JP7292110B2 - 成膜装置および成膜方法 - Google Patents
成膜装置および成膜方法 Download PDFInfo
- Publication number
- JP7292110B2 JP7292110B2 JP2019100726A JP2019100726A JP7292110B2 JP 7292110 B2 JP7292110 B2 JP 7292110B2 JP 2019100726 A JP2019100726 A JP 2019100726A JP 2019100726 A JP2019100726 A JP 2019100726A JP 7292110 B2 JP7292110 B2 JP 7292110B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- film forming
- chamber
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45546—Atomic layer deposition [ALD] characterized by the apparatus specially adapted for a substrate stack in the ALD reactor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Description
基板を保持可能に構成された基板ホルダと、
前記基板を水平姿勢で搬送する搬送機構であって該基板を前記基板ホルダに対して挿抜可能とする搬送機構と、
前記基板ホルダを回動させることにより該基板ホルダと該基板ホルダに保持された前記基板との相対位置を変える回動機構と、
前記基板が垂直姿勢となるように前記回動機構により回動された前記基板ホルダを収容し、該基板に成膜処理を行うチャンバと、
制御部と、を備え、
前記制御部は、
前記成膜処理の前、前記基板ホルダに前記基板を挿入する際には、第1の位置において前記搬送機構により前記基板ホルダに前記基板を保持させる第1制御と、
前記成膜処理の後、前記基板ホルダから前記基板を抜き取る際には、前記第1の位置よりも奥側の第2の位置において前記搬送機構により前記基板ホルダから前記基板を受け取る第2制御と、
を行う
ことを特徴とする。
図1は、実施形態に係る成膜装置1の構成例を示す模式図である。成膜装置1は、基板ホルダ11、搬送機構12、移動機構13、回動機構14、制御部15、及び、チャンバ16を備える。基板ホルダ11は、1以上の基板SBを保持可能に構成され、本実施形態では複数(例えば25枚)の基板SBを保持可能とする。基板SBは、半導体装置を製造するための基材(例えばシリコン等で構成されたウエハ)、電子装置を製造するための基材(例えばガラス基板)等、所定の板材とする。基板ホルダ11は、ホルダ11の筐体内壁に固定された第1支持部111および第2支持部112を含む。詳細については後述とするが、このような構成により、基板ホルダ11は、基板SBを保持可能とする。
上記実施形態の一例として、第1実験例では、基板SBとしてシリコンウエハを25枚準備し、成膜装置1(図1参照)を用いて図2(A)~図2(H)の手順で、それら基板SB上に酸化アルミニウムの膜(膜厚25nm程度)を形成した。成膜装置1による成膜処理は、基板温度250℃の下、トリメチルアルミニウム(TMA)及び水蒸気(H2O)を用いたALDにより行われた。
第2実験例として、成膜処理を行う際(図2(D)参照)の回動機構14による基板ホルダ11の回動角は87°としたことを除いて、第1実験例同様の手順により成膜処理を行った。第2実験例によれば、1枚の基板SBにおける異物のうち1μm以上のものの数量は8程度と計測された。
第1比較例として、基板ホルダ11からの基板SBの抜取り(図2(E)~図2(H)参照)の際に受け部121が確実に基板SBを受け取れるように、受け部121の載置面の面積を大きくしたことを除いて、第1実験例同様の手順により成膜処理を行った。ここでは、受け部121として、載置面の寸法を第1実験例に比べて基板SB中心方向に拡大した(500μm程度)ものを用いた。第1比較例によれば、1枚の基板SBにおける異物のうち1μm以上のものの数量は30程度と計測された。
第2比較例として、成膜処理を行う際(図2(D)参照)の回動機構14による基板ホルダ11の回動角は87°としたことを除いて、第1比較例同様の手順により成膜処理を行った。第2比較例によれば、1枚の基板SBにおける異物のうち1μm以上のものの数量は24程度と計測された。
図3は、成膜装置1の適用例として、成膜処理を含む複数の処理を行うためのシステムSYの構成例を示す。ここでは、システムSYは、電子装置の一例として、有機EL(Electro‐Luminescence)デバイスを製造するための製造システムとする。システムSYは、真空室30の周囲に複数のプロセスチャンバが配置されたクラスタ方式の構成を採用している。本実施形態では、システムSYは、ローダ311、ロードロックチャンバ312、複数のチャンバ32~36、ロードロックチャンバ371、アンローダ372、及び、搬送機構39を備える。
上記適用例の一例として、第3実験例では、基板SBとしてシリコンウエハを25枚準備し、システムSY(図3参照)を用いて、それら基板SBにより有機ELデバイスを製造した。これらの基板SBは、カセットに一体に収納されてローダ311より一度に供給され、また、カセットに一体に収納されてアンローダ372より一度に送出された。ALDチャンバ36では、第1実験例同様の手順で酸化アルミニウムの成膜が行われ、即ち、成膜処理は、基板温度100℃の下、トリメチルアルミニウム(TMA)及び水蒸気(H2O)を用いたALDにより行われた。
第4実験例として、成膜処理を行う際(図2(D)参照)の回動機構14による基板ホルダ11の回動角は87°としたことを除いて、第3実験例同様の手順により成膜処理を行った。第4実験例においては、点灯検査不良率を8%程度に留めることができた。
