JP7083949B2 - Plasma irradiation system and plasma irradiation method - Google Patents

Description

The present invention relates to a plasma irradiation system for irradiating an object to be treated with plasma, and a plasma irradiation method.

In recent years, plasma treatment has been applied to objects to be treated in various fields, such as industrial objects such as circuit boards and assembled products, and medical objects such as instruments used in hospitals. As a useful technique, plasma processing by a plasma irradiation system is adopted. On the other hand, since the plasma cannot be visually confirmed, it may not be possible to determine whether or not the plasma treatment for the object to be processed is properly performed by observing the appearance of the object to be processed. For this reason, the development of an indicator whose optical characteristics change due to plasma irradiation is underway, and the suitability of plasma processing by a plasma irradiation system is determined using such an indicator. The following patent documents describe an example of such a plasma irradiation system.

Japanese Unexamined Patent Publication No. 2015-149263 Japanese Unexamined Patent Publication No. 2015-200531

By using the indicator described in the above patent document, it is possible to judge the suitability of plasma treatment to some extent. However, there is still room for improvement in the method of determining the suitability of plasma treatment using an indicator or other device whose optical characteristics change due to plasma treatment, and by making various improvements, plasma treatment can be performed. The practicality of the plasma irradiation system that can judge the suitability is improved. The present invention has been made in view of such circumstances, and an object of the present invention is to improve the practicality of a plasma irradiation system and a plasma irradiation method.

In order to solve the above problems, the plasma irradiation system described in the present application is a plasma irradiation system that irradiates an object to be treated with plasma, and the plasma irradiation system is a substrate whose optical characteristics change due to plasma irradiation. Plasma is applied to the feeder that supplies the feeder, the applying device that applies the base material supplied by the feeder to the object to be processed, the substrate applied to the object to be processed, and the object to be processed. It is characterized by including a plasma irradiating device for irradiating and a measuring device for measuring the optical characteristics of the substrate irradiated with plasma by the plasma irradiating device. Further, in the plasma irradiation method described in the present application, a supply step of supplying a base material whose optical characteristics change due to plasma irradiation by a feeder and the base material supplied in the supply step to the object to be treated. The applying step, the plasma irradiation step of irradiating the substrate applied to the object to be treated with plasma, and the optical characteristics of the substrate irradiated with plasma in the plasma irradiation step. It is characterized by including a measuring step for measuring.

In the plasma irradiation system and the plasma irradiation method described in the present application, a substrate whose optical characteristics change due to plasma irradiation is supplied by a feeder, and the substrate and the object to be processed are irradiated with plasma. Then, the optical properties of the base material applied to the object to be treated are measured. This makes it possible to automatically determine in real time whether or not the plasma treatment for the object to be processed is properly executed when the plasma processing for the object to be processed is executed. And the practicality of the plasma irradiation method is improved.

It is a top view which shows the plasma irradiation system. It is a top view which shows the installation device. It is a top view which shows the plasma irradiation apparatus. It is a schematic sectional drawing which shows the irradiation head 74. It is a top view which shows the measuring apparatus. It is a block diagram which shows the control device. It is a top view which shows the discharge device.

Hereinafter, examples of the present invention will be described in detail as embodiments for carrying out the present invention with reference to the drawings.

<Plasma irradiation system configuration>
FIG. 1 shows the plasma irradiation system 10 of the first embodiment. The plasma irradiation system 10 is a system that irradiates an object to be processed with plasma generated under atmospheric pressure, and is a system capable of automatically determining the suitability of plasma treatment by the irradiated plasma. The plasma irradiation system 10 includes an installation device 12, a plasma irradiation device 14, a measuring device 16, and a control device (see FIG. 6) 18. The installation device 12, the plasma irradiation device 14, and the measuring device 16 are arranged in a row adjacent to each other, and the plasma irradiation device 14 is arranged on the downstream side of the installation device 12, and the plasma irradiation device 14 is arranged. A measuring device 16 is arranged on the downstream side. The arrangement direction of the installation device 12, the plasma irradiation device 14, and the measurement device 16 is referred to as an X direction, and the horizontal direction orthogonal to the X direction is referred to as a Y direction.

