CN113107875B - 涡轮分子泵 - Google Patents

涡轮分子泵 Download PDF

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Publication number
CN113107875B
CN113107875B CN202011161207.9A CN202011161207A CN113107875B CN 113107875 B CN113107875 B CN 113107875B CN 202011161207 A CN202011161207 A CN 202011161207A CN 113107875 B CN113107875 B CN 113107875B
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CN
China
Prior art keywords
blades
rotor
stator
blade
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202011161207.9A
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English (en)
Chinese (zh)
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CN113107875A (zh
Inventor
二木敬一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=76708982&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN113107875(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN113107875A publication Critical patent/CN113107875A/zh
Application granted granted Critical
Publication of CN113107875B publication Critical patent/CN113107875B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/028—Layout of fluid flow through the stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CN202011161207.9A 2020-01-09 2020-10-27 涡轮分子泵 Active CN113107875B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-002445 2020-01-09
JP2020002445A JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
CN113107875A CN113107875A (zh) 2021-07-13
CN113107875B true CN113107875B (zh) 2023-09-08

Family

ID=76708982

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011161207.9A Active CN113107875B (zh) 2020-01-09 2020-10-27 涡轮分子泵

Country Status (3)

Country Link
JP (1) JP7363494B2 (enExample)
CN (1) CN113107875B (enExample)
TW (1) TW202126907A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198205A (ja) * 2006-01-25 2007-08-09 Shimadzu Corp ターボ分子ポンプ
CN102465890A (zh) * 2010-11-04 2012-05-23 致扬科技股份有限公司 改良的涡轮分子泵的定子结构及其制造方法
CN102536902A (zh) * 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
DE102014203604A1 (de) * 2014-02-27 2015-08-27 Rolls-Royce Deutschland Ltd & Co Kg Schaufelreihengruppe

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
JP5369591B2 (ja) * 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
CN110382877B (zh) 2017-03-23 2022-01-14 埃地沃兹日本有限公司 真空泵和用于该真空泵的叶片零件及转子以及固定的叶片

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007198205A (ja) * 2006-01-25 2007-08-09 Shimadzu Corp ターボ分子ポンプ
CN102465890A (zh) * 2010-11-04 2012-05-23 致扬科技股份有限公司 改良的涡轮分子泵的定子结构及其制造方法
CN102536902A (zh) * 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
DE102014203604A1 (de) * 2014-02-27 2015-08-27 Rolls-Royce Deutschland Ltd & Co Kg Schaufelreihengruppe

Also Published As

Publication number Publication date
CN113107875A (zh) 2021-07-13
JP2021110286A (ja) 2021-08-02
JP7363494B2 (ja) 2023-10-18
TW202126907A (zh) 2021-07-16

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