JP7310146B2 - ハードマスク付き半導体デバイスの製造用の基板及び半導体デバイスの製造方法 - Google Patents
ハードマスク付き半導体デバイスの製造用の基板及び半導体デバイスの製造方法 Download PDFInfo
- Publication number
- JP7310146B2 JP7310146B2 JP2019005444A JP2019005444A JP7310146B2 JP 7310146 B2 JP7310146 B2 JP 7310146B2 JP 2019005444 A JP2019005444 A JP 2019005444A JP 2019005444 A JP2019005444 A JP 2019005444A JP 7310146 B2 JP7310146 B2 JP 7310146B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- hard mask
- mask
- etching
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000000758 substrate Substances 0.000 title claims description 28
- 238000000034 method Methods 0.000 title description 8
- 238000005530 etching Methods 0.000 claims description 73
- 150000001875 compounds Chemical class 0.000 claims description 36
- 229910052721 tungsten Inorganic materials 0.000 claims description 19
- 229910052719 titanium Inorganic materials 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 229910052715 tantalum Inorganic materials 0.000 claims description 11
- 229910052735 hafnium Inorganic materials 0.000 claims description 10
- 229910052750 molybdenum Inorganic materials 0.000 claims description 10
- 229910052758 niobium Inorganic materials 0.000 claims description 10
- 229910052720 vanadium Inorganic materials 0.000 claims description 10
- 229910052726 zirconium Inorganic materials 0.000 claims description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical group [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 238000012360 testing method Methods 0.000 description 43
- 239000007789 gas Substances 0.000 description 36
- 235000012431 wafers Nutrition 0.000 description 36
- 238000011156 evaluation Methods 0.000 description 32
- 238000002834 transmittance Methods 0.000 description 22
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 14
- 229910052707 ruthenium Inorganic materials 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 239000010936 titanium Substances 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 239000000956 alloy Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000010955 niobium Substances 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000005121 nitriding Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000001039 wet etching Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 239000000654 additive Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052681 coesite Inorganic materials 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical group [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000010000 carbonizing Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical group [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- BCCOBQSFUDVTJQ-UHFFFAOYSA-N octafluorocyclobutane Chemical compound FC1(F)C(F)(F)C(F)(F)C1(F)F BCCOBQSFUDVTJQ-UHFFFAOYSA-N 0.000 description 1
- 235000019407 octafluorocyclobutane Nutrition 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- -1 tungsten nitride Chemical class 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical group [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
前記化合物は窒化、酸化あるいは炭化された化合物であり、
前記第1の膜と、前記第1の膜に対して基板側の方向である下方に積層されるRuを含まない第2の膜と、により構成される。
続いて、既述の実施形態に関連して行われた評価試験について説明する。
評価試験1
評価試験1では、互いに異なる膜(試験膜とする)が形成された各基板にC4F8ガスとN2ガスとの混合ガスを供給してエッチングを行った。各試験膜の材料としては、TiN、RuW、RuWN、RuHf及びRuHfNである。そして試験膜をエッチングしたときと、同様の条件、同様の処理時間でSiO2膜についてエッチングを行った。そして各試験膜について、SiO2膜のエッチング量/試験膜のエッチング量をSiO2膜に対するエッチング選択比として算出した。
評価試験2においては、SiO2膜が形成された基板にC4F8ガスとN2ガスとの混合ガスを供給して、当該SiO2膜を120nmエッチングした。また、基板に各々形成された試験膜であるWN膜、RuHfN膜、RuWN膜について、このSiO2膜のエッチングと同条件で同じ時間エッチングを行い、エッチング量を測定すると共に、評価試験1と同様にSiO2膜に対するエッチング選択比を算出した。
