JP7369899B2 - 半導体デバイス用の結晶学的に安定化された強誘電性ハフニウムジルコニウムベースの膜を形成する方法 - Google Patents
半導体デバイス用の結晶学的に安定化された強誘電性ハフニウムジルコニウムベースの膜を形成する方法 Download PDFInfo
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- JP7369899B2 JP7369899B2 JP2021504264A JP2021504264A JP7369899B2 JP 7369899 B2 JP7369899 B2 JP 7369899B2 JP 2021504264 A JP2021504264 A JP 2021504264A JP 2021504264 A JP2021504264 A JP 2021504264A JP 7369899 B2 JP7369899 B2 JP 7369899B2
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- hafnium zirconium
- hafnium
- gas
- substrate
- film
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- 238000000034 method Methods 0.000 title claims description 201
- INIGCWGJTZDVRY-UHFFFAOYSA-N hafnium zirconium Chemical compound [Zr].[Hf] INIGCWGJTZDVRY-UHFFFAOYSA-N 0.000 title claims description 116
- 239000004065 semiconductor Substances 0.000 title description 18
- 239000000758 substrate Substances 0.000 claims description 114
- 239000002019 doping agent Substances 0.000 claims description 57
- 238000000151 deposition Methods 0.000 claims description 53
- KQHQLIAOAVMAOW-UHFFFAOYSA-N hafnium(4+) oxygen(2-) zirconium(4+) Chemical compound [O--].[O--].[O--].[O--].[Zr+4].[Hf+4] KQHQLIAOAVMAOW-UHFFFAOYSA-N 0.000 claims description 37
- 238000012545 processing Methods 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 10
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 5
- 239000011737 fluorine Substances 0.000 claims description 5
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229910052727 yttrium Inorganic materials 0.000 claims description 5
- 229910015844 BCl3 Inorganic materials 0.000 claims description 4
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 claims description 4
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 4
- 229910017083 AlN Inorganic materials 0.000 claims description 3
- 229910004491 TaAlN Inorganic materials 0.000 claims description 3
- 229910004166 TaN Inorganic materials 0.000 claims description 3
- 229910010037 TiAlN Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 229910052712 strontium Inorganic materials 0.000 claims description 3
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 229910052684 Cerium Inorganic materials 0.000 claims description 2
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 2
- 229910052691 Erbium Inorganic materials 0.000 claims description 2
- 229910052693 Europium Inorganic materials 0.000 claims description 2
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 2
- 229910052689 Holmium Inorganic materials 0.000 claims description 2
- 229910052779 Neodymium Inorganic materials 0.000 claims description 2
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 2
- 229910052772 Samarium Inorganic materials 0.000 claims description 2
- 229910052775 Thulium Inorganic materials 0.000 claims description 2
- 229910052790 beryllium Inorganic materials 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- 229910052716 thallium Inorganic materials 0.000 claims description 2
- 229910052776 Thorium Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 238
- 230000008569 process Effects 0.000 description 158
- 239000010408 film Substances 0.000 description 142
- 239000002243 precursor Substances 0.000 description 120
- 229910052760 oxygen Inorganic materials 0.000 description 73
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 70
- 239000001301 oxygen Substances 0.000 description 70
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 67
- 229910052735 hafnium Inorganic materials 0.000 description 66
- 229910052726 zirconium Inorganic materials 0.000 description 65
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 60
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 55
- 238000000231 atomic layer deposition Methods 0.000 description 44
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 41
- 239000010410 layer Substances 0.000 description 41
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 35
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 35
- 230000008021 deposition Effects 0.000 description 33
- -1 glymes Chemical class 0.000 description 29
- 229910052757 nitrogen Inorganic materials 0.000 description 25
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 24
- 238000010926 purge Methods 0.000 description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 21
- 239000010703 silicon Substances 0.000 description 21
- HPYIUKIBUJFXII-UHFFFAOYSA-N Cyclopentadienyl radical Chemical compound [CH]1C=CC=C1 HPYIUKIBUJFXII-UHFFFAOYSA-N 0.000 description 19
- 239000003446 ligand Substances 0.000 description 17
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 16
- 238000010586 diagram Methods 0.000 description 16
- QUPDWYMUPZLYJZ-UHFFFAOYSA-N ethyl Chemical compound C[CH2] QUPDWYMUPZLYJZ-UHFFFAOYSA-N 0.000 description 14
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 14
- DHHKPEUQJIEKOA-UHFFFAOYSA-N tert-butyl 2-[6-(nitromethyl)-6-bicyclo[3.2.0]hept-3-enyl]acetate Chemical compound C1C=CC2C(CC(=O)OC(C)(C)C)(C[N+]([O-])=O)CC21 DHHKPEUQJIEKOA-UHFFFAOYSA-N 0.000 description 12
- 239000011777 magnesium Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000006227 byproduct Substances 0.000 description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 8
- 238000001312 dry etching Methods 0.000 description 8
- 239000011261 inert gas Substances 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 150000004703 alkoxides Chemical class 0.000 description 6
- 239000011575 calcium Substances 0.000 description 6
- 150000004820 halides Chemical class 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 5
- 125000000217 alkyl group Chemical group 0.000 description 5
- 150000001408 amides Chemical class 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- ZYVYEJXMYBUCMN-UHFFFAOYSA-N 1-methoxy-2-methylpropane Chemical compound COCC(C)C ZYVYEJXMYBUCMN-UHFFFAOYSA-N 0.000 description 4
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- 230000006399 behavior Effects 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 150000003983 crown ethers Chemical class 0.000 description 4
- 150000002170 ethers Chemical class 0.000 description 4
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 4
- 229910052761 rare earth metal Inorganic materials 0.000 description 4
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- ZUHZGEOKBKGPSW-UHFFFAOYSA-N tetraglyme Chemical compound COCCOCCOCCOCCOC ZUHZGEOKBKGPSW-UHFFFAOYSA-N 0.000 description 4
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 4
- 101000929663 Homo sapiens Phospholipid-transporting ATPase ABCA7 Proteins 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 3
- 102100036620 Phospholipid-transporting ATPase ABCA7 Human genes 0.000 description 3
- OLBVUFHMDRJKTK-UHFFFAOYSA-N [N].[O] Chemical compound [N].[O] OLBVUFHMDRJKTK-UHFFFAOYSA-N 0.000 description 3
- 125000000129 anionic group Chemical group 0.000 description 3
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 150000007942 carboxylates Chemical class 0.000 description 3
- 150000002240 furans Chemical class 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 239000012705 liquid precursor Substances 0.000 description 3
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 150000002825 nitriles Chemical class 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 150000003222 pyridines Chemical class 0.000 description 3
- 150000003233 pyrroles Chemical class 0.000 description 3
- 150000003235 pyrrolidines Chemical class 0.000 description 3
- 150000002910 rare earth metals Chemical class 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 3
- RHUYHJGZWVXEHW-UHFFFAOYSA-N 1,1-Dimethyhydrazine Chemical compound CN(C)N RHUYHJGZWVXEHW-UHFFFAOYSA-N 0.000 description 2
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 2
- AVFZOVWCLRSYKC-UHFFFAOYSA-N 1-methylpyrrolidine Chemical compound CN1CCCC1 AVFZOVWCLRSYKC-UHFFFAOYSA-N 0.000 description 2
- AOPDRZXCEAKHHW-UHFFFAOYSA-N 1-pentoxypentane Chemical compound CCCCCOCCCCC AOPDRZXCEAKHHW-UHFFFAOYSA-N 0.000 description 2
- BPRYUXCVCCNUFE-UHFFFAOYSA-M 2,4,6-trimethylphenolate Chemical compound CC1=CC(C)=C([O-])C(C)=C1 BPRYUXCVCCNUFE-UHFFFAOYSA-M 0.000 description 2
- OBETXYAYXDNJHR-UHFFFAOYSA-N 2-Ethylhexanoic acid Chemical group CCCCC(CC)C(O)=O OBETXYAYXDNJHR-UHFFFAOYSA-N 0.000 description 2
- SDTMFDGELKWGFT-UHFFFAOYSA-N 2-methylpropan-2-olate Chemical compound CC(C)(C)[O-] SDTMFDGELKWGFT-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- AHVYPIQETPWLSZ-UHFFFAOYSA-N N-methyl-pyrrolidine Natural products CN1CC=CC1 AHVYPIQETPWLSZ-UHFFFAOYSA-N 0.000 description 2
- BIVNKSDKIFWKFA-UHFFFAOYSA-N N-propan-2-yl-N-silylpropan-2-amine Chemical compound CC(C)N([SiH3])C(C)C BIVNKSDKIFWKFA-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 238000000277 atomic layer chemical vapour deposition Methods 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- XGIUDIMNNMKGDE-UHFFFAOYSA-N bis(trimethylsilyl)azanide Chemical compound C[Si](C)(C)[N-][Si](C)(C)C XGIUDIMNNMKGDE-UHFFFAOYSA-N 0.000 description 2
- 229910000085 borane Inorganic materials 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- SHZIWNPUGXLXDT-UHFFFAOYSA-N caproic acid ethyl ester Natural products CCCCCC(=O)OCC SHZIWNPUGXLXDT-UHFFFAOYSA-N 0.000 description 2
- 150000001734 carboxylic acid salts Chemical class 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- ZYLGGWPMIDHSEZ-UHFFFAOYSA-N dimethylazanide;hafnium(4+) Chemical compound [Hf+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C ZYLGGWPMIDHSEZ-UHFFFAOYSA-N 0.000 description 2
