JP7324515B2 - レーザービームを用いて被加工材を加工する装置 - Google Patents

レーザービームを用いて被加工材を加工する装置 Download PDF

Info

Publication number
JP7324515B2
JP7324515B2 JP2020519731A JP2020519731A JP7324515B2 JP 7324515 B2 JP7324515 B2 JP 7324515B2 JP 2020519731 A JP2020519731 A JP 2020519731A JP 2020519731 A JP2020519731 A JP 2020519731A JP 7324515 B2 JP7324515 B2 JP 7324515B2
Authority
JP
Japan
Prior art keywords
workpiece
laser
laser beam
signal
pressurized liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020519731A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020535974A5 (enExample
JP2020535974A (ja
Inventor
ヒッペルト、ダーヴィド
ラポルト、グレゴワール
エップレ、マキシミリアン
ディール、ヘルギ
リヘルツハーゲン、ベルナルド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Synova SA
Original Assignee
Synova SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Synova SA filed Critical Synova SA
Publication of JP2020535974A publication Critical patent/JP2020535974A/ja
Publication of JP2020535974A5 publication Critical patent/JP2020535974A5/ja
Application granted granted Critical
Publication of JP7324515B2 publication Critical patent/JP7324515B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/004—Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
    • B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Laser Beam Processing (AREA)
JP2020519731A 2017-10-05 2018-10-04 レーザービームを用いて被加工材を加工する装置 Active JP7324515B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17195003.3 2017-10-05
EP17195003.3A EP3466597A1 (en) 2017-10-05 2017-10-05 Apparatus for machining a workpiece with a laser beam
PCT/EP2018/077038 WO2019068823A2 (en) 2017-10-05 2018-10-04 APPARATUS FOR MACHINING A PIECE BY LASER BEAM

Publications (3)

Publication Number Publication Date
JP2020535974A JP2020535974A (ja) 2020-12-10
JP2020535974A5 JP2020535974A5 (enExample) 2022-11-11
JP7324515B2 true JP7324515B2 (ja) 2023-08-10

Family

ID=60022007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020519731A Active JP7324515B2 (ja) 2017-10-05 2018-10-04 レーザービームを用いて被加工材を加工する装置

Country Status (9)

Country Link
US (1) US11697175B2 (enExample)
EP (2) EP3466597A1 (enExample)
JP (1) JP7324515B2 (enExample)
KR (1) KR102584148B1 (enExample)
CN (1) CN111194249A (enExample)
CA (1) CA3074403A1 (enExample)
IL (1) IL273758B2 (enExample)
RU (1) RU2764101C2 (enExample)
WO (1) WO2019068823A2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3984687A1 (de) * 2020-10-16 2022-04-20 Bystronic Laser AG Strahlbearbeitungskopf und verfahren zur strahlbearbeitung
DE102020213813A1 (de) * 2020-11-03 2022-05-05 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zum Einstellen von Betriebsparametern eines physikalischen Systems
US20240391026A1 (en) * 2023-05-25 2024-11-28 Industrial Laser Machines, LLC Liquid Jet Laser Tool Utilizing An Off-Axis Laser Beam
AT527326B1 (de) 2024-02-27 2025-01-15 Aidexa Gmbh Messvorrichtung zur optischen Abtastung mittels wasserstrahlgeführter Lichtquelleneinstrahlung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005125398A (ja) 2003-10-27 2005-05-19 Shibaura Mechatronics Corp レーザ加工装置
JP2006245438A (ja) 2005-03-04 2006-09-14 Hitachi Via Mechanics Ltd プリント基板の穴明け方法およびプリント基板の穴明け装置
JP2010115680A (ja) 2008-11-12 2010-05-27 Suzuki Motor Corp レーザ加工良否判定方法及び装置
JP2011064503A (ja) 2009-09-15 2011-03-31 Nippon Steel Corp 圧縮応力値の推定方法、圧縮応力値推定装置およびレーザ加工装置
JP2011212710A (ja) 2010-03-31 2011-10-27 Shibuya Kogyo Co Ltd レーザ加工装置の液柱観察装置および液柱観察方法
JP2014512273A (ja) 2011-04-21 2014-05-22 アディジェ ソシエタ ペル アチオニ レーザ切断プロセスの制御方法およびこれを行うレーザ切断システム
JP2016137520A (ja) 2015-01-08 2016-08-04 ゼネラル・エレクトリック・カンパニイ 閉じ込めレーザ穿孔のための方法およびシステム

