JP7290650B2 - ピンフィン型パワーモジュールを製造する方法および治具 - Google Patents
ピンフィン型パワーモジュールを製造する方法および治具 Download PDFInfo
- Publication number
- JP7290650B2 JP7290650B2 JP2020541446A JP2020541446A JP7290650B2 JP 7290650 B2 JP7290650 B2 JP 7290650B2 JP 2020541446 A JP2020541446 A JP 2020541446A JP 2020541446 A JP2020541446 A JP 2020541446A JP 7290650 B2 JP7290650 B2 JP 7290650B2
- Authority
- JP
- Japan
- Prior art keywords
- jig
- fin
- fins
- pin
- power module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000011810 insulating material Substances 0.000 claims description 13
- 239000003822 epoxy resin Substances 0.000 claims description 11
- 238000000465 moulding Methods 0.000 claims description 11
- 229920000647 polyepoxide Polymers 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229920006254 polymer film Polymers 0.000 claims description 3
- 238000005452 bending Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 101000709025 Homo sapiens Rho-related BTB domain-containing protein 2 Proteins 0.000 description 1
- 102100032658 Rho-related BTB domain-containing protein 2 Human genes 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
- B29C2045/14131—Positioning or centering articles in the mould using positioning or centering means forming part of the insert
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102018201263.6A DE102018201263B3 (de) | 2018-01-29 | 2018-01-29 | Ein verfahren und eine vorrichtung zum herstellen eines pin-fin-leistungsmoduls |
DE102018201263.6 | 2018-01-29 | ||
PCT/EP2019/050488 WO2019145154A1 (en) | 2018-01-29 | 2019-01-10 | A method and a jig for manufacturing a pin-fin type power module |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021513217A JP2021513217A (ja) | 2021-05-20 |
JP7290650B2 true JP7290650B2 (ja) | 2023-06-13 |
Family
ID=65036765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020541446A Active JP7290650B2 (ja) | 2018-01-29 | 2019-01-10 | ピンフィン型パワーモジュールを製造する方法および治具 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3747046A1 (zh) |
JP (1) | JP7290650B2 (zh) |
CN (1) | CN111527598A (zh) |
DE (1) | DE102018201263B3 (zh) |
WO (1) | WO2019145154A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020208862A1 (de) * | 2020-07-15 | 2022-01-20 | Zf Friedrichshafen Ag | Formwerkzeug zum verkapseln eines pin-fin-artigen leistungsmoduls und verfahren zum herstellen eines leistungsmoduls |
EP4205942A4 (en) * | 2020-09-16 | 2023-10-25 | Huawei Technologies Co., Ltd. | INJECTION MOLD AND INJECTION MOLDING PROCESS |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011238644A (ja) | 2010-05-06 | 2011-11-24 | Denso Corp | パワー半導体モジュールの製造方法 |
JP2012164763A (ja) | 2011-02-04 | 2012-08-30 | Toyota Motor Corp | ヒートシンク付き半導体パッケージの製造方法及び当該ヒートシンク |
JP2012243941A (ja) | 2011-05-19 | 2012-12-10 | Toyota Motor Corp | 冶具、半導体モジュールの製造方法及び半導体モジュール |
JP2014067771A (ja) | 2012-09-25 | 2014-04-17 | Mitsubishi Electric Corp | 半導体装置封止用金型及び半導体装置 |
JP2014175336A (ja) | 2013-03-06 | 2014-09-22 | Mitsubishi Electric Corp | 半導体装置の製造方法および半導体装置ならびに半導体装置の製造装置 |
JP2015185835A (ja) | 2014-03-26 | 2015-10-22 | 株式会社デンソー | 半導体装置及びその製造方法 |
JP2016139709A (ja) | 2015-01-28 | 2016-08-04 | 日立オートモティブシステムズ株式会社 | 電子装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2965699B1 (fr) | 2010-10-05 | 2013-03-29 | Commissariat Energie Atomique | Dispositif pour la dissipation thermique destine a au moins un composant electronique et procede correspondant |