第3比較例として、基板ホルダ11からの基板SBの抜取り(図2(E)~図2(H)参照)の際に受け部121が確実に基板SBを受け取れるように、受け部121の載置面の面積を大きくしたことを除いて、第3実験例同様の手順により成膜処理を行った。ここでは、受け部121として、載置面の寸法を第3実験例に比べて基板SB中心方向に拡大した(500μm程度)ものを用いた。第3比較例によれば、点灯検査不良率は28%程度となった。
第4比較例として、成膜処理を行う際(図2(D)参照)の回動機構14による基板ホルダ11の回動角は87°としたことを除いて、第3比較例同様の手順により成膜処理を行った。第4比較例によれば、点灯検査不良率は24%程度となった。
以上では幾つかの好適な態様を例示したが、本発明は、これらの例に限られるものではなく、その要旨を逸脱しない範囲で部分的に変更され又は組み合わされてもよい。また、本明細書に記載された個々の用語は、本発明を説明する目的で用いられたものに過ぎず、本発明は、その用語の厳密な意味に限定されるものでない。また、実施形態は、成膜装置1による成膜処理に着目して説明されたが、エッチング処理、洗浄処理等、他の半導体製造処理にも適用可能である。
Claims (9)
- 基板を保持可能に構成された基板ホルダと、
前記基板を水平姿勢で搬送する搬送機構であって該基板を前記基板ホルダに対して挿抜可能とする搬送機構と、
前記基板ホルダを回動させることにより該基板ホルダと該基板ホルダに保持された前記基板との相対位置を変える回動機構と、
前記基板が垂直姿勢となるように前記回動機構により回動された前記基板ホルダを収容し、該基板に成膜処理を行うチャンバと、
制御部と、を備え、
前記制御部は、
前記成膜処理の前、前記基板ホルダに前記基板を挿入する際には、第1の位置において前記搬送機構により前記基板ホルダに前記基板を保持させる第1制御と、
前記成膜処理の後、前記基板ホルダから前記基板を抜き取る際には、前記第1の位置よりも奥側の第2の位置において前記搬送機構により前記基板ホルダから前記基板を受け取る第2制御と、
を行う
ことを特徴とする成膜装置。 - 前記基板ホルダは、前記基板を複数保持可能であり、
前記制御部は、前記第1制御では、前記複数の基板の個々が水平姿勢となり且つそれらが垂直方向に並んで前記基板ホルダに保持されるように、前記搬送機構および前記回動機構を制御する
ことを特徴とする請求項1記載の成膜装置。 - 前記基板ホルダは、垂直姿勢の前記基板を下方側で支持する第1支持部と、該基板を側方側で支持する第2支持部と、を含んでおり、
前記基板ホルダが前記基板を水平姿勢で保持している状態では、前記第1支持部は、前記第2支持部に対して、前記搬送機構が前記基板ホルダに対してアクセスする側とは反対側に位置する
ことを特徴とする請求項1又は請求項2記載の成膜装置。 - 前記チャンバは、前記成膜処理としてCVD(Chemical Vapor Deposition)及びALD(Atomic Layer Deposition)の少なくとも一方を行う
ことを特徴とする請求項1から請求項3の何れか1項記載の成膜装置。 - 前記搬送機構が前記基板ホルダに対してアクセス可能な位置と前記チャンバ内の位置との間で前記基板ホルダを移動させる移動機構を更に備える
ことを特徴とする請求項1から請求項4の何れか1項記載の成膜装置。 - 前記移動機構は昇降機構であり、
前記チャンバは、前記搬送機構が前記基板ホルダに対してアクセス可能な位置の下方に位置する
ことを特徴とする請求項5記載の成膜装置。 - 前記移動機構は昇降機構であり、
前記チャンバは、前記搬送機構が前記基板ホルダに対してアクセス可能な位置の上方に位置する
ことを特徴とする請求項5記載の成膜装置。 - 前記チャンバを第1のチャンバとして、前記基板に他の処理を行うための第2のチャンバを更に備えており、
前記第1のチャンバと前記第2のチャンバとは、それらにおける前記基板に対する処理が完了するまでの間、前記基板が大気に曝されることのないように構成されている
ことを特徴とする請求項1から請求項7の何れか1項記載の成膜装置。 - 搬送機構により基板を水平姿勢で搬送しながら第1の位置において基板ホルダに前記基板を保持させる工程と、
回動機構により前記基板ホルダを回動させることにより該基板ホルダに保持された前記基板を垂直姿勢にしてから前記基板に成膜処理を行う工程であって、該回動において該基板ホルダと該基板ホルダに保持された前記基板との相対位置を変える工程と、
前記回動機構により前記基板ホルダを回動させることにより該基板ホルダに保持された前記基板を水平姿勢に戻す工程と、
前記第1の位置よりも奥側の第2の位置において前記搬送機構により前記基板ホルダから前記基板を受け取る工程と、を有する
ことを特徴とする成膜方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019100726A JP7292110B2 (ja) | 2019-05-29 | 2019-05-29 | 成膜装置および成膜方法 |
US16/879,038 US20200378002A1 (en) | 2019-05-29 | 2020-05-20 | Deposition apparatus and deposition method |
KR1020200062728A KR20200138025A (ko) | 2019-05-29 | 2020-05-26 | 성막장치 및 성막방법 |
CN202010472906.9A CN112011786A (zh) | 2019-05-29 | 2020-05-29 | 沉积设备和沉积方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019100726A JP7292110B2 (ja) | 2019-05-29 | 2019-05-29 | 成膜装置および成膜方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2020193381A JP2020193381A (ja) | 2020-12-03 |
