JP7332709B2 - 疎水性及び疎氷性コーティング - Google Patents
疎水性及び疎氷性コーティング Download PDFInfo
- Publication number
- JP7332709B2 JP7332709B2 JP2021556224A JP2021556224A JP7332709B2 JP 7332709 B2 JP7332709 B2 JP 7332709B2 JP 2021556224 A JP2021556224 A JP 2021556224A JP 2021556224 A JP2021556224 A JP 2021556224A JP 7332709 B2 JP7332709 B2 JP 7332709B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- substrate
- top surface
- interface
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Description
Claims (19)
- コーティングを堆積する方法であって、
基板上に前記コーティングを堆積すること
を含み、ここで、
前記基板が可視光に対して少なくとも部分的に透明であり、
前記コーティングが、ケイ素(Si)、酸素(O)、及び炭素(C)を含み、
前記コーティングが、前記基板と前記コーティングとの間に界面が形成されるように堆積され、
前記コーティングにおけるCの濃度が、前記界面よりも前記コーティングの上面でより高く、
前記コーティングの前記上面が、前記コーティングの前記界面とは反対側に配置され、
前記コーティングが90°から120°の水接触角を有し、かつ
前記コーティングの屈折率と前記基板の屈折率との差は0.2未満である、
方法。 - 前記コーティングにおけるCの濃度が、3原子パーセントから25原子パーセントの範囲である、請求項1に記載の方法。
- 前記基板がSi及びOを含む、請求項1に記載の方法。
- 前記コーティング中のCの濃度の変化が前記界面と前記上面との間で実質的に線型である、請求項1に記載の方法。
- 前記コーティングの上に第2の基板を形成することをさらに含み、前記第2の基板と前記コーティングとは、ゼロ以外の距離又は中間層によって隔てられる、請求項1に記載の方法。
- 前記第2の基板上に第2のコーティングを形成することをさらに含む、請求項5に記載の方法。
- 前記コーティングが、5GPaから40GPaのバルク弾性率を有する、請求項1に記載の方法。
- 前記コーティングが、1GPaから10GPaの硬度を有する、請求項1に記載の方法。
- 前記コーティングにおけるCの濃度は、前記コーティングが前記界面から前記上面まで堆積されるにつれて高周波電力を低減することにより高められる、請求項1に記載の方法。
- コーティングを堆積する方法であって、
可視光に対して少なくとも部分的に透明な基板をケイ素含有前駆体、酸素含有前駆体及び炭素含有前駆体を含むガス混合物に曝すことにより、前記基板上に前記コーティングを堆積すること、
前記ガス混合物に高周波電力を適用すること、
前記基板上に前記コーティングの界面を形成すること、ここで、前記界面が、ケイ素(Si)、酸素(O)、及び炭素(C)を含み、並びに
前記コーティングにおけるCの濃度が前記界面よりも前記コーティングの上面でより高くなるように、前記コーティングを前記界面から前記上面まで堆積する間に前記ガス混合物に適用される前記高周波電力を低減させて、前記Cの濃度を高めること
を含み、
前記コーティングは、該コーティングの前記上面に配置される複数の水滴と前記上面との水接触角が90°から120°になるように堆積され、かつ
前記コーティングの屈折率と前記基板の屈折率との差は0.2未満である、方法。 - 前記コーティングにおけるCの濃度が、3原子パーセントから25原子パーセントの範囲である、請求項10に記載の方法。
- 前記高周波電力が、400Wから800Wの間である、請求項10に記載の方法。
- 前記コーティングの厚さが1000Åから10μmである、請求項10に記載の方法。
- 前記基板をガス混合物に曝すことが、化学気相堆積(CVD)を含む、請求項10に記載の方法。
- 層状構造であって、
基板;及び
前記基板上に配置されたコーティング
を含み、ここで、
前記基板が可視光に対して少なくとも部分的に透明であり、
前記コーティングが、ケイ素(Si)、酸素(O)、及び炭素(C)を含み、
前記コーティングが、前記基板と前記コーティングとの間に界面が形成されるように堆積され、
前記コーティングにおけるCの濃度が、前記界面よりも前記コーティングの上面でより高く、
前記コーティングの前記上面が、前記コーティングの前記界面とは反対側に堆積され、
前記コーティングの前記上面に配置される複数の水滴と前記上面との水接触角が90°から120°であり、かつ
前記コーティングの屈折率と前記基板の屈折率との差は0.2未満である、
層状構造。 - 前記基板が車両用のフロントガラスを含む、請求項15に記載の層状構造。
- 前記コーティング中のCの濃度の変化が、前記界面と前記上面との間で実質的に線型である、請求項15に記載の層状構造。
- 前記コーティングにおけるCの濃度が、3原子パーセントから25原子パーセントの範囲である、請求項15に記載の層状構造。
- 前記基板がSi及びOを含む、請求項15に記載の層状構造。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962820648P | 2019-03-19 | 2019-03-19 | |
US62/820,648 | 2019-03-19 | ||
PCT/US2020/018886 WO2020190441A1 (en) | 2019-03-19 | 2020-02-19 | Hydrophobic and icephobic coating |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022525634A JP2022525634A (ja) | 2022-05-18 |
JP7332709B2 true JP7332709B2 (ja) | 2023-08-23 |
Family
ID=72515165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021556224A Active JP7332709B2 (ja) | 2019-03-19 | 2020-02-19 | 疎水性及び疎氷性コーティング |