The installation device 12 is a device for installing a generally rectangular sheet-shaped indicator on the object to be treated by plasma. By the way, the color of the indicator changes due to the irradiation of plasma. Indicators whose color changes due to plasma irradiation are JP-A-2013-178922, JP-2013-95765, JP-A-2013-98196, JP-A-2013-95764, and JP-A-2015-13982. , Japanese Patent Application Laid-Open No. 2015-205995, etc., and since they are known, detailed description thereof will be omitted. Specifically, for example, it is composed of a viscous fluid containing a composition that changes by reacting with hydrogen ions obtained by nitrogen oxides, an azo-based dye, a nitrogen-containing polymer, and a cationic surfactant. A thin film layer is formed on the surface of the sheet by a viscous fluid or the like containing the composition. This forms an indicator containing a thin film layer that changes color upon irradiation with plasma. An adhesive is applied to the back surface of the indicator.

As shown in FIG. 2, the installation device 12 includes a transfer device 20, an indicator feeder 22, a moving device 24, and a holding head 26. The transport device 20 has a pair of conveyor belts 30, and the pair of conveyor belts 30 are arranged on the base 32 so as to be parallel to each other and extend in the X direction. A pair of conveyor belts 30 support a mounting plate 38 for mounting the object to be processed 36, and the mounting plate 38 is conveyed in the X direction by driving an electromagnetic motor (see FIG. 6) 40. .. Further, the transfer device 20 has a holding device (see FIG. 6) 46, and the mounting plate 38 supported by the conveyor belt 30 is fixed by the holding device 46 at a working position generally in the central portion of the base 32. Is held in.

The indicator feeder 22 is a device for supplying the indicator 50, and is arranged at the end of the base 32 in the Y direction. The indicator feeder 22 is housed in a state in which the carrier tape is wound, and a plurality of indicators 50 are attached to the carrier tape at predetermined intervals so as to extend in the longitudinal direction. Then, the indicator feeder 22 sends out the carrier tape by the sending device (see FIG. 6) 52. As a result, the indicator feeder 22 supplies the indicator 50 at the supply position by feeding out the carrier tape.

The moving device 24 has a beam portion 56 and a slider 58. The beam portion 56 is mounted on the base 32 and is arranged so as to straddle the pair of conveyor belts 30. Then, the slider 58 is slidably held in the Y direction on the side surface of the beam portion 56, and is slid to an arbitrary position by the drive of the electromagnetic motor (see FIG. 6) 60.

The holding head 26 is mounted on the side surface of the slider 58 and is moved in the Y direction above the base 32. At this time, the holding head 26 moves between the upper part of the supply position of the indicator 50 by the indicator feeder 22 and the upper part of the mounting plate 38 held by the holding device 46 of the transfer device 20. The holding head 26 has a suction nozzle 62 provided on the lower end surface. The suction nozzle 62 is connected to the positive / negative pressure supply device (see FIG. 6) 64 via the negative pressure air and the positive pressure air passages. The suction nozzle 62 sucks and holds the indicator 50 by a negative pressure, and releases the held indicator 50 by a positive pressure. Further, the holding head 26 has a nozzle elevating device (see FIG. 6) 66 that elevates and elevates the suction nozzle 62. The nozzle elevating device 66 causes the holding head 26 to change the vertical position of the holding indicator 50.

Further, as shown in FIG. 3, the plasma irradiation device 14 has a transport device 70, a moving device 72, and an irradiation head 74. The transport device 70 has a pair of conveyor belts 76, and the pair of conveyor belts 76 are arranged on the base 78 so as to be parallel to each other and extend in the X direction. The ends of the pair of conveyor belts 76 are arranged at positions facing the ends of the pair of conveyor belts 30 of the installation device 12. As a result, the mounting plate 38 carried out from the pair of conveyor belts 30 of the installation device 12 is supported by the pair of conveyor belts 76, and the mounting plate 38 is driven by the electromagnetic motor (see FIG. 6) 80. It is conveyed in the X direction. Further, the transfer device 70 has a holding device (see FIG. 6) 82, and the mounting plate 38 supported by the conveyor belt 76 is fixed by the holding device 82 at a working position generally in the central portion of the base 78. Is held in.

The moving device 72 has a beam portion 86 and a slider 88. The beam portion 86 is mounted on the base 78 and is arranged so as to straddle the pair of conveyor belts 76. Then, the slider 88 is slidably held in the Y direction on the side surface of the beam portion 86, and is slid to an arbitrary position by the drive of the electromagnetic motor (see FIG. 6) 90.

The irradiation head 74 is mounted on the side surface of the slider 88 and is moved in the Y direction above the base 78. At this time, the irradiation head 74 moves to an arbitrary position in the Y direction above the mounting plate 38 held by the holding device 82 of the transport device 70. Further, as shown in FIG. 4, the irradiation head 74 has a skeleton 100, and a reaction chamber 102 is formed inside the skeleton 100. A pair of electrodes 104 are arranged inside the reaction chamber 102. Each electrode 104 is generally L-shaped, with its ends facing each other.

The skeleton 100 of the irradiation head is formed with an inflow path 106 for allowing the processing gas to flow into the reaction chamber 102. The end of the inflow path 106 on the reaction chamber 102 side is open between the pair of facing electrodes 104. On the other hand, a processing gas supply device (see FIG. 6) 108 is connected to the end of the inflow path 106 opposite to the reaction chamber 102. The treatment gas supply device 108 is a device that supplies a treatment gas in which an inert gas such as a rare gas or a nitrogen gas and an active gas such as oxygen are mixed at a predetermined ratio. As a result, the processing gas is supplied to the reaction chamber 102 via the inflow path 106. Further, a plurality of outlets 110 are formed on the skeleton 100 of the irradiation head 74 so as to face the inflow path 106. That is, the inflow path 106 and the plurality of outlets 110 are formed on the skeleton 100 so as to sandwich the pair of electrodes 104.

Further, as shown in FIG. 5, the measuring device 16 has a transport device 120, a moving device 122, and a color difference meter 124. The transport device 120 has a pair of conveyor belts 126, and the pair of conveyor belts 126 are arranged on the base 128 so as to be parallel to each other and extend in the X direction. The ends of the pair of conveyor belts 126 are arranged at positions facing the ends of the pair of conveyor belts 76 of the plasma irradiation device 14. As a result, the mounting plate 38 carried out from the pair of conveyor belts 76 of the plasma irradiation device 14 is supported by the pair of conveyor belts 126, and the mounting plate 38 is driven by the electromagnetic motor (see FIG. 6) 129. Is conveyed in the X direction. Further, the transfer device 120 has a holding device (see FIG. 6) 130, and the mounting plate 38 supported by the conveyor belt 126 is fixed by the holding device 130 at a working position generally in the central portion of the base 128. Is held in.

The moving device 122 has a beam portion 132 and a slider 134. The beam portion 132 is mounted on the base 128 and is arranged so as to straddle the pair of conveyor belts 126. Then, the slider 134 is slidably held in the Y direction on the side surface of the beam portion 132, and is slid to an arbitrary position by the drive of the electromagnetic motor (see FIG. 6) 136.

The color difference meter 124 is mounted on the side surface of the slider 134 and is moved in the Y direction above the base 128. At this time, the color difference meter 124 moves to an arbitrary position in the Y direction above the mounting plate 38 held by the holding device 130 of the transport device 120. Further, the color difference meter 124 measures the color difference ΔE * ab as an index value regarding the color of the indicator 50. Specifically, the color difference meter 124 detects the lightness L * in the Lab color space and the chromaticities a * and b * indicating hue and saturation. Then, the color difference ΔE * ab is calculated based on the detected lightness L * and chromaticity a *, b * and the preset lightness L * and chromaticity a *, b * of the color sample. As a color sample, an indicator 50 sufficiently irradiated with plasma is adopted.

Further, as shown in FIG. 6, the control device 18 includes a controller 150, a plurality of drive circuits 152, a control circuit 154, and a storage device 156. The plurality of drive circuits 152 include the electromagnetic motor 40, the holding device 46, the sending device 52, the electromagnetic motor 60, the positive / negative pressure supply device 64, the nozzle elevating device 66, the electromagnetic motor 80, the holding device 82, the electromagnetic motor 90, and the electrode 104. It is connected to a processing gas supply device 108, a color difference meter 124, an electromagnetic motor 129, a holding device 130, and an electromagnetic motor 136. The controller 150 includes a CPU, a ROM, a RAM, and the like, and is mainly a computer, and is connected to a drive circuit 152. As a result, the operation of the installation device 12, the plasma irradiation device 14, and the measuring device 16 is controlled by the controller 150. Further, the control circuit 154 is connected to the display device 158, and the controller 150 is connected to the control circuit 154. As a result, an arbitrary image is displayed on the display device 158 under the control of the controller 150. Further, the controller 150 is connected to the storage device 156. As a result, various data are stored in the storage device 156.

