JP7363494B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

Info

Publication number
JP7363494B2
JP7363494B2 JP2020002445A JP2020002445A JP7363494B2 JP 7363494 B2 JP7363494 B2 JP 7363494B2 JP 2020002445 A JP2020002445 A JP 2020002445A JP 2020002445 A JP2020002445 A JP 2020002445A JP 7363494 B2 JP7363494 B2 JP 7363494B2
Authority
JP
Japan
Prior art keywords
blades
blade
rotor
stages
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020002445A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021110286A (ja
JP2021110286A5 (enExample
Inventor
敬一 二木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=76708982&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP7363494(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2020002445A priority Critical patent/JP7363494B2/ja
Priority to CN202011161207.9A priority patent/CN113107875B/zh
Priority to TW109137946A priority patent/TW202126907A/zh
Publication of JP2021110286A publication Critical patent/JP2021110286A/ja
Publication of JP2021110286A5 publication Critical patent/JP2021110286A5/ja
Application granted granted Critical
Publication of JP7363494B2 publication Critical patent/JP7363494B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/028—Layout of fluid flow through the stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP2020002445A 2020-01-09 2020-01-09 ターボ分子ポンプ Active JP7363494B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020002445A JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ
CN202011161207.9A CN113107875B (zh) 2020-01-09 2020-10-27 涡轮分子泵
TW109137946A TW202126907A (zh) 2020-01-09 2020-10-30 渦輪分子泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020002445A JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2021110286A JP2021110286A (ja) 2021-08-02
JP2021110286A5 JP2021110286A5 (enExample) 2022-07-12
JP7363494B2 true JP7363494B2 (ja) 2023-10-18

Family

ID=76708982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020002445A Active JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ

Country Status (3)

Country Link
JP (1) JP7363494B2 (enExample)
CN (1) CN113107875B (enExample)
TW (1) TW202126907A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198205A (ja) 2006-01-25 2007-08-09 Shimadzu Corp ターボ分子ポンプ
CN102536902A (zh) 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
WO2018174013A1 (ja) 2017-03-23 2018-09-27 エドワーズ株式会社 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
JP5369591B2 (ja) * 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
CN102465890A (zh) * 2010-11-04 2012-05-23 致扬科技股份有限公司 改良的涡轮分子泵的定子结构及其制造方法
DE102014203604A1 (de) * 2014-02-27 2015-08-27 Rolls-Royce Deutschland Ltd & Co Kg Schaufelreihengruppe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198205A (ja) 2006-01-25 2007-08-09 Shimadzu Corp ターボ分子ポンプ
CN102536902A (zh) 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
WO2018174013A1 (ja) 2017-03-23 2018-09-27 エドワーズ株式会社 真空ポンプとこれに用いられるブレード部品およびロータならびに固定のブレード

Also Published As

Publication number Publication date
CN113107875A (zh) 2021-07-13
JP2021110286A (ja) 2021-08-02
TW202126907A (zh) 2021-07-16
CN113107875B (zh) 2023-09-08

Similar Documents

Publication Publication Date Title
US8308429B2 (en) Axial compressor
JP5369591B2 (ja) ターボ分子ポンプ
US10801520B2 (en) Centrifugal turbo machinery
WO2018181343A1 (ja) 遠心圧縮機
CN1131978A (zh) 磨损小的涡轮机
JPH0826877B2 (ja) ターボ分子ポンプ
JP7363494B2 (ja) ターボ分子ポンプ
EP2154380B1 (en) Seal device for rotary fluid machine and rotary fluid machine
JP4104098B2 (ja) 真空ポンプ
JP6763803B2 (ja) 遠心回転機械
JP7396209B2 (ja) ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ
TW202309401A (zh) 渦輪分子泵及渦輪分子泵的定子
JPS6131695A (ja) タ−ボ分子ポンプ
JP4935509B2 (ja) ターボ分子ポンプ
WO2018179173A1 (ja) インペラ及び遠心圧縮機
JP6994976B2 (ja) タービンの排気室及びタービン
WO2022180902A1 (ja) 多段遠心圧縮機
EP2956674B1 (en) Vacuum pump
US20250027507A1 (en) Multiple blade rows for impeller and diffuser stages
WO2019107488A1 (ja) 多段遠心圧縮機、ケーシング及びリターンベーン
JP7350521B2 (ja) 回転機械
WO2025262409A1 (en) Vacuum pump
JP2020186729A (ja) 遠心圧縮機
JPH07217588A (ja) 渦流ブロア
JPS6336096A (ja) 渦流型真空ポンプ

Legal Events

Date Code Title Description
RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20210331

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20210715

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20210812

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220516

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220630

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230222

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230228

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20230426

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230601

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230905

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230918

R151 Written notification of patent or utility model registration

Ref document number: 7363494

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

R157 Certificate of patent or utility model (correction)

Free format text: JAPANESE INTERMEDIATE CODE: R157