DE112012005791B4 (de) | 2012-01-31 | 2022-05-12 | Mitsubishi Electric Corporation | Halbleiterbauteil und Verfahren zu dessen Herstellung |
-
2018
- 2018-01-29 DE DE102018201263.6A patent/DE102018201263B3/de not_active Expired - Fee Related
-
2019
- 2019-01-10 WO PCT/EP2019/050488 patent/WO2019145154A1/en unknown
- 2019-01-10 JP JP2020541446A patent/JP7290650B2/ja active Active
- 2019-01-10 CN CN201980006546.9A patent/CN111527598A/zh active Pending
- 2019-01-10 EP EP19700871.7A patent/EP3747046A1/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011238644A (ja) | 2010-05-06 | 2011-11-24 | Denso Corp | パワー半導体モジュールの製造方法 |
JP2012164763A (ja) | 2011-02-04 | 2012-08-30 | Toyota Motor Corp | ヒートシンク付き半導体パッケージの製造方法及び当該ヒートシンク |
JP2012243941A (ja) | 2011-05-19 | 2012-12-10 | Toyota Motor Corp | 冶具、半導体モジュールの製造方法及び半導体モジュール |
JP2014067771A (ja) | 2012-09-25 | 2014-04-17 | Mitsubishi Electric Corp | 半導体装置封止用金型及び半導体装置 |
JP2014175336A (ja) | 2013-03-06 | 2014-09-22 | Mitsubishi Electric Corp | 半導体装置の製造方法および半導体装置ならびに半導体装置の製造装置 |
JP2015185835A (ja) | 2014-03-26 | 2015-10-22 | 株式会社デンソー | 半導体装置及びその製造方法 |
JP2016139709A (ja) | 2015-01-28 | 2016-08-04 | 日立オートモティブシステムズ株式会社 | 電子装置 |
Also Published As
Publication number | Publication date |
---|---|
EP3747046A1 (en) | 2020-12-09 |
JP2021513217A (ja) | 2021-05-20 |
WO2019145154A1 (en) | 2019-08-01 |
CN111527598A (zh) | 2020-08-11 |
DE102018201263B3 (de) | 2019-05-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4012765A (en) | Lead frame for plastic encapsulated semiconductor assemblies | |
JP6743916B2 (ja) | 半導体装置及び半導体装置の製造方法 | |
US8530281B2 (en) | Production method of semiconductor module with resin-molded assembly of heat spreader and semiconductor chip | |
US9059145B2 (en) | Power module, method for manufacturing power module, and molding die | |
US3574815A (en) | Method of fabricating a plastic encapsulated semiconductor assembly | |
JP2007184315A (ja) | 樹脂封止型パワー半導体モジュール | |
JP7290650B2 (ja) | ピンフィン型パワーモジュールを製造する方法および治具 | |
JP2005244166A (ja) | 半導体装置 | |
JP2006222347A (ja) | 半導体モジュールと半導体モジュールの製造方法 | |
JP2016012604A (ja) | 半導体装置の製造方法 | |
JP2018170348A (ja) | 半導体装置とその製造方法 | |
JP2015159258A (ja) | 半導体装置及びその製造方法 | |
CN109309065B (zh) | 一种散热元件及其制备方法和igbt模组 | |
CN215911397U (zh) | 包封针翅型功率模块的模具 | |
CN108538728B (zh) | 制造半导体器件的方法 | |
US20090294955A1 (en) | Cooling device with a preformed compliant interface | |
KR100616310B1 (ko) | 전자장비용 방열판의 제조방법 | |
KR100298042B1 (ko) | 히트싱크 | |
JP2014107384A (ja) | 半導体装置および半導体装置の製造方法 | |
JP6136978B2 (ja) | 半導体装置及びその製造方法 | |
JP4293232B2 (ja) | 半導体装置の製造方法 | |
JP2015032822A (ja) | ヒートシンク | |
JP2010141034A (ja) | 半導体装置及びその製造方法 | |
KR200262602Y1 (ko) | 히트 싱크 | |
JP2001352008A (ja) | 半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211027 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20221129 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221206 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230303 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230516 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230601 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7290650 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |