US20230063929A1 - Hydrophobic and icephobic coating - Google Patents
Hydrophobic and icephobic coating Download PDFInfo
- Publication number
- US20230063929A1 US20230063929A1 US17/982,470 US202217982470A US2023063929A1 US 20230063929 A1 US20230063929 A1 US 20230063929A1 US 202217982470 A US202217982470 A US 202217982470A US 2023063929 A1 US2023063929 A1 US 2023063929A1
- Authority
- US
- United States
- Prior art keywords
- coating
- layered structure
- substrate
- top surface
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Definitions
- Embodiments of the invention relate to a method and an article of manufacture and, more specifically, to a method of depositing a hydrophobic and icephobic coating.
- Glass surfaces are hydrophilic by nature, such that glass surfaces tend to attract water, resulting in formation of a water film or ice film on the surface.
- cars and other vehicles accumulate ice, which is especially problematic on windshields, windows and other viewing surfaces. Additionally, during rain, water films forming on windshields impair visibility during driving.
- heated windshield wipers to help melt snow
- sheets of plastic to cover the windshields to prevent snow formation.
- heated windshield wipers are energy intensive, take a long time to remove snow, and often convert snow into hard ice before final removal.
- Plastic sheet covers have to be repeatedly applied and removed and often trap ice underneath.
- Silicone based liquid formulations are found in the art, which prevent ice and snow buildup by providing a temporary hydrophobic coating, lessening the sticking of ice and snow to the windshield or other glass surfaces.
- One drawback of these coatings is that the coatings are temporary and have to be reapplied every few weeks, making them costly and time consuming.
- a method of depositing a coating including depositing the coating on a substrate, the coating including silicon (Si), oxygen (O), and carbon (C).
- the substrate is at least partially transparent to visible light.
- the coating is deposited such that an interface is formed between the substrate and the coating.
- the concentration of C in the coating is larger at a top surface of the coating than the interface.
- the top surface of the coating is disposed on the opposite side of the coating than the interface.
- a method of depositing a coating including depositing the coating on a substrate, the coating including silicon (Si), oxygen (O), and carbon (C).
- the substrate is at least partially transparent to visible light.
- the coating is deposited such that an interface is formed between the substrate and the coating.
- the concentration of C in the coating is larger at a top surface of the coating than the interface.
- the top surface of the coating is disposed on the opposite side of the coating than the interface.
- the concentration of C in the coating ranges from about 3 atomic percent to about 25 atomic percent.
- a layered structure including a substrate and a coating disposed over the substrate.
- the coating includes silicon (Si), oxygen (O), and carbon (C).
- the substrate is at least partially transparent to visible light.
- the coating is deposited such that an interface is formed between the substrate and the coating.
- the concentration of C in the coating is larger at a top surface of the coating than the interface.
- the top surface of the coating is disposed on the opposite side of the coating than the interface.
- the top surface of the coating in the layered structure is inherently hydrophobic and icephobic, and thus the coating at least partially prevents the wetting of a water or ice film on the surface of the layered structure.
- the coating does not to be periodically replaced, and thus the substrate, such as a windshield or window, does not need to be retreated.
- FIG. 1 is a flow diagram of method operations for depositing a coating on a substrate, according to one embodiment.
- FIG. 2 A illustrates a layered structure, according to one embodiment.
- FIG. 2 B illustrates the layered structure of FIG. 2 A during deposition of a coating, according to one embodiment.
- FIG. 2 C illustrates the layered structure of FIG. 2 B undergoing post-treatment, according to one embodiment.
- FIG. 3 illustrates a treated windshield in a car, according to one embodiment.
- Embodiments of the disclosure provided herein include a method of coating a substrate, and a layered structure created by coating the substrate.
- a coating including silicon (Si), oxygen (O), and carbon (C) is deposited on a substrate.
- the top surface of the coating is inherently hydrophobic and icephobic.
- C doping there is a variation in C doping in the coating, so that unwanted reflections, refractions, or diffusion of visible light through the layered structure is not negatively affected by the coating.
- the gradual variation of C doping through the coating allows for good adhesion at the interface between the surface and the coating.
- Embodiments of the disclosure provided herein may be especially useful for, but are not limited to, a method of depositing a coating on a substrate transparent to visible light.
- the term “about” refers to a +/ ⁇ 10% variation from the nominal value. It is to be understood that such a variation can be included in any value provided herein.
- FIG. 1 is a flow diagram of method operations 100 for depositing a coating on a substrate to create a layered structure, according to one embodiment.
- FIG. 2 A illustrates a layered structure 200 , according to one embodiment.
- the layered structure 200 includes a substrate 205 .
- the substrate 205 includes silicon (Si) and oxygen (O), according to one embodiment.
- the substrate 205 allows the passage of at least a portion of the spectrum of visible light.
- the substrate can include glass.
- the substrate 205 can be an optical lens of any kind, including a lens for magnifying or correcting any aberration of an image, such as spherical or chromatic aberrations.
- the substrate 205 can be a lens for eyeglasses or goggles.
- the substrate 205 can be a layered structure, and can include layers or other features for partially or completely blocking a spectrum of light, such as infrared, ultraviolet, and the like.
- the substrate 205 is a windshield for a vehicle, according to one embodiment.
- the substrate 205 is a side or rear window for a vehicle, according to one embodiment.
- the vehicle can be, but is not limited to, a car, a truck, a motorcycle, a boat, a ship, a scooter, a train, an amphibious vehicle, an aircraft, an airplane, a helicopter, a spacecraft, and the like.
- the substrate 205 is a window for a building, a permanent structure, or a temporary structure, according to one embodiment.
- FIG. 2 B illustrates the layered structure 200 of FIG. 2 A during deposition of the coating 215 , according to one embodiment.
- the coating 215 can be deposited by any conventional deposition process 210 , such as, but not limited to, atomic layer deposition (ALD), physical vapor deposition (PVD), and chemical vapor deposition (CVD).
- the deposition process 210 can be performed in any conventional deposition chamber (not shown).
- the precursors can be any precursor or combination of precursors that contain carbon, oxygen, and silicon.
- the deposition process 210 can be performed at a temperature from between about 300° C. to about 450° C.
