JP7329608B2 - 空間的に変化する偏光回転子および偏光子を用いた高感度粒子検出 - Google Patents
空間的に変化する偏光回転子および偏光子を用いた高感度粒子検出 Download PDFInfo
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- 230000010287 polarization Effects 0.000 title claims description 259
- 239000002245 particle Substances 0.000 title claims description 125
- 238000001514 detection method Methods 0.000 title description 49
- 210000001747 pupil Anatomy 0.000 claims description 108
- 238000005286 illumination Methods 0.000 claims description 84
- 238000009826 distribution Methods 0.000 claims description 49
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000003384 imaging method Methods 0.000 claims description 28
- 230000005684 electric field Effects 0.000 claims description 26
- 230000004044 response Effects 0.000 claims description 13
- 230000000903 blocking effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 26
- 230000006870 function Effects 0.000 description 20
- 239000011149 active material Substances 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 230000001902 propagating effect Effects 0.000 description 10
- 230000000670 limiting effect Effects 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 230000003750 conditioning effect Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- 230000011218 segmentation Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000002123 temporal effect Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- -1 but not limited to Substances 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Description
Claims (9)
- システムであって、
照射ビームを生成するように構成された照射源と、
前記照射ビームを照射方向に沿って軸外角度で試料に向けるための1つ以上の照射光学部品と、
暗視野モードでの前記照射ビームに応答して、前記試料からの散乱光を収集するための1つ以上の収集光学部品と、
前記1つ以上の収集光学部品の瞳面に配置された偏光回転子であって、前記試料の表面から散乱された光を、選択された偏光角に回転させるように選択された、空間的に変化する偏光回転角をもたらす、偏光回転子であり、前記瞳面内の頂点において交差するように方向付けられた端部を有する、複数の区分を含んだ環状に区分化された半波長板を備え、前記頂点の位置は、前記照射ビームの鏡面反射角度に対応する前記瞳面内の点に一致する、偏光回転子と、
前記選択された偏光角に沿って偏光された光を阻止するように整列された偏光子と、
前記偏光子によって通過された光に基づいて、前記試料の暗視野像を生成するための検出器であって、前記偏光子によって通過された光は、前記試料の前記表面上の1つ以上の粒子によって散乱された光の少なくとも一部分を含む、検出器と
を備えることを特徴とするシステム。 - 請求項1に記載のシステムであって、前記1つ以上の照射光学部品は、p偏光によって前記照射ビームを前記試料に向けるように構成されることを特徴とするシステム。
- 請求項1に記載のシステムであって、前記偏光子は、
偏光ビームスプリッタを備え、前記偏光ビームスプリッタは、前記偏光子によって通過された前記試料からの前記散乱光を、第1の光路に沿って向け、前記偏光ビームスプリッタは、前記偏光子によって阻止された前記試料からの前記散乱光を、前記第1の光路とは異なる第2の光路に沿って向ける
ことを特徴とするシステム。 - 請求項3に記載のシステムであって、前記第2の光路に沿った、前記偏光子によって阻止された前記試料からの前記散乱光に基づいて、前記試料の暗視野像を生成するように構成された追加の検出器であって、前記偏光子によって阻止された前記試料からの前記散乱光は、選択された阻止許容範囲内の前記試料の前記表面によって散乱された光を含む、追加の検出器
をさらに備えることを特徴とするシステム。 - 請求項1に記載のシステムであって、前記試料の表面から散乱された光は既知の電界分布を有し、前記偏光回転子は、既知の電界分布に偏光された光を、前記選択された偏光角に回転させるように構成されることを特徴とするシステム。
- 請求項1に記載のシステムであって、前記瞳面内の前記頂点の位置は、前記1つ以上の収集光学部品によって収集された光に関連付けられた収集エリアの外側にあることを特徴とするシステム。
- 請求項1に記載のシステムであって、前記瞳面内の前記頂点の位置は、前記1つ以上の収集光学部品によって収集された光に関連付けられた収集エリアの内側にあることを特徴とするシステム。
- 装置であって、
暗視野撮像システムの瞳面に配置された偏光回転子を備え、前記暗視野撮像システムは、軸外照射に応答して、試料からの散乱光を収集するための1つ以上の収集光学部品を含み、前記偏光回転子は、前記試料の表面から散乱された光を、選択された偏光角に回転させるように選択された、空間的に変化する偏光回転角をもたらし、前記偏光回転子は、前記瞳面内の頂点において交差するように方向付けられた端部を有する、複数の区分を含んだ環状に区分化された半波長板を備え、前記頂点の位置は、照射ビームの鏡面反射角度に対応する前記瞳面内の点に一致し、前記偏光回転子は、前記試料の表面から散乱された前記光を阻止するために、前記選択された偏光角に沿って偏光された光を阻止するように整列された偏光子に結合されるように構成される、
ことを特徴とする装置。 - 請求項8に記載の装置であって、前記試料の表面から散乱された光は既知の電界分布を有し、前記偏光回転子は、既知の電界分布に偏光された光を、前記選択された偏光角に回転させるように構成されることを特徴とする装置。
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US16/577,326 US10948423B2 (en) | 2019-02-17 | 2019-09-20 | Sensitive particle detection with spatially-varying polarization rotator and polarizer |
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US10948423B2 (en) | 2019-02-17 | 2021-03-16 | Kla Corporation | Sensitive particle detection with spatially-varying polarization rotator and polarizer |
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US11879853B2 (en) | 2021-02-19 | 2024-01-23 | Kla Corporation | Continuous degenerate elliptical retarder for sensitive particle detection |
CN113125436B (zh) * | 2021-04-22 | 2022-08-30 | 华中科技大学 | 基于光学暗场显微技术的检测系统和方法 |
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Also Published As
Publication number | Publication date |
---|---|
KR20210118957A (ko) | 2021-10-01 |
IL294835A (en) | 2022-09-01 |
CN115684203A (zh) | 2023-02-03 |
TW202043738A (zh) | 2020-12-01 |
TWI828838B (zh) | 2024-01-11 |
KR102617173B1 (ko) | 2023-12-21 |
IL285501B1 (en) | 2024-04-01 |
US20210164918A1 (en) | 2021-06-03 |
CN113544497A (zh) | 2021-10-22 |
CN113544497B (zh) | 2023-04-04 |
WO2020167618A1 (en) | 2020-08-20 |
US20200264109A1 (en) | 2020-08-20 |
JP2023118958A (ja) | 2023-08-25 |
TWI829504B (zh) | 2024-01-11 |
JP2022521489A (ja) | 2022-04-08 |
DE112020000832T5 (de) | 2021-11-04 |
TW202321673A (zh) | 2023-06-01 |
US10948423B2 (en) | 2021-03-16 |
US11243175B2 (en) | 2022-02-08 |
IL285501A (en) | 2021-09-30 |
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