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3147459B2 (ja) * 1992-02-06 2001-03-19 石川島播磨重工業株式会社 レーザ加工機の加工ヘッド
US6163010A (en) * 1996-10-25 2000-12-19 E. I. Du Pont De Nemours And Company Method and apparatus for laser cutting materials
JPH11254161A (ja) 1998-03-09 1999-09-21 Amada Co Ltd レーザー加工装置及び加工ヘッド駆動方法
CA2330426C (en) * 1998-04-30 2007-11-13 Synova S.A. Material shaping device with a laser beam which is injected into a stream of liquid
RU2155653C2 (ru) * 1998-06-08 2000-09-10 Курский государственный технический университет Видеосенсорное устройство
US6140604A (en) * 1998-06-18 2000-10-31 General Electric Company Laser drilling breakthrough detector
DE19852302A1 (de) * 1998-11-12 2000-05-25 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Bearbeiten von Werkstücken mit Hochenergiestrahlung
DE10103255B4 (de) * 2001-01-25 2004-12-30 Robert Bosch Gmbh Verfahren zur automatischen Beurteilung von Laserbearbeitungsprozessen
FR2836620B1 (fr) 2002-02-28 2004-04-16 Snecma Services Instrument de projection thermique
SE521787C2 (sv) * 2002-04-05 2003-12-09 Volvo Aero Corp Anordning och förfarande för kontroll av ett svetsområde, inrättning och förfarande för styrning av en svetsoperation, datorprogram och datorprogramprodukt
US7286223B2 (en) * 2003-03-18 2007-10-23 Loma Linda University Medical Center Method and apparatus for detecting embedded rebar within an interaction region of a structure irradiated with laser light
DE50312360D1 (de) 2003-08-09 2010-03-11 Trumpf Werkzeugmaschinen Gmbh Laserbearbeitungsdüsenkupplung
JP5035653B2 (ja) 2005-03-18 2012-09-26 澁谷工業株式会社 ハイブリッドレーザ加工装置
JP2009000698A (ja) 2007-06-19 2009-01-08 Sumitomo Jukikai Advanced Machinery Kk レーザ加工装置及びレーザ加工方法
JP5147445B2 (ja) 2007-09-28 2013-02-20 株式会社スギノマシン 噴流液柱内に導かれたレーザー光によるレーザー加工装置
US8134098B2 (en) * 2007-09-28 2012-03-13 Sugino Machine Limited Laser machining apparatus using laser beam introduced into jet liquid column
JP5196298B2 (ja) 2008-02-18 2013-05-15 澁谷工業株式会社 レーザ加工装置
JP2009241138A (ja) * 2008-03-31 2009-10-22 Sugino Mach Ltd レーザー加工装置
US20120074110A1 (en) * 2008-08-20 2012-03-29 Zediker Mark S Fluid laser jets, cutting heads, tools and methods of use
EP2189236B1 (en) * 2008-11-21 2012-06-20 Synova S.A. Method and apparatus for improving reliability of a machining process
JP4826861B2 (ja) * 2009-07-10 2011-11-30 三菱電機株式会社 レーザ加工方法および装置
JP5431831B2 (ja) 2009-08-21 2014-03-05 株式会社ディスコ レーザー加工装置
US8525073B2 (en) * 2010-01-27 2013-09-03 United Technologies Corporation Depth and breakthrough detection for laser machining
EP2611566A4 (en) * 2010-08-31 2017-11-08 Foro Energy Inc. Fluid laser jets, cutting heads, tools and methods of use
US10124410B2 (en) * 2010-09-25 2018-11-13 Ipg Photonics Corporation Methods and systems for coherent imaging and feedback control for modification of materials
DE102012003202A1 (de) 2012-02-17 2013-08-22 Vollmer Werke Maschinenfabrik Gmbh Vorrichtung und Verfahren zum Bearbeiten von Werkstücken, insbesondere von Schneiden oder mit Schneiden versehenen Werkstücken, mit einem Nasslaser
US9468991B2 (en) * 2014-01-27 2016-10-18 General Electric Company Method determining hole completion
EP2957378A1 (de) * 2014-06-16 2015-12-23 Synova SA Bearbeitungskopf zum Einkopplen eines Laserstrahles in einem Flüssigkeitsstrahl mit einer Flüssigkeitschnittstelle
EP2960006B1 (de) * 2014-06-23 2019-02-20 Synova S.A. Verfahren und Vorrichtung zum Bestimmen einer Lage eines Flüssigkeitsstrahls durch eine Änderung einer Konstellation
US11077521B2 (en) * 2014-10-30 2021-08-03 Schlumberger Technology Corporation Creating radial slots in a subterranean formation
US9770785B2 (en) * 2014-11-18 2017-09-26 General Electric Company System and method for forming a cooling hole in an airfoil
US10589385B2 (en) * 2015-01-08 2020-03-17 General Electric Company Method and system for confined laser drilling
US9776284B2 (en) * 2015-01-22 2017-10-03 General Electric Company System and method for cutting a passage in an airfoil
EP3305457B1 (en) * 2015-05-29 2020-07-22 Makino Milling Machine Co., Ltd. Machine tool
EP3124165B1 (en) 2015-07-28 2020-06-17 Synova S.A. Process of treating a workpiece using a liquid jet guided laser beam
US10335900B2 (en) 2016-03-03 2019-07-02 General Electric Company Protective shield for liquid guided laser cutting tools
EP3486027B1 (en) * 2017-11-21 2022-12-28 Synova S.A. Measuring a fluid jet guiding a laser beam
EP3513898A1 (en) 2018-01-19 2019-07-24 Synova S.A. Apparatus for automatic jet angle adjustment
EP3533557B1 (en) * 2018-03-01 2021-05-26 Synova S.A. Apparatus for machining a workpiece with a laser beam coupled into a fluid jet, with automatic laser-nozzle alignment ; method of aligning such a beam

