workpiece by the blade is lowered, and there is a possibility that processing defects may occur.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a blade with a base and a cutting device capable of suppressing a decrease in processing efficiency and the occurrence of processing defects.

According to one aspect of the present invention, the base has an annular base having an opening formed in the center and an annular blade fixed to the first surface side of the base, and the base is the base. An annular first convex portion provided along the outer peripheral edge of the base and projecting from the first surface, and an annular first convex portion provided so as to surround the opening on the radial inside of the base from the first convex portion. It has a second convex portion protruding from the first surface, and a member made of cemented carbide is provided on the tip surface of the first convex portion, and the base and the blade are formed by the second convex portion. A pedestaled blade is provided that is bonded via an adhesive that adheres to the tip surface of the portion.

Further, according to one aspect of the present invention, it has a chuck table for holding the workpiece and a cutting unit on which a blade with a base for cutting the workpiece held by the chuck table is mounted. The blade with a base has an annular base having an opening formed in the center and an annular blade fixed to the first surface side of the base, and the base is the base. An annular first convex portion provided along the outer peripheral edge of the base and projecting from the first surface, and a first convex portion provided so as to surround the opening on the radial inside of the base from the first convex portion. It has a second convex portion protruding from one surface, and a first member made of cemented carbide is provided on the tip surface of the first convex portion, and the base and the blade are the second. The cutting unit is connected via an adhesive attached to the tip surface of the convex portion, and the cutting unit is fixed to the spindle, a blade mount fixed to the tip portion of the spindle, and a blade with a base to the blade mount. The blade mount has a nut, a disk-shaped flange portion provided with an annular convex portion, and a support shaft protruding from the center of the flange portion, and is provided on the tip surface of the convex portion. Is provided with a second member made of cemented carbide, and the blade is formed by fastening the fixing nut to the tip of the support shaft in a state where the support shaft is inserted into the opening of the base. Is provided with a cutting device sandwiched between the first member and the second member.

The blade with a base according to one aspect of the present invention includes a base and a blade, and the base has a first convex portion provided with a member made of cemented carbide (cemented carbide member) on the tip surface, and a second. It has a convex part. Further, the base and the blade are bonded to each other via an adhesive adhering to the tip surface of the second convex portion. As a result, the blade comes into contact with the carbide member and is supported.

The above-mentioned cemented carbide member has high hardness and is not easily scratched even if it comes into contact with abrasive grains contained in the blade. Therefore, it is possible to omit the step of flattening the tip surface of the cemented carbide member or reduce the frequency of implementation thereof, and it is possible to improve the processing efficiency. Further, since the tip surface of the cemented carbide member is easily maintained flat, the blade is less likely to shake (vibrate) during cutting of the workpiece. As a result, a decrease in processing accuracy is suppressed, and the occurrence of processing defects is prevented.

It is an exploded perspective view which shows the blade with a base. FIG. 2A is a cross-sectional view showing a blade with a base in a state where the base and the blade are connected, and FIG. 2B is a cross-sectional view of the blade with a base in a state where the base and the blade are connected. It is sectional drawing which shows a part enlarged. It is a perspective view which shows the cutting apparatus. It is a perspective view which shows the cutting unit. It is a partial cross-sectional side view which shows the cutting unit which attached the blade with a base.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a blade with a base according to the present embodiment will be described. FIG. 1 is an exploded perspective view showing a blade 2 with a base.

The base-equipped blade 2 includes an annular base 4 and an annular blade 6. The base 4 is made of, for example, aluminum or the like, and includes a first surface 4a and a second surface 4b parallel to each other, and an outer peripheral edge 4c. Further, in the center of the base 4, a circular opening 4d that penetrates the base 4 from the first surface 4a to the second surface 4b is formed.

An annular first convex portion 4e projecting from the first surface 4a toward the blade 6 side is provided on the outer peripheral portion of the base 4 along the outer peripheral edge 4c. Further, in a region inside the base 4 in the radial direction with respect to the first convex portion 4e, an annular second convex portion 4f protruding from the first surface 4a toward the blade 6 side is provided apart from the first convex portion 4e. Has been done. The first convex portion 4e and the second convex portion 4f are formed concentrically so as to surround the opening 4d. The shape of the second convex portion 4f is not limited, and for example, the second convex portion 4f may be provided in a polygonal shape surrounding the opening 4d.

Further, the first convex portion 4e is provided with a tip surface 4g at its tip, and the second convex portion 4f is provided with a tip surface 4h at its tip. The tip surface 4g and the tip surface 4h are formed substantially parallel to the first surface 4a, respectively. The height of the first convex portion 4e (the amount of protrusion from the first surface 4a) is smaller than the height of the second convex portion 4f (the amount of protrusion from the first surface 4a). Therefore, the tip surface 4g of the first convex portion 4e is arranged closer to the first surface 4a than the tip surface 4h of the second convex portion 4f (see FIGS. 2A and 2B).

A cemented carbide member 8 which is an annular member made of cemented carbide is provided on the tip surface 4g of the first convex portion 4e. The cemented carbide member 8 is provided with a tip surface 8a at its tip, and the tip surface 8a is formed substantially parallel to the first surface 4a. The distance from the first surface 4a to the tip surface 8a of the cemented carbide member 8 is substantially equal to the distance from the first surface 4a to the tip surface 4h of the second convex portion 4f. That is, the tip surface 8a of the cemented carbide member 8 and the tip surface 4h of the second convex portion 4f are formed in substantially the same plane (see FIGS. 2A and 2B).

There is no limitation on the material of the cemented carbide constituting the cemented carbide member 8. For example, the cemented carbide member 8 is sintered by blending metal carbides such as tungsten, chromium, molybdenum, titanium, zirconium, hafnium, vanadium, niobium, and tantalum with iron-based metals (iron, cobalt, nickel, etc.). It is composed of a composite material (alloy). In particular, a WC-Co alloy using tungsten carbide (WC) and cobalt is suitable as a material for the cemented carbide member 8 because it exhibits high hardness in a wide temperature range and has excellent mechanical strength.

The cemented carbide member 8 is formed in an annular shape corresponding to the shape of the tip surface 4g of the first convex portion 4e, for example, and is attached to the tip surface 4g of the first convex portion 4e via an adhesive. However, the cemented carbide member 8 may be formed directly on the tip surface 4g of the first convex portion 4e.

The blade 6 is fixed to the first surface 4a side of the base 4. The blade 6 is formed in an annular shape by, for example, fixing abrasive grains made of diamond, cubic boron nitride (cBN) or the like with a bonding material made of metal, ceramics, resin or the like. However, the abrasive grains and the bonding material contained in the blade 6 are not limited, and are appropriately selected according to the specifications of the blade 2 with a base.

The blade 6 includes a first surface 6a and a second surface 6b parallel to each other, and an outer peripheral edge 6c. Further, in the center of the blade 6, a circular opening 6d that penetrates the blade 6 from the first surface 6a to the second surface 6b is formed.

By connecting the base 4 and the blade 6 with an adhesive or the like, a blade 2 with a base in which the base 4 and the blade 6 are integrated can be obtained. FIG. 2A is a cross-sectional view showing a blade 2 with a base in a state where the base 4 and the blade 6 are coupled.

When connecting the base 4 and the blade 6 using an adhesive, first, the adhesive is applied to the tip surface 4h of the second convex portion 4f of the base 4. As this adhesive, for example, an epoxy resin-based adhesive can be used. The adhesive may be applied to the entire tip surface 4h, or may be applied in dots to a plurality of regions of the tip surface 4h. Further, the adhesive may be applied to the blade 6. In this case, the adhesive is applied to the region of the first surface 6a of the blade 6 corresponding to the tip surface 4h of the second convex portion 4f.

Then, with the adhesive applied to the base 4, the first surface 4a of the base 4 and the first surface 6a of the blade 6 are opposed to each other, and the central axis of the base 4 and the central axis of the blade 6 are brought into contact with each other. The base 4 and the blade 6 are bonded so as to overlap each other. As a result, the base 4 and the blade 6 are bonded to each other via an adhesive.

The diameter of the outer peripheral edge 6c of the blade 6 is larger than the diameter of the outer peripheral edge 4c of the base 4. Therefore, when the base 4 and the blade 6 are combined, the outer peripheral edge 6c of the blade 6 is arranged radially outside the base 4 with respect to the outer peripheral edge 4c of the base 4, and protrudes from the outer peripheral edge 4c. Further, the inner diameter of the blade 6 (diameter of the opening 6d) is equal to or larger than the inner diameter of the base 4 (diameter of the opening 4d), and the opening 4d and the opening 6d are arranged concentrically.

FIG. 2B is an enlarged cross-sectional view showing a part of the blade 2 with a base in a state where the base 4 and the blade 6 are connected. When the base 4 and the blade 6 are combined, the blade 6 comes into contact with the tip surface 8a of the cemented carbide member 8 formed on the tip surface 4g of the first convex portion 4e included in the base 4, and the cemented carbide member Supported by 8.

Here, since the cemented carbide member 8 has a high hardness, it is not easily damaged even if it comes into contact with the abrasive grains contained in the blade 6, and the flatness of the tip surface 8a of the cemented carbide member 8 is easily maintained. Therefore, by supporting the blade 6 with the carbide member 8, it is easy to maintain a state in which the blade 6 is appropriately fixed to the base 4.

When the base 4 and the blade 6 are attached to each other, the adhesive is not applied to the cemented carbide member 8. Therefore, the cemented carbide member 8 comes into contact with the blade 6, but does not adhere to the blade 6. When the base 4 and the blade 6 are attached to each other without applying the adhesive to the cemented carbide member 8, the adhesive protrudes from between the cemented carbide member 8 and the blade 6 and the outer circumference of the blade 6 is attached. It can be prevented from adhering to the part. As a result, quality deterioration of the blade 2 with a base is suppressed.

Next, a configuration example of a cutting device that cuts a workpiece using the blade 2 with a base will be described. FIG. 3 is a perspective view showing a cutting device 20 for cutting the workpiece 11.

Examples of the workpiece 11 to be cut by the cutting device 20 include semiconductor wafers equipped with devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration), CSP (Chip Size Package) substrates, and QFN (Quad Flat Non). -leaded Package) Examples include package substrates such as substrates. However, there are no restrictions on the type, material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a substrate or the like made of a material such as ceramic, resin, or metal.

The cutting device 20 includes a base 22 that supports each component of the cutting device 20, and a cover 24 that covers the upper surface side of the base 22 is provided above the base 22. A space for processing the workpiece 11 is formed inside the cover 24, and a cutting unit (cutting means) 26 on which the blade 2 with a base is mounted is arranged in this space. The cutting unit 26 is connected to a moving mechanism (not shown), and this moving mechanism moves the cutting unit 26 along the Y-axis direction (front-back direction, indexing feed direction) and the Z-axis direction (vertical direction, vertical direction). Let me.

Further, below the cutting unit 26, a chuck table (holding table) 28 for holding the workpiece 11 is provided. The upper surface of the chuck table 28 constitutes a holding surface for holding the workpiece 11, and this holding surface is connected to a suction source (not shown) via a suction path (not shown). With the workpiece 11 placed on the chuck table 28, the work piece 11 is suction-held by the chuck table 28 by applying the negative pressure of the suction source to the holding surface.

Further, the chuck table 28 is connected to a moving mechanism (not shown), and this moving mechanism moves the chuck table 28 along the X-axis direction (left-right direction, machining feed direction). Further, the chuck table 28 is connected to a rotation mechanism (not shown), which rotates the chuck table 28 around a rotation axis substantially parallel to the Z-axis direction.

A cassette elevator 30 is installed at the front corner of the base 22. A cassette 32 capable of accommodating a plurality of workpieces 11 is placed on the upper surface of the cassette elevator 30. The cassette elevator 30 is configured to be able to move up and down, and adjusts the height (position in the Z-axis direction) of the cassette 32 so that the workpiece 11 is properly carried in and out. Further, in the vicinity of the cassette elevator 30, a transport mechanism (not shown) for transporting the workpiece 11 between the chuck table 28 and the cassette 32 is provided.

A touch panel type monitor 34 serving as a user interface is provided on the front surface 24a side of the cover 24. The monitor 34 displays an image of the workpiece 11 held by the chuck table 28, information such as the machining status of the workpiece 11, and notifies the operator of the cutting apparatus 20. Further, the operator can input various information (machining conditions, etc.) into the cutting device 20 by using the monitor 34.

Further, the components of the cutting device 20 (cutting unit 26, moving mechanism connected to the cutting unit 26, chuck table 28, moving mechanism and rotating mechanism connected to the chuck table 28, cassette elevator 30, transport mechanism, monitor 34, etc. ) Is connected to a control unit (not shown). The control unit is composed of a computer or the like, and controls the operation of each component.

FIG. 4 is a perspective view showing the cutting unit 26. The cutting unit 26 includes a spindle (rotating shaft) 40 arranged along the Y-axis direction, and the spindle 40 is housed in a tubular housing 42. The tip (one end side) of the spindle 40 is exposed to the outside of the housing 42, and the blade mount 44 is fixed to the tip of the spindle 40. A motor (not shown) for rotating the spindle 40 is connected to the base end portion (other end side) of the spindle 40.

The blade mount 44 is made of a metal such as SUS (stainless steel), and includes a disk-shaped flange portion (fixed flange) 46 and a support shaft 48 projecting from the center of the surface 46a of the flange portion 46. Further, on the surface 46a side of the flange portion 46, an annular convex portion 46b protruding from the surface 46a is provided along the outer peripheral edge of the flange portion 46. The convex portion 46b is formed at a position and shape corresponding to the first convex portion 4e (see FIG. 1 and the like) of the blade 2 with a base. Further, the convex portion 46b is provided with a tip surface 46c at its tip, and the tip surface 46c is formed substantially parallel to the surface 46a (see FIG. 5).

The support shaft 48 is formed in a cylindrical shape, and a screw portion 48a is provided on the outer peripheral surface of the tip portion thereof. When the support shaft 48 is inserted into the opening 4d of the base 4 included in the blade 2 with a base, the blade 2 with a base is attached to the blade mount 44. As described above, the inner diameter of the blade 6 (diameter of the opening 6d) is equal to or larger than the inner diameter of the base 4 (diameter of the opening 4d), and the opening 4d and the opening 6d are arranged concentrically. (See Fig. 2 (A)). Therefore, when the support shaft 48 is inserted into the opening 4d of the base 4, the blade 6 does not come into contact with the support shaft 48 and the mounting of the blade 2 with the base is not hindered.

A cemented carbide member 50, which is an annular member made of cemented carbide, is provided on the tip surface 46c of the convex portion 46b. The cemented carbide member 50 is provided with a tip surface 50a at its tip, and the tip surface 50a is formed substantially parallel to the surface 46a. An example of the cemented carbide constituting the cemented carbide member 50 is the same as that of the cemented carbide member 8 (see FIG. 1 and the like) provided on the base 4.

The cemented carbide member 50 is formed in an annular shape corresponding to the shape of the tip surface 46c of the convex portion 46b, for example, and is attached to the tip surface 46c of the convex portion 46b via an adhesive. However, the cemented carbide member 50 may be formed directly on the tip surface 46c of the convex portion 46b.

An annular fixing nut 52 is fastened to the tip of the support shaft 48. A circular opening 52a corresponding to the diameter of the support shaft 48 is formed in the center of the fixing nut 52. The opening 52a is provided with a thread groove corresponding to the threaded portion 48a formed on the support shaft 48.

When the fixing nut 52 is fastened to the screw portion 48a formed at the tip of the support shaft 48 with the support shaft 48 inserted into the opening 4d of the base 4, the support shaft 48 is provided on the first convex portion 4e of the base 4. The blade 6 is sandwiched between the cemented carbide member 8 (see FIG. 1 and the like) and the cemented carbide member 50 provided on the convex portion 46b of the flange portion 46. As a result, the blade 6 is attached to the tip of the spindle 40.

FIG. 5 is a partial cross-sectional side view showing a cutting unit 26 to which the blade 2 with a base is mounted. As shown in FIG. 5, the blade mount 44 is fixed to the tip of the spindle 40 by a washer 54 and a bolt 56. Further, the blade 6 is sandwiched between the cemented carbide member 8 (first member) and the cemented carbide member 50 (second member), and the first surface 6a of the blade 6 comes into contact with the tip surface 8a of the cemented carbide member 8. However, the second surface 6b of the blade 6 is in contact with the tip surface 50a of the cemented carbide member 50.

When the spindle 40 is rotated with the blade 2 with a base mounted on the cutting unit 26, the base 4 and the blade 6 rotate about the axis of the spindle 40. Then, the workpiece 11 is cut by cutting the outer peripheral portion (tip portion) of the rotating blade 6 into the workpiece 11 held by the chuck table 28 (see FIG. 3).

When the workpiece 11 is machined using the blade 2 with a base, the blade 6 is sandwiched between the cemented carbide member 8 and the cemented carbide member 50, as shown in FIG. Here, both the cemented carbide member 8 and the cemented carbide member 50 are formed of cemented carbide, have high hardness, and are not easily damaged even if they come into contact with abrasive grains contained in the blade 6. Therefore, even if a load is applied to the blade 6 by processing the workpiece 11, the carbide member 8 and the cemented carbide member 50 are less likely to be damaged, and the tip surface 8a of the cemented carbide member 8 and the tip surface 50a of the cemented carbide member 50 Flatness is easy to maintain.

When the tip surface 8a of the cemented carbide member 8 and the tip surface 50a of the cemented carbide member 50 are flat, the blade 6 is securely fixed, and blurring (vibration) of the blade 6 during cutting of the workpiece 11 is unlikely to occur. As a result, a decrease in processing accuracy and the occurrence of processing defects are suppressed. If the cemented carbide member 8 and the cemented carbide member 50 are not easily damaged, the step of flattening the tip surface 8a of the cemented carbide member 8 and the tip surface 50a of the cemented carbide member 50 by polishing or the like is omitted, or the frequency of implementation thereof. Can be reduced. As a result, the machining efficiency of the workpiece 11 by the cutting device 20 can be improved.

The thicknesses of the cemented carbide member 8 and the cemented carbide member 50 are appropriately set according to the material of the blade 6 and the like. For example, the thickness of the cemented carbide member 8 and the cemented carbide member 50 is set to 1/3 or more of the average particle diameter of the abrasive grains contained in the blade 6. As a result, the amount of protrusion of the abrasive grains contained in the blade 6 from the bonding material is less likely to exceed the thickness of the cemented carbide member 8 and the cemented carbide member 50, and the cemented carbide member 8 and the cemented carbide member 50 due to contact with the abrasive grains. Breakage is suppressed.

Abrasive grains having an average particle size of 45 μm or less are often used for the blade 6. Therefore, the thickness of the cemented carbide member 8 and the cemented carbide member 50 is preferably 15 μm or more, and more preferably 45 μm or more. On the other hand, there is no particular limitation on the upper limit of the thickness of the cemented carbide member 8 and the cemented carbide member 50. For example, the cemented carbide member 8 and the cemented carbide member 50 are formed with a thickness of 100 μm or less.

As described above, the tip surface 8a of the cemented carbide member 8 and the tip surface 4h of the second convex portion 4f are formed in substantially the same plane. Therefore, when changing the thickness of the cemented carbide member 8, the distance from the first surface 4a to the tip surface 8a of the cemented carbide member 8 is the distance from the first surface 4a to the tip surface 4h of the second convex portion 4f. The height of the first convex portion 4e is adjusted so as to be substantially equal to.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

2 Blade with base 4 Base 4a 1st surface 4b 2nd surface 4c Outer peripheral edge 4d Opening 4e 1st convex part 4f 2nd convex part 4g Tip surface 4h Tip surface 6 Blade 6a 1st surface 6b 2nd surface 6c Outside Periphery 6d Opening 8 Carbide member 8a Tip surface 20 Cutting device 22 Base 24 Cover 24a Front 26 Cutting unit (cutting means)
28 Chuck table (holding table)
30 Cassette Elevator 32 Cassette 34 Monitor 40 Spindle (Rotating Shaft)
42 Housing 44 Blade mount 46 Flange (fixed flange)
46a Surface 46b Convex 46c Tip surface 48 Support shaft 48a Threaded part 50 Carbide member 50a Tip surface 52 Fixing nut 52a Opening 54 Washer 56 Bolt 11 Work piece

Claims (2)

It has an annular base having an opening formed in the center and an annular blade fixed to the first surface side of the base.
The base has an annular first convex portion that is provided along the outer peripheral edge of the base and projects from the first surface, and an opening that is radially inside the base from the first convex portion. It has a second convex portion that is provided so as to surround the first surface and protrudes from the first surface.
A member made of cemented carbide is provided on the tip surface of the first convex portion.
The base and the blade are bonded to each other via an adhesive adhering to the tip surface of the second convex portion. A chuck table that holds the work piece and
It has a cutting unit on which a blade with a base for cutting the workpiece held by the chuck table is mounted.
The base-equipped blade has an annular base having an opening formed in the center and an annular blade fixed to the first surface side of the base.
The base has an annular first convex portion that is provided along the outer peripheral edge of the base and projects from the first surface, and an opening that is radially inside the base from the first convex portion. It has a second convex portion that is provided so as to surround the first surface and protrudes from the first surface.
A first member made of cemented carbide is provided on the tip surface of the first convex portion.
The base and the blade are bonded to each other via an adhesive adhering to the tip surface of the second convex portion.
The cutting unit has a spindle, a blade mount fixed to the tip of the spindle, and a fixing nut for fixing the blade with a base to the blade mount.
The blade mount has a disk-shaped flange portion provided with an annular convex portion and a support shaft protruding from the center of the flange portion.
A second member made of cemented carbide is provided on the tip surface of the convex portion.
The blade is sandwiched between the first member and the second member by fastening the fixing nut to the tip of the support shaft while the support shaft is inserted into the opening of the base. A cutting device characterized by that.

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