JP2022521190A5 - - Google Patents

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Publication number
JP2022521190A5
JP2022521190A5 JP2021547727A JP2021547727A JP2022521190A5 JP 2022521190 A5 JP2022521190 A5 JP 2022521190A5 JP 2021547727 A JP2021547727 A JP 2021547727A JP 2021547727 A JP2021547727 A JP 2021547727A JP 2022521190 A5 JP2022521190 A5 JP 2022521190A5
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JP
Japan
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JP2021547727A
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Japanese (ja)
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JP7329609B2 (ja
JP2022521190A (ja
JPWO2020168139A5 (https=
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Priority claimed from US16/789,650 external-priority patent/US11495428B2/en
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Priority to JP2023110436A priority Critical patent/JP7599526B2/ja
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JP2021547727A 2019-02-17 2020-02-14 紫外及び可視波長のプラズモニックフォトカソードエミッタ及び方法 Active JP7329609B2 (ja)

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JP2023110436A JP7599526B2 (ja) 2019-02-17 2023-07-05 紫外及び可視波長のプラズモニックフォトカソードエミッタ

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962806822P 2019-02-17 2019-02-17
US62/806,822 2019-02-17
US16/789,650 2020-02-13
US16/789,650 US11495428B2 (en) 2019-02-17 2020-02-13 Plasmonic photocathode emitters at ultraviolet and visible wavelengths
PCT/US2020/018199 WO2020168139A1 (en) 2019-02-17 2020-02-14 Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Related Child Applications (1)

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JP2023110436A Division JP7599526B2 (ja) 2019-02-17 2023-07-05 紫外及び可視波長のプラズモニックフォトカソードエミッタ

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JP2022521190A JP2022521190A (ja) 2022-04-06
JP2022521190A5 true JP2022521190A5 (https=) 2023-02-22
JPWO2020168139A5 JPWO2020168139A5 (https=) 2023-02-22
JP7329609B2 JP7329609B2 (ja) 2023-08-18

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JP2021547727A Active JP7329609B2 (ja) 2019-02-17 2020-02-14 紫外及び可視波長のプラズモニックフォトカソードエミッタ及び方法
JP2023110436A Active JP7599526B2 (ja) 2019-02-17 2023-07-05 紫外及び可視波長のプラズモニックフォトカソードエミッタ

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US (1) US11495428B2 (https=)
EP (1) EP3912182A4 (https=)
JP (2) JP7329609B2 (https=)
KR (1) KR102615663B1 (https=)
TW (1) TWI829864B (https=)
WO (1) WO2020168139A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11217416B2 (en) 2019-09-27 2022-01-04 Kla Corporation Plasmonic photocathode emitters
CN112420466B (zh) * 2020-10-29 2021-11-19 清华大学 表面等离激元诱导的电子发射源
CN112908807B (zh) * 2021-01-13 2024-07-02 陕西理工大学 一种光电阴极及其应用
KR102714203B1 (ko) 2021-12-23 2024-10-04 계명대학교 산학협력단 플라즈몬 나노입자를 포함하는 박막형 광학소재 제조방법
CN119252723B (zh) * 2024-09-26 2025-10-24 杭州邦齐州科技有限公司 一种光电阴极用级联增强型光学输入窗

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576559A (en) * 1994-11-01 1996-11-19 Intevac, Inc. Heterojunction electron transfer device
US5912500A (en) * 1995-11-22 1999-06-15 Intevac, Inc. Integrated photocathode
US6538256B1 (en) * 2000-08-17 2003-03-25 Applied Materials, Inc. Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance
US7015467B2 (en) 2002-10-10 2006-03-21 Applied Materials, Inc. Generating electrons with an activated photocathode
US20050285128A1 (en) 2004-02-10 2005-12-29 California Institute Of Technology Surface plasmon light emitter structure and method of manufacture
US7301263B2 (en) 2004-05-28 2007-11-27 Applied Materials, Inc. Multiple electron beam system with electron transmission gates
JP4939033B2 (ja) * 2005-10-31 2012-05-23 浜松ホトニクス株式会社 光電陰極
JP4995660B2 (ja) * 2007-07-30 2012-08-08 浜松ホトニクス株式会社 光電陰極
CN102187425B (zh) 2008-10-16 2013-11-06 小利兰·斯坦福大学托管委员会 光子增强型热离子发射
US8196217B2 (en) 2009-08-14 2012-06-05 The Board Of Trustees Of The Leland Stanford Junior University Tip-enhanced resonant apertures
KR101038923B1 (ko) 2010-02-02 2011-06-03 전북대학교산학협력단 개선된 발광 효율을 갖는 발광 다이오드 및 이의 제조방법
JP2012069459A (ja) * 2010-09-27 2012-04-05 Hamamatsu Photonics Kk 撮像装置
KR101182359B1 (ko) 2010-12-13 2012-09-20 한국과학기술원 메탈 나노 입자의 표면 플라즈몬 공명 특성을 적용하여 강화된 음극선 발광 형광체의 구조
WO2012126792A1 (en) 2011-03-18 2012-09-27 Ecole Polytechnique Federale De Lausanne (Epfl) Electron beam apparatus
US9287057B2 (en) 2013-06-05 2016-03-15 City University Of Hong Kong Plasmonic enhanced tandem dye-sensitized solar cell with metallic nanostructures
KR102320646B1 (ko) 2014-07-24 2021-11-04 유니버셜 디스플레이 코포레이션 향상층(들)을 갖는 oled 디바이스
US9418814B2 (en) 2015-01-12 2016-08-16 Uchicago Argonne, Llc Planar field emitters and high efficiency photocathodes based on ultrananocrystalline diamond
US10748730B2 (en) * 2015-05-21 2020-08-18 Kla-Tencor Corporation Photocathode including field emitter array on a silicon substrate with boron layer
US10074509B2 (en) 2015-06-07 2018-09-11 Purdue Research Foundation Plasmon-excited electron beam array for complementary patterning
JP2017053823A (ja) * 2015-09-11 2017-03-16 株式会社東芝 電子線照射装置
US9984846B2 (en) 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
JP6867568B2 (ja) 2016-11-07 2021-04-28 国立大学法人東京工業大学 ナノスケール光陰極電子源
US10141155B2 (en) * 2016-12-20 2018-11-27 Kla-Tencor Corporation Electron beam emitters with ruthenium coating
JP6501285B2 (ja) * 2017-04-05 2019-04-17 株式会社Photo electron Soul 電子線発生装置、および、電子線適用装置
CN107275168B (zh) 2017-06-06 2019-03-29 东南大学 一种基于氮化钛的新型纳米结构光阴极
US10395884B2 (en) 2017-10-10 2019-08-27 Kla-Tencor Corporation Ruthenium encapsulated photocathode electron emitter
US10535493B2 (en) 2017-10-10 2020-01-14 Kla-Tencor Corporation Photocathode designs and methods of generating an electron beam using a photocathode
CN108231507B (zh) 2017-12-12 2020-06-23 东南大学 一种基于新型纳米结构的光阴极及其制备方法
CN108630510A (zh) 2018-05-21 2018-10-09 南京理工大学 变掺杂GaN纳米线阵列光电阴极及其制备方法
US10714295B2 (en) * 2018-09-18 2020-07-14 Kla-Tencor Corporation Metal encapsulated photocathode electron emitter
US11217416B2 (en) * 2019-09-27 2022-01-04 Kla Corporation Plasmonic photocathode emitters

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