<Plasma processing by plasma irradiation system>
In the plasma irradiation system 10, plasma is irradiated to the object to be processed 36 according to the above-described configuration, and plasma processing is executed on the object to be processed 36. As the plasma treatment, for example, the surface of the object to be treated 36 is modified. In the surface modification by plasma treatment, the surface of the object to be treated 36 is chemically modified to impart a hydrophilic group to the surface of the object to be treated 36, thereby improving the wettability. Further, for example, by physically modifying the surface of the object to be processed 36 by temperature and a strong voltage, unevenness is formed on the surface of the object to be processed 36. However, due to insufficient voltage applied to the electrode 104, insufficient flow rate of the processing gas supplied to the reaction chamber 102, etc., the processing gas may not be properly converted into plasma, and plasma processing on the object to be processed 36 may not be performed properly. be. Therefore, in the plasma irradiation system 10, the suitability of plasma processing by plasma irradiation is automatically performed. The plasma processing by the plasma irradiation system 10 and the automatic determination of the suitability of the plasma processing will be described in detail below.

Specifically, according to the command of the controller 150, the mounting plate 38 is conveyed to the working position in the installation device 12, and is fixedly held by the holding device 46 at the working position. Further, the indicator feeder 22 operates the transmission device 52 according to the command of the controller 150, and supplies the indicator 50 at the supply position. Then, the holding head 26 moves onto the supply position of the indicator feeder 22 by the command of the controller 150, and the suction nozzle 62 sucks and holds the indicator 50.

Subsequently, the holding head 26 moves above the mounting plate 38 held by the holding device 46, and the indicator 50 is installed on the object to be processed 36 mounted on the mounting plate 38. At this time, the indicator 50 is installed on the installation portion (see FIG. 2) 160 on the upper surface of the object to be processed 36, and is attached to the installation portion 160 by the adhesive applied to the back surface of the indicator 50. In the object to be processed 36, the entire surface is not the target of plasma treatment, and a part of the surface region (hereinafter, referred to as “plasma treatment region”) 162 is the target region of plasma treatment, and the installation unit 160 Is in the vicinity of the plasma processing region 162. Then, when the indicator 50 is attached to the installation portion 160 of the object to be processed 36, the mounting plate 38 is conveyed downstream by the command of the controller 150. As a result, the mounting plate 38 is carried out from the installation device 12 and carried into the plasma irradiation device 14.

When the mounting plate 38 is carried into the plasma irradiation device 14, the mounting plate 38 is conveyed to the working position in the plasma irradiation device 14 by the command of the controller 150, and is fixedly held by the holding device 82 at the working position. To. Next, according to the command of the controller 150, the processing gas supply device 108 supplies the processing gas to the inflow path 106 in the irradiation head 74. As a result, the processing gas flows into the reaction chamber 102. In the reaction chamber 102, a voltage is applied to the pair of electrodes 104 at a predetermined timing by a command of the controller 150, and a current flows between the pair of electrodes 104. As a result, an electric discharge is generated between the pair of electrodes 104, and the electric discharge causes the processing gas to be turned into plasma. Then, the plasma is blown out from the outlet 110. As a result, the plasma processing region 162 of the object to be processed 36 mounted on the mounting plate 38 is irradiated with plasma, and the plasma processing region 162 is subjected to plasma treatment. Since the indicator 50 is attached in the vicinity of the plasma processing region 162, the indicator 50 is also irradiated with plasma in the same manner as the plasma processing region 162 during plasma processing for the plasma processing region 162.

Further, in the control device 18, an identification ID for identifying the object to be processed 36, for example, a lot number of the object to be processed 36, a product ID, and the like, and plasma conditions in plasma processing are stored in association with the storage device 156. To. By the way, as plasma conditions, the concentration of the processing gas, the supply amount of the processing gas, the type of the processing gas, the applied voltage value, the plasma irradiation time, the relative moving speed between the object to be processed 36 and the irradiation head 74, and the subject. The distance between the processing body 36 and the irradiation head 74, the amount of plasma irradiation, and the like can be mentioned.