この評価試験3では、評価試験1、2と同様に、エッチングガスとしてC4F8ガスとN2ガスとの混合ガスを、試験膜が形成された基板に供給し、SiO2膜に対する各試験膜のエッチング選択比を算出した。試験膜としては、RuW膜、RuWN膜、Ru膜を夫々用いた。さらにこれらRuW膜、RuWN膜、Ru膜について、特定の化合物からなるウエットエッチング液に基板を浸漬した際に、当該基板から除去されるか否かを調べた。
この評価試験4では、複数のガラス板にWN膜、RuWN膜を夫々成膜した。このWN膜及びRuWN膜の膜厚はガラス板毎に変更しており、10nmあるいは20nmの膜厚を有するように成膜した。そして、このように成膜を行ったガラス板を、文字が記載された基板上に、当該文字を覆うように載置し、目視で文字を確認できるか否か調べた。
この評価試験5では、評価試験4と同様の試験を行った。ただしガラス膜に形成する膜の種類及び膜の厚さの組み合わせについては評価試験4と異なっている。この評価試験5では厚さが20nmのTiN膜、厚さが20nmのRu膜、厚さが10nmのRu膜、厚さが20nmのTiRuN膜を、夫々ガラス板に成膜した。このTiRuN膜については、TiとRuとの組成比が異なる2種類の膜を成膜しており、Ruの組成比が小さい方の膜を第1のTiRuN膜、Ruの組成比が大きい方の膜を第2のTiRuN膜とする。
12 上層膜
12A 開口部
15 マスク膜
15A 開口部
Claims (4)
- Ruと、Ti、Zr、Hf、V、Nb、Ta、Mo、W及びSiの中から選択された元素と、により構成される化合物からなる第1の膜を備えるハードマスクが形成された基板であり、
前記化合物は窒化、酸化あるいは炭化された化合物であり、
前記第1の膜と、前記第1の膜に対して基板側の方向である下方に積層されるRuを含まない第2の膜と、により構成されるハードマスク付き半導体デバイスの製造用の基板。 - 前記第2の膜は、TiNまたはSiNである請求項1記載のハードマスク付き半導体デバイスの製造用の基板。
- Ruと、Ti、Zr、Hf、V、Nb、Ta、Mo、W及びSiの中から選択された元素と、により構成される化合物からなるハードマスク形成用の膜を、半導体デバイスの製造用の基板に設けられる被エッチング膜上に形成する膜形成工程と、
次いで、前記ハードマスク形成用の膜にパターンを形成して、ハードマスクを形成する工程と、
続いて前記ハードマスクを介して、前記被エッチング膜をエッチングする工程と、
を備え、
前記化合物は窒化、酸化あるいは炭化された化合物であり、
前記膜形成工程は、前記化合物からなる第1の膜と、前記第1の膜に対して基板側の方向である下方に積層されるRuを含まない第2の膜と、を前記ハードマスク形成用の膜として前記被エッチング膜上に形成する工程である半導体デバイスの製造方法。 - 前記膜形成工程の後、前記ハードマスク形成用の膜上にレジスト膜を形成する工程と、
前記基板において、前記ハードマスク形成用の膜よりも当該基板側の方向である下方に位置するマークを光学的に検出する工程と、
検出した前記マークの位置に基づいて前記レジスト膜を露光してレジストパターンを形成し、当該レジストパターンを介して前記ハードマスク形成用の膜に前記パターンを形成する工程と、
を含む請求項3記載の半導体デバイスの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019005444A JP7310146B2 (ja) | 2019-01-16 | 2019-01-16 | ハードマスク付き半導体デバイスの製造用の基板及び半導体デバイスの製造方法 |
TW109100022A TW202101532A (zh) | 2019-01-16 | 2020-01-02 | 硬遮罩及半導體元件之製造方法 |
KR1020200004758A KR102379359B1 (ko) | 2019-01-16 | 2020-01-14 | 하드 마스크 및 반도체 디바이스의 제조 방법 |
US16/743,466 US20200227273A1 (en) | 2019-01-16 | 2020-01-15 | Hard mask and semiconductor device manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019005444A JP7310146B2 (ja) | 2019-01-16 | 2019-01-16 | ハードマスク付き半導体デバイスの製造用の基板及び半導体デバイスの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020112755A JP2020112755A (ja) | 2020-07-27 |
JP7310146B2 true JP7310146B2 (ja) | 2023-07-19 |
Family
ID=71516397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019005444A Active JP7310146B2 (ja) | 2019-01-16 | 2019-01-16 | ハードマスク付き半導体デバイスの製造用の基板及び半導体デバイスの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20200227273A1 (ja) |
JP (1) | JP7310146B2 (ja) |
KR (1) | KR102379359B1 (ja) |
TW (1) | TW202101532A (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005085821A (ja) | 2003-09-04 | 2005-03-31 | Toshiba Corp | 磁気抵抗効果素子及び磁気メモリ |
JP2007081383A (ja) | 2005-08-15 | 2007-03-29 | Fujitsu Ltd | 微細構造の製造方法 |
JP2015032783A (ja) | 2013-08-06 | 2015-02-16 | マイクロン テクノロジー, インク. | 半導体装置の製造方法 |
US20150118604A1 (en) | 2012-05-25 | 2015-04-30 | The Regents Of The University Of California | Method for fabrication of high aspect ratio trenches and formation of nanoscale features therefrom |
JP2015122133A (ja) | 2013-12-24 | 2015-07-02 | 株式会社東芝 | パターン形成方法、スタンパーの製造方法、及び磁気記録媒体の製造方法 |
WO2018181891A1 (ja) | 2017-03-31 | 2018-10-04 | 凸版印刷株式会社 | 位相シフトマスクブランク、位相シフトマスク及び位相シフトマスクの製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3366572B2 (ja) * | 1998-06-08 | 2003-01-14 | 富士通株式会社 | X線露光用マスク及びその作成方法 |
KR100725451B1 (ko) * | 2005-06-07 | 2007-06-07 | 삼성전자주식회사 | 강유전체 캐패시터의 제조 방법 및 이를 이용한 반도체장치의 제조 방법 |
KR100948770B1 (ko) * | 2008-06-27 | 2010-03-24 | 주식회사 에스앤에스텍 | 블랭크 마스크, 포토마스크 및 이의 제조 방법 |
KR102239726B1 (ko) | 2013-09-11 | 2021-04-12 | 호야 가부시키가이샤 | 다층 반사막을 구비한 기판, euv 리소그래피용 반사형 마스크 블랭크, euv 리소그래피용 반사형 마스크 및 그 제조 방법과 반도체 장치의 제조 방법 |
