JP7316719B2 - 磁気センサ及び検査装置 - Google Patents

磁気センサ及び検査装置 Download PDF

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Publication number
JP7316719B2
JP7316719B2 JP2020141944A JP2020141944A JP7316719B2 JP 7316719 B2 JP7316719 B2 JP 7316719B2 JP 2020141944 A JP2020141944 A JP 2020141944A JP 2020141944 A JP2020141944 A JP 2020141944A JP 7316719 B2 JP7316719 B2 JP 7316719B2
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magnetic
conductive
partial surface
conductive portion
element portion
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JP2020141944A
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Japanese (ja)
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JP2022037688A5 (enExample
JP2022037688A (ja
Inventor
哲 喜々津
聡志 白鳥
仁志 岩崎
祥弘 東
義成 黒崎
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Toshiba Corp
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Toshiba Corp
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Priority to JP2020141944A priority Critical patent/JP7316719B2/ja
Priority to US17/177,014 priority patent/US11402441B2/en
Publication of JP2022037688A publication Critical patent/JP2022037688A/ja
Publication of JP2022037688A5 publication Critical patent/JP2022037688A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/36—Arrangements for testing, measuring or monitoring the electrical condition of accumulators or electric batteries, e.g. capacity or state of charge [SoC]
    • G01R31/382—Arrangements for monitoring battery or accumulator variables, e.g. SoC
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0094—Sensor arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/242—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents
    • A61B5/245—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents specially adapted for magnetoencephalographic [MEG] signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/205—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
JP2020141944A 2020-08-25 2020-08-25 磁気センサ及び検査装置 Active JP7316719B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020141944A JP7316719B2 (ja) 2020-08-25 2020-08-25 磁気センサ及び検査装置
US17/177,014 US11402441B2 (en) 2020-08-25 2021-02-16 Magnetic sensor and inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020141944A JP7316719B2 (ja) 2020-08-25 2020-08-25 磁気センサ及び検査装置

Publications (3)

Publication Number Publication Date
JP2022037688A JP2022037688A (ja) 2022-03-09
JP2022037688A5 JP2022037688A5 (enExample) 2022-04-15
JP7316719B2 true JP7316719B2 (ja) 2023-07-28

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JP2020141944A Active JP7316719B2 (ja) 2020-08-25 2020-08-25 磁気センサ及び検査装置

