JP7332301B2 - 蒸着マスク及び蒸着マスクの製造方法 - Google Patents

蒸着マスク及び蒸着マスクの製造方法 Download PDF

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Publication number
JP7332301B2
JP7332301B2 JP2019016362A JP2019016362A JP7332301B2 JP 7332301 B2 JP7332301 B2 JP 7332301B2 JP 2019016362 A JP2019016362 A JP 2019016362A JP 2019016362 A JP2019016362 A JP 2019016362A JP 7332301 B2 JP7332301 B2 JP 7332301B2
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Japan
Prior art keywords
vapor deposition
manufacturing
holding frame
deposition mask
layer
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JP2019016362A
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Japanese (ja)
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JP2020122208A5 (https=
JP2020122208A (ja
Inventor
優子 松本
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Japan Display Inc
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Japan Display Inc
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Application filed by Japan Display Inc filed Critical Japan Display Inc
Priority to JP2019016362A priority Critical patent/JP7332301B2/ja
Priority to PCT/JP2019/042845 priority patent/WO2020158082A1/ja
Priority to CN201980089786.XA priority patent/CN113330134B/zh
Publication of JP2020122208A publication Critical patent/JP2020122208A/ja
Publication of JP2020122208A5 publication Critical patent/JP2020122208A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP2019016362A 2019-01-31 2019-01-31 蒸着マスク及び蒸着マスクの製造方法 Active JP7332301B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019016362A JP7332301B2 (ja) 2019-01-31 2019-01-31 蒸着マスク及び蒸着マスクの製造方法
PCT/JP2019/042845 WO2020158082A1 (ja) 2019-01-31 2019-10-31 蒸着マスク及び蒸着マスクの製造方法
CN201980089786.XA CN113330134B (zh) 2019-01-31 2019-10-31 蒸镀掩模和蒸镀掩模的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019016362A JP7332301B2 (ja) 2019-01-31 2019-01-31 蒸着マスク及び蒸着マスクの製造方法

Publications (3)

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JP2020122208A JP2020122208A (ja) 2020-08-13
JP2020122208A5 JP2020122208A5 (https=) 2022-02-02
JP7332301B2 true JP7332301B2 (ja) 2023-08-23

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JP2019016362A Active JP7332301B2 (ja) 2019-01-31 2019-01-31 蒸着マスク及び蒸着マスクの製造方法

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JP (1) JP7332301B2 (https=)
CN (1) CN113330134B (https=)
WO (1) WO2020158082A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7737833B2 (ja) * 2021-06-30 2025-09-11 株式会社Magnolia White 蒸着マスク
JP2025137443A (ja) * 2024-03-07 2025-09-19 大日本印刷株式会社 マスク装置、マスク積層体、フレーム積層体、マスクの交換方法、及び、有機デバイスの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000196243A (ja) 1998-12-28 2000-07-14 Fujitsu Ltd フレキシブル多層回路基板の製造方法
JP2003107723A (ja) 2001-09-25 2003-04-09 Eastman Kodak Co メタルマスクの製造方法およびメタルマスク
JP2004349086A (ja) 2003-05-21 2004-12-09 Kyushu Hitachi Maxell Ltd 有機ｅｌ素子用の蒸着マスクとその製造方法
JP2012114431A (ja) 2010-11-23 2012-06-14 Ibiden Co Ltd 半導体搭載用基板、半導体装置及び半導体装置の製造方法
JP2015168848A (ja) 2014-03-06 2015-09-28 大日本印刷株式会社 基板付蒸着マスク装置の製造方法、基板付蒸着マスクおよびレジストパターン付基板

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6430668B2 (ja) * 2016-02-10 2018-11-28 鴻海精密工業股▲ふん▼有限公司 蒸着マスクの製造方法、蒸着マスク、および有機半導体素子の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000196243A (ja) 1998-12-28 2000-07-14 Fujitsu Ltd フレキシブル多層回路基板の製造方法
JP2003107723A (ja) 2001-09-25 2003-04-09 Eastman Kodak Co メタルマスクの製造方法およびメタルマスク
JP2004349086A (ja) 2003-05-21 2004-12-09 Kyushu Hitachi Maxell Ltd 有機ｅｌ素子用の蒸着マスクとその製造方法
JP2012114431A (ja) 2010-11-23 2012-06-14 Ibiden Co Ltd 半導体搭載用基板、半導体装置及び半導体装置の製造方法
JP2015168848A (ja) 2014-03-06 2015-09-28 大日本印刷株式会社 基板付蒸着マスク装置の製造方法、基板付蒸着マスクおよびレジストパターン付基板

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
木村馨，無機接着剤の現状，溶接学会誌，日本，1984年03月05日，第53巻第2号， pp.86-93，pp.86-93

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CN113330134B (zh) 2024-01-09
WO2020158082A1 (ja) 2020-08-06
CN113330134A (zh) 2021-08-31
JP2020122208A (ja) 2020-08-13

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