JP7275068B2 - 膜質除去方法、基板処理方法、及び基板処理装置 - Google Patents
膜質除去方法、基板処理方法、及び基板処理装置 Download PDFInfo
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Description
また、本発明の目的は複数の単位パルスレーザーを基板の上の膜質に照射して膜質除去領域を微細化することができる膜質除去方法、基板処理方法、及び基板処理装置を提供することをことにある。
また、本発明の一実施形態によれば、複数の単位パルスレーザーを基板の上の膜質に照射して膜質除去効率を高めることがきる。
図3は本発明の実施形態による基板処理設備を示す平面図である。図3を参照すれば、基板処理設備10はインデックスモジュール100と工程処理モジュール200を有する。インデックスモジュール100はロードポート120及び移送フレーム140を有する。ロードポート120、移送フレーム140、及び工程処理モジュール200は順次的に一列に配列される。以下、ロードポート120、移送フレーム140、及び工程処理モジュール200が配列された方向を第1の方向12とし、上部から見る時、第1の方向12と垂直になる方向を第2方向14がとし、第1の方向12と第2方向14を含む平面と垂直である方向を第3方向16とする。
310 ハウジング
320 支持ユニット
400 レーザー照射ユニット
410 レーザー光源
420 波長調節部材
430 形状調節部材
440 レーザー照射部材
Claims (25)
- 基板の上の縁領域に複数の単位パルスレーザーを照射して前記基板の上の膜質を除去する方法において、
前記基板で前記単位パルスレーザーが照射される領域が互いに重畳されないようにパルス幅が設定され、回転する前記基板上に複数の前記単位パルスレーザーを照射する第1照射段階と、
前記第1照射段階で前記単位パルスレーザーが照射された領域の中で互いに隣接する照射領域の間の領域に複数の前記単位パルスレーザーを照射する第2照射段階と、を含む膜質除去方法。 - 前記第1照射段階と前記第2照射段階は、順次的に遂行され、前記第2照射段階は、前記第1照射段階が完了された後、設定時間が経過され、遂行される請求項1に記載の膜質除去方法。
- 前記単位パルスレーザーは、前記膜質のアブレーション閾値以下の波長を有する請求項1に記載の膜質除去方法。
- 前記単位パルスレーザーは、150nm乃至1200nmの波長を有する請求項3に記載の膜質除去方法。
- 前記第1照射段階及び/又は前記第2照射段階で前記基板に照射される前記単位パルスレーザーは、円形状を有する請求項1乃至請求項4のいずれかの一項に記載の膜質除去方法。
- 前記第1照射段階及び/又は前記第2照射段階で前記基板に照射される前記単位パルスレーザーは、四角形状を有する請求項1乃至請求項4のいずれかの一項に記載の膜質除去方法。
- 前記第1照射段階では、
前記基板の回転によって前記基板の円周方向に沿って前記単位パルスレーザーの照射が行われ、
前記基板の半径方向に沿って前記単位パルスレーザーの照射位置を変更して前記単位パルスレーザーの照射が行われる請求項1乃至請求項4のいずれかの一項に記載の膜質除去方法。 - 前記第2照射段階では、
前記基板の回転によって前記基板の円周方向に沿って前記単位パルスレーザーの照射が行われ、
前記基板の半径方向に沿って前記単位パルスレーザーの照射位置を変更して前記単位パルスレーザーの照射が行われる請求項1乃至請求項4のいずれかの一項に記載の膜質除去方法。 - 基板を処理する方法において、
回転する前記基板に複数の単位パルスレーザーを照射して前記基板を処理する第1照射段階、及び第2照射段階を順次的に遂行し、
前記第1照射段階では前記基板で前記単位パルスレーザーが照射される領域が互いに重畳されないようにパルス幅が設定され、
前記第2照射段階では前記第1照射段階で前記単位パルスレーザーが照射された領域の中で互いに隣接する照射領域の間の領域に前記単位パルスレーザーを照射する基板処理方法。 - 前記第1照射段階では、
前記基板の回転によって前記基板の円周方向に沿って前記単位パルスレーザーの照射が行われ、
前記基板の半径方向に沿って前記単位パルスレーザーの照射位置を変更して前記単位パルスレーザーの照射が行われる請求項9に記載の基板処理方法。 - 前記第2照射段階では、
前記基板の回転によって前記基板の円周方向に沿って前記単位パルスレーザーの照射が行われ、
前記基板の半径方向に沿って前記単位パルスレーザーの照射位置を変更して前記単位パルスレーザーの照射が行われる請求項10に記載の基板処理方法。 - 前記第1照射段階と前記第2照射段階で前記基板に照射される前記単位パルスレーザーは、円形状を有する請求項9に記載の基板処理方法。
- 前記第1照射段階と前記第2照射段階で前記基板に照射される前記単位パルスレーザーは、角部分がラウンドになった四角形状を有する請求項9に記載の基板処理方法。
- 前記処理は、
前記レーザーによって前記基板の上の膜質を除去する処理である請求項9乃至請求項13のいずれかの一項に記載の基板処理方法。 - 前記レーザーによって除去される前記膜質は、前記基板の縁領域に提供された膜質である請求項14に記載の基板処理方法。
- 前記第2照射段階は、前記第1照射段階が完了された後、設定時間が経過され、遂行される請求項15に記載の基板処理方法。
- 基板を処理する装置において、
内部空間を有するハウジングと、
前記内部空間で基板を支持し、回転させる支持ユニットと、
前記支持ユニットに支持された基板に複数の単位パルスレーザーを照射するレーザー照射ユニットと、
前記支持ユニットと前記レーザー照射ユニットを制御する制御器と、を含み、
前記制御器は、
前記支持ユニットに支持された基板を回転させ、
前記支持ユニットに支持されて回転する基板に前記単位パルスレーザーを照射し、前記単位パルスレーザーが照射される領域が互いに重畳されないようにパルス幅が設定される第1照射段階と、
前記第1照射段階で前記単位パルスレーザーが照射された領域の中で互いに隣接する領域の間に前記単位パルスレーザーを照射する第2照射段階が遂行されるように前記支持ユニットと前記レーザー照射ユニットを制御する基板処理装置。 - 前記制御器は、
前記第2照射段階が、前記第1照射段階が完了された後、設定時間が経過され、遂行されるように前記支持ユニットと前記レーザー照射ユニットを制御する請求項17に記載の基板処理装置。 - 前記制御器は、
前記単位パルスレーザーが前記支持ユニットに支持された基板上に塗布された膜質のアブレーション閾値以下の波長を有するように前記レーザー照射ユニットを制御する請求項1
7に記載の基板処理装置。 - 前記制御器は、
前記単位パルスレーザーが150nm乃至1200nm以下の波長を有するように前記レーザー照射ユニットを制御する請求項19に記載の基板処理装置。 - 前記レーザー照射ユニットは、
前記単位パルスレーザーを照射するレーザー光源と、
前記レーザー光源で照射された単位パルスレーザーを前記支持ユニットに支持された基板に照射するレーザー照射部材と、
前記基板上に前記単位パルスレーザーが照射される領域が前記基板の半径方向に沿って変更されるように前記レーザー照射部材を移動させる駆動部材と、を含む請求項17乃至請求項20のいずれかの一項に記載の基板処理装置。 - 前記制御器は、
前記単位パルスレーザーを前記支持ユニットに支持された基板の縁領域に照射するように前記レーザー照射部材を制御する請求項21に記載の基板処理装置。 - 前記レーザー照射ユニットは、
前記レーザー光源で照射された単位パルスレーザーの波長を変更する波長調節部材と、
前記レーザー光源で照射された単位パルスレーザーの形状を変更する形状調節部材と、をさらに含む請求項21に記載の基板処理装置。 - 前記形状調節部材は、
前記単位パルスレーザーの形状を円形状に変更する請求項23に記載の基板処理装置。 - 前記形状調節部材は、
前記単位パルスレーザーの形状を四角形状に変更する請求項24に記載の基板処理装置。
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