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US (1) US11402441B2 (enExample)
JP (1) JP7316719B2 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022105354A (ja) * 2021-01-04 2022-07-14 株式会社東芝 磁気センサ及び検査装置
JP2022108344A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP2022108403A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP2022114102A (ja) * 2021-01-26 2022-08-05 株式会社東芝 磁気センサ及び検査装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7431780B2 (ja) * 2021-08-06 2024-02-15 株式会社東芝 センサ及び検査装置
JP7615070B2 (ja) 2022-02-21 2025-01-16 株式会社東芝 センサ及び検査装置
JP7594558B2 (ja) 2022-02-21 2024-12-04 株式会社東芝 センサ及び検査装置
JP7746227B2 (ja) 2022-07-04 2025-09-30 株式会社東芝 センサ及び検査装置
JP7746226B2 (ja) 2022-07-04 2025-09-30 株式会社東芝 センサ及び検査装置
JP7746233B2 (ja) 2022-08-09 2025-09-30 株式会社東芝 磁気センサ及び検査装置
JP7746238B2 (ja) 2022-08-25 2025-09-30 株式会社東芝 磁気センサ及び検査装置
JP7783148B2 (ja) 2022-09-01 2025-12-09 株式会社東芝 センサ及び検査装置
JP7761547B2 (ja) 2022-09-01 2025-10-28 株式会社東芝 センサ及び検査装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002109707A (ja) 2000-09-29 2002-04-12 Toshiba Corp ヨーク型磁気再生ヘッドおよびその製造方法ならびに磁気ディスク装置
JP2002334412A (ja) 2001-05-11 2002-11-22 Matsushita Electric Ind Co Ltd ヨーク型ｍｒヘッドおよびその製造方法ならびに磁気記録再生装置
US20080151441A1 (en) 2006-12-22 2008-06-26 Hitachi Global Storage Technologies Magnetoresistive sensor having an anisotropic hard bias with high coercivity
JP2008153295A (ja) 2006-12-14 2008-07-03 Fujitsu Ltd 磁気抵抗効果素子、磁気ヘッドおよび磁気記憶装置
JP2018155719A (ja) 2017-03-21 2018-10-04 株式会社東芝 磁気センサ、生体細胞検出装置及び診断装置
JP2018163115A (ja) 2017-03-27 2018-10-18 Tdk株式会社 磁場検出装置
JP2019174324A (ja) 2018-03-29 2019-10-10 Tdk株式会社 磁気センサ
JP2019207167A (ja) 2018-05-29 2019-12-05 株式会社東芝 磁気センサ及び診断装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6651956B2 (ja) * 2016-04-01 2020-02-19 日立金属株式会社 電流センサ
WO2017204151A1 (ja) 2016-05-24 2017-11-30 Tdk株式会社 磁気センサ
JP6761337B2 (ja) 2016-12-28 2020-09-23 オムロン株式会社 脈波測定装置および脈波測定方法、並びに血圧測定装置
JP2019215182A (ja) 2018-06-11 2019-12-19 Tdk株式会社 磁気センサ
EP3806833A1 (en) 2018-06-15 2021-04-21 INSERM (Institut National de la Santé et de la Recherche Médicale) Use of pi3kc2b inhibitors for the preservation of vascular endothelial cell barrier integrity
JP7293147B2 (ja) * 2019-04-02 2023-06-19 株式会社東芝 磁気センサ、センサモジュール及び診断装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002109707A (ja) 2000-09-29 2002-04-12 Toshiba Corp ヨーク型磁気再生ヘッドおよびその製造方法ならびに磁気ディスク装置
JP2002334412A (ja) 2001-05-11 2002-11-22 Matsushita Electric Ind Co Ltd ヨーク型ｍｒヘッドおよびその製造方法ならびに磁気記録再生装置
JP2008153295A (ja) 2006-12-14 2008-07-03 Fujitsu Ltd 磁気抵抗効果素子、磁気ヘッドおよび磁気記憶装置
US20080151441A1 (en) 2006-12-22 2008-06-26 Hitachi Global Storage Technologies Magnetoresistive sensor having an anisotropic hard bias with high coercivity
JP2018155719A (ja) 2017-03-21 2018-10-04 株式会社東芝 磁気センサ、生体細胞検出装置及び診断装置
JP2018163115A (ja) 2017-03-27 2018-10-18 Tdk株式会社 磁場検出装置
JP2019174324A (ja) 2018-03-29 2019-10-10 Tdk株式会社 磁気センサ
JP2019207167A (ja) 2018-05-29 2019-12-05 株式会社東芝 磁気センサ及び診断装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022105354A (ja) * 2021-01-04 2022-07-14 株式会社東芝 磁気センサ及び検査装置
JP7482046B2 (ja) 2021-01-04 2024-05-13 株式会社東芝 磁気センサ及び検査装置
JP2022108344A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP2022108403A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP7426957B2 (ja) 2021-01-13 2024-02-02 株式会社東芝 磁気センサ及び検査装置
JP7426956B2 (ja) 2021-01-13 2024-02-02 株式会社東芝 磁気センサ及び検査装置
JP2022114102A (ja) * 2021-01-26 2022-08-05 株式会社東芝 磁気センサ及び検査装置
JP7426958B2 (ja) 2021-01-26 2024-02-02 株式会社東芝 磁気センサ及び検査装置

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Publication number Publication date
JP2022037688A (ja) 2022-03-09
US20220065955A1 (en) 2022-03-03
US11402441B2 (en) 2022-08-02

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