US9257638B2 (en) | 2014-03-27 | 2016-02-09 | Lam Research Corporation | Method to etch non-volatile metal materials |
JP2018010080A (ja) | 2016-07-12 | 2018-01-18 | 凸版印刷株式会社 | 位相シフト型フォトマスクブランク |
-
2019
- 2019-01-16 JP JP2019005444A patent/JP7310146B2/ja active Active
-
2020
- 2020-01-02 TW TW109100022A patent/TW202101532A/zh unknown
- 2020-01-14 KR KR1020200004758A patent/KR102379359B1/ko active IP Right Grant
- 2020-01-15 US US16/743,466 patent/US20200227273A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005085821A (ja) | 2003-09-04 | 2005-03-31 | Toshiba Corp | 磁気抵抗効果素子及び磁気メモリ |
JP2007081383A (ja) | 2005-08-15 | 2007-03-29 | Fujitsu Ltd | 微細構造の製造方法 |
US20150118604A1 (en) | 2012-05-25 | 2015-04-30 | The Regents Of The University Of California | Method for fabrication of high aspect ratio trenches and formation of nanoscale features therefrom |
JP2015032783A (ja) | 2013-08-06 | 2015-02-16 | マイクロン テクノロジー, インク. | 半導体装置の製造方法 |
JP2015122133A (ja) | 2013-12-24 | 2015-07-02 | 株式会社東芝 | パターン形成方法、スタンパーの製造方法、及び磁気記録媒体の製造方法 |
WO2018181891A1 (ja) | 2017-03-31 | 2018-10-04 | 凸版印刷株式会社 | 位相シフトマスクブランク、位相シフトマスク及び位相シフトマスクの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2020112755A (ja) | 2020-07-27 |
KR20200089228A (ko) | 2020-07-24 |
TW202101532A (zh) | 2021-01-01 |
KR102379359B1 (ko) | 2022-03-28 |
US20200227273A1 (en) | 2020-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7058080B2 (ja) | Aleおよび選択的蒸着を用いた基板のエッチング | |
JP7504977B2 (ja) | リソグラフィにおける確率的な歩留まりへの影響の排除 | |
JP6716629B2 (ja) | 位相反転ブランクマスク及びその製造方法 | |
US8927179B2 (en) | Optical member for EUV lithography, and process for production of reflective layer-equipped substrate | |
US7838180B2 (en) | Mask blank, method of manufacturing an exposure mask, and method of manufacturing an imprint template | |
US20130048606A1 (en) | Methods for in-situ chamber dry clean in photomask plasma etching processing chamber | |
KR100885636B1 (ko) | 블랭크 마스크 및 이를 이용한 포토마스크의 제조방법 | |
WO2019229785A1 (ja) | 半導体装置の製造方法、基板処理装置およびプログラム | |
TWI766866B (zh) | 蝕刻方法 | |
US20190302604A1 (en) | Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device | |
US11960201B2 (en) | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | |
JP5295968B2 (ja) | 半導体装置の製造方法および装置 | |
JP7310146B2 (ja) | ハードマスク付き半導体デバイスの製造用の基板及び半導体デバイスの製造方法 | |
US11054735B2 (en) | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | |
KR20100123644A (ko) | 에칭 방법 및 포토마스크 블랭크의 가공 방법 | |
US20220043335A1 (en) | Mask blank, transfer mask, and semiconductor-device manufacturing method | |
EP4212956A1 (en) | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask | |
JP5402860B2 (ja) | レジストパターンの転写方法及びフォトマスクの製造方法 | |
US11815804B2 (en) | EUV mask blank and method of making EUV mask blank | |
JP7417578B2 (ja) | マスクブランクスおよびその製造方法 | |
US11915932B2 (en) | Plasma etching of mask materials | |
US20210173296A1 (en) | Photomask blank, manufacturing method of photomask and photomask | |
KR20240099050A (ko) | 반사형 마스크 블랭크, 반사형 마스크 및 그의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210817 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220510 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220705 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220822 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230302 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230606 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230619 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7310146 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |