JP7363894B2 - 加工システム及び検査システム - Google Patents

加工システム及び検査システム Download PDF

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Publication number
JP7363894B2
JP7363894B2 JP2021515373A JP2021515373A JP7363894B2 JP 7363894 B2 JP7363894 B2 JP 7363894B2 JP 2021515373 A JP2021515373 A JP 2021515373A JP 2021515373 A JP2021515373 A JP 2021515373A JP 7363894 B2 JP7363894 B2 JP 7363894B2
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Japan
Prior art keywords
processing
area
light
paint film
defect
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JP2021515373A
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Japanese (ja)
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JPWO2020217338A1 (https=
JPWO2020217338A5 (https=
Inventor
真路 佐藤
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Nikon Corp
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Nikon Corp
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Publication of JPWO2020217338A1 publication Critical patent/JPWO2020217338A1/ja
Publication of JPWO2020217338A5 publication Critical patent/JPWO2020217338A5/ja
Priority to JP2023172437A priority Critical patent/JP2023175909A/ja
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Publication of JP7363894B2 publication Critical patent/JP7363894B2/ja
Priority to JP2025136869A priority patent/JP2025164838A/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/60—Preliminary treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by any single one of main groups B23K1/00 - B23K28/00
    • B23K31/12—Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by any single one of main groups B23K1/00 - B23K28/00 relating to investigating the properties, e.g. the weldability, of materials
    • B23K31/125—Weld quality monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/006—Vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles ; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic materials
    • B23K2103/42—Plastics other than composite materials

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Quality & Reliability (AREA)
  • Laser Beam Processing (AREA)
  • Coating Apparatus (AREA)
  • Electroluminescent Light Sources (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2021515373A 2019-04-24 2019-04-24 加工システム及び検査システム Active JP7363894B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023172437A JP2023175909A (ja) 2019-04-24 2023-10-04 加工システム及び検査システム
JP2025136869A JP2025164838A (ja) 2019-04-24 2025-08-20 加工システム及び検査システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/017402 WO2020217338A1 (ja) 2019-04-24 2019-04-24 加工システム及び検査システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023172437A Division JP2023175909A (ja) 2019-04-24 2023-10-04 加工システム及び検査システム

Publications (3)

Publication Number Publication Date
JPWO2020217338A1 JPWO2020217338A1 (https=) 2020-10-29
JPWO2020217338A5 JPWO2020217338A5 (https=) 2022-03-29
JP7363894B2 true JP7363894B2 (ja) 2023-10-18

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ID=72941091

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2021515373A Active JP7363894B2 (ja) 2019-04-24 2019-04-24 加工システム及び検査システム
JP2023172437A Pending JP2023175909A (ja) 2019-04-24 2023-10-04 加工システム及び検査システム
JP2025136869A Pending JP2025164838A (ja) 2019-04-24 2025-08-20 加工システム及び検査システム

Family Applications After (2)

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JP2023172437A Pending JP2023175909A (ja) 2019-04-24 2023-10-04 加工システム及び検査システム
JP2025136869A Pending JP2025164838A (ja) 2019-04-24 2025-08-20 加工システム及び検査システム

Country Status (5)

Country Link
US (2) US20220196569A1 (https=)
EP (1) EP3960365B1 (https=)
JP (3) JP7363894B2 (https=)
TW (1) TW202042921A (https=)
WO (1) WO2020217338A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021106400A1 (ja) * 2019-11-27 2021-06-03 Ｊｆｅスチール株式会社 溶接検査装置
WO2022225470A1 (en) * 2021-04-23 2022-10-27 Scg Packaging Public Company Limited A device for testing the liquid absorption of a material and the process thereof
CN117529386A (zh) * 2021-06-29 2024-02-06 株式会社尼康 用于大规模光学制造的方法
WO2023127152A1 (ja) * 2021-12-28 2023-07-06 株式会社ニコン 光学装置および検査方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003294418A (ja) 2002-04-04 2003-10-15 Mitsutoyo Corp 微小周期構造評価装置及び微小周期構造評価方法
JP2005030822A (ja) 2003-07-09 2005-02-03 Hitachi Ltd 膜計測方法及びその装置
JP2005169397A (ja) 2003-12-05 2005-06-30 Seiko Epson Corp レーザ照射装置、液滴吐出装置、レーザ照射方法、液滴吐出方法及び位置制御装置
JP2011530443A (ja) 2008-08-05 2011-12-22 アルコア インコーポレイテッド 摩擦低減テクスチャ表面を有する金属シート及びプレート並びにそれらの製造方法
US20170144255A1 (en) 2015-11-23 2017-05-25 The Boeing Company System and Method for Preparing a Fluid Flow Surface
JP2017161354A (ja) 2016-03-09 2017-09-14 三菱重工業株式会社 部材の検査装置及び部材の補修方法
WO2018197555A1 (de) 2017-04-26 2018-11-01 4Jet Microtech Gmbh & Co. Kg Verfahren und vorrichtung zum herstellen von riblets

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63130289A (ja) * 1986-11-19 1988-06-02 Kawasaki Steel Corp ロ−ルの粗面化方法及びその装置
GB2226970B (en) 1989-01-11 1992-10-21 British Aerospace Methods of manufacture and surface treatment using laser radiation
DE19636458C1 (de) * 1996-09-07 1998-04-02 Schweistechnische Lehr Und Ver Manuell zu positionierende und zu betätigende Einrichtung zum Laserstrahlschweißen
JP2000292125A (ja) * 1999-04-02 2000-10-20 Amada Co Ltd ワークにおける加工可能範囲の検出方法
CN1397089A (zh) * 2000-02-15 2003-02-12 松下电器产业株式会社 非单晶薄膜、带非单晶薄膜的衬底、其制造方法及其制造装置、以及其检查方法及其检查装置、以及利用该非单晶薄膜的薄膜晶体管、薄膜晶体管阵列及图像显示装置
JP5202026B2 (ja) * 2008-02-25 2013-06-05 三菱電機株式会社 レーザスクライブ装置
US8260030B2 (en) * 2009-03-30 2012-09-04 Koh Young Technology Inc. Inspection method
JP5854025B2 (ja) * 2013-11-13 2016-02-09 トヨタ自動車株式会社 回転ロール表面の異物検知および清浄方法と異物検知および清浄装置
US10258982B2 (en) 2014-04-23 2019-04-16 Japan Science And Technology Agency Combined-blade open flow path device and joined body thereof
JP6451370B2 (ja) * 2015-02-09 2019-01-16 オムロン株式会社 接合構造体の製造方法
KR101893823B1 (ko) * 2016-10-04 2018-08-31 주식회사 고영테크놀러지 기판 검사장치 및 이를 이용한 기판의 왜곡 보상 방법

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003294418A (ja) 2002-04-04 2003-10-15 Mitsutoyo Corp 微小周期構造評価装置及び微小周期構造評価方法
JP2005030822A (ja) 2003-07-09 2005-02-03 Hitachi Ltd 膜計測方法及びその装置
JP2005169397A (ja) 2003-12-05 2005-06-30 Seiko Epson Corp レーザ照射装置、液滴吐出装置、レーザ照射方法、液滴吐出方法及び位置制御装置
JP2011530443A (ja) 2008-08-05 2011-12-22 アルコア インコーポレイテッド 摩擦低減テクスチャ表面を有する金属シート及びプレート並びにそれらの製造方法
US20170144255A1 (en) 2015-11-23 2017-05-25 The Boeing Company System and Method for Preparing a Fluid Flow Surface
JP2017161354A (ja) 2016-03-09 2017-09-14 三菱重工業株式会社 部材の検査装置及び部材の補修方法
WO2018197555A1 (de) 2017-04-26 2018-11-01 4Jet Microtech Gmbh & Co. Kg Verfahren und vorrichtung zum herstellen von riblets

Also Published As

Publication number Publication date
EP3960365A1 (en) 2022-03-02
JP2023175909A (ja) 2023-12-12
EP3960365A4 (en) 2023-02-01
US20250251351A1 (en) 2025-08-07
TW202042921A (zh) 2020-12-01
JPWO2020217338A1 (https=) 2020-10-29
US20220196569A1 (en) 2022-06-23
EP3960365B1 (en) 2025-11-05
WO2020217338A1 (ja) 2020-10-29
JP2025164838A (ja) 2025-10-30

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