Country Status (6)
Country | Link |
---|---|
US (2) | US11530478B2 (ja) |
JP (1) | JP7332709B2 (ja) |
KR (1) | KR102655348B1 (ja) |
DE (1) | DE112020001319T5 (ja) |
TW (1) | TW202039917A (ja) |
WO (1) | WO2020190441A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
SG10202002601QA (en) | 2014-10-17 | 2020-05-28 | Applied Materials Inc | Cmp pad construction with composite material properties using additive manufacturing processes |
US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME |
CN112654655A (zh) | 2018-09-04 | 2021-04-13 | 应用材料公司 | 先进抛光垫配方 |
US11738517B2 (en) | 2020-06-18 | 2023-08-29 | Applied Materials, Inc. | Multi dispense head alignment using image processing |
US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
US11951590B2 (en) | 2021-06-14 | 2024-04-09 | Applied Materials, Inc. | Polishing pads with interconnected pores |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003514746A (ja) | 1999-11-18 | 2003-04-22 | ガーディアン・インダストリーズ・コーポレーション | 基材上にdlcを含む疎水性コーティング |
Family Cites Families (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2599066A (en) | 1950-12-11 | 1952-06-03 | Edwin B Osborn | Windshield cover for automobiles |
US2690928A (en) | 1952-08-04 | 1954-10-05 | Jones Robert D | Windshield cover |
US3046048A (en) | 1960-01-20 | 1962-07-24 | Roland A Cheney | Magnetically secured windshield cover |
US4336644A (en) | 1978-06-30 | 1982-06-29 | Medlin Richard C | Method of installing bulletproof windows in an armored automobile |
US5037156A (en) | 1988-04-25 | 1991-08-06 | Lundberg Frances A | Windshield protector |
US5188887A (en) | 1989-03-09 | 1993-02-23 | Guardian Industries Corp. | Heat treatable sputter-coated glass |
US5242560A (en) | 1989-03-09 | 1993-09-07 | Guardian Industries Corp. | Heat treatable sputter-coated glass |
US5637353A (en) | 1990-09-27 | 1997-06-10 | Monsanto Company | Abrasion wear resistant coated substrate product |
JP2929779B2 (ja) | 1991-02-15 | 1999-08-03 | トヨタ自動車株式会社 | 炭素被膜付撥水ガラス |
US5229194A (en) | 1991-12-09 | 1993-07-20 | Guardian Industries Corp. | Heat treatable sputter-coated glass systems |
US5214008A (en) | 1992-04-17 | 1993-05-25 | Guardian Industries Corp. | High visible, low UV and low IR transmittance green glass composition |
US5344718A (en) | 1992-04-30 | 1994-09-06 | Guardian Industries Corp. | High performance, durable, low-E glass |
JP2743707B2 (ja) * | 1992-05-22 | 1998-04-22 | トヨタ自動車株式会社 | 混合被膜付きガラス及びその製造方法 |
JP3387141B2 (ja) | 1993-03-24 | 2003-03-17 | 日本板硝子株式会社 | 撥水性ガラス物品 |
US5688585A (en) | 1993-08-05 | 1997-11-18 | Guardian Industries Corp. | Matchable, heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
US5376455A (en) | 1993-10-05 | 1994-12-27 | Guardian Industries Corp. | Heat-treatment convertible coated glass and method of converting same |
US5665424A (en) | 1994-03-11 | 1997-09-09 | Sherman; Dan | Method for making glass articles having a permanent protective coating |
JPH08119787A (ja) | 1994-10-14 | 1996-05-14 | Komatsu Electron Metals Co Ltd | 連続チャージ法におけるドーパント供給方法およびドーパント組成物 |
US5514476A (en) | 1994-12-15 | 1996-05-07 | Guardian Industries Corp. | Low-E glass coating system and insulating glass units made therefrom |
US5557462A (en) | 1995-01-17 | 1996-09-17 | Guardian Industries Corp. | Dual silver layer Low-E glass coating system and insulating glass units made therefrom |
US5646781A (en) | 1995-05-15 | 1997-07-08 | Omega Optical, Inc. | Optical filters for forming enhanced images |
US5615923A (en) | 1995-09-01 | 1997-04-01 | Madison; Donald T. | Cover for vehicle window |
LU88653A1 (fr) | 1995-09-06 | 1996-10-04 | Glaverbel | Verre gris clair foncé sodo-calcique |
MX9605168A (es) | 1995-11-02 | 1997-08-30 | Guardian Industries | Sistema de recubrimiento con vidrio de baja emisividad, durable, de alto funcionamiento, neutro, unidades de vidrio aislante elaboradas a partir del mismo, y metodos para la fabricacion de los mismos. |
JP3498881B2 (ja) * | 1996-05-27 | 2004-02-23 | セントラル硝子株式会社 | 撥水性ガラスの製法 |
US6249378B1 (en) | 1997-02-28 | 2001-06-19 | Nikon Corporation | Mirror and projection type display apparatus |
US5926740A (en) * | 1997-10-27 | 1999-07-20 | Micron Technology, Inc. | Graded anti-reflective coating for IC lithography |
JPH11129382A (ja) * | 1997-10-30 | 1999-05-18 | Toppan Printing Co Ltd | 防汚性反射防止積層体およびその製造方法 |
JP2000174282A (ja) | 1998-12-03 | 2000-06-23 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US6261693B1 (en) | 1999-05-03 | 2001-07-17 | Guardian Industries Corporation | Highly tetrahedral amorphous carbon coating on glass |
US6410368B1 (en) | 1999-10-26 | 2002-06-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device with TFT |
US7071041B2 (en) | 2000-01-20 | 2006-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
JP4033286B2 (ja) | 2001-03-19 | 2008-01-16 | 日本板硝子株式会社 | 高屈折率誘電体膜とその製造方法 |
US7049004B2 (en) | 2001-06-18 | 2006-05-23 | Aegis Semiconductor, Inc. | Index tunable thin film interference coatings |
JP4673513B2 (ja) | 2001-08-01 | 2011-04-20 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US6773944B2 (en) | 2001-11-07 | 2004-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
JP4387099B2 (ja) | 2001-12-28 | 2009-12-16 | 株式会社半導体エネルギー研究所 | 半導体装置の生産方法 |
KR100864001B1 (ko) * | 2002-06-14 | 2008-10-16 | 삼성전자주식회사 | 유기 전계발광장치 |
JP3974023B2 (ja) * | 2002-06-27 | 2007-09-12 | 富士通株式会社 | 半導体装置の製造方法 |
JP4015510B2 (ja) * | 2002-09-09 | 2007-11-28 | 日本エー・エス・エム株式会社 | 半導体集積回路の多層配線用層間絶縁膜及びその製造方法 |
US7749622B2 (en) | 2002-10-22 | 2010-07-06 | Asahi Glass Company, Limited | Multilayer film-coated substrate and process for its production |
US7931325B2 (en) | 2003-05-16 | 2011-04-26 | Robbins Leslie D | Windshield ice removal device |
JP3940709B2 (ja) * | 2003-07-01 | 2007-07-04 | 株式会社東芝 | 相変化光記録媒体 |
US7253123B2 (en) * | 2005-01-10 | 2007-08-07 | Applied Materials, Inc. | Method for producing gate stack sidewall spacers |
TWI335997B (en) | 2005-07-01 | 2011-01-11 | Hon Hai Prec Ind Co Ltd | Optical filter |
US8299400B2 (en) | 2005-08-04 | 2012-10-30 | Guardian Industries Corp. | Heatable vehicle window utilizing silver inclusive epoxy electrical connection and method of making same |
CN100539071C (zh) * | 2006-02-16 | 2009-09-09 | 中芯国际集成电路制造(上海)有限公司 | 用于形成低介电常数氟掺杂层的方法 |
CA2642867A1 (en) * | 2006-02-23 | 2007-08-30 | Picodeon Ltd Oy | Coating on a fiber substrate and a coated fiber product |
JP4193153B2 (ja) | 2007-03-06 | 2008-12-10 | いすゞ自動車株式会社 | デフロスターノズル |
CA2628517C (en) | 2007-10-17 | 2013-08-13 | Adm21 Co., Ltd. | Wiper blade with heating elements |
FR2940966B1 (fr) * | 2009-01-09 | 2011-03-04 | Saint Gobain | Substrat hydrophobe comprenant un primage du type oxycarbure de silicium active par plasma |
US8866047B1 (en) | 2010-02-20 | 2014-10-21 | Darren Parker | Removable timed windshield deicer sheet |
US8362399B2 (en) | 2010-02-22 | 2013-01-29 | Seaborn W John | Windshield heater |
US8976319B2 (en) * | 2010-11-16 | 2015-03-10 | Sharp Kabushiki Kaisha | Display device comprising an ion-generating device and a guiding mechanism that can selectively guide air from a fan |
CN106405707B (zh) | 2011-06-06 | 2021-07-20 | Agc株式会社 | 滤光片、固体摄像元件、摄像装置用透镜和摄像装置 |
FR2982608B1 (fr) * | 2011-11-16 | 2013-11-22 | Saint Gobain | Couche barriere aux metaux alcalins a base de sioc |
TW202300961A (zh) | 2012-07-16 | 2023-01-01 | 美商唯亞威方案公司 | 光學濾波器及感測器系統 |
KR102401136B1 (ko) | 2013-01-29 | 2022-05-24 | 비아비 솔루션즈 아이엔씨. | 가변 광 필터 및 그에 기반한 파장선택 센서 |
FR3008100B1 (fr) | 2013-07-08 | 2015-06-26 | Saint Gobain | Copolymere pour revetement hydrophobe a durabilite amelioree |
JP6347705B2 (ja) * | 2014-09-17 | 2018-06-27 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
TWI559026B (zh) | 2015-06-24 | 2016-11-21 | 財團法人工業技術研究院 | 抗反射結構及其製造方法 |
US10170299B2 (en) * | 2015-07-01 | 2019-01-01 | Applied Materials, Inc. | Method to reduce trap-induced capacitance in interconnect dielectric barrier stack |
-
2020
- 2020-02-19 US US16/795,431 patent/US11530478B2/en active Active
- 2020-02-19 JP JP2021556224A patent/JP7332709B2/ja active Active
- 2020-02-19 DE DE112020001319.7T patent/DE112020001319T5/de active Pending
- 2020-02-19 KR KR1020217033034A patent/KR102655348B1/ko active IP Right Grant
- 2020-02-19 WO PCT/US2020/018886 patent/WO2020190441A1/en active Application Filing
- 2020-02-24 TW TW109105826A patent/TW202039917A/zh unknown
-
2022
- 2022-11-07 US US17/982,470 patent/US20230063929A1/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003514746A (ja) | 1999-11-18 | 2003-04-22 | ガーディアン・インダストリーズ・コーポレーション | 基材上にdlcを含む疎水性コーティング |
Also Published As
Publication number | Publication date |
---|---|
US20200299834A1 (en) | 2020-09-24 |
DE112020001319T5 (de) | 2021-12-02 |
WO2020190441A1 (en) | 2020-09-24 |
US20230063929A1 (en) | 2023-03-02 |
KR20210127814A (ko) | 2021-10-22 |
US11530478B2 (en) | 2022-12-20 |
KR102655348B1 (ko) | 2024-04-04 |
TW202039917A (zh) | 2020-11-01 |
JP2022525634A (ja) | 2022-05-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7332709B2 (ja) | 疎水性及び疎氷性コーティング | |
AU2004283938B2 (en) | Substrate, in particular glass substrate, supporting a photocatalytic layer coated with a protective thin layer | |
EP1296901B1 (fr) | Substrat texture transparent et procedes pour l'obtenir | |
EP3694735B1 (en) | Head-up display with improved anti-reflection functional coating on windshield | |
US6273488B1 (en) | System and method for removing liquid from rear window of a vehicle | |
EP1720808A2 (fr) | Substrat, notamment verrier, a surface hydrophobe, avec une durabilite amelioree des proprietes hydrophobes. | |
US9403992B2 (en) | Barrier coatings for polymeric substrates | |
US20070196633A1 (en) | Durable transparent coatings for polymeric substrates | |
JP2003514746A (ja) | 基材上にdlcを含む疎水性コーティング | |
KR20000052525A (ko) | 반사방지 코팅을 포함하는 투명한 기판 | |
EP1644554A1 (fr) | PROCEDE DE DEPOT D’OXYDE DE TITANE PAR SOURCE PLASMA | |
WO2005009914A2 (fr) | Procede de preparation d’un revetement photocatalytique integre dans le traitement thermique d’un vitrage | |
WO2000064829A1 (fr) | Substrat texture susceptible de constituer un vitrage, procede pour son obtention | |
EP2509923B1 (fr) | Substrat hydrophobe comprenant un double primage et procede de fabrication | |
EP3419827A1 (fr) | Article comprenant une couche de protection superieure a base d'oxyde mixte de zirconium et d'aluminium | |
JPH06100717A (ja) | ポリカーボネート基質用多層被覆及びその製法 | |
JP2001228304A (ja) | 防曇性薄膜を具えた成形体及びその製造方法 | |
JP2895749B2 (ja) | 撥水性反射低減ガラス | |
TW201022734A (en) | Anti-glare glasses for automobile rear-view mirror | |
FR3099475A1 (fr) | Revêtement multicouche pour vitrage, procédé de réalisation d’un tel revêtement et vitrage pourvu dudit revêtement | |
FR2993395A1 (fr) | Procede de traitement d'un substrat, en particulier pour la protection de couches antireflets |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211115 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220922 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221025 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230123 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230322 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230425 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230711 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230810 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7332709 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |