JP7349062B2 - Plasma irradiation system - Google Patents

Description

The present invention relates to a plasma irradiation system for irradiating plasma onto an object to be processed.

In recent years, plasma processing has been applied to objects in various fields, such as industrial objects such as circuit boards and assembled products, and medical objects such as instruments used in hospitals. , plasma treatment using a plasma irradiation system has been adopted as a useful technique. On the other hand, since plasma cannot be visually confirmed, it may not be possible to determine whether or not the plasma processing on the object to be processed is being performed appropriately by observing the appearance of the object to be processed. For this reason, the development of indicators whose optical characteristics change due to plasma irradiation is underway, and such indicators are used to determine the suitability of plasma processing by plasma irradiation systems. An example of such a plasma irradiation system is described in the following patent document.

Japanese Patent Application Publication No. 2015-149263 Japanese Patent Application Publication No. 2015-200531

By using the indicators described in the above-mentioned patent documents, it is possible to determine whether or not plasma processing is appropriate to some extent. However, there is still room for improvement in the method of determining the suitability of plasma treatment using indicators whose optical characteristics change due to plasma treatment. The practicality of a plasma irradiation system that can determine suitability is improved. The present invention has been made in view of such circumstances, and an object of the present invention is to improve the practicality of a plasma irradiation system and a plasma irradiation method.

In order to solve the above problems, the plasma irradiation system described in the present application is a plasma irradiation system that irradiates plasma onto an object to be processed, and the plasma irradiation system supplies an indicator that changes color due to plasma irradiation. a feeder, an application device that applies the indicator supplied by the feeder to a processing object, and a plasma irradiation device that irradiates the indicator applied to the processing object and the processing object with plasma. and a measuring device that measures the color of the indicator irradiated with plasma by the plasma irradiation device.

In the plasma irradiation system described in this application, a base material whose optical properties change due to plasma irradiation is supplied by a feeder, and the plasma is irradiated onto the base material and the object to be processed. Then, the optical properties of the base material applied to the object to be processed are measured. This makes it possible to automatically determine in real time whether or not the plasma treatment on the object to be processed is being performed appropriately when the plasma treatment is performed on the object to be processed. and the practicality of the plasma irradiation method is improved.

FIG. 1 is a plan view showing a plasma irradiation system. It is a top view showing an installation device. FIG. 2 is a plan view showing a plasma irradiation device. 7 is a schematic cross-sectional view showing an irradiation head 74. FIG. FIG. 2 is a plan view showing the measuring device. FIG. 2 is a block diagram showing a control device. It is a top view showing a discharge device.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will be described below in detail as modes for carrying out the present invention with reference to the drawings.

<Configuration of plasma irradiation system>
FIG. 1 shows a plasma irradiation system 10 according to a first embodiment. The plasma irradiation system 10 is a system that irradiates an object to be processed with plasma generated under atmospheric pressure, and is also a system that can automatically determine whether or not plasma processing using the irradiated plasma is appropriate. The plasma irradiation system 10 includes an installation device 12, a plasma irradiation device 14, a measurement device 16, and a control device (see FIG. 6) 18. The installation device 12 , the plasma irradiation device 14 , and the measurement device 16 are arranged in a row adjacent to each other, and the plasma irradiation device 14 is arranged downstream of the installation device 12 . A measuring device 16 is arranged downstream. The direction in which the installation device 12, plasma irradiation device 14, and measurement device 16 are arranged is referred to as the X direction, and the horizontal direction perpendicular to the X direction is referred to as the Y direction.

The installation device 12 is a device that installs a generally rectangular sheet-like indicator on the object to be processed by plasma. Incidentally, the indicator changes color when irradiated with plasma. Indicators whose color changes due to plasma irradiation are disclosed in JP-A No. 2013-178922, JP-A No. 2013-95765, JP-A No. 2013-98196, JP-A No. 2013-95764, and JP-A No. 2015-13982. , JP-A No. 2015-205995, etc., and is well known, so a detailed explanation will be omitted. Specifically, for example, a viscous fluid containing a composition that changes by reacting with hydrogen ions obtained from nitrogen oxides, a viscous fluid containing a composition such as an azo dye, a nitrogen-containing polymer, and a cationic surfactant. A thin film layer is formed on the surface of the sheet using a viscous fluid containing the composition. As a result, an indicator including a thin film layer that changes color upon irradiation with plasma is formed. Note that an adhesive is applied to the back side of the indicator.