Then, when the plasma irradiation to the object to be processed 36 is completed in the plasma irradiation device 14, the mounting plate 38 is conveyed downstream by the command of the controller 150. As a result, the mounting plate 38 is carried out from the plasma irradiation device 14 and carried into the measuring device 16. When the mounting plate 38 is carried into the measuring device 16, the mounting plate 38 is conveyed to the working position in the measuring device 16 by the command of the controller 150, and is fixedly held by the holding device 130 at the working position. Next, according to the command of the controller 150, the color difference meter 124 moves above the indicator 50 attached to the object to be processed 36. Then, the brightness L * and the chromaticities a * and b * of the indicator 50 are detected by the color difference meter 124, and the color difference ΔE * a from the color sample is detected.
b is calculated. At this time, in the control device 18, the identification ID for identifying the object to be processed 36, the detected lightness L * and chromaticity a *, b * of the indicator 50, and the calculated color difference ΔE * ab are used. It is stored in association with the storage device 156.

Further, in the control device 18, the controller 150 determines the suitability of the plasma processing based on the calculated color difference ΔE * ab. Specifically, a threshold value α is set in the controller 150. The threshold value α is set to the color difference when the minimum plasma is irradiated as an appropriate plasma process when the indicator 50 is irradiated with plasma. Therefore, if the calculated color difference ΔE * ab is equal to or less than the threshold value α, the indicator 50 is appropriately irradiated with plasma, and if the calculated color difference ΔE * ab is larger than the threshold value α, the indicator 50 is appropriately irradiated with plasma. Is not considered to have been irradiated. Therefore, the controller 150 appropriately performs plasma processing on the object to be processed 36 when the calculated color difference ΔE * ab is equal to or less than the threshold value α, and the calculated color difference ΔE * ab is larger than the threshold value α. It is determined that the plasma treatment for the object to be processed 36 is not properly performed.

Then, the controller 150 causes the display device 158 to display the determination result. Further, in the control device 18, the identification ID for identifying the object to be processed 36 and the determination result by the controller 150, that is, the suitability of plasma processing for the object to be processed 36 are stored in association with the storage device 156. Then, when the measurement of the color difference ΔE * ab by the color difference meter 124 and the suitability determination of the plasma processing by the controller 150 are completed in the measuring device 16, the mounting plate 38 is conveyed downstream by the command of the controller 150. As a result, the mounting plate 38 is carried out from the plasma irradiation system 10 together with the object to be processed 36, and the plasma treatment by the plasma irradiation system 10 and the automatic determination of the suitability of the plasma treatment are completed.

As described above, in the plasma irradiation system 10, the indicator 50 whose color is changed by the irradiation of plasma is installed on the object to be processed 36 by the installation device 12, and the indicator 50 is installed on the object to be processed 36. Plasma is irradiated by the plasma irradiation device 14. Then, after the indicator 50 installed on the object to be processed 36 is irradiated with plasma together with the object to be processed 36 by plasma irradiation to the object to be processed 36, the indicator 50 and the color sample are provided by the measuring device 16. The color difference ΔE * ab is measured. The color sample is set to the color after the color change of the indicator 50 sufficiently irradiated with plasma. As a result, when the plasma processing is executed, it becomes possible to automatically determine in real time whether or not the plasma processing for the object to be processed 36 is properly executed, and the practicality of the plasma irradiation system 10 is improved. do.

Further, since the determination result of the suitability of the plasma processing is displayed on the display device 158, the operator can again, for example, plasma the object to be processed 36 which is determined that the plasma processing is not properly executed. By executing the treatment, it is possible to perform an appropriate plasma treatment on all the objects to be processed 36.

Further, each time the color difference ΔE * ab of the object to be processed 36 is measured, the identification ID of the object to be processed 36, the brightness L * and the chromaticity a *, b * of the indicator 50, and the calculated color difference ΔE * ab Is stored in association with the storage device 156. Further, the result of determining the suitability of the plasma processing is also stored in the storage device 156 in association with the identification ID of the object to be processed 36. As a result, it is possible to leave a history of plasma processing for each object to be processed 36, and it is possible to perform appropriate product management.

Further, for each object to be processed 36, the processing conditions at the time of plasma processing, the brightness L * and chromaticity a *, b * of the indicator 50, the calculated color difference ΔE * ab, and the judgment result of the suitability of plasma processing are obtained. Is associated and stored in the storage device 156. As a result, for example, when it is determined that the plasma processing is not properly executed in terms of the suitability of the plasma processing, or when the calculated color difference ΔE * ab is large, the determination result or the color difference ΔE * ab is associated with the determination result. It is possible to set new processing conditions based on the processing conditions that have been set. Specifically, for example, in the processing conditions associated with the judgment result that the plasma processing is not properly executed, when the concentration of the processing gas is low, the plasma irradiation time is short, or the like, a new treatment is performed. As conditions, it is possible to set processing conditions such as making the concentration higher than the stored processing gas concentration and making it longer than the stored plasma irradiation time. This makes it possible to set appropriate processing conditions at the time of plasma processing by using the determination result of the suitability of plasma processing. It should be noted that this process may be performed by an operator or may be automatically performed by the controller 150.

<Second Example>
In the plasma irradiation system 10 of the first embodiment, the sheet-shaped indicator 50 is installed on the object to be processed 36, but the viscous fluid whose color changes due to the irradiation of plasma is applied to the object to be processed 36. It may be discharged. Specifically, in the plasma irradiation system 10 of the first embodiment, the discharge device 170 shown in FIG. 7 may be adopted instead of the installation device 12.

Since the discharge device 170 has substantially the same structure as the installation device 12 except for the dispenser head 172, the dispenser head 172 will be described, and the reference numerals used in the installation device 12 will be used for the same components as the installation device 12. Therefore, a brief explanation or explanation will be omitted. The discharge device 170 includes a transfer device 20, a moving device 24, and a dispenser head 172. The discharge device 170 does not have an indicator feeder 22.

The dispenser head 172 is mounted on the slider 58 of the moving device 24 instead of the holding head 26 of the installing device 12. The dispenser head 172 is an inkjet type work head, and discharges a viscous fluid whose color changes due to plasma irradiation from a discharge port 176 opened on the lower surface of the dispenser head 172. This viscous fluid is a viscous fluid used when forming the thin film layer of the indicator 50.

In the discharge device 170 having such a structure, the mounting plate 38 is conveyed to the work position in the discharge device 170 by the command of the controller 150, and is fixedly held by the holding device 46 at the work position. Then, the dispenser head 172 moves above the mounting plate 38 held by the holding device 46 by the command of the controller 150, and the viscous fluid is placed on the object to be processed 36 mounted on the mounting plate 38. Is discharged. At this time, the dispenser head 172 discharges the viscous fluid in the form of a thin film to the installation portion 160 on the upper surface of the object to be processed 36. Then, when the viscous fluid is discharged to the installation portion 160 of the object to be processed 36, the mounting plate 38 is conveyed downstream by the command of the controller 150. As a result, the mounting plate 38 is carried out from the discharge device 170 and carried into the plasma irradiation device 14.

It should be noted that the processing after the mounting plate 38 is carried into the plasma irradiation device 14, that is, the processing by the plasma irradiation device 14 and the processing by the measuring device 16 is the same as the processing in the first embodiment. Is omitted. However, in the measuring device 16 of the second embodiment, the brightness L * and the chromaticities a * and b * of the viscous fluid discharged to the installation unit 160 are detected, and the color difference ΔE * ab is calculated. Further, the lightness L * and the chromaticities a * and b * of the color sample used for the calculation of the color difference ΔE * ab are set to the colors after the color change of the viscous fluid sufficiently irradiated with plasma.

In this way, the same effect as that of the first embodiment can be obtained by measuring the color difference ΔE * ab of the viscous fluid discharged by the discharge device 170 by using the discharge device 170 instead of the installation device 12. It becomes.

Incidentally, in the above embodiment, the plasma irradiation system 10 is an example of the plasma irradiation system. The installation device 12 is an example of a granting device. The plasma irradiation device 14 is an example of a plasma irradiation device. The measuring device 16 is an example of the measuring device. The indicator 50 is an example of a base material. The controller 150 is an example of a determination device. The storage device 156 is an example of a first storage device, a second storage device, and a third storage device. The display device 158 is an example of a notification device. The discharge device 170 is an example of a granting device.

The present invention is not limited to the above embodiment, and can be carried out in various embodiments with various changes and improvements based on the knowledge of those skilled in the art. Specifically, for example, in the above embodiment, the indicator 50 whose color changes by plasma irradiation or the viscous fluid is adopted, but it is possible to adopt an indicator whose optical characteristics change by plasma irradiation. Is. Here, examples of the optical characteristics include hue, saturation, lightness, chromaticity, brightness, color tone, light transmittance, light reflectance, light wavelength, energy, and the like.

Further, in the above embodiment, the lightness L * and the chromaticities a * and b * of the indicator 50 or the viscous fluid are detected, and the color difference ΔE * ab is calculated. That is, the L * a * b * color difference is adopted as an index value for indexing the optical characteristics that change due to plasma irradiation, but the optical characteristics that change due to plasma irradiation are used by using various methods. It is possible to measure and calculate index values. Specifically, for example, XYZ color system, X10Y10Z10 color system, chromaticity coordinates, chromaticity diagram, UCS chromaticity diagram, L * C * h * color system, L * u * v * color system, It is possible to measure and calculate the index value of optical characteristics using the Munsell color system, color matching function, and so on.

Further, in the above embodiment, the indicator 50 is installed or the viscous fluid is discharged on the object to be processed 36, but the indicator 50 is installed or the viscous fluid is discharged next to the object to be processed 36. May be good. This makes it possible to irradiate the entire surface of the object to be processed 36 with plasma. An indicator 50 is installed or a viscous fluid is discharged on the object to be processed 36 in the present specification, and an indicator 50 is installed or a viscous fluid is discharged next to the object to be processed 36. That is included in the concept that the indicator 50 is installed on the object to be processed 36 or the viscous fluid is discharged. That is, it is included in the concept that the indicator 50 or the viscous fluid is applied to the object to be processed 36.

Further, in the above embodiment, when it is determined that the plasma treatment is not appropriate, the operator manually returns the object to be processed 36 to the installation device 12 or the like, and the plasma treatment is executed again, but the plasma treatment is automatically performed. The processing body 36 may be returned to the installation device 12 or the like. That is, a mechanism for automatically returning the object to be processed 36 from the measuring device 16 to the installation device 12 is adopted, and when it is determined that plasma processing is not appropriate, the object to be processed 36 is automatically returned to the installation device 12 or the like by the mechanism. You may return to. As a result, it becomes possible to reduce the work by the worker and improve the productivity.

Further, in the above embodiment, the determination result of the suitability of the plasma processing is displayed on the display device 158, but the operator may be notified by voice, a lamp, or the like.

Further, the object to be processed 36 to be subjected to plasma processing of the plasma irradiation system 10 is not particularly limited, and is an industrial object to be processed such as a circuit board and an assembly product, and a medical object such as an instrument used in a hospital or the like. It is possible to adopt members in various fields such as processed bodies.

10: Plasma irradiation system 12: Installation device (giving device) 14: Plasma irradiation device 16: Measuring device 50: Indicator (base material) 150: Controller (judgment device) 156: Storage device (first storage device) (second storage device) Device) (3rd storage device) 158: Display device (notification device) 170: Discharge device (giving device)

Claims (5)

A plasma irradiation system that irradiates the object to be treated with plasma.
The plasma irradiation system
A feeder that supplies a substrate whose optical properties change due to plasma irradiation,
An applying device that applies the base material supplied by the feeder to the object to be processed, and
The base material applied to the object to be processed, a plasma irradiation device for irradiating the object to be processed with plasma, and a plasma irradiation device.
A plasma irradiation system comprising a measuring device for measuring the optical characteristics of the base material irradiated with plasma by the plasma irradiation device. The feeder is
The plasma irradiation system according to claim 1, wherein the carrier tape to which the plurality of the base materials are attached is sent out to supply the base materials. The granting device is
The first or second aspect of the present invention, wherein the holding head having a holder is provided, the base material supplied from the feeder is held by the holder, and the held base material is installed on the object to be processed. Plasma irradiation system. The granting device is
The plasma irradiation system according to any one of claims 1 to 3, wherein the substrate is attached to the object to be treated and installed. A supply process that uses a feeder to supply a substrate whose optical properties change due to plasma irradiation, and
In the application step of applying the base material supplied in the supply step to the object to be processed,
A plasma irradiation step of irradiating the substrate applied to the object to be processed and the object to be processed with plasma,
A plasma irradiation method including a measurement step of measuring the optical characteristics of the substrate irradiated with plasma in the plasma irradiation step.

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