JP7262849B2 - ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置 - Google Patents

ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置 Download PDF

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JP7262849B2
JP7262849B2 JP2021527442A JP2021527442A JP7262849B2 JP 7262849 B2 JP7262849 B2 JP 7262849B2 JP 2021527442 A JP2021527442 A JP 2021527442A JP 2021527442 A JP2021527442 A JP 2021527442A JP 7262849 B2 JP7262849 B2 JP 7262849B2
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ammonia
sample gas
gas
sensor
relative humidity
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JPWO2020255580A1 (https=
JPWO2020255580A5 (https=
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岳 今村
皓輔 南
弘太 柴
元起 吉川
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National Institute for Materials Science
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National Institute for Materials Science
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/04—Anhydrides, e.g. cyclic anhydrides
    • C08F222/06—Maleic anhydride
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0054—Ammonia
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Medicinal Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
JP2021527442A 2019-06-18 2020-05-08 ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置 Active JP7262849B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019112434 2019-06-18
JP2019112434 2019-06-18
PCT/JP2020/018649 WO2020255580A1 (ja) 2019-06-18 2020-05-08 ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置

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JPWO2020255580A1 JPWO2020255580A1 (https=) 2020-12-24
JPWO2020255580A5 JPWO2020255580A5 (https=) 2022-02-04
JP7262849B2 true JP7262849B2 (ja) 2023-04-24

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US (1) US12130270B2 (https=)
EP (1) EP3988913B1 (https=)
JP (1) JP7262849B2 (https=)
TW (1) TWI797447B (https=)
WO (1) WO2020255580A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7840896B2 (ja) * 2023-03-15 2026-04-06 株式会社東芝 ガス検出システムおよびガス検出方法
JP7799649B2 (ja) * 2023-03-22 2026-01-15 株式会社東芝 ケミカルセンサシステム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040040841A1 (en) 2002-09-04 2004-03-04 Anuncia Gonzalez-Martin Chemical sensors utilizing conducting polymer compositions
JP2009250896A (ja) 2008-04-09 2009-10-29 National Institute Of Advanced Industrial & Technology アンモニア測定素子、アンモニア測定装置、アンモニアの測定方法、塩素測定素子、塩素測定装置及び塩素の測定方法
JP2019015675A (ja) 2017-07-10 2019-01-31 富士通株式会社 ガスセンサ、ガスセンサシステム、及びガス検出方法

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US3630956A (en) * 1969-04-01 1971-12-28 Air Prod & Chem Method of producing gases with controlled concentrations of water vapor
US6123324A (en) * 1998-08-21 2000-09-26 Air Products And Chemicals, Inc. Process for humidifying a gas stream
KR20040054801A (ko) * 2001-11-26 2004-06-25 소니 인터내셔널(유로파) 게엠베하 실온에 근접한 온도에서 조작 및 제조되는, 1ｄ 반도체재료의 화학 감지 재료로서의 용도
US20050279987A1 (en) 2002-09-05 2005-12-22 Alexander Star Nanostructure sensor device with polymer recognition layer
US8152991B2 (en) * 2005-10-27 2012-04-10 Nanomix, Inc. Ammonia