- the process can be performed from about 60 seconds to about 10 minutes.
- a radio frequency (RF) can be applied with an RF power of about 400 W to about 800 W.
- Pressure of the chamber (not shown) can be maintained at about 5 Torr to about 10 Torr.
- a neutral gas such as argon (Ar) or helium (He), can be co-flowed during deposition at a flow rate of about 2000 sccm to about 5000 sccm.
- the deposition process 210 is CVD
- the precursors are octamethylcyclotetrasiloxane (OMCTS), methane (CH 3 ), and oxygen gas (O 2 )
- oxygen gas is provided at a flow rate of about 50 sccm to about 200 sccm
- helium gas (He) is co-flowed during deposition at a flow rate of about 2000 sccm to about 5000 sccm
- pressure of the chamber (not shown) can be maintained at about 5 Torr to about 10 Torr
- the process is performed at a temperature of about 350° C., with an applied RF power of about 400 W to about 800 W.
- Carbon in the coating 215 is deposited at rate of about 4000 ⁇ /min to about 5000 ⁇ /min. Higher RF power leads to lower carbon content, so in one embodiment, growth of the interface 225 is performed at a higher RF power, which is then gradually reduced during the course of deposition to form a variation in the carbon content of the coating 215 .
- the coating 215 includes silicon (Si), oxygen (O), and carbon (C).
- the coating can also include hydrogen (H).
- An interface 225 is formed through chemical bonding between the coating 215 and the substrate 205 .
- the C can bond to Si, substituting O, by forming terminal methyl groups (—CH 3 ).
- the C can substitute for 0 in the bonded Si—O network by forming methylene bridges (—CH 2 —) between Si atoms, or the C can substitute for Si in the bonded Si—O network as C.
- the aforementioned C groups are also located at the top surface 215 S of the coating 215 , and the C groups reduce contact angle of water droplets disposed on the top surface.
- the top surface 215 S is inherently hydrophobic, such that water contact angles of water droplets is between about 90° to about 120°, according to one embodiment.
- the top surface 215 S is also icephobic, such that ice is at least partially prevented from forming on the top surface.
- hydrophobic and icephobic surfaces at least partially prevent the sticking of water and ice to the surface via water or ice film growth, which makes removal of water and ice easier.
- a water contact angle of water droplets between about 90° to about 120° leads to about 50% of the ice or water sticking to the surface of a material.
- the top surface 215 S reduces the wetting of a water film or an ice film.
- the top surface 215 S is hydrophobic and icephobic as deposited, and thus does not require retreating, which results in decreased cost and time for the user.
- the coating 215 includes from above about 0 atomic percentage of C to below about 40 atomic percentage of C, such as about 3 atomic percentage of C to about 25 atomic percentage of C, preferably about 2 atomic percentage of C to about 12 atomic percent carbon, according to one embodiment.
- the C concentration in the coating 215 is variable, such that the concentration of C in the coating is larger at the interface 225 than at a top surface 215 S of the coating, wherein the top surface of the coating is disposed on the opposite side of the coating than the interface.
- the variation of concentration of C in the coating 215 is substantially linear between the interface 225 and the top surface 215 S, according to one embodiment.
- the gradual variation of concentration of C allows for a smooth variance in the index of refraction of the coating 215 , preventing large amounts of light from being reflected, refracted, diffracted, or otherwise undesirably altered, so as to provide unimpeded vision through the layered structure 200 .
- the index of refraction of the substrate 205 and the layered structure 200 can be similar.
- the gradual variation of concentration of C allows for a clean interface 225 between the substrate 205 and the coating 215 , preventing formation of vacancies or interstitial atoms at the interface which cause unwanted reflection, refraction, or diffraction of light through the layered structure 200 .
- the concentration of C in the coating 215 gradually increases until it reaches its desired value at the top surface 215 S, which is below about 25 atomic percentage of C, preferably about 3 atomic percentage of C to about 12 atomic percentage of C, and the C groups present at the top surface contribute to the hydrophobicity and icephobicity of the coating.
- the thickness of the coating 215 is from about 100 ⁇ to about 10 ⁇ m, preferably from about 100 ⁇ to about 5 ⁇ m, according to one embodiment.
- Thinner coatings 215 are preferable, as there is minimal impact to optical or “see thru” performance of glass, but too thin of coatings can wear off over time due to mechanical wear from erosion or windshield wiper or other cleaning operations, leading to growing the coating at a thickness as descried above.
- the layered structure 200 has an acceptable bulk modulus and hardness so that the layered structure has acceptable strength for the purpose of the layered structure, e.g., strong enough for use as a windshield or side window in vehicles.
- the bulk modulus of the layered structure 200 can vary between about 5 GPa to about 40 GPa, and the hardness of the layered structure can vary between about 1 GPa to about 10 GPa, depending on the use of the layered structure as a windshield or window.
- the refractive index of the coating 215 is similar to the substrate 205 , or the difference is minimal for ideal optical performance.
- the index of refraction for glass is about 1.45, and the refractive index of the coating 215 is expected to be lower, a gradual change in refractive index while minimizing total film thickness will result in ideal optical performance.
- the maximum difference in refractive indices should be maintained below about 0.2, in order to maintain desired optical performance of the layered structure 200 .
- a post-treatment 220 is applied to the layered structure 200 .
- the post-treatment 220 can include an anneal, a bake, a chemical etch, a chemical cleaning process, or any combination of the above, performed either sequentially or simultaneously.
- FIG. 2 C illustrates the layered structure 200 of FIG. 2 B undergoing post-treatment 220 , according to one embodiment.
- the post-treatment 220 improves uniformity of the coating 215 , heals atomic vacancies in the coating, the substrate 205 , and the interface 225 , ensures a smoother interface between the substrate and the coating, and improves top surface 215 S smoothness, all of which improves the optical and structural properties of the layered structure 200 .
- the layered structure 200 can include multiple layers of substrates 205 and coatings 215 .
- a film can be grown on a layered structure 200 , and the film becomes the new substrate 205 upon which method 100 can be performed. In this manner, the method 100 can be performed repeatedly, resulting in multiple layers of substrates 205 and coatings 215 .
- a vacuum or air gap can be present between iterations of the layered structure 200 , as in, for example, double pane windows or windshields.
- the layered structure 200 can be laminated glass, and the iterations of substrates 205 and coatings 215 can be separated by an interlayer, so that the layered structure holds together when shattered.
- the interlayer can include polyvinyl butyral (PVB), ethylene-vinyl acetate (EVA), polybutylene terephthalate (PBT), or the like.
- FIG. 3 illustrates a treated windshield 326 in a vehicle 300 , according to one embodiment.
- the vehicle can be any of the vehicles presented above, although not limited solely to the vehicles presented above.
- the windshield frame 354 is disposed in an aperture in the vehicle 300 , and the treated windshield 326 is attached to the windshield frame by fasteners 360 .
- the fasteners 360 can be any used in the art to fasten windshields to the vehicle 300 in the art, such as clips, molding, weather stripping, and the like.
- the substrate 205 is a conventional windshield, and thus the treated windshield 326 is the layered structure 200 , according to one embodiment, and the coating 215 increases the hydrophobicity and icephobicity of the treated windshield surface.
- the coating 215 prevents build-up of ice and snow, and allows for easier removal of the ice and snow from windshield wipers.
- the small thickness of the coating 215 in comparison to the thickness of a conventional windshield allows the coating to be applied to a conventional windshield without necessitating redesign or further engineering of the windshield, since the small thickness of the coating does not interfere with many designs of fastening windshields to vehicles.
- a coating 215 is deposited on a substrate 205 to make a layered structure 200 .
- the substrate 205 can be a windshield, and thus the layered structure 200 is a treated windshield 326 .
- the coating 215 includes silicon, oxygen, and carbon, where the carbon doping in the coating increases between the interface 225 and the top surface 215 S of the coating.
- the top surface 215 S of the coating 215 is inherently hydrophobic and icephobic, and reduces the wetting of water or ice film on the layered structure 200 , without requiring reapplication of the coating.
- the coating 215 can be deposited on conventional glass substrates 205 , such as a windshield or window.
- the gradual variation in carbon concentrations in the coating 215 results in slowly varying index of refraction, which reduces unwanted refraction, reflection, or diffraction of light passing through the layered structure 200 .
Abstract
Embodiments described herein relate to layered structures having a top surface which is hydrophobic for reducing the wetting of water or ice on the layered structure without requiring reapplication. In one or more embodiments, a layered structure is provided and includes a coating containing silicon, oxygen, and carbon disposed over a substrate and an interface disposed between the substrate and the coating. The substrate is at least partially transparent to visible light, a concentration of carbon in the coating is greater at a top surface of the coating than the interface, and the top surface of the coating is disposed on the opposite side of the coating than the interface.
Description
- This application is a divisional of U.S. application Ser. No. 16/795,431, filed Feb. 19, 2020, which claims benefit to U.S. Prov. Appl. No. 62/820,648, filed Mar. 19, 2019, which are hereby incorporated by reference in their entirety.
- Embodiments of the invention relate to a method and an article of manufacture and, more specifically, to a method of depositing a hydrophobic and icephobic coating.
- Glass surfaces are hydrophilic by nature, such that glass surfaces tend to attract water, resulting in formation of a water film or ice film on the surface. In snowy, winter weather, cars and other vehicles accumulate ice, which is especially problematic on windshields, windows and other viewing surfaces. Additionally, during rain, water films forming on windshields impair visibility during driving.
- In order to combat this issue, current solutions in the marketplace include heated windshield wipers to help melt snow, and sheets of plastic to cover the windshields to prevent snow formation. However, heated windshield wipers are energy intensive, take a long time to remove snow, and often convert snow into hard ice before final removal. Plastic sheet covers have to be repeatedly applied and removed and often trap ice underneath.
- Silicone based liquid formulations are found in the art, which prevent ice and snow buildup by providing a temporary hydrophobic coating, lessening the sticking of ice and snow to the windshield or other glass surfaces. One drawback of these coatings is that the coatings are temporary and have to be reapplied every few weeks, making them costly and time consuming.
- Therefore, there is a need for long-lasting hydrophobic and icephobic coating of windshields and other glass surfaces.
- In one embodiment, a method of depositing a coating is provided, including depositing the coating on a substrate, the coating including silicon (Si), oxygen (O), and carbon (C). The substrate is at least partially transparent to visible light. The coating is deposited such that an interface is formed between the substrate and the coating. The concentration of C in the coating is larger at a top surface of the coating than the interface. The top surface of the coating is disposed on the opposite side of the coating than the interface.
- In another embodiment, a method of depositing a coating is provided, including depositing the coating on a substrate, the coating including silicon (Si), oxygen (O), and carbon (C). The substrate is at least partially transparent to visible light. The coating is deposited such that an interface is formed between the substrate and the coating. The concentration of C in the coating is larger at a top surface of the coating than the interface. The top surface of the coating is disposed on the opposite side of the coating than the interface. The concentration of C in the coating ranges from about 3 atomic percent to about 25 atomic percent.
- In another embodiment, a layered structure is provided, including a substrate and a coating disposed over the substrate. The coating includes silicon (Si), oxygen (O), and carbon (C). The substrate is at least partially transparent to visible light. The coating is deposited such that an interface is formed between the substrate and the coating. The concentration of C in the coating is larger at a top surface of the coating than the interface. The top surface of the coating is disposed on the opposite side of the coating than the interface.
- The top surface of the coating in the layered structure is inherently hydrophobic and icephobic, and thus the coating at least partially prevents the wetting of a water or ice film on the surface of the layered structure. The coating does not to be periodically replaced, and thus the substrate, such as a windshield or window, does not need to be retreated.
- So that the manner in which the above-recited features of the present disclosure can be understood in detail, a more particular description of the embodiments, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this disclosure and are therefore not to be considered limiting of its scope, for the disclosure may admit to other equally effective embodiments.
-
FIG. 1 is a flow diagram of method operations for depositing a coating on a substrate, according to one embodiment. -
FIG. 2A illustrates a layered structure, according to one embodiment. -
FIG. 2B illustrates the layered structure ofFIG. 2A during deposition of a coating, according to one embodiment. -
FIG. 2C illustrates the layered structure ofFIG. 2B undergoing post-treatment, according to one embodiment. -
FIG. 3 illustrates a treated windshield in a car, according to one embodiment. - To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
- Embodiments of the disclosure provided herein include a method of coating a substrate, and a layered structure created by coating the substrate. A coating including silicon (Si), oxygen (O), and carbon (C) is deposited on a substrate. The top surface of the coating is inherently hydrophobic and icephobic. There is a variation in C doping in the coating, so that unwanted reflections, refractions, or diffusion of visible light through the layered structure is not negatively affected by the coating. In addition, the gradual variation of C doping through the coating allows for good adhesion at the interface between the surface and the coating. Embodiments of the disclosure provided herein may be especially useful for, but are not limited to, a method of depositing a coating on a substrate transparent to visible light.
- As used herein, the term “about” refers to a +/−10% variation from the nominal value. It is to be understood that such a variation can be included in any value provided herein.
-
FIG. 1 is a flow diagram ofmethod operations 100 for depositing a coating on a substrate to create a layered structure, according to one embodiment. Although the method operations are described in connection withFIGS. 1 and 2A -C, persons skilled in the art will understand that any system configured to perform the method operations, in any order, falls within the scope of the embodiments described herein.FIG. 2A illustrates alayered structure 200, according to one embodiment. Thelayered structure 200 includes asubstrate 205. Thesubstrate 205 includes silicon (Si) and oxygen (O), according to one embodiment. Thesubstrate 205 allows the passage of at least a portion of the spectrum of visible light. The substrate can include glass. Thesubstrate 205 can be an optical lens of any kind, including a lens for magnifying or correcting any aberration of an image, such as spherical or chromatic aberrations. Thesubstrate 205 can be a lens for eyeglasses or goggles. Thesubstrate 205 can be a layered structure, and can include layers or other features for partially or completely blocking a spectrum of light, such as infrared, ultraviolet, and the like. - The
substrate 205 is a windshield for a vehicle, according to one embodiment. Thesubstrate 205 is a side or rear window for a vehicle, according to one embodiment. The vehicle can be, but is not limited to, a car, a truck, a motorcycle, a boat, a ship, a scooter, a train, an amphibious vehicle, an aircraft, an airplane, a helicopter, a spacecraft, and the like. Thesubstrate 205 is a window for a building, a permanent structure, or a temporary structure, according to one embodiment. - Referring to
FIGS. 1 and 2A -C, the method begins atoperation 110, where acoating 215 is deposited on thesubstrate 205.FIG. 2B illustrates thelayered structure 200 ofFIG. 2A during deposition of thecoating 215, according to one embodiment. Thecoating 215 can be deposited by anyconventional deposition process 210, such as, but not limited to, atomic layer deposition (ALD), physical vapor deposition (PVD), and chemical vapor deposition (CVD). Thedeposition process 210 can be performed in any conventional deposition chamber (not shown). The precursors can be any precursor or combination of precursors that contain carbon, oxygen, and silicon. Thedeposition process 210 can be performed at a temperature from between about 300° C. to about 450° C. The process can be performed from about 60 seconds to about 10 minutes. A radio frequency (RF) can be applied with an RF power of about 400 W to about 800 W. Pressure of the chamber (not shown) can be maintained at about 5 Torr to about 10 Torr. A neutral gas, such as argon (Ar) or helium (He), can be co-flowed during deposition at a flow rate of about 2000 sccm to about 5000 sccm. - In one embodiment, the
deposition process 210 is CVD, the precursors are octamethylcyclotetrasiloxane (OMCTS), methane (CH3), and oxygen gas (O2), oxygen gas is provided at a flow rate of about 50 sccm to about 200 sccm, helium gas (He) is co-flowed during deposition at a flow rate of about 2000 sccm to about 5000 sccm, pressure of the chamber (not shown) can be maintained at about 5 Torr to about 10 Torr, and the process is performed at a temperature of about 350° C., with an applied RF power of about 400 W to about 800 W. Carbon in thecoating 215 is deposited at rate of about 4000 Å/min to about 5000 Å/min. Higher RF power leads to lower carbon content, so in one embodiment, growth of theinterface 225 is performed at a higher RF power, which is then gradually reduced during the course of deposition to form a variation in the carbon content of thecoating 215. - The
coating 215 includes silicon (Si), oxygen (O), and carbon (C). The coating can also include hydrogen (H). Aninterface 225 is formed through chemical bonding between thecoating 215 and thesubstrate 205. The C can bond to Si, substituting O, by forming terminal methyl groups (—CH3). The C can substitute for 0 in the bonded Si—O network by forming methylene bridges (—CH2—) between Si atoms, or the C can substitute for Si in the bonded Si—O network as C. The aforementioned C groups are also located at the top surface 215S of thecoating 215, and the C groups reduce contact angle of water droplets disposed on the top surface. The top surface 215S is inherently hydrophobic, such that water contact angles of water droplets is between about 90° to about 120°, according to one embodiment. The top surface 215S is also icephobic, such that ice is at least partially prevented from forming on the top surface. - It is known in the art that hydrophobic and icephobic surfaces at least partially prevent the sticking of water and ice to the surface via water or ice film growth, which makes removal of water and ice easier. A water contact angle of water droplets between about 90° to about 120° leads to about 50% of the ice or water sticking to the surface of a material. Thus, the top surface 215S reduces the wetting of a water film or an ice film. The top surface 215S is hydrophobic and icephobic as deposited, and thus does not require retreating, which results in decreased cost and time for the user.
