JP7329609B2 - 紫外及び可視波長のプラズモニックフォトカソードエミッタ及び方法 - Google Patents

紫外及び可視波長のプラズモニックフォトカソードエミッタ及び方法 Download PDF

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JP7329609B2
JP7329609B2 JP2021547727A JP2021547727A JP7329609B2 JP 7329609 B2 JP7329609 B2 JP 7329609B2 JP 2021547727 A JP2021547727 A JP 2021547727A JP 2021547727 A JP2021547727 A JP 2021547727A JP 7329609 B2 JP7329609 B2 JP 7329609B2
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photocathode
layer
plasmonic
array
plasmonic structure
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Japanese (ja)
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JP2022521190A (ja
JP2022521190A5 (https=
JPWO2020168139A5 (https=
Inventor
カテリナ イオーケイミディ
ギルダルド デルガド
フランシス ヒル
ガリー ロペス
ミゲル エー ゴンザレス
アラン ブロディー
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KLA Corp
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KLA Corp
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Priority to JP2023110436A priority Critical patent/JP7599526B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3423—Semiconductors, e.g. GaAs, NEA emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3425—Metals, metal alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06333—Photo emission

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
JP2021547727A 2019-02-17 2020-02-14 紫外及び可視波長のプラズモニックフォトカソードエミッタ及び方法 Active JP7329609B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023110436A JP7599526B2 (ja) 2019-02-17 2023-07-05 紫外及び可視波長のプラズモニックフォトカソードエミッタ

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962806822P 2019-02-17 2019-02-17
US62/806,822 2019-02-17
US16/789,650 2020-02-13
US16/789,650 US11495428B2 (en) 2019-02-17 2020-02-13 Plasmonic photocathode emitters at ultraviolet and visible wavelengths
PCT/US2020/018199 WO2020168139A1 (en) 2019-02-17 2020-02-14 Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023110436A Division JP7599526B2 (ja) 2019-02-17 2023-07-05 紫外及び可視波長のプラズモニックフォトカソードエミッタ

Publications (4)

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JP2022521190A JP2022521190A (ja) 2022-04-06
JP2022521190A5 JP2022521190A5 (https=) 2023-02-22
JPWO2020168139A5 JPWO2020168139A5 (https=) 2023-02-22
JP7329609B2 true JP7329609B2 (ja) 2023-08-18

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JP2023110436A Active JP7599526B2 (ja) 2019-02-17 2023-07-05 紫外及び可視波長のプラズモニックフォトカソードエミッタ

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Country Status (6)

Country Link
US (1) US11495428B2 (https=)
EP (1) EP3912182A4 (https=)
JP (2) JP7329609B2 (https=)
KR (1) KR102615663B1 (https=)
TW (1) TWI829864B (https=)
WO (1) WO2020168139A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11217416B2 (en) 2019-09-27 2022-01-04 Kla Corporation Plasmonic photocathode emitters
CN112420466B (zh) * 2020-10-29 2021-11-19 清华大学 表面等离激元诱导的电子发射源
CN112908807B (zh) * 2021-01-13 2024-07-02 陕西理工大学 一种光电阴极及其应用
KR102714203B1 (ko) 2021-12-23 2024-10-04 계명대학교 산학협력단 플라즈몬 나노입자를 포함하는 박막형 광학소재 제조방법
CN119252723B (zh) * 2024-09-26 2025-10-24 杭州邦齐州科技有限公司 一种光电阴极用级联增强型光学输入窗

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JP2017053823A (ja) 2015-09-11 2017-03-16 株式会社東芝 電子線照射装置
JP2022501772A (ja) 2018-09-18 2022-01-06 ケーエルエー コーポレイション 金属封入光電陰極電子エミッタ

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JP2017053823A (ja) 2015-09-11 2017-03-16 株式会社東芝 電子線照射装置
JP2022501772A (ja) 2018-09-18 2022-01-06 ケーエルエー コーポレイション 金属封入光電陰極電子エミッタ

Also Published As

Publication number Publication date
JP2022521190A (ja) 2022-04-06
US11495428B2 (en) 2022-11-08
WO2020168139A9 (en) 2020-09-24
TW202101505A (zh) 2021-01-01
EP3912182A1 (en) 2021-11-24
KR102615663B1 (ko) 2023-12-19
WO2020168139A1 (en) 2020-08-20
US20200266019A1 (en) 2020-08-20
JP2023118869A (ja) 2023-08-25
TWI829864B (zh) 2024-01-21
EP3912182A4 (en) 2022-12-28
KR20210118223A (ko) 2021-09-29
JP7599526B2 (ja) 2024-12-13

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