JP2021110286A5 - - Google Patents

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Publication number
JP2021110286A5
JP2021110286A5 JP2020002445A JP2020002445A JP2021110286A5 JP 2021110286 A5 JP2021110286 A5 JP 2021110286A5 JP 2020002445 A JP2020002445 A JP 2020002445A JP 2020002445 A JP2020002445 A JP 2020002445A JP 2021110286 A5 JP2021110286 A5 JP 2021110286A5
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JP
Japan
Prior art keywords
blades
stages
rotor
turbo molecular
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020002445A
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English (en)
Japanese (ja)
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JP2021110286A (ja
JP7363494B2 (ja
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Publication date
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Priority to JP2020002445A priority Critical patent/JP7363494B2/ja
Priority claimed from JP2020002445A external-priority patent/JP7363494B2/ja
Priority to CN202011161207.9A priority patent/CN113107875B/zh
Priority to TW109137946A priority patent/TW202126907A/zh
Publication of JP2021110286A publication Critical patent/JP2021110286A/ja
Publication of JP2021110286A5 publication Critical patent/JP2021110286A5/ja
Application granted granted Critical
Publication of JP7363494B2 publication Critical patent/JP7363494B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2020002445A 2020-01-09 2020-01-09 ターボ分子ポンプ Active JP7363494B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020002445A JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ
CN202011161207.9A CN113107875B (zh) 2020-01-09 2020-10-27 涡轮分子泵
TW109137946A TW202126907A (zh) 2020-01-09 2020-10-30 渦輪分子泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020002445A JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2021110286A JP2021110286A (ja) 2021-08-02
JP2021110286A5 true JP2021110286A5 (enExample) 2022-07-12
JP7363494B2 JP7363494B2 (ja) 2023-10-18

Family

ID=76708982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020002445A Active JP7363494B2 (ja) 2020-01-09 2020-01-09 ターボ分子ポンプ

Country Status (3)

Country Link
JP (1) JP7363494B2 (enExample)
CN (1) CN113107875B (enExample)
TW (1) TW202126907A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7396209B2 (ja) * 2020-06-03 2023-12-12 株式会社島津製作所 ターボ分子ポンプ、ターボ分子ポンプのロータおよびステータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
JP2007198205A (ja) 2006-01-25 2007-08-09 Shimadzu Corp ターボ分子ポンプ
JP5369591B2 (ja) * 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
CN102465890A (zh) * 2010-11-04 2012-05-23 致扬科技股份有限公司 改良的涡轮分子泵的定子结构及其制造方法
CN102536902A (zh) 2010-12-13 2012-07-04 致扬科技股份有限公司 涡轮分子泵的叶片结构改良
DE102014203604A1 (de) * 2014-02-27 2015-08-27 Rolls-Royce Deutschland Ltd & Co Kg Schaufelreihengruppe
CN110382877B (zh) 2017-03-23 2022-01-14 埃地沃兹日本有限公司 真空泵和用于该真空泵的叶片零件及转子以及固定的叶片

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