- The
coating 215 includes from above about 0 atomic percentage of C to below about 40 atomic percentage of C, such as about 3 atomic percentage of C to about 25 atomic percentage of C, preferably about 2 atomic percentage of C to about 12 atomic percent carbon, according to one embodiment. The C concentration in thecoating 215 is variable, such that the concentration of C in the coating is larger at theinterface 225 than at a top surface 215S of the coating, wherein the top surface of the coating is disposed on the opposite side of the coating than the interface. The variation of concentration of C in thecoating 215 is substantially linear between theinterface 225 and the top surface 215S, according to one embodiment. The gradual variation of concentration of C allows for a smooth variance in the index of refraction of thecoating 215, preventing large amounts of light from being reflected, refracted, diffracted, or otherwise undesirably altered, so as to provide unimpeded vision through thelayered structure 200. Thus, the index of refraction of thesubstrate 205 and thelayered structure 200 can be similar. - The gradual variation of concentration of C allows for a
clean interface 225 between thesubstrate 205 and thecoating 215, preventing formation of vacancies or interstitial atoms at the interface which cause unwanted reflection, refraction, or diffraction of light through thelayered structure 200. In this manner, the concentration of C in thecoating 215 gradually increases until it reaches its desired value at the top surface 215S, which is below about 25 atomic percentage of C, preferably about 3 atomic percentage of C to about 12 atomic percentage of C, and the C groups present at the top surface contribute to the hydrophobicity and icephobicity of the coating. The thickness of thecoating 215 is from about 100 Å to about 10 μm, preferably from about 100 Å to about 5 μm, according to one embodiment.Thinner coatings 215 are preferable, as there is minimal impact to optical or “see thru” performance of glass, but too thin of coatings can wear off over time due to mechanical wear from erosion or windshield wiper or other cleaning operations, leading to growing the coating at a thickness as descried above. - The
layered structure 200 has an acceptable bulk modulus and hardness so that the layered structure has acceptable strength for the purpose of the layered structure, e.g., strong enough for use as a windshield or side window in vehicles. The bulk modulus of thelayered structure 200 can vary between about 5 GPa to about 40 GPa, and the hardness of the layered structure can vary between about 1 GPa to about 10 GPa, depending on the use of the layered structure as a windshield or window. The refractive index of thecoating 215 is similar to thesubstrate 205, or the difference is minimal for ideal optical performance. The index of refraction for glass is about 1.45, and the refractive index of thecoating 215 is expected to be lower, a gradual change in refractive index while minimizing total film thickness will result in ideal optical performance. The maximum difference in refractive indices should be maintained below about 0.2, in order to maintain desired optical performance of thelayered structure 200. - At
optional operation 120, a post-treatment 220 is applied to thelayered structure 200. The post-treatment 220 can include an anneal, a bake, a chemical etch, a chemical cleaning process, or any combination of the above, performed either sequentially or simultaneously.FIG. 2C illustrates thelayered structure 200 ofFIG. 2B undergoing post-treatment 220, according to one embodiment. The post-treatment 220 improves uniformity of thecoating 215, heals atomic vacancies in the coating, thesubstrate 205, and theinterface 225, ensures a smoother interface between the substrate and the coating, and improves top surface 215S smoothness, all of which improves the optical and structural properties of thelayered structure 200. - The
layered structure 200 can include multiple layers ofsubstrates 205 andcoatings 215. A film can be grown on alayered structure 200, and the film becomes thenew substrate 205 upon whichmethod 100 can be performed. In this manner, themethod 100 can be performed repeatedly, resulting in multiple layers ofsubstrates 205 andcoatings 215. A vacuum or air gap can be present between iterations of thelayered structure 200, as in, for example, double pane windows or windshields. Thelayered structure 200 can be laminated glass, and the iterations ofsubstrates 205 andcoatings 215 can be separated by an interlayer, so that the layered structure holds together when shattered. The interlayer can include polyvinyl butyral (PVB), ethylene-vinyl acetate (EVA), polybutylene terephthalate (PBT), or the like. -
FIG. 3 illustrates a treatedwindshield 326 in avehicle 300, according to one embodiment. AlthoughFIG. 3 shows thevehicle 300 is a car, the vehicle can be any of the vehicles presented above, although not limited solely to the vehicles presented above. Thewindshield frame 354 is disposed in an aperture in thevehicle 300, and the treatedwindshield 326 is attached to the windshield frame byfasteners 360. Thefasteners 360 can be any used in the art to fasten windshields to thevehicle 300 in the art, such as clips, molding, weather stripping, and the like. Thesubstrate 205 is a conventional windshield, and thus the treatedwindshield 326 is thelayered structure 200, according to one embodiment, and thecoating 215 increases the hydrophobicity and icephobicity of the treated windshield surface. Thecoating 215 prevents build-up of ice and snow, and allows for easier removal of the ice and snow from windshield wipers. The small thickness of thecoating 215 in comparison to the thickness of a conventional windshield allows the coating to be applied to a conventional windshield without necessitating redesign or further engineering of the windshield, since the small thickness of the coating does not interfere with many designs of fastening windshields to vehicles. - As described above, a
coating 215 is deposited on asubstrate 205 to make alayered structure 200. Thesubstrate 205 can be a windshield, and thus thelayered structure 200 is a treatedwindshield 326. Thecoating 215 includes silicon, oxygen, and carbon, where the carbon doping in the coating increases between theinterface 225 and the top surface 215S of the coating. - The top surface 215S of the
coating 215 is inherently hydrophobic and icephobic, and reduces the wetting of water or ice film on thelayered structure 200, without requiring reapplication of the coating. Thecoating 215 can be deposited onconventional glass substrates 205, such as a windshield or window. The gradual variation in carbon concentrations in thecoating 215 results in slowly varying index of refraction, which reduces unwanted refraction, reflection, or diffraction of light passing through thelayered structure 200. - While the foregoing is directed to implementations of the present invention, other and further implementations of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (20)
1. A layered structure, comprising:
a coating comprising silicon, oxygen, and carbon disposed over a substrate; and
an interface disposed between the substrate and the coating;
wherein:
the substrate is at least partially transparent to visible light;
a concentration of carbon in the coating is greater at a top surface of the coating than the interface; and
the top surface of the coating is disposed on the opposite side of the coating than the interface.
2. The layered structure of claim 1 , wherein the concentration of carbon in the coating is greater at the top surface of the coating by reducing a radio frequency power as the coating is deposited from the interface to the top surface.
3. The layered structure of claim 1 , wherein the concentration of carbon in the coating is less than 40 atomic percent.
4. The layered structure of claim 1 , wherein the coating on the substrate was deposited by a chemical vapor deposition process.
5. The layered structure of claim 1 , wherein the coating has a hardness in a range from about 1 GPa to about 10 GPa.
6. The layered structure of claim 1 , wherein the coating has a bulk modulus in a range from about 5 GPa to about 40 GPa.
7. The layered structure of claim 1 , wherein a plurality of water droplets disposed on the top surface of the coating makes a water contact angle with the top surface, the water contact angle is in a range from about 90° to about 120°.
8. The layered structure of claim 1 , wherein the thickness of the coating is in a range from about 1,000 Å to about 10 μm.
9. The layered structure of claim 1 , wherein the variation of concentration of carbon in the coating is substantially linear between the interface and the top surface.
10. The layered structure of claim 1 , wherein the concentration of carbon in the coating is in a range from about 3 atomic percent to about 25 atomic percent.
11. The layered structure of claim 1 , wherein the substrate comprises a windshield for a vehicle.
12. The layered structure of claim 1 , wherein the substrate comprises silicon and oxygen.
13. The layered structure of claim 1 , further comprising a second substrate disposed above the coating, the second substrate and the coating are separated by a non-zero distance or an interlayer.
14. The layered structure of claim 13 , further comprising a second coating formed over the second substrate.
15. A layered structure, comprising:
a coating comprising silicon, oxygen, and carbon disposed over a substrate; and
an interface disposed between the substrate and the coating;
wherein:
the substrate is at least partially transparent to visible light;
a concentration of carbon in the coating is greater at a top surface of the coating than the interface;
the top surface of the coating is disposed on the opposite side of the coating than the interface;
the thickness of the coating is in a range from about 1,000 Å to about 10 μm;
the coating has a hardness in a range from about 1 GPa to about 10 GPa; and
the coating has a bulk modulus in a range from about 5 GPa to about 40 GPa.
16. The layered structure of claim 15 , wherein the concentration of carbon in the coating is greater at the top surface of the coating by reducing a radio frequency power as the coating is deposited from the interface to the top surface.
17. The layered structure of claim 15 , wherein a plurality of water droplets disposed on the top surface of the coating makes a water contact angle with the top surface, the water contact angle is in a range from about 90° to about 120°.
18. The layered structure of claim 15 , wherein the substrate comprises a windshield for a vehicle.
19. The layered structure of claim 15 , further comprising a second substrate disposed above the coating, the second substrate and the coating are separated by a non-zero distance or an interlayer.
20. A layered structure, comprising:
a coating comprising silicon, oxygen, and carbon disposed over a substrate; and
an interface disposed between the substrate and the coating;
wherein:
the substrate is at least partially transparent to visible light;
the thickness of the coating is in a range from about 1,000 Å to about 10 μm;
a concentration of carbon in the coating is greater at a top surface of the coating than the interface by reducing a radio frequency power as the coating is deposited from the interface to the top surface; and
the top surface of the coating is disposed on the opposite side of the coating than the interface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/982,470 US20230063929A1 (en) | 2019-03-19 | 2022-11-07 | Hydrophobic and icephobic coating |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962820648P | 2019-03-19 | 2019-03-19 | |
US16/795,431 US11530478B2 (en) | 2019-03-19 | 2020-02-19 | Method for forming a hydrophobic and icephobic coating |
US17/982,470 US20230063929A1 (en) | 2019-03-19 | 2022-11-07 | Hydrophobic and icephobic coating |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/795,431 Division US11530478B2 (en) | 2019-03-19 | 2020-02-19 | Method for forming a hydrophobic and icephobic coating |
Publications (1)
Publication Number | Publication Date |
---|---|
US20230063929A1 true US20230063929A1 (en) | 2023-03-02 |
Family
ID=72515165
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/795,431 Active 2040-04-25 US11530478B2 (en) | 2019-03-19 | 2020-02-19 | Method for forming a hydrophobic and icephobic coating |
US17/982,470 Pending US20230063929A1 (en) | 2019-03-19 | 2022-11-07 | Hydrophobic and icephobic coating |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/795,431 Active 2040-04-25 US11530478B2 (en) | 2019-03-19 | 2020-02-19 | Method for forming a hydrophobic and icephobic coating |
Country Status (6)
Country | Link |
---|---|
US (2) | US11530478B2 (en) |
JP (1) | JP7332709B2 (en) |
KR (1) | KR102655348B1 (en) |
DE (1) | DE112020001319T5 (en) |
TW (1) | TW202039917A (en) |
WO (1) | WO2020190441A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
CN107078048B (en) | 2014-10-17 | 2021-08-13 | 应用材料公司 | CMP pad construction with composite material properties using additive manufacturing process |
CN113103145B (en) | 2015-10-30 | 2023-04-11 | 应用材料公司 | Apparatus and method for forming polishing article having desired zeta potential |
US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
US11471999B2 (en) | 2017-07-26 | 2022-10-18 | Applied Materials, Inc. | Integrated abrasive polishing pads and manufacturing methods |
WO2019032286A1 (en) | 2017-08-07 | 2019-02-14 | Applied Materials, Inc. | Abrasive delivery polishing pads and manufacturing methods thereof |
CN112654655A (en) | 2018-09-04 | 2021-04-13 | 应用材料公司 | Advanced polishing pad formulations |
US11738517B2 (en) | 2020-06-18 | 2023-08-29 | Applied Materials, Inc. | Multi dispense head alignment using image processing |
US11878389B2 (en) | 2021-02-10 | 2024-01-23 | Applied Materials, Inc. | Structures formed using an additive manufacturing process for regenerating surface texture in situ |
US11951590B2 (en) | 2021-06-14 | 2024-04-09 | Applied Materials, Inc. | Polishing pads with interconnected pores |
Family Cites Families (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2599066A (en) | 1950-12-11 | 1952-06-03 | Edwin B Osborn | Windshield cover for automobiles |
US2690928A (en) | 1952-08-04 | 1954-10-05 | Jones Robert D | Windshield cover |
US3046048A (en) | 1960-01-20 | 1962-07-24 | Roland A Cheney | Magnetically secured windshield cover |
US4336644A (en) | 1978-06-30 | 1982-06-29 | Medlin Richard C | Method of installing bulletproof windows in an armored automobile |
US5037156A (en) | 1988-04-25 | 1991-08-06 | Lundberg Frances A | Windshield protector |
US5188887A (en) | 1989-03-09 | 1993-02-23 | Guardian Industries Corp. | Heat treatable sputter-coated glass |
US5242560A (en) | 1989-03-09 | 1993-09-07 | Guardian Industries Corp. | Heat treatable sputter-coated glass |
US5637353A (en) | 1990-09-27 | 1997-06-10 | Monsanto Company | Abrasion wear resistant coated substrate product |
JP2929779B2 (en) * | 1991-02-15 | 1999-08-03 | トヨタ自動車株式会社 | Water-repellent glass with carbon coating |
US5229194A (en) | 1991-12-09 | 1993-07-20 | Guardian Industries Corp. | Heat treatable sputter-coated glass systems |
US5344718A (en) | 1992-04-30 | 1994-09-06 | Guardian Industries Corp. | High performance, durable, low-E glass |
US5214008A (en) | 1992-04-17 | 1993-05-25 | Guardian Industries Corp. | High visible, low UV and low IR transmittance green glass composition |
JP2743707B2 (en) * | 1992-05-22 | 1998-04-22 | トヨタ自動車株式会社 | Glass with mixed coating and method for producing the same |
JP3387141B2 (en) * | 1993-03-24 | 2003-03-17 | 日本板硝子株式会社 | Water-repellent glass article |
US5688585A (en) | 1993-08-05 | 1997-11-18 | Guardian Industries Corp. | Matchable, heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same |
US5376455A (en) | 1993-10-05 | 1994-12-27 | Guardian Industries Corp. | Heat-treatment convertible coated glass and method of converting same |
US5665424A (en) | 1994-03-11 | 1997-09-09 | Sherman; Dan | Method for making glass articles having a permanent protective coating |
JPH08119787A (en) | 1994-10-14 | 1996-05-14 | Komatsu Electron Metals Co Ltd | Dopant feeding method in continuously charging process and dopant composition |
US5514476A (en) | 1994-12-15 | 1996-05-07 | Guardian Industries Corp. | Low-E glass coating system and insulating glass units made therefrom |
US5557462A (en) | 1995-01-17 | 1996-09-17 | Guardian Industries Corp. | Dual silver layer Low-E glass coating system and insulating glass units made therefrom |
US5646781A (en) | 1995-05-15 | 1997-07-08 | Omega Optical, Inc. | Optical filters for forming enhanced images |
US5615923A (en) | 1995-09-01 | 1997-04-01 | Madison; Donald T. | Cover for vehicle window |
LU88653A1 (en) | 1995-09-06 | 1996-10-04 | Glaverbel | Soda-lime dark light gray glass |
MX9605168A (en) | 1995-11-02 | 1997-08-30 | Guardian Industries | Neutral, high performance, durable low-e glass coating system, insulating glass units made therefrom, and methods of making same. |
JP3498881B2 (en) * | 1996-05-27 | 2004-02-23 | セントラル硝子株式会社 | Manufacturing method of water-repellent glass |
US6249378B1 (en) | 1997-02-28 | 2001-06-19 | Nikon Corporation | Mirror and projection type display apparatus |
US5926740A (en) * | 1997-10-27 | 1999-07-20 | Micron Technology, Inc. | Graded anti-reflective coating for IC lithography |
JPH11129382A (en) * | 1997-10-30 | 1999-05-18 | Toppan Printing Co Ltd | Antifouling antireflective laminate and its manufacture |
JP2000174282A (en) | 1998-12-03 | 2000-06-23 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
US6338901B1 (en) | 1999-05-03 | 2002-01-15 | Guardian Industries Corporation | Hydrophobic coating including DLC on substrate |
US6261693B1 (en) | 1999-05-03 | 2001-07-17 | Guardian Industries Corporation | Highly tetrahedral amorphous carbon coating on glass |
US6410368B1 (en) | 1999-10-26 | 2002-06-25 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device with TFT |
US7071041B2 (en) | 2000-01-20 | 2006-07-04 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
JP4033286B2 (en) | 2001-03-19 | 2008-01-16 | 日本板硝子株式会社 | High refractive index dielectric film and manufacturing method thereof |
US7049004B2 (en) | 2001-06-18 | 2006-05-23 | Aegis Semiconductor, Inc. | Index tunable thin film interference coatings |
JP4673513B2 (en) | 2001-08-01 | 2011-04-20 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
US6773944B2 (en) | 2001-11-07 | 2004-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
JP4387099B2 (en) | 2001-12-28 | 2009-12-16 | 株式会社半導体エネルギー研究所 | Semiconductor device production method |
KR100864001B1 (en) * | 2002-06-14 | 2008-10-16 | 삼성전자주식회사 | Organic electroluminescent device |
JP3974023B2 (en) * | 2002-06-27 | 2007-09-12 | 富士通株式会社 | Manufacturing method of semiconductor device |
JP4015510B2 (en) * | 2002-09-09 | 2007-11-28 | 日本エー・エス・エム株式会社 | Interlayer insulating film for multilayer wiring of semiconductor integrated circuit and manufacturing method thereof |
US7749622B2 (en) | 2002-10-22 | 2010-07-06 | Asahi Glass Company, Limited | Multilayer film-coated substrate and process for its production |
US7931325B2 (en) | 2003-05-16 | 2011-04-26 | Robbins Leslie D | Windshield ice removal device |
JP3940709B2 (en) * | 2003-07-01 | 2007-07-04 | 株式会社東芝 | Phase change optical recording medium |
US7253123B2 (en) * | 2005-01-10 | 2007-08-07 | Applied Materials, Inc. | Method for producing gate stack sidewall spacers |
TWI335997B (en) | 2005-07-01 | 2011-01-11 | Hon Hai Prec Ind Co Ltd | Optical filter |
US8299400B2 (en) | 2005-08-04 | 2012-10-30 | Guardian Industries Corp. | Heatable vehicle window utilizing silver inclusive epoxy electrical connection and method of making same |
CN100539071C (en) * | 2006-02-16 | 2009-09-09 | 中芯国际集成电路制造(上海)有限公司 | Be used to form the method for low dielectric constant fluorine doping layer |
WO2007096483A2 (en) * | 2006-02-23 | 2007-08-30 | Picodeon Ltd Oy | Coating on a stone or ceramic substrate and a coated stone or ceramic product |
JP4193153B2 (en) | 2007-03-06 | 2008-12-10 | いすゞ自動車株式会社 | Defroster nozzle |
CA2628517C (en) | 2007-10-17 | 2013-08-13 | Adm21 Co., Ltd. | Wiper blade with heating elements |
FR2940966B1 (en) * | 2009-01-09 | 2011-03-04 | Saint Gobain | HYDROPHOBIC SUBSTRATE COMPRISING A PLASMA ACTIVATED SILICON OXYCARBIDE PREMIUM |
US8866047B1 (en) | 2010-02-20 | 2014-10-21 | Darren Parker | Removable timed windshield deicer sheet |
US8362399B2 (en) | 2010-02-22 | 2013-01-29 | Seaborn W John | Windshield heater |
US8976319B2 (en) * | 2010-11-16 | 2015-03-10 | Sharp Kabushiki Kaisha | Display device comprising an ion-generating device and a guiding mechanism that can selectively guide air from a fan |
CN106405707B (en) | 2011-06-06 | 2021-07-20 | Agc株式会社 | Optical filter, solid-state imaging element, lens for imaging device, and imaging device |
FR2982608B1 (en) * | 2011-11-16 | 2013-11-22 | Saint Gobain | BARRIER LAYER WITH ALKALI METALS BASED ON SIOC |
TWI648561B (en) | 2012-07-16 | 2019-01-21 | 美商唯亞威方案公司 | Optical filter and sensor system |
EP2951621B1 (en) | 2013-01-29 | 2021-01-27 | Viavi Solutions Inc. | A variable optical filter and a wavelength-selective sensor based thereon |
FR3008100B1 (en) | 2013-07-08 | 2015-06-26 | Saint Gobain | COPOLYMER FOR HYDROPHOBIC COATING WITH IMPROVED DURABILITY |
JP6347705B2 (en) * | 2014-09-17 | 2018-06-27 | 株式会社日立国際電気 | Semiconductor device manufacturing method, substrate processing apparatus, and program |
TWI559026B (en) | 2015-06-24 | 2016-11-21 | 財團法人工業技術研究院 | Anti-reflection strcuture and method of forming the same |
US10170299B2 (en) * | 2015-07-01 | 2019-01-01 | Applied Materials, Inc. | Method to reduce trap-induced capacitance in interconnect dielectric barrier stack |
-
2020
- 2020-02-19 JP JP2021556224A patent/JP7332709B2/en active Active
- 2020-02-19 KR KR1020217033034A patent/KR102655348B1/en active IP Right Grant
- 2020-02-19 DE DE112020001319.7T patent/DE112020001319T5/en active Pending
- 2020-02-19 WO PCT/US2020/018886 patent/WO2020190441A1/en active Application Filing
- 2020-02-19 US US16/795,431 patent/US11530478B2/en active Active
- 2020-02-24 TW TW109105826A patent/TW202039917A/en unknown
-
2022
- 2022-11-07 US US17/982,470 patent/US20230063929A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
KR102655348B1 (en) | 2024-04-04 |
KR20210127814A (en) | 2021-10-22 |
JP7332709B2 (en) | 2023-08-23 |
JP2022525634A (en) | 2022-05-18 |
DE112020001319T5 (en) | 2021-12-02 |
US11530478B2 (en) | 2022-12-20 |
TW202039917A (en) | 2020-11-01 |
WO2020190441A1 (en) | 2020-09-24 |
US20200299834A1 (en) | 2020-09-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20230063929A1 (en) | Hydrophobic and icephobic coating | |
EP1720808B1 (en) | Substrate, such as a glass substrate, with a hydrophobic surface and improved durability of hydrophobic properties | |
EP0519690B1 (en) | Anti-reflective coating with gradient zone | |
AU2004283938B2 (en) | Substrate, in particular glass substrate, supporting a photocatalytic layer coated with a protective thin layer | |
JP5107494B2 (en) | Hydrophobic coating containing DLC on substrate | |
US5245468A (en) | Anti-reflective transparent coating | |
KR100721782B1 (en) | Transparent substrate comprising an antireflection coating, laminated glazing comprising the substrate, method for using the glazing and method for manufacturing the substrate | |
US5733660A (en) | Glass pane with reflectance reducing coating | |
US20070196633A1 (en) | Durable transparent coatings for polymeric substrates | |
EP1654201A2 (en) | Method for preparing a photocatalytic coating integrated into glazing heat treatment | |
US20200333593A1 (en) | Head-up display with improved anti-reflection functional coating on windshield | |
EP0712815A1 (en) | Glazing provided with a thin coating and process for making it | |
EP1813582A1 (en) | Transparent substrate coated with multilayered thin films | |
US20140065395A1 (en) | Barrier coatings for polymeric substrates | |
US11422294B2 (en) | Durable functional coatings | |
WO2024090311A1 (en) | Light-absorbing composition, production method for light-absorbing composition, light absorption film, optical filter, and manufacturing method for optical filter | |
JP2001228304A (en) | Molding with anticlouding thin film and method for producing same | |
US11585970B2 (en) | Low loss single crystal multilayer optical component and method of making same | |
EP0826641B1 (en) | Glazing comprising a substrate furnished with a multiplicity of thin layers providing thermal insulation and/or solar protection | |
JP2012247512A (en) | Antireflection film of plastic optical component and method for producing antireflection film of plastic optical component | |
JP2895749B2 (en) | Water-repellent reflection reducing glass | |
WO2022053760A1 (en) | Laminated glazing with reduced external light reflection and head-up display with improved visibility | |
KR20230012831A (en) | High hardness lens and protective window |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
AS | Assignment |
Owner name: APPLIED MATERIALS, INC., CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BAJAJ, RAJEEV;CHANG, MEI;PADHI, DEENESH;REEL/FRAME:062612/0018 Effective date: 20200220 |