- DWCMDRNGBIZOQL-UHFFFAOYSA-N dimethylazanide;zirconium(4+) Chemical compound [Zr+4].C[N-]C.C[N-]C.C[N-]C.C[N-]C DWCMDRNGBIZOQL-UHFFFAOYSA-N 0.000 description 2
- HHFAWKCIHAUFRX-UHFFFAOYSA-N ethoxide Chemical compound CC[O-] HHFAWKCIHAUFRX-UHFFFAOYSA-N 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 2
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- WCYWZMWISLQXQU-UHFFFAOYSA-N methyl Chemical compound [CH3] WCYWZMWISLQXQU-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 125000002097 pentamethylcyclopentadienyl group Chemical group 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-M phenolate Chemical compound [O-]C1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-M 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- JAMNHZBIQDNHMM-UHFFFAOYSA-N pivalonitrile Chemical compound CC(C)(C)C#N JAMNHZBIQDNHMM-UHFFFAOYSA-N 0.000 description 2
- OGHBATFHNDZKSO-UHFFFAOYSA-N propan-2-olate Chemical compound CC(C)[O-] OGHBATFHNDZKSO-UHFFFAOYSA-N 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 125000001339 silanediyl group Chemical group [H][Si]([H])(*)* 0.000 description 2
- 239000012686 silicon precursor Substances 0.000 description 2
- 125000005374 siloxide group Chemical group 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- LALRXNPLTWZJIJ-UHFFFAOYSA-N triethylborane Chemical compound CCB(CC)CC LALRXNPLTWZJIJ-UHFFFAOYSA-N 0.000 description 2
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 2
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- JOMDRFHDFPOLDV-VNGPFPIXSA-K (Z)-6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-5-oxooct-3-en-3-olate lanthanum(3+) Chemical compound [La+3].CC(C)(C)C(\[O-])=C\C(=O)C(F)(F)C(F)(F)C(F)(F)F.CC(C)(C)C(\[O-])=C\C(=O)C(F)(F)C(F)(F)C(F)(F)F.CC(C)(C)C(\[O-])=C\C(=O)C(F)(F)C(F)(F)C(F)(F)F JOMDRFHDFPOLDV-VNGPFPIXSA-K 0.000 description 1
- KZBQCXBCJMHJOB-VNGPFPIXSA-K (z)-6,6,7,7,8,8,8-heptafluoro-2,2-dimethyl-5-oxooct-3-en-3-olate;ytterbium(3+) Chemical compound [Yb+3].CC(C)(C)C(\[O-])=C\C(=O)C(F)(F)C(F)(F)C(F)(F)F.CC(C)(C)C(\[O-])=C\C(=O)C(F)(F)C(F)(F)C(F)(F)F.CC(C)(C)C(\[O-])=C\C(=O)C(F)(F)C(F)(F)C(F)(F)F KZBQCXBCJMHJOB-VNGPFPIXSA-K 0.000 description 1
- ZKRDKPISZHQYEL-UHFFFAOYSA-N 2-bis(2,2-dimethylhydrazinyl)silyl-1,1-dimethylhydrazine Chemical compound CN(C)N[SiH](NN(C)C)NN(C)C ZKRDKPISZHQYEL-UHFFFAOYSA-N 0.000 description 1
- BGGIUGXMWNKMCP-UHFFFAOYSA-N 2-methylpropan-2-olate;zirconium(4+) Chemical compound CC(C)(C)O[Zr](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C BGGIUGXMWNKMCP-UHFFFAOYSA-N 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000012695 Ce precursor Substances 0.000 description 1
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 description 1
- 229910005267 GaCl3 Inorganic materials 0.000 description 1
- 229910003865 HfCl4 Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
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- 101100521334 Mus musculus Prom1 gene Proteins 0.000 description 1
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Images
Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45536—Use of plasma, radiation or electromagnetic fields
- C23C16/45542—Plasma being used non-continuously during the ALD reactions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- H—ELECTRICITY
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Description
ML1L2L3Dx
を有し、式中Mは、イットリウム(Y)、ルテチウム(Lu)、ランタン(La)、セリウム(Ce)、プラセオジム(Pr)、ネオジム(Nd)、サマリウム(Sm)、ユウロピウム(Eu)、ガドリニウム(Gd)、テルビウム(Tb)、ジスプロシウム(Dy)、ホルミウム(Ho)、エルビウム(Er)、ツリウム(Tm)、及びイッテルビウム(Yb)の群から選択された希土類金属元素である。L1、L2、L3は個別の陰イオン配位子であり、Dは中性ドナー配位子であり、ここでxは0、1、2、又は3とすることができる。各L1、L2、L3配位子は、アルコキシド、ハロゲン化物、アリールオキシド、アミド、シクロペンタジエニル、アルキル、シリル、アミジナート、ベータ-ジケトナート、ケトイミナート、シラノエート、及びカルボン酸塩の群から個別に選択され得る。D配位子は、エーテル、フラン、ピリジン、ピロール、ピロリジン、アミン、クラウンエーテル、グライム、及びニトリルの群から選択され得る。
ML1L2Dx
ここで、Mは、ベリリウム(Be)、マグネシウム(Mg)、カルシウム(Ca)、ストロンチウム(Sr)、及びバリウム(Ba)の群から選択されたアルカリ土類金属元素である。L1及びL2は個別の陰イオン配位子であり、Dは中性ドナー配位子であり、ここでxは0、1、2、又は3とすることができる。L1、L2配位子の各々は、アルコキシド、ハロゲン化物、アリールオキシド、アミド、シクロペンタジエニル、アルキル、シリル、アミジナート、ベータ-ジケトナート、ケトイミナート、シラノエート、及びカルボン酸塩の群から個別に選択され得る。D配位子は、エーテル、フラン、ピリジン、ピロール、ピロリジン、アミン、クラウンエーテル、グライム、及びニトリルの群から選択され得る。
AlL1L2L3Dx
を有し、式中L1、L2、L3は個別の陰イオン配位子であり、Dは中性ドナー配位子であり、ここでxは0、1、又は2とすることができる。各L1、L2、L3配位子は、アルコキシド、ハロゲン化物、アリールオキシド、アミド、シクロペンタジエニル、アルキル、シリル、アミジナート、ベータ-ジケトナート、ケトイミナート、シラノエート、及びカルボン酸塩の群から個別に選択され得る。D配位子は、エーテル、フラン、ピリジン、ピロール、ピロリジン、アミン、クラウンエーテル、グライム、及びニトリルの群から選択され得る。
図4A~図4Bは、本発明の実施形態による、ハフニウムジルコニウム窒化膜及びドープされたハフニウムジルコニウム窒化膜を形成するためのプロセスフロー図である。図4A~図4Bのプロセスフローは、図1A、図1BのALD/PEALDシステム1/100、又はALD/PEALDプロセスを実施するように構成された任意の他の好適なALD/PEALDシステムによって実行され得る。
Claims (20)
- 基板を処理する方法であって、
5ナノメートルを超える厚さのハフニウムジルコニウムベースの膜を基板上に堆積することと、
前記ハフニウムジルコニウムベースの膜上にキャップ層を堆積させることと、
前記基板を熱処理して、前記ハフニウムジルコニウムベースの膜を、非中心対称斜方晶相、正方晶相、又はこれらの混合相へと結晶化させることと、
前記基板から前記キャップ層を除去することと、
前記熱処理されたハフニウムジルコニウムベースの膜を5ナノメートル未満の厚さに薄膜化することであって、当該薄膜化された前記熱処理されたハフニウムジルコニウムベースの膜は、前記結晶化された非中心対称斜方晶相、正方晶相、又はこれらの混合相を維持している、ことと、
を含む方法。 - 前記熱処理されたハフニウムジルコニウムベースの膜は、3nm未満の厚さに薄膜化される、請求項1に記載の方法。
- 前記キャップ層は、TiN、TaN、TiAlN、TaAlN、AlN、又はこれらの組み合わせを含む、請求項1に記載の方法。
- 前記キャップ層は、Ge、又はGe及びSiを含む、請求項1に記載の方法。
- 前記熱処理は、前記基板を300℃~850℃の温度に加熱することを含む、請求項1に記載の方法。
- 前記薄膜化は、原子層エッチング(ALE)によって実施される、請求項1に記載の方法。
- 前記ALEは、B含有ガス又はAl含有ガスと、フッ素含有ガスとの交互曝露を含む、請求項6に記載の方法。
- 前記ALEは、BCl3ガスとHFガスとの交互曝露を含む、請求項6に記載の方法。
- 前記キャップ層を堆積させる前に、前記ハフニウムジルコニウムベースの膜上にアモルファス又は多結晶シリコン層を堆積させること、
を更に含む請求項1に記載の方法。 - 前記熱処理されたハフニウムジルコニウムベースの膜から、前記アモルファス又は多結晶シリコン層を除去すること、
を更に含む請求項9に記載の方法。 - 前記基板を更に処理して、前記薄膜化された前記熱処理されたハフニウムジルコニウムベースの膜を含有する、MOSFET、トンネル接合、ダイオード、抵抗メモリ、又はキャパシタを形成すること、
を更に含む請求項1に記載の方法。 - 前記ハフニウムジルコニウムベースの膜は、ハフニウムジルコニウム酸化膜、ハフニウムジルコニウム窒化膜、ハフニウムジルコニウム酸窒化膜、ドープされたハフニウムジルコニウム酸化膜、ドープされたハフニウムジルコニウム窒化膜、又はドープされたハフニウムジルコニウム酸窒化膜を含む、請求項1に記載の方法。
- 前記ドープされたハフニウムジルコニウム酸化膜、前記ドープされたハフニウムジルコニウム窒化膜、又は前記ドープされたハフニウムジルコニウム酸窒化膜は、Be、Mg、Ca、Sr、Ba、Ra、B、Al、Ga、In、Tl、Si、Y、Lu、La、Ce、Pr、Nd、Sm、Eu、Gd、Th、Dy、Ho、Er、Tm、及びYbから選択されるドーパント元素を含有する、請求項12に記載の方法。
- 基板を処理する方法であって、
5ナノメートルを超える厚さのハフニウムジルコニウム酸化膜を基板上に堆積させることと、
前記ハフニウムジルコニウム酸化膜上に、TiN、TaN、TiAlN、TaAlN、AlN、又はこれらの組み合わせを含むキャップ層を堆積させることと、
前記基板を300℃~850℃の温度で熱処理して、前記ハフニウムジルコニウム酸化膜を、非中心対称斜方晶相、正方晶相、又はこれらの混合相へと結晶化させることと、
前記基板から前記キャップ層を除去することと、
前記熱処理されたハフニウムジルコニウム酸化膜を原子層エッチング(ALE)によって5nm未満の厚さに薄膜化することであって、当該薄膜化された前記熱処理されたハフニウムジルコニウム酸化膜は、前記結晶化された非中心対称斜方晶相、正方晶相、又はこれらの混合相を維持している、ことと、
を含む方法。 - 前記熱処理されたハフニウムジルコニウム酸化膜は、3ナノメートル未満の厚さに薄膜化される、請求項14に記載の方法。
- 前記ALEは、B含有ガス又はAl含有ガスと、フッ素含有ガスとの交互曝露を含む、請求項14に記載の方法。
- 前記ALEは、BCl3ガスとHFガスとの交互曝露を含む、請求項14に記載の方法。
- 前記キャップ層を堆積させる前に、前記ハフニウムジルコニウム酸化膜上にアモルファス又は多結晶シリコン層を堆積させること、
を更に含む請求項14に記載の方法。 - 前記熱処理されたハフニウムジルコニウム酸化膜から、前記アモルファス又は多結晶シリコン層を除去すること、
を更に含む請求項18に記載の方法。 - 前記基板を更に処理して、前記薄膜化された前記熱処理されたハフニウムジルコニウム酸化膜を含有する、MOSFET、トンネル接合、ダイオード、抵抗メモリ、又はキャパシタを形成すること、
を更に含む請求項14に記載の方法。
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10566212B2 (en) | 2016-12-19 | 2020-02-18 | Lam Research Corporation | Designer atomic layer etching |
JP7123622B2 (ja) * | 2018-05-18 | 2022-08-23 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US11121140B2 (en) * | 2020-01-08 | 2021-09-14 | Sandisk Technologies Llc | Ferroelectric tunnel junction memory device with integrated ovonic threshold switches |
JP7096279B2 (ja) | 2020-03-25 | 2022-07-05 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置、プログラム、および基板処理方法 |
US20220020862A1 (en) * | 2020-07-16 | 2022-01-20 | Entegris, Inc. | Carbon-free laminated hafnium oxide/zirconium oxide films for ferroelectric memories |
US11706928B2 (en) * | 2020-10-30 | 2023-07-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Memory device and method for fabricating the same |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003234325A (ja) | 2001-12-04 | 2003-08-22 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
US20080233288A1 (en) | 2007-03-20 | 2008-09-25 | Tokyo Electron Limited | Method of forming crystallographically stabilized doped hafnium zirconium based films |
US20090057737A1 (en) | 2007-09-05 | 2009-03-05 | Qimonda Ag | Integrated circuit with dielectric layer |
US20090261395A1 (en) | 2008-04-21 | 2009-10-22 | Qimonda Ag | Integrated Circuit Including a Ferroelectric Memory Cell and Method of Manufacturing the Same |
US20110027999A1 (en) | 2006-08-16 | 2011-02-03 | Freescale Semiconductor, Inc. | Etch method in the manufacture of an integrated circuit |
WO2012133433A1 (ja) | 2011-03-28 | 2012-10-04 | 独立行政法人産業技術総合研究所 | ゲート絶縁膜の形成方法及び半導体装置の製造方法 |
JP2014053568A (ja) | 2012-09-10 | 2014-03-20 | Toshiba Corp | 強誘電体メモリ及びその製造方法 |
JP2017518639A (ja) | 2014-05-20 | 2017-07-06 | マイクロン テクノロジー, インク. | 有極性、カイラル、非中心対称性強誘電体材料、その材料を含むメモリセルおよび関連するデバイスと方法。 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6586260B2 (en) * | 2001-03-28 | 2003-07-01 | Sharp Laboratories Of America, Inc. | Single c-axis PGO thin film electrodes having good surface smoothness and uniformity and methods for making the same |
US6420279B1 (en) * | 2001-06-28 | 2002-07-16 | Sharp Laboratories Of America, Inc. | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate |
US7112485B2 (en) * | 2002-08-28 | 2006-09-26 | Micron Technology, Inc. | Systems and methods for forming zirconium and/or hafnium-containing layers |
US6897074B1 (en) * | 2004-03-03 | 2005-05-24 | Sharp Laboratories Of America, Inc. | Method for making single-phase c-axis doped PGO ferroelectric thin films |
KR100891779B1 (ko) * | 2005-11-28 | 2009-04-07 | 허니웰 인터내셔날 인코포레이티드 | 증착 공정용의 유기금속 전구체 및 관련된 중간체, 이들의제조 방법, 및 이들의 사용 방법 |
US20080087890A1 (en) * | 2006-10-16 | 2008-04-17 | Micron Technology, Inc. | Methods to form dielectric structures in semiconductor devices and resulting devices |
US7755128B2 (en) * | 2007-03-20 | 2010-07-13 | Tokyo Electron Limited | Semiconductor device containing crystallographically stabilized doped hafnium zirconium based materials |
JP4552973B2 (ja) | 2007-06-08 | 2010-09-29 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
US7964515B2 (en) * | 2007-12-21 | 2011-06-21 | Tokyo Electron Limited | Method of forming high-dielectric constant films for semiconductor devices |
US7791149B2 (en) * | 2008-07-10 | 2010-09-07 | Qimonda Ag | Integrated circuit including a dielectric layer |
US8313994B2 (en) * | 2009-03-26 | 2012-11-20 | Tokyo Electron Limited | Method for forming a high-K gate stack with reduced effective oxide thickness |
US20110065287A1 (en) * | 2009-09-11 | 2011-03-17 | Tokyo Electron Limited | Pulsed chemical vapor deposition of metal-silicon-containing films |
KR20110098355A (ko) * | 2010-02-26 | 2011-09-01 | 성균관대학교산학협력단 | 중성빔 식각 장치를 이용한 원자층 식각 방법 |
KR20120064966A (ko) * | 2010-12-10 | 2012-06-20 | 에스케이하이닉스 주식회사 | 반도체 장치 제조 방법 |
JP6042415B2 (ja) * | 2012-04-05 | 2016-12-14 | 東京エレクトロン株式会社 | 半導体デバイスの製造方法 |
KR20150037009A (ko) * | 2013-09-30 | 2015-04-08 | 에스케이하이닉스 주식회사 | 고유전층을 포함하는 반도체장치 및 그 제조 방법 |
JP6202681B2 (ja) * | 2014-03-26 | 2017-09-27 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびプログラム |
US11107919B2 (en) * | 2017-08-31 | 2021-08-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of manufacturing semiconductor device including ferroelectric layer having columnar-shaped crystals |
KR102433290B1 (ko) * | 2018-02-08 | 2022-08-17 | 에스케이하이닉스 주식회사 | 강유전성 소자의 제조 방법 |
US10833150B2 (en) * | 2018-07-11 | 2020-11-10 | International Business Machines Corporation | Fast recrystallization of hafnium or zirconium based oxides in insulator-metal structures |
-
2019
- 2019-07-26 US US16/522,993 patent/US10790149B2/en active Active
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- 2019-07-26 WO PCT/US2019/043595 patent/WO2020023837A1/en active Application Filing
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003234325A (ja) | 2001-12-04 | 2003-08-22 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
US20110027999A1 (en) | 2006-08-16 | 2011-02-03 | Freescale Semiconductor, Inc. | Etch method in the manufacture of an integrated circuit |
US20080233288A1 (en) | 2007-03-20 | 2008-09-25 | Tokyo Electron Limited | Method of forming crystallographically stabilized doped hafnium zirconium based films |
US20090057737A1 (en) | 2007-09-05 | 2009-03-05 | Qimonda Ag | Integrated circuit with dielectric layer |
US20090261395A1 (en) | 2008-04-21 | 2009-10-22 | Qimonda Ag | Integrated Circuit Including a Ferroelectric Memory Cell and Method of Manufacturing the Same |
WO2012133433A1 (ja) | 2011-03-28 | 2012-10-04 | 独立行政法人産業技術総合研究所 | ゲート絶縁膜の形成方法及び半導体装置の製造方法 |
JP2014053568A (ja) | 2012-09-10 | 2014-03-20 | Toshiba Corp | 強誘電体メモリ及びその製造方法 |
JP2017518639A (ja) | 2014-05-20 | 2017-07-06 | マイクロン テクノロジー, インク. | 有極性、カイラル、非中心対称性強誘電体材料、その材料を含むメモリセルおよび関連するデバイスと方法。 |
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