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005125398A (ja) 2003-10-27 2005-05-19 Shibaura Mechatronics Corp レーザ加工装置
JP2006245438A (ja) 2005-03-04 2006-09-14 Hitachi Via Mechanics Ltd プリント基板の穴明け方法およびプリント基板の穴明け装置
JP2010115680A (ja) 2008-11-12 2010-05-27 Suzuki Motor Corp レーザ加工良否判定方法及び装置
JP2011064503A (ja) 2009-09-15 2011-03-31 Nippon Steel Corp 圧縮応力値の推定方法、圧縮応力値推定装置およびレーザ加工装置
JP2011212710A (ja) 2010-03-31 2011-10-27 Shibuya Kogyo Co Ltd レーザ加工装置の液柱観察装置および液柱観察方法
JP2014512273A (ja) 2011-04-21 2014-05-22 アディジェ ソシエタ ペル アチオニ レーザ切断プロセスの制御方法およびこれを行うレーザ切断システム
JP2016137520A (ja) 2015-01-08 2016-08-04 ゼネラル・エレクトリック・カンパニイ 閉じ込めレーザ穿孔のための方法およびシステム

Also Published As

Publication number Publication date
WO2019068823A2 (en) 2019-04-11
WO2019068823A3 (en) 2019-05-16
RU2764101C2 (ru) 2022-01-13
EP3466597A1 (en) 2019-04-10
US11697175B2 (en) 2023-07-11
JP2020535974A (ja) 2020-12-10
EP3691828A2 (en) 2020-08-12
KR102584148B1 (ko) 2023-10-04
CA3074403A1 (en) 2019-04-11
RU2020112846A3 (enExample) 2021-11-09
IL273758B2 (en) 2025-01-01
IL273758B1 (en) 2024-09-01
EP3691828B1 (en) 2024-12-04
IL273758A (en) 2020-05-31
CN111194249A (zh) 2020-05-22
US20200282493A1 (en) 2020-09-10
EP3691828C0 (en) 2024-12-04
RU2020112846A (ru) 2021-11-09
KR20200091383A (ko) 2020-07-30

Similar Documents

Publication Publication Date Title
JP7324515B2 (ja) レーザービームを用いて被加工材を加工する装置
JP4107833B2 (ja) レーザ加工ヘッド
US9116131B2 (en) Method and monitoring device for the detection and monitoring of the contamination of an optical component in a device for laser material processing
JP7302888B2 (ja) レーザービームをガイドする液体噴流を測定するための装置
US20130068738A1 (en) Laser cutting head and method for cutting a workpiece by means of a laser cutting head
JP2020535974A5 (enExample)
JP5671873B2 (ja) レーザ溶接モニタリング装置
JPH03504214A (ja) レーザーにより溶接または切断を行う時の品質確認方法及び装置
KR102672099B1 (ko) 자동 레이저-노즐-정렬을 이용한 유체 제트에 결합된 레이저 빔으로 공작물을 제작하기 위한 장치 및 이러한 빔을 정렬하는 방법
CN115213552A (zh) 用于比较激光加工系统的方法和用于监控激光加工过程的方法以及所属的激光加工系统
JP5414645B2 (ja) レーザ加工装置
CN111629856B (zh) 用于自动调整射流角度的装置
JP5738051B2 (ja) レーザ加工装置
KR20260004372A (ko) 액체 제트 유도 레이저 빔을 이용한 공작물 가공을 위한 진동 감지
CN117733321A (zh) 用于激光加工头的过程监控器
JPH0520194B2 (enExample)
WO2022080394A1 (ja) レーザ加工装置及びノズル検査方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210812

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220729

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220802

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20221101

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230207

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230501

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230711

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230724

R150 Certificate of patent or registration of utility model

Ref document number: 7324515

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150