JP7419443B2 - 過酸化水素水溶液の精製方法 - Google Patents
過酸化水素水溶液の精製方法 Download PDFInfo
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- JP7419443B2 JP7419443B2 JP2022107203A JP2022107203A JP7419443B2 JP 7419443 B2 JP7419443 B2 JP 7419443B2 JP 2022107203 A JP2022107203 A JP 2022107203A JP 2022107203 A JP2022107203 A JP 2022107203A JP 7419443 B2 JP7419443 B2 JP 7419443B2
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- hydrogen peroxide
- peroxide solution
- reverse osmosis
- stabilizer
- exchange resin
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- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 title claims description 148
- 238000000034 method Methods 0.000 title claims description 47
- 239000007864 aqueous solution Substances 0.000 title claims description 5
- 238000000746 purification Methods 0.000 title description 20
- 238000001223 reverse osmosis Methods 0.000 claims description 49
- 239000003381 stabilizer Substances 0.000 claims description 35
- 239000011347 resin Substances 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 30
- 238000001179 sorption measurement Methods 0.000 claims description 21
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 20
- 239000012528 membrane Substances 0.000 claims description 17
- 239000003729 cation exchange resin Substances 0.000 claims description 14
- 229910019142 PO4 Inorganic materials 0.000 claims description 11
- 239000003957 anion exchange resin Substances 0.000 claims description 11
- 239000003456 ion exchange resin Substances 0.000 claims description 10
- 229920003303 ion-exchange polymer Polymers 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- 239000010935 stainless steel Substances 0.000 claims description 8
- 235000011180 diphosphates Nutrition 0.000 claims description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 6
- 239000010452 phosphate Substances 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 3
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 claims description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 3
- 125000002467 phosphate group Chemical group [H]OP(=O)(O[H])O[*] 0.000 claims 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 31
- 239000000243 solution Substances 0.000 description 21
- 239000012535 impurity Substances 0.000 description 20
- 229910052742 iron Inorganic materials 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 125000000129 anionic group Chemical group 0.000 description 7
- 238000006701 autoxidation reaction Methods 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 125000002091 cationic group Chemical group 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 235000021317 phosphate Nutrition 0.000 description 6
- 238000004377 microelectronic Methods 0.000 description 5
- 239000012466 permeate Substances 0.000 description 5
- 239000004952 Polyamide Substances 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 238000005342 ion exchange Methods 0.000 description 4
- 229920002647 polyamide Polymers 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 239000004793 Polystyrene Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229940023913 cation exchange resins Drugs 0.000 description 3
- 229920001429 chelating resin Polymers 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N divinylbenzene Substances C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
- 235000011007 phosphoric acid Nutrition 0.000 description 3
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
- 238000001802 infusion Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 150000003016 phosphoric acids Chemical class 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920002239 polyacrylonitrile Polymers 0.000 description 2
- -1 polypiperazinamide Polymers 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 235000019820 disodium diphosphate Nutrition 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000004255 ion exchange chromatography Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000001745 non-dispersive infrared spectroscopy Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006864 oxidative decomposition reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L sulfate group Chemical group S(=O)(=O)([O-])[O-] QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 229910021654 trace metal Inorganic materials 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
- C01B15/0135—Purification by solid ion-exchangers or solid chelating agents
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/025—Reverse osmosis; Hyperfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
- B01D15/361—Ion-exchange
- B01D15/362—Cation-exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
- B01D15/361—Ion-exchange
- B01D15/363—Anion-exchange
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
- B01D61/025—Reverse osmosis; Hyperfiltration
- B01D61/026—Reverse osmosis; Hyperfiltration comprising multiple reverse osmosis steps
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/037—Stabilisation by additives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/06—Specific process operations in the permeate stream
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/12—Addition of chemical agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2311/00—Details relating to membrane separation process operations and control
- B01D2311/26—Further operations combined with membrane separation processes
- B01D2311/2626—Absorption or adsorption
Description
(a)少なくとも1つの第1の逆浸透系による、過酸化水素水溶液の処理、
(b)少なくとも1つの第1の安定剤による、得られた過酸化水素溶液の処理、
(c)少なくとも1つの吸着樹脂による、得られた過酸化水素溶液の処理、
(d)任意選択的に、少なくとも1つのイオン交換樹脂による、得られた過酸化水素溶液の処理
のステップを含む、過酸化水素水溶液の精製のためのプロセスである。
- 逆浸透系の下流の精製手段の寿命を保存することが可能となる;
- 精製プロセスの安全性が改善される;
- 高純度の過酸化水素溶液、特に非常に低いレベルのTOC、TN及び鉄を有する過酸化水素溶液を送達することが可能となる;
- TNレベルを監視することが、過酸化水素品質及び製造の安定性を確実にするために有利であることが見出された。
- 安定剤を実質的に含まない過酸化水素溶液が提供される。
(a)少なくとも1つの第1の逆浸透系による、過酸化水素水溶液の処理、
(b)少なくとも1つの第1の安定剤による、得られた過酸化水素溶液の処理、
(c)少なくとも1つの吸着樹脂による、得られた過酸化水素溶液の処理、
(d)任意選択的に、少なくとも1つのイオン交換樹脂による、得られた過酸化水素溶液の処理。
痕跡金属:
A1 <0.000001mg/kg
Cr <0.000001mg/kg
Fe <0.000001mg/kg
Ni <0.000001mg/kg
Cl <0.002mg/kg
SO4 2-<0.002mg/kg
PO4 3-としてのP <0.001mg/kg
TOC:<1mg/kg
乾燥残渣:<1mg/kg
TN:<0.05mg/kg
上記の説明において記載された方法を使用して、材料の分析を実行した。
60重量%の濃度を有する過酸化水素の水溶液をポリアミド逆浸透膜に通した。28bargの供給圧力及び5℃の温度において。供給物のTOC値は110mg/kgであった。(0.005mg/kg未満のTOCレベルを有する)超高純度水を使用して、得られた透過物を31%の濃度まで希釈した。安定剤SAPP(0.5mg/kg)を添加し、そして溶液を均質化し、分析した。
吸着樹脂
上記で製造された安定化された過酸化水素水溶液を、20℃の温度において2.5BV/時間の流速でAMBERLITE(登録商標)XAD4吸着樹脂のカラムに通した。
イオン交換
得られた過酸化水素水溶液を、10BV/時間の流速でカチオン交換樹脂、及び20℃の温度において重炭酸塩型のアニオン交換樹脂に連続して通した。得られた過酸化水素溶液は、0.6mg/kgのTOCレベル、検出限界未満のPO4濃度及び0.05mg/kg未満のTN濃度を有した。
膜精製
60重量%の濃度を有する過酸化水素の水溶液をポリアミド逆浸透膜に通した。28bargの供給圧力及び5℃の温度において。供給物のTC値は110mg/kgであった。(0.005mg/kg未満のTOCレベルを有する)超高純度水を使用して、得られた透過物を31%の濃度まで希釈した。
吸着樹脂
上記で製造された過酸化水素水溶液を、20℃の温度において2.5BV/時間の流速でAMBERLITE(登録商標)XAD4吸着樹脂のカラムに通した。
イオン交換
得られた過酸化水素水溶液を、10BV/時間の流速でカチオン交換樹脂、及び20℃の温度において重炭酸塩型のアニオン交換樹脂に連続して通した。得られた過酸化水素溶液は、0.6mg/kgのTOCレベル、検出限界未満のPO4濃度及び0.065mg/kgのTN濃度を有した。
H2O2の精製は、実施例1と実質的に類似の方法で実行され、そして膜精製後の鉄含有量は0.001mg/kg未満であることが決定され、そして吸着ステップ後の鉄含有量は0.000005mg/kg未満であった。イオン交換ステップ後の鉄含有量は0.000001mg/kg未満であった。イオン交換ステップ後のPO4、TN及びTOC値は実施例1と類似であった。
Claims (9)
- 少なくとも以下のステップ:
(a)少なくとも1つの第1の逆浸透系による、過酸化水素水溶液の処理、
(b)少なくとも1つの第1の安定剤による、前記得られた過酸化水素溶液の処理、
(c)少なくとも1つの吸着樹脂による、前記得られた過酸化水素溶液の処理
を含み、前記少なくとも1つの第1の安定剤が、ホスフェート、ピロホスフェート、リン酸及びその組合せから選択される、過酸化水素水溶液の精製方法。 - 前記得られた過酸化水素溶液が少なくとも1つのイオン交換樹脂によって処理される、さらなるステップ(d)を含む、請求項1に記載の方法。
- ステップ(d)が、カチオン交換樹脂、それに続いて、アニオン交換樹脂、それに続いて、カチオン交換樹脂による、前記得られた過酸化水素溶液の処理からなる、請求項2に記載の方法。
- 前記第1の逆浸透系が少なくとも2つの平行逆浸透膜を含む、請求項1~3のいずれか一項に記載の方法。
- ステップ(b)の後、及びステップ(c)の前に、ステップ(b)から得られる前記過酸化水素溶液が、少なくとも1つの第2の逆浸透系によってさらに処理される処理ステップ(b’)を含む、請求項1又は2に記載の方法。
- ステップ(b’)の後、及びステップ(c)の前に、ステップ(b’)から得られる前記過酸化水素溶液が、少なくとも1つの第2の安定剤によってさらに処理される処理ステップ(b’’)を含む、請求項5に記載の方法。
- 前記少なくとも1つの第2の安定剤が、ホスフェート、ピロホスフェート、リン酸及びその組合せから選択され、好ましくは前記少なくとも1つの第1の安定剤と同一である、請求項6に記載の方法。
- 前記第1及び/又は前記少なくとも1つの第2の逆浸透系がステンレス鋼を含む、請求項1又は2に記載の方法。
- 前記第1及び/又は前記少なくとも1つの第2の逆浸透系、並びに/或いは前記吸着樹脂及び/又は任意選択的に前記イオン交換樹脂、より特に前記アニオン性交換樹脂が窒素含有ポリマーを含む、請求項1又は2に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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EP21201296 | 2021-10-06 | ||
EP21201296.7A EP4163252A1 (en) | 2021-10-06 | 2021-10-06 | Method for purifying an aqueous hydrogen peroxide solution |
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JP2002080207A (ja) | 2000-06-21 | 2002-03-19 | Santoku Kagaku Kogyo Kk | 精製過酸化水素水の製造方法 |
JP2012188318A (ja) | 2011-03-10 | 2012-10-04 | Santoku Kagaku Kogyo Kk | 精製過酸化水素水の製造方法 |
KR20150089465A (ko) | 2014-01-28 | 2015-08-05 | 주식회사 한솔케미칼 | 역삼투 방식을 이용한 과산화수소 정제 시스템 및 그에 의해 제조되는 과산화수소 |
JP2018065726A (ja) | 2016-10-20 | 2018-04-26 | 栗田工業株式会社 | 過酸化水素水溶液の精製方法および精製装置 |
CN113371683A (zh) | 2020-12-16 | 2021-09-10 | 惠州市宙邦化工有限公司 | 一种电子级双氧水生产方法 |
US20210307332A1 (en) | 2018-08-02 | 2021-10-07 | Evonik Corporation | Polymer-stabilized aqueous hydrogen peroxide solutions and associated methods |
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DE69904090T2 (de) * | 1998-01-16 | 2003-09-04 | Ausimont Spa | Verfahren zur industriellen Herstellung von hochreinem Wasserstoffperoxid |
DE19817794A1 (de) * | 1998-04-21 | 1999-10-28 | Basf Ag | Hochreine wässrige Wasserstoffperoxid-Lösungen, Verfahren zu ihrer Herstellung und ihre Verwendung |
EP1520839A1 (en) | 2003-10-02 | 2005-04-06 | SOLVAY (Société Anonyme) | Process for the purification of aqueous peroxygen solutions, solutions obtainable thereby and their use |
CN101244810B (zh) * | 2008-03-14 | 2012-01-04 | 江阴市润玛电子材料有限公司 | 超高纯过氧化氢的制备工艺及其装置 |
CN113460969A (zh) * | 2021-07-29 | 2021-10-01 | 镇江润晶高纯化工科技股份有限公司 | 一种生产效率高且稳定性强的半导体级双氧水的制备方法 |
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JP2002080207A (ja) | 2000-06-21 | 2002-03-19 | Santoku Kagaku Kogyo Kk | 精製過酸化水素水の製造方法 |
JP2012188318A (ja) | 2011-03-10 | 2012-10-04 | Santoku Kagaku Kogyo Kk | 精製過酸化水素水の製造方法 |
KR20150089465A (ko) | 2014-01-28 | 2015-08-05 | 주식회사 한솔케미칼 | 역삼투 방식을 이용한 과산화수소 정제 시스템 및 그에 의해 제조되는 과산화수소 |
JP2018065726A (ja) | 2016-10-20 | 2018-04-26 | 栗田工業株式会社 | 過酸化水素水溶液の精製方法および精製装置 |
US20210307332A1 (en) | 2018-08-02 | 2021-10-07 | Evonik Corporation | Polymer-stabilized aqueous hydrogen peroxide solutions and associated methods |
CN113371683A (zh) | 2020-12-16 | 2021-09-10 | 惠州市宙邦化工有限公司 | 一种电子级双氧水生产方法 |
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KR20230049538A (ko) | 2023-04-13 |
US20230107919A1 (en) | 2023-04-06 |
JP2023055616A (ja) | 2023-04-18 |
CN115924852A (zh) | 2023-04-07 |
IL294322A (en) | 2023-05-01 |
TW202315839A (zh) | 2023-04-16 |
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