JP7356811B2 - 基板支持装置及び基板支持装置の制御方法 - Google Patents
基板支持装置及び基板支持装置の制御方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/24—Devices for sensing torque, or actuated thereby
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
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Description
基板の周縁部に当接し、前記基板を回転させる複数の支持部と、
複数の支持部が設けられた一対の被駆動部と、
一方の被駆動部と他方の被駆動部とを連結する連結部と、
前記連結部の少なくとも一部を移動させることで、前記被駆動部の各々を第一方向に沿って直線状で近接又は離隔させる駆動部と、
を備えてもよい。
一方の被駆動部に設けられ、当該一方の被駆動部を前記第一方向で直線状に移動させるための第一被ガイド部材と、
他方の被駆動部に設けられ、当該他方の被駆動部を前記第一方向で直線状に移動させるための第二被ガイド部材と、
前記第一被ガイド部材を前記第一方向に沿ってガイドする第一ガイドと、
前記第二被ガイド部材を前記第一方向に沿ってガイドする第二ガイドと、
をさらに備えてもよい。
前記第一ガイド及び前記第二ガイドが設けられた基台をさらに備え、
前記基台には前記支持部が通過する前記第一方向に沿った長孔が設けられてもよい。
一方の被駆動部に、複数の支持部と、当該一方の被駆動部を前記第一方向で直線状に移動させるための複数の第一被ガイド部材が設けられ、
他方の被駆動部に、複数の支持部と、当該他方の被駆動部を前記第一方向で直線状に移動させるための複数の第二被ガイド部材が設けられ、
一方の被駆動部に設けられた支持部の間に複数の第一被ガイド部材が設けられ、
他方の被駆動部に設けられた支持部の間に複数の第二被ガイド部材が設けられてもよい。
前記連結部は基板の面内方向であって前記第一方向に直交する第二方向に沿って移動可能な基端部を有し、
前記基端部を第二方向に沿って移動することで前記一対のアームが開閉してもよい。
前記駆動部から前記連結部に加わる力を検知する第一検知部と、
前記第一検知部で検知される力を第一範囲の値にするよう前記駆動部を制御する制御部と、
をさらに備えてもよい。
前記連結部は開閉する一対のアームを有し、
一方の被駆動部に複数の支持部が設けられ、一方の被駆動部に設けられた支持部の各々は一方のアームに対して基板の面内方向で揺動可能となり、
他方の被駆動部に複数の支持部が設けられ、他方の被駆動部に設けられた支持部の各々が他方のアームに対して基板の面内方向で揺動可能となってもよい。
前記駆動部はモータであり、
前記モータのトルクを検知する第二検知部と、
前記第二検知部で検知されるトルクを第二範囲の値にするように前記モータを制御する制御部をさらに備えてもよい。
前述したいずれかの基板支持装置を制御するための基板支持装置の制御方法であって、
前記連結部の少なくとも一部を移動させることで、前記被駆動部の各々を前記第一方向に沿って直線状で離間させる工程と、
前記基板を複数の支持部の間に設ける工程と、
前記連結部を移動させて前記一対の被駆動部を前記第一方向に沿って直線状で近接させることで、前記支持部によって前記基板の周縁部を支持する工程と、
前記支持部を回転させることで前記基板を回転させる工程と、
を備えてもよい。
《構成》
基板洗浄装置等を含む基板処理装置の第1の実施の形態について説明する。
本実施の形態の基板支持装置100を用いた基板洗浄方法の一例は、以下のようになる。なお、上記と重複することになるので簡単に説明するに留めるが、上記「構成」で述べた全ての態様を「方法」において適用することができる。また、逆に、「方法」において述べた全ての態様を「構成」において適用することができる。また、本実施の形態の方法を実施させるためのプログラムは記録媒体に記録されてもよく、この記録媒体をコンピュータで読み取ることで、本実施の形態の方法が基板処理装置で実施されてもよい。
次に、上述した構成からなる本実施の形態による効果であって、未だ説明していないものを中心に説明する。「構成」で記載されていない場合であっても、「効果」で説明するあらゆる構成を本件発明において採用することができる。
次に、本発明の第2の実施の形態について説明する。
Claims (7)
- 基板の周縁部に当接し、前記基板を回転させる複数の支持部と、
複数の支持部が設けられた一対の被駆動部と、
一方の被駆動部と他方の被駆動部とを連結する連結部と、
前記連結部の少なくとも一部を第二方向に沿って移動させることで、前記被駆動部の各々を前記第二方向に直交する第一方向に沿って直線状で近接又は離隔させる駆動部と、
一方の被駆動部に設けられ、当該一方の被駆動部を前記第一方向で直線状に移動させるための第一被ガイド部材と、
他方の被駆動部に設けられ、当該他方の被駆動部を前記第一方向で直線状に移動させるための第二被ガイド部材と、
前記第一被ガイド部材を前記第一方向に沿ってガイドする第一ガイドと、
前記第二被ガイド部材を前記第一方向に沿ってガイドする第二ガイドと、
前記第一ガイド及び前記第二ガイドが設けられた基台と、
を備え、
前記基台に前記支持部が通過する前記第一方向に沿った同じ方向で延在する複数の長孔が設けられ、
前記被駆動部が近接した状態で前記基板が回転される、基板支持装置。 - 基板の周縁部に当接し、前記基板を回転させる複数の支持部と、
複数の支持部が設けられた一対の被駆動部と、
一方の被駆動部と他方の被駆動部とを連結する連結部と、
前記連結部の少なくとも一部を移動させることで、前記被駆動部の各々を第一方向に沿って直線状で近接又は離隔させる駆動部と、
を備え、
前記連結部は基板の面内方向であって前記第一方向に直交する第二方向に沿って移動可能な基端部を有し、
前記基端部を第二方向に沿って移動して一対のアームが開閉することで、前記被駆動部の各々が第一方向に沿って直線状で近接又は離隔し、
前記被駆動部が近接した状態で前記基板が回転される、
基板支持装置。 - 一方の被駆動部に、複数の支持部と、当該一方の被駆動部を前記第一方向で直線状に移動させるための複数の第一被ガイド部材が設けられ、
他方の被駆動部に、複数の支持部と、当該他方の被駆動部を前記第一方向で直線状に移動させるための複数の第二被ガイド部材が設けられ、
一方の被駆動部に設けられた支持部の間に複数の第一被ガイド部材が設けられ、
他方の被駆動部に設けられた支持部の間に複数の第二被ガイド部材が設けられる、請求項1又は2に記載の基板支持装置。 - 前記駆動部から前記連結部又は前記駆動部から前記連結部を介して前記被駆動部に加わる力を検知する第一検知部と、
前記第一検知部で検知される力を第一範囲の値にするよう前記駆動部を制御する制御部と、
をさらに備える、請求項1乃至3のいずれか1項に記載の基板支持装置。 - 前記連結部は開閉する一対のアームを有し、
一方の被駆動部に複数の支持部が設けられ、一方の被駆動部に設けられた支持部の各々は一方のアームに対して基板の面内方向で揺動可能となり、
他方の被駆動部に複数の支持部が設けられ、他方の被駆動部に設けられた支持部の各々が他方のアームに対して基板の面内方向で揺動可能となる、請求項1乃至4のいずれか1項に記載の基板支持装置。 - 前記駆動部はモータであり、
前記モータのトルクを検知する第二検知部と、
前記第二検知部で検知されるトルクを第二範囲の値にするように前記モータを制御する制御部をさらに備える、請求項1乃至5のいずれか1項に記載の基板支持装置。 - 請求項1乃至6のいずれか1項に記載の基板支持装置を制御するための基板支持装置の制御方法であって、
前記連結部の少なくとも一部を移動させることで、前記被駆動部の各々を前記第一方向に沿って直線状で離間させる工程と、
前記基板を複数の支持部の間に設ける工程と、
前記連結部を移動させて前記一対の被駆動部を前記第一方向に沿って直線状で近接させることで、前記支持部によって前記基板の周縁部を支持する工程と、
前記支持部を回転させることで前記基板を回転させる工程と、
を備える基板支持装置の制御方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2019070492A JP7356811B2 (ja) | 2019-04-02 | 2019-04-02 | 基板支持装置及び基板支持装置の制御方法 |
US16/823,448 US20200321237A1 (en) | 2019-04-02 | 2020-03-19 | Substrate supporting apparatus and method of controlling substrate supporting apparatus |
TW109107815A TW202105588A (zh) | 2019-04-02 | 2020-03-23 | 基板支持裝置及基板支持裝置之控制方法 |
KR1020200038157A KR20200116860A (ko) | 2019-04-02 | 2020-03-30 | 기판 지지 장치 및 기판 지지 장치의 제어 방법 |
CN202010248905.6A CN111799209A (zh) | 2019-04-02 | 2020-04-01 | 基板支承装置以及基板支承装置的控制方法 |
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JP2006222190A (ja) | 2005-02-09 | 2006-08-24 | Yaskawa Electric Corp | ウェハのアライナー装置 |
JP2007294920A (ja) | 2006-03-31 | 2007-11-08 | Ebara Corp | 基板保持回転機構、基板処理装置 |
JP2010074108A (ja) | 2008-09-22 | 2010-04-02 | Tokyo Electron Ltd | ウエハ位置合わせ装置 |
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JP3986769B2 (ja) * | 2001-06-13 | 2007-10-03 | 日本電子株式会社 | 試料ホルダおよび試料固定方法 |
JP6017262B2 (ja) * | 2012-10-25 | 2016-10-26 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
JP6792512B2 (ja) * | 2017-05-16 | 2020-11-25 | 株式会社荏原製作所 | 基板洗浄装置および基板処理装置 |
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- 2020-03-30 KR KR1020200038157A patent/KR20200116860A/ko unknown
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Patent Citations (5)
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JP2000068243A (ja) | 1998-01-13 | 2000-03-03 | Shimada Phys & Chem Ind Co Ltd | ウェーハ洗浄装置 |
JP2004079587A (ja) | 2002-08-09 | 2004-03-11 | Reitetsukusu:Kk | ウエハ回転装置とこれを有する端部傷検査装置 |
JP2006222190A (ja) | 2005-02-09 | 2006-08-24 | Yaskawa Electric Corp | ウェハのアライナー装置 |
JP2007294920A (ja) | 2006-03-31 | 2007-11-08 | Ebara Corp | 基板保持回転機構、基板処理装置 |
JP2010074108A (ja) | 2008-09-22 | 2010-04-02 | Tokyo Electron Ltd | ウエハ位置合わせ装置 |
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US20200321237A1 (en) | 2020-10-08 |
JP2020170764A (ja) | 2020-10-15 |
KR20200116860A (ko) | 2020-10-13 |
TW202105588A (zh) | 2021-02-01 |
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