As shown in FIG. 2, the installation device 12 includes a conveying device 20, an indicator feeder 22, a moving device 24, and a holding head 26. The conveyance device 20 has a pair of conveyor belts 30, and the pair of conveyor belts 30 are arranged on a base 32 so as to extend in parallel with each other in the X direction. A pair of conveyor belts 30 support a mounting plate 38 on which an object to be processed 36 is placed, and are driven by an electromagnetic motor (see FIG. 6) 40 to convey the mounting plate 38 in the X direction. . Further, the conveying device 20 has a holding device (see FIG. 6) 46, and the mounting plate 38 supported by the conveyor belt 30 is fixedly held at a working position generally in the center of the base 32 by the holding device 46. is maintained.

The indicator feeder 22 is a device that supplies the indicator 50, and is disposed at the end of the base 32 in the Y direction. The indicator feeder 22 accommodates a wound carrier tape, and a plurality of indicators 50 are attached to the carrier tape at predetermined intervals so as to extend in the longitudinal direction. Then, the indicator feeder 22 feeds out the carrier tape by a feeding device (see FIG. 6) 52. Thereby, the indicator feeder 22 supplies the indicator 50 at the supply position by feeding out the carrier tape.

The moving device 24 includes a beam portion 56 and a slider 58. The beam portion 56 is mounted on the base 32 and is arranged so as to straddle the pair of conveyor belts 30. The slider 58 is held on the side surface of the beam portion 56 so as to be slidable in the Y direction, and is slid to an arbitrary position by driving an electromagnetic motor 60 (see FIG. 6).

The holding head 26 is attached to the side surface of the slider 58 and is moved in the Y direction above the base 32. At this time, the holding head 26 moves between above the position where the indicator 50 is supplied by the indicator feeder 22 and above the mounting plate 38 held by the holding device 46 of the conveyance device 20 . The holding head 26 has a suction nozzle 62 provided on the lower end surface. The suction nozzle 62 communicates with a positive and negative pressure supply device (see FIG. 6) 64 via negative pressure air and positive pressure air passages. The suction nozzle 62 suction-holds the indicator 50 using negative pressure, and releases the held indicator 50 using positive pressure. The holding head 26 also includes a nozzle lifting device (see FIG. 6) 66 that lifts and lowers the suction nozzle 62. Using the nozzle lifting device 66, the holding head 26 changes the vertical position of the indicator 50 it holds.

Further, the plasma irradiation device 14 includes a transport device 70, a moving device 72, and an irradiation head 74, as shown in FIG. The conveyance device 70 has a pair of conveyor belts 76, and the pair of conveyor belts 76 are arranged on a base 78 so as to extend parallel to each other in the X direction. Note that the ends of the pair of conveyor belts 76 are arranged at positions facing the ends of the pair of conveyor belts 30 of the installation device 12. As a result, the placing plate 38 carried out from the pair of conveyor belts 30 of the installation device 12 is supported by the pair of conveyor belts 76, and the placing plate 38 is driven by the electromagnetic motor (see FIG. 6) 80. It is transported in the X direction. Further, the conveying device 70 has a holding device (see FIG. 6) 82, and the holding device 82 holds the mounting plate 38 supported by the conveyor belt 76 in a fixed position at a working position generally in the center of the base 78. is maintained.

The moving device 72 has a beam portion 86 and a slider 88. The beam portion 86 is mounted on the base 78 and is arranged so as to straddle the pair of conveyor belts 76 . The slider 88 is held on the side surface of the beam portion 86 so as to be slidable in the Y direction, and is slid to an arbitrary position by driving an electromagnetic motor 90 (see FIG. 6).

The irradiation head 74 is attached to the side surface of the slider 88 and is moved in the Y direction above the base 78. At this time, the irradiation head 74 moves to an arbitrary position in the Y direction above the mounting plate 38 held by the holding device 82 of the transport device 70. Further, as shown in FIG. 4, the irradiation head 74 has a frame 100, and a reaction chamber 102 is formed inside the frame 100. A pair of electrodes 104 are arranged inside the reaction chamber 102 . Each electrode 104 is generally L-shaped, with ends facing each other.

An inflow path 106 for allowing processing gas to flow into the reaction chamber 102 is formed in the body 100 of the irradiation head. The end of the inflow path 106 on the reaction chamber 102 side opens toward between the pair of electrodes 104 facing each other. On the other hand, a processing gas supply device (see FIG. 6) 108 is connected to the end of the inflow path 106 on the opposite side from the reaction chamber 102. The processing gas supply device 108 is a device that supplies a processing gas that is a mixture of an inert gas such as a rare gas or nitrogen gas and an active gas such as oxygen at a predetermined ratio. Thereby, the processing gas is supplied to the reaction chamber 102 via the inflow path 106. Moreover, a plurality of air outlets 110 are further formed in the frame 100 of the irradiation head 74 so as to face the inflow path 106 . That is, the inflow path 106 and the plurality of air outlets 110 are formed in the frame 100 so as to sandwich the pair of electrodes 104 therebetween.

Further, the measuring device 16 includes a conveying device 120, a moving device 122, and a color difference meter 124, as shown in FIG. The conveyance device 120 has a pair of conveyor belts 126, and the pair of conveyor belts 126 are arranged on a base 128 so as to extend in parallel with each other in the X direction. Note that the ends of the pair of conveyor belts 126 are disposed at positions facing the ends of the pair of conveyor belts 76 of the plasma irradiation device 14. As a result, the mounting plate 38 carried out from the pair of conveyor belts 76 of the plasma irradiation device 14 is supported by the pair of conveyor belts 126, and the mounting plate 38 is driven by the electromagnetic motor (see FIG. 6) 129. is transported in the X direction. The conveying device 120 also includes a holding device (see FIG. 6) 130, by which the mounting plate 38 supported by the conveyor belt 126 is fixedly held at a working position generally in the center of the base 128. is maintained.

The moving device 122 includes a beam portion 132 and a slider 134. The beam portion 132 is mounted on the base 128 and is arranged so as to straddle the pair of conveyor belts 126 . A slider 134 is held on the side surface of the beam portion 132 so as to be slidable in the Y direction, and is slid to an arbitrary position by driving an electromagnetic motor (see FIG. 6) 136.

The color difference meter 124 is attached to the side surface of the slider 134 and is moved in the Y direction above the base 128. At this time, the color difference meter 124 moves to an arbitrary position in the Y direction above the mounting plate 38 held by the holding device 130 of the transport device 120. Further, the color difference meter 124 measures the color difference ΔE*ab as an index value regarding the color of the indicator 50. Specifically, the color difference meter 124 detects lightness L* and chromaticities a* and b* indicating hue and saturation in the Lab color space. Then, the color difference ΔE*ab is calculated based on the detected lightness L* and chromaticity a*, b* and the lightness L* and chromaticity a*, b* of a preset color sample. Note that an indicator 50 sufficiently irradiated with plasma is used as a color sample.

Further, the control device 18 includes a controller 150, a plurality of drive circuits 152, a control circuit 154, and a storage device 156, as shown in FIG. The plurality of drive circuits 152 include the electromagnetic motor 40, the holding device 46, the sending device 52, the electromagnetic motor 60, the positive and negative pressure supply device 64, the nozzle lifting device 66, the electromagnetic motor 80, the holding device 82, the electromagnetic motor 90, the electrode 104, It is connected to a processing gas supply device 108, a color difference meter 124, an electromagnetic motor 129, a holding device 130, and an electromagnetic motor 136. The controller 150 is mainly a computer, including a CPU, ROM, RAM, etc., and is connected to a drive circuit 152. As a result, the operations of the installation device 12, plasma irradiation device 14, and measurement device 16 are controlled by the controller 150. Further, the control circuit 154 is connected to a display device 158, and the controller 150 is connected to the control circuit 154. As a result, an arbitrary image is displayed on the display device 158 under the control of the controller 150. Further, controller 150 is connected to storage device 156. As a result, various data are stored in the storage device 156.

<Plasma treatment using plasma irradiation system>
In the plasma irradiation system 10, with the above-described configuration, the object to be processed 36 is irradiated with plasma and plasma processing is performed on the object to be processed 36. As the plasma treatment, for example, surface modification of the object to be treated 36 is performed. In surface modification by plasma treatment, the surface of the object to be treated 36 is chemically modified and hydrophilic groups are added to the surface of the object to be treated 36, thereby improving wettability. Further, for example, by physically modifying the surface of the object to be processed 36 using temperature and strong voltage, irregularities are formed on the surface of the object to be processed 36 . However, due to insufficient voltage applied to the electrode 104, insufficient flow rate of the processing gas supplied to the reaction chamber 102, etc., the processing gas may not be appropriately converted into plasma, and the plasma processing on the object to be processed 36 may not be performed appropriately. be. Therefore, in the plasma irradiation system 10, the suitability of plasma treatment by plasma irradiation is automatically determined. Below, plasma processing by the plasma irradiation system 10 and automatic determination of the suitability of the plasma processing will be explained in detail.

Specifically, in response to a command from the controller 150, the mounting plate 38 is transported to the working position in the installation device 12, and is fixedly held by the holding device 46 at the working position. Further, the indicator feeder 22 operates the feeding device 52 according to a command from the controller 150 to feed the indicator 50 at the feeding position. Then, the holding head 26 moves above the supply position of the indicator feeder 22 according to a command from the controller 150, and the suction nozzle 62 suction-holds the indicator 50.

Subsequently, the holding head 26 moves above the mounting plate 38 held by the holding device 46 and places the indicator 50 on the object to be processed 36 placed on the mounting plate 38. At this time, the indicator 50 is installed on the installation part 160 (see FIG. 2) on the upper surface of the object to be processed 36, and is stuck to the installation part 160 with an adhesive applied to the back surface of the indicator 50. Note that the entire surface of the object to be processed 36 is not subject to plasma treatment, but a partial area (hereinafter referred to as "plasma treatment area") 162 of the surface is a target area for plasma treatment, and the installation portion 160 is located near the plasma processing region 162. Then, when the indicator 50 is attached to the installation part 160 of the object to be processed 36, the mounting plate 38 is conveyed downstream in accordance with a command from the controller 150. Thereby, the mounting plate 38 is carried out from the installation device 12 and carried into the plasma irradiation device 14.

When the mounting plate 38 is carried into the plasma irradiation apparatus 14, the mounting plate 38 is transported to the working position in the plasma irradiation apparatus 14 according to a command from the controller 150, and is fixedly held by the holding device 82 at the working position. Ru. Next, in response to a command from the controller 150, the processing gas supply device 108 in the irradiation head 74 supplies processing gas to the inflow path 106. As a result, the processing gas flows into the reaction chamber 102 . In the reaction chamber 102, a voltage is applied to the pair of electrodes 104 at a predetermined timing according to a command from the controller 150, and a current flows between the pair of electrodes 104. This causes a discharge between the pair of electrodes 104, and the discharge turns the processing gas into plasma. Then, plasma is blown out from the outlet 110. As a result, the plasma processing region 162 of the object to be processed 36 placed on the mounting plate 38 is irradiated with plasma, and the plasma processing region 162 is subjected to plasma processing. Note that since the indicator 50 is attached near the plasma processing region 162, the indicator 50 is also irradiated with plasma when the plasma processing region 162 is subjected to plasma processing.

Further, in the control device 18, an identification ID for identifying the object to be processed 36, for example, a lot number, a product ID, etc. of the object to be processed 36, and plasma conditions for plasma processing are stored in association with each other in the storage device 156. Ru. Incidentally, the plasma conditions include the concentration of the processing gas, the amount of supply of the processing gas, the type of processing gas, the applied voltage value, the plasma irradiation time, the relative moving speed between the object to be processed 36 and the irradiation head 74, and the object to be processed. Examples include the distance between the processing body 36 and the irradiation head 74 and the amount of plasma irradiation.

Then, in the plasma irradiation device 14, when the plasma irradiation to the object to be processed 36 is completed, the mounting plate 38 is transported downstream in accordance with a command from the controller 150. Thereby, the mounting plate 38 is carried out from the plasma irradiation device 14 and carried into the measurement device 16. When the mounting plate 38 is carried into the measuring device 16, the mounting plate 38 is transported to the working position in the measuring device 16 according to a command from the controller 150, and is fixedly held by the holding device 130 at the working position. Next, according to a command from the controller 150, the color difference meter 124 is moved above the indicator 50 attached to the object to be processed 36. Then, the color difference meter 124 detects the lightness L* and chromaticity a*, b* of the indicator 50, and the color difference ΔE*a with the color sample is detected.
b is calculated. At this time, the control device 18 uses the identification ID for identifying the object to be processed 36, the brightness L* and chromaticity a*, b* of the detected indicator 50, and the calculated color difference ΔE*ab. It is stored in association with the storage device 156.

Further, in the control device 18, the controller 150 determines whether plasma processing is appropriate based on the calculated color difference ΔE*ab. Specifically, a threshold value α is set in the controller 150. The threshold value α is set to the color difference when the indicator 50 is irradiated with a minimum amount of plasma as appropriate plasma processing. Therefore, if the calculated color difference ΔE*ab is equal to or less than the threshold α, the indicator 50 is appropriately irradiated with plasma, and if the calculated color difference ΔE*ab is greater than the threshold α, the indicator 50 is appropriately irradiated with plasma. It is thought that the light was not irradiated. Therefore, the controller 150 determines that when the calculated color difference ΔE*ab is less than or equal to the threshold value α, the plasma processing on the object to be processed 36 is performed appropriately, and when the calculated color difference ΔE*ab is larger than the threshold value α, It is determined that the plasma processing on the object to be processed 36 is not being performed appropriately.

Then, the controller 150 causes the display device 158 to display the determination result. Further, in the control device 18 , an identification ID for identifying the object to be processed 36 and a determination result by the controller 150 , that is, whether plasma processing is appropriate for the object to be processed 36 are stored in association with each other in the storage device 156 . In the measuring device 16, when the measurement of the color difference ΔE*ab by the color difference meter 124 and the determination of the suitability of the plasma treatment by the controller 150 are completed, the mounting plate 38 is conveyed downstream in accordance with a command from the controller 150. Thereby, the mounting plate 38 is carried out from the plasma irradiation system 10 together with the object to be processed 36, and the plasma treatment by the plasma irradiation system 10 and the automatic determination of the suitability of the plasma treatment are completed.

As described above, in the plasma irradiation system 10, the indicator 50 whose color changes due to plasma irradiation is installed on the object to be processed 36 by the installation device 12, and the indicator 50 is installed on the object to be processed 36 on which the indicator 50 is installed. Plasma is irradiated by the plasma irradiation device 14. Then, after the indicator 50 installed on the object to be processed 36 is irradiated with plasma together with the object to be processed 36, the indicator 50 and the color sample are measured by the measuring device 16. The color difference ΔE*ab is measured. Note that the color sample is set to the color after the indicator 50 has changed color after being sufficiently irradiated with plasma. As a result, when plasma processing is performed, it becomes possible to automatically determine in real time whether or not the plasma processing on the object to be processed 36 is being appropriately performed, improving the practicality of the plasma irradiation system 10. do.

Further, since the judgment result of the suitability of the plasma treatment is displayed on the display device 158, the operator can, for example, apply the plasma again to the object to be treated 36 for which it has been determined that the plasma treatment has not been appropriately performed. By executing the process, it becomes possible to perform appropriate plasma processing on all the objects to be processed 36.

In addition, each time the color difference ΔE*ab of the object to be processed 36 is measured, the identification ID of the object to be processed 36, the brightness L* and chromaticity a*, b* of the indicator 50, and the calculated color difference ΔE*ab are stored in association with the storage device 156. Further, the determination result as to whether plasma processing is appropriate or not is also stored in the storage device 156 in association with the identification ID of the object to be processed 36 . Thereby, it becomes possible to leave a history of plasma processing for each object to be processed 36, and it becomes possible to perform appropriate product management.

Furthermore, for each object to be processed 36, the processing conditions at the time of plasma processing, the brightness L* and chromaticity a*, b* of the indicator 50, the calculated color difference ΔE*ab, and the judgment result of the suitability of plasma processing. are stored in the storage device 156 in association with each other. As a result, for example, in the suitability of plasma processing, if it is determined that the plasma processing is not properly executed, or if the calculated color difference ΔE*ab is large, the determination result or the color difference ΔE*ab can be linked. It becomes possible to set new processing conditions based on the existing processing conditions. Specifically, for example, if the concentration of the processing gas is low or the plasma irradiation time is short under the processing conditions associated with the judgment result that the plasma processing is not being performed properly, new processing may be necessary. As conditions, it is possible to set processing conditions such as making the concentration of the processing gas higher than the stored processing gas concentration or making the plasma irradiation time longer than the stored plasma irradiation time. This makes it possible to set appropriate processing conditions for plasma processing using the result of determining whether or not plasma processing is appropriate. Note that this process may be performed by an operator or automatically by the controller 150.

<Second example>
In the plasma irradiation system 10 of the first embodiment, a sheet-like indicator 50 is installed on the object to be processed 36, and a viscous fluid whose color changes when irradiated with plasma is applied to the object to be processed 36. May be discharged. Specifically, in the plasma irradiation system 10 of the first embodiment, a discharge device 170 shown in FIG. 7 may be employed instead of the installation device 12.

Since the dispensing device 170 has substantially the same structure as the installation device 12 except for the dispenser head 172, the dispenser head 172 will be described, and the same reference numerals as the installation device 12 will be used for the same components as the installation device 12. Therefore, the explanation will be briefly explained or the explanation will be omitted. The dispensing device 170 includes a conveying device 20, a moving device 24, and a dispenser head 172. Note that the discharge device 170 does not have the indicator feeder 22.

The dispenser head 172 is mounted on the slider 58 of the moving device 24 instead of the holding head 26 of the installation device 12. The dispenser head 172 is an inkjet type working head, and discharges a viscous fluid whose color changes by plasma irradiation from a discharge port 176 opened on the lower surface of the dispenser head 172 . Note that this viscous fluid is a viscous fluid used when forming the thin film layer of the indicator 50.

In the discharging device 170 having such a structure, the mounting plate 38 is transported to the working position in the discharging device 170 according to a command from the controller 150, and is fixedly held by the holding device 46 at the working position. Then, the dispenser head 172 moves above the mounting plate 38 held by the holding device 46 according to a command from the controller 150, and places the viscous fluid on the object to be processed 36 placed on the mounting plate 38. Discharge. At this time, the dispenser head 172 discharges the viscous fluid in a thin film onto the installation portion 160 on the upper surface of the object to be processed 36 . Then, when the viscous fluid is discharged to the installation section 160 of the object to be processed 36, the mounting plate 38 is conveyed downstream in accordance with a command from the controller 150. Thereby, the mounting plate 38 is carried out from the discharge device 170 and carried into the plasma irradiation device 14.

Note that the processing after the mounting plate 38 is carried into the plasma irradiation device 14, that is, the processing by the plasma irradiation device 14 and the processing by the measurement device 16, is the same as the processing in the first embodiment, so the explanation will be omitted. omitted. However, in the measuring device 16 of the second embodiment, the lightness L* and chromaticity a*, b* of the viscous fluid discharged to the installation part 160 are detected, and the color difference ΔE*ab is calculated. Further, the lightness L* and chromaticity a*, b* of the color sample used for calculating the color difference ΔE*ab are set to the color after the viscous fluid has been sufficiently irradiated with plasma and has changed color.

In this way, the same effects as in the first embodiment can be achieved by using the discharging device 170 instead of the installation device 12 and measuring the color difference ΔE*ab of the viscous fluid discharged by the discharging device 170. becomes.

Incidentally, in the above embodiment, the plasma irradiation system 10 is an example of a plasma irradiation system. The installation device 12 is an example of an application device. The plasma irradiation device 14 is an example of a plasma irradiation device. The measuring device 16 is an example of a measuring device. Indicator 50 is an example of a base material. Controller 150 is an example of a determination device. The storage device 156 is an example of a first storage device, a second storage device, and a third storage device. The display device 158 is an example of a notification device. The discharge device 170 is an example of an application device.

It should be noted that the present invention is not limited to the above embodiments, but can be implemented in various forms with various changes and improvements based on the knowledge of those skilled in the art. Specifically, for example, in the above embodiment, the indicator 50 whose color changes when irradiated with plasma or a viscous fluid is used, but it is also possible to use an indicator whose optical characteristics change when irradiated with plasma. It is. Here, the optical properties include hue, saturation, brightness, chromaticity, brightness, color tone, light transmittance, light reflectance, light wavelength, energy, and the like.

Further, in the above embodiment, the lightness L* and chromaticity a*, b* of the indicator 50 or the viscous fluid are detected, and the color difference ΔE*ab is calculated. In other words, L*a*b* color difference is used as an index value to indicate the optical properties that change due to plasma irradiation, but various methods are used to evaluate the optical properties that change due to plasma irradiation. It is possible to measure and calculate index values. Specifically, for example, XYZ color system, X10Y10Z10 color system, chromaticity coordinates, chromaticity diagram, UCS chromaticity diagram, L*C*h* color system, L*u*v* color system, It is possible to measure and calculate index values of optical characteristics using the Munsell color system, color matching functions, and the like.

Further, in the above embodiment, the indicator 50 is installed or the viscous fluid is discharged on the object to be processed 36, but the indicator 50 is installed or the viscous fluid is discharged next to the object to be processed 36. Good too. This makes it possible to irradiate the entire surface of the object to be processed 36 with plasma. Note that the indicator 50 is installed or the viscous fluid is discharged on the object to be treated 36 in this specification, and the indicator 50 is installed or the viscous fluid is discharged next to the object to be treated 36. This is included in the concept that the indicator 50 is installed on the object to be processed 36 or the viscous fluid is discharged. In other words, it is included in the concept that the indicator 50 or the viscous fluid is applied to the object to be processed 36 .

Further, in the above embodiment, when it is determined that the plasma treatment is not appropriate, the operator manually returns the object to be treated 36 to the installation device 12, etc., and the plasma treatment is performed again. A configuration may also be adopted in which the processing body 36 returns to the installation device 12 or the like. In other words, a mechanism is adopted that automatically returns the object to be processed 36 from the measurement device 16 to the installation device 12, and when it is determined that plasma treatment is not appropriate, the mechanism automatically returns the object to be processed 36 to the installation device 12, etc. You may change it back to . This makes it possible to reduce the amount of work done by the worker, improving productivity.

Further, in the above embodiment, the determination result of whether or not plasma treatment is appropriate is displayed on the display device 158, but it may be notified to the operator by voice, lamp, or the like.

The objects to be processed 36 to be subjected to plasma treatment by the plasma irradiation system 10 are not particularly limited, and include industrial objects such as circuit boards and assembled products, and medical objects such as instruments used in hospitals. It is possible to employ members from various fields, such as processing bodies.

10: Plasma irradiation system 12: Installation device (application device) 14: Plasma irradiation device 16: Measuring device 50: Indicator (base material) 150: Controller (judgment device) 156: Storage device (first storage device) (second storage device) device) (third storage device) 158: Display device (notification device) 170: Discharge device (application device)

Claims (1)

A plasma irradiation system that irradiates a target object with plasma,
The plasma irradiation system includes:
a feeder that supplies an indicator that changes color when irradiated with plasma;
an application device that applies the indicator supplied by the feeder to the object to be processed;
a plasma irradiation device that irradiates the indicator provided on the object to be processed and the object to be processed with plasma;
A plasma irradiation system comprising: a measuring device that measures the color of the indicator irradiated with plasma by the plasma irradiation device.

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