JP7264536B2 - 調湿ガス発生装置 - Google Patents
調湿ガス発生装置 Download PDFInfo
- Publication number
- JP7264536B2 JP7264536B2 JP2021541380A JP2021541380A JP7264536B2 JP 7264536 B2 JP7264536 B2 JP 7264536B2 JP 2021541380 A JP2021541380 A JP 2021541380A JP 2021541380 A JP2021541380 A JP 2021541380A JP 7264536 B2 JP7264536 B2 JP 7264536B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- water
- trap box
- saturation tank
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 109
- 238000003860 storage Methods 0.000 claims description 16
- 238000005260 corrosion Methods 0.000 claims description 11
- 230000007797 corrosion Effects 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000010992 reflux Methods 0.000 claims description 6
- 229920006395 saturated elastomer Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims 3
- 229920005989 resin Polymers 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000005108 dry cleaning Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000005679 Peltier effect Effects 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000008236 heating water Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J7/00—Apparatus for generating gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F6/00—Air-humidification, e.g. cooling by humidification
- F24F6/02—Air-humidification, e.g. cooling by humidification by evaporation of water in the air
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Drying Of Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2019/032425 WO2021033260A1 (ja) | 2019-08-20 | 2019-08-20 | 調湿ガス発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021033260A1 JPWO2021033260A1 (zh) | 2021-02-25 |
JP7264536B2 true JP7264536B2 (ja) | 2023-04-25 |
Family
ID=74660640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021541380A Active JP7264536B2 (ja) | 2019-08-20 | 2019-08-20 | 調湿ガス発生装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7264536B2 (zh) |
KR (1) | KR20220046404A (zh) |
CN (2) | CN118059786A (zh) |
WO (1) | WO2021033260A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024018573A1 (ja) * | 2022-07-20 | 2024-01-25 | マイクロ・イクイップメント株式会社 | 温湿度制御装置、及び、温湿度制御装置と調湿ガス発生装置との組合せ |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004340565A (ja) | 2003-04-24 | 2004-12-02 | Toyota Motor Corp | 加湿装置 |
JP2007514915A (ja) | 2003-05-02 | 2007-06-07 | チャオジョン・ジャン | 露点加湿機および関連するガス温度制御 |
JP2018087664A (ja) | 2016-11-29 | 2018-06-07 | 株式会社チノー | 加湿器 |
WO2018127331A1 (de) | 2017-01-06 | 2018-07-12 | Avl Emission Test Systems Gmbh | Kondensatabscheider für abgasmessanlagen |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1053429A (fr) * | 1952-04-04 | 1954-02-02 | Séparateur de gouttelettes d'eau pour appareil d'humidification de l'air | |
JPS62103421U (zh) * | 1985-12-20 | 1987-07-01 | ||
JPH0690118B2 (ja) | 1986-11-12 | 1994-11-14 | 理化学研究所 | 定湿気体発生装置の飽和槽 |
JPS6390425U (zh) * | 1986-11-29 | 1988-06-11 | ||
DE3907457C2 (de) * | 1989-03-08 | 1997-01-16 | Metallgesellschaft Ag | Verfahren zur Abscheidung flüssiger Asche |
JP2816074B2 (ja) * | 1992-12-24 | 1998-10-27 | シャープ株式会社 | 調湿装置 |
US6715743B2 (en) * | 2001-11-27 | 2004-04-06 | Chaojiong Zhang | Gas humidifier |
DE10251134A1 (de) * | 2002-10-31 | 2004-05-19 | GRÜNDLER GmbH | Beatmungsvorrichtung und Verfahren |
JP2007240141A (ja) * | 2006-02-10 | 2007-09-20 | Haruo Tsuchimoto | 湿度制御方法、湿度制御装置及びそれを備える生ゴミ処理装置 |
JP2008075943A (ja) * | 2006-09-20 | 2008-04-03 | Chino Corp | 加湿器 |
KR101109525B1 (ko) * | 2008-12-12 | 2012-01-31 | 주식회사 씨엔엘에너지 | 연료전지용 가스 가습장치 |
CN101493254B (zh) * | 2009-02-23 | 2010-06-23 | 重庆大学 | 鼓泡式自动加湿器 |
JP5964740B2 (ja) * | 2012-12-21 | 2016-08-03 | 株式会社荏原製作所 | 研磨装置 |
CN106500227A (zh) * | 2016-10-21 | 2017-03-15 | 张可 | 冬季加湿器 |
-
2019
- 2019-08-20 WO PCT/JP2019/032425 patent/WO2021033260A1/ja active Application Filing
- 2019-08-20 CN CN202410408544.5A patent/CN118059786A/zh active Pending
- 2019-08-20 JP JP2021541380A patent/JP7264536B2/ja active Active
- 2019-08-20 CN CN201980032412.4A patent/CN112714668B/zh active Active
- 2019-08-20 KR KR1020207032004A patent/KR20220046404A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004340565A (ja) | 2003-04-24 | 2004-12-02 | Toyota Motor Corp | 加湿装置 |
JP2007514915A (ja) | 2003-05-02 | 2007-06-07 | チャオジョン・ジャン | 露点加湿機および関連するガス温度制御 |
JP2018087664A (ja) | 2016-11-29 | 2018-06-07 | 株式会社チノー | 加湿器 |
WO2018127331A1 (de) | 2017-01-06 | 2018-07-12 | Avl Emission Test Systems Gmbh | Kondensatabscheider für abgasmessanlagen |
Also Published As
Publication number | Publication date |
---|---|
CN112714668B (zh) | 2024-04-26 |
CN112714668A (zh) | 2021-04-27 |
KR20220046404A (ko) | 2022-04-14 |
CN118059786A (zh) | 2024-05-24 |
WO2021033260A1 (ja) | 2021-02-25 |
JPWO2021033260A1 (zh) | 2021-02-25 |
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