JP7421509B2 - バナジウムで補償された光学グレードの4hおよび6h単結晶 - Google Patents
バナジウムで補償された光学グレードの4hおよび6h単結晶 Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims description 104
- 230000003287 optical effect Effects 0.000 title claims description 69
- 229910052720 vanadium Inorganic materials 0.000 title description 13
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 title description 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 129
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 90
- 239000012535 impurity Substances 0.000 claims description 15
- 229910052796 boron Inorganic materials 0.000 claims description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 42
- 238000010521 absorption reaction Methods 0.000 description 31
- 230000005540 biological transmission Effects 0.000 description 23
- 238000002834 transmittance Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 230000031700 light absorption Effects 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000000859 sublimation Methods 0.000 description 4
- 230000008022 sublimation Effects 0.000 description 4
- 239000000370 acceptor Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000005274 electronic transitions Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- -1 carbon ion Chemical class 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000005516 deep trap Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004476 mid-IR spectroscopy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
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Description
この出願は、2020年3月2日に出願された米国仮特許出願第62/984,177号の優先権を主張する。この米国仮特許出願第62/984,177号の開示全体は、引用により本明細書に援用されるものとする。
Claims (10)
- 6Hまたは4Hポリタイプの炭化ケイ素(SiC)単結晶であって、
前記SiC単結晶が、光エネルギーまたは光情報を伝送するように構成され、前記光エネルギーまたは前記光情報が、420nm~4.5μmの範囲の波長の光を有し、前記SiC単結晶が室温において抵抗率が1・105Ωよりも大きいことを特徴とする炭化ケイ素(SiC)単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶がバナジウム補償4H-SiC単結晶であり、前記光の波長が420nmから450nm未満の範囲であることを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、6HポリタイプおよびNuタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において1・1010Ωcm以上であることを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、4HポリタイプおよびNuタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において1・1012Ωcm以上であることを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、6HポリタイプおよびNuタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において1・1011Ωcmより大きいことを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、浅い不純物バックグラウンドでホウ素が優勢な6HポリタイプおよびPiタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において1・1011Ωcmより大きいことを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、浅い不純物バックグラウンドでホウ素が優勢な4HポリタイプおよびPiタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において1・1013Ωcmより大きいことを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、浅い不純物バックグラウンドでホウ素が優勢な4HポリタイプおよびPiタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において1・1013Ωcmより高いことを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、浅い不純物バックグラウンドでホウ素が優勢な6HポリタイプおよびPiタイプのバナジウム補償SiC単結晶であり、抵抗率が室温において5・1011Ωcmより高いことを特徴とするSiC単結晶。 - 請求項1に記載のSiC単結晶において、
前記SiC単結晶が、浅い不純物バックグラウンドでアルミニウムが優勢なPiタイプのバナジウム補償6H-SiC単結晶であり、抵抗率が室温において1・105~1・108Ωcmであることを特徴とするSiC単結晶。
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US202062984177P | 2020-03-02 | 2020-03-02 | |
US62/984,177 | 2020-03-02 |
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JP2021029778A Pending JP2021138601A (ja) | 2020-03-02 | 2021-02-26 | 炭化ケイ素結晶およびその製造方法 |
JP2021031418A Active JP7421509B2 (ja) | 2020-03-02 | 2021-03-01 | バナジウムで補償された光学グレードの4hおよび6h単結晶 |
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US (2) | US20210269937A1 (ja) |
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