JP2020193381A5 JP2020193381A5 (ja) | 2022-05-12 |
JP7292110B2 true JP7292110B2 (ja) | 2023-06-16 |
Family
ID=73506335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019100726A Active JP7292110B2 (ja) | 2019-05-29 | 2019-05-29 | 成膜装置および成膜方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20200378002A1 (ja) |
JP (1) | JP7292110B2 (ja) |
KR (1) | KR20200138025A (ja) |
CN (1) | CN112011786A (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001068530A (ja) | 1999-08-26 | 2001-03-16 | Anelva Corp | 基板処理装置 |
US20020076316A1 (en) | 2000-12-18 | 2002-06-20 | Benzing David W. | Wafer boat and boat holder |
JP2002270671A (ja) | 2001-03-06 | 2002-09-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2003258059A (ja) | 2002-02-28 | 2003-09-12 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法 |
JP2009194184A (ja) | 2008-02-15 | 2009-08-27 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2016503462A (ja) | 2012-11-23 | 2016-02-04 | ピコサン オーワイPicosun Oy | Ald反応炉における基板の装填 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4305749A1 (de) * | 1993-02-25 | 1994-09-01 | Leybold Ag | Vorrichtung zum Halten von flachen, kreisscheibenförmigen Substraten in der Vakuumkammer einer Beschichtungs- oder Ätzanlage |
JPH08130190A (ja) * | 1994-10-31 | 1996-05-21 | Sony Corp | ウエハ縦置き型縦型炉 |
JP3548373B2 (ja) * | 1997-03-24 | 2004-07-28 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JPH11251393A (ja) * | 1998-02-27 | 1999-09-17 | Dainippon Screen Mfg Co Ltd | 基板搬送装置および基板搬送方法 |
JP4776061B2 (ja) * | 2000-07-04 | 2011-09-21 | キヤノンアネルバ株式会社 | 薄膜形成装置 |
JP5089906B2 (ja) * | 2006-04-05 | 2012-12-05 | 株式会社アルバック | 縦型化学気相成長装置 |
JP4327206B2 (ja) * | 2007-01-30 | 2009-09-09 | 東京エレクトロン株式会社 | 縦型熱処理装置及び縦型熱処理方法 |
JP5060324B2 (ja) * | 2008-01-31 | 2012-10-31 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及び処理容器 |
KR101036123B1 (ko) * | 2010-06-10 | 2011-05-23 | 에스엔유 프리시젼 주식회사 | 박막 증착 장치 |
JP5488400B2 (ja) * | 2010-10-29 | 2014-05-14 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
JP6119408B2 (ja) * | 2013-05-09 | 2017-04-26 | ソニー株式会社 | 原子層堆積装置 |
KR101486937B1 (ko) * | 2013-11-15 | 2015-01-29 | 코닉이앤씨 주식회사 | 원자층 증착 장치 및 방법 |
-
2019
- 2019-05-29 JP JP2019100726A patent/JP7292110B2/ja active Active
-
2020
- 2020-05-20 US US16/879,038 patent/US20200378002A1/en not_active Abandoned
- 2020-05-26 KR KR1020200062728A patent/KR20200138025A/ko not_active Application Discontinuation
- 2020-05-29 CN CN202010472906.9A patent/CN112011786A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001068530A (ja) | 1999-08-26 | 2001-03-16 | Anelva Corp | 基板処理装置 |
US20020076316A1 (en) | 2000-12-18 | 2002-06-20 | Benzing David W. | Wafer boat and boat holder |
JP2002270671A (ja) | 2001-03-06 | 2002-09-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP2003258059A (ja) | 2002-02-28 | 2003-09-12 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法 |
JP2009194184A (ja) | 2008-02-15 | 2009-08-27 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2016503462A (ja) | 2012-11-23 | 2016-02-04 | ピコサン オーワイPicosun Oy | Ald反応炉における基板の装填 |
Also Published As
Publication number | Publication date |
---|---|
KR20200138025A (ko) | 2020-12-09 |
US20200378002A1 (en) | 2020-12-03 |
JP2020193381A (ja) | 2020-12-03 |
CN112011786A (zh) | 2020-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20080138176A1 (en) | Apparatus for manufacturing semiconductor device | |
KR101170357B1 (ko) | 기판 교환 방법 및 기판 처리 장치 | |
TW201027784A (en) | Advanced platform for processing crystalline silicon solar cells | |
JP2011071293A (ja) | プロセスモジュール、基板処理装置、および基板搬送方法 | |
JP7106681B2 (ja) | デュアルロードロックチャンバ | |
JP7175191B2 (ja) | 基板処理装置および基板搬送方法 | |
JPWO2014168006A1 (ja) | 基板処理装置、プログラム及び半導体装置の製造方法 | |
US20140093337A1 (en) | Substrate processing apparatus and substrate processing method for performing cleaning process and the like on substrate | |
US11358809B1 (en) | Vacuum robot apparatus for variable pitch access | |
JP2003051460A (ja) | 半導体素子の銅薄膜堆積装置 | |
JP2010056353A (ja) | 半導体装置の製造方法 | |
JP7292110B2 (ja) | 成膜装置および成膜方法 | |
US20120014768A1 (en) | Vacuum processing apparatus | |
JP2008192835A (ja) | 成膜方法,基板処理装置,および半導体装置 | |
US10453725B2 (en) | Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same | |
TW202111846A (zh) | 為了產量效率預對準載體、晶圓及載體-晶圓組合的方法 | |
JP2019195055A (ja) | 半導体プロセス用の基板搬送機構及び成膜装置 | |
JP7175151B2 (ja) | 搬送方法 | |
WO2023166970A1 (ja) | 基板処理方法 | |
JP2011066186A (ja) | 載置台構造、ロードロック装置及び処理装置 | |
WO2022244745A1 (ja) | 基板処理方法 | |
JP2002305231A (ja) | 縦型バッチ処理装置並びに移載機及び基板の搬送方法 | |
TW202107598A (zh) | 放置載體的載體前開式晶圓傳送盒及方法 | |
WO2023009303A1 (en) | Enhanced stress tuning and interfacial adhesion for tungsten (w) gap fill | |
TW202314800A (zh) | 用於底層金屬上之完全著底通孔之選擇性蝕刻停止封蓋及選擇性通孔開口之方法及裝置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20210103 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210113 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220427 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220427 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230224 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230413 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230508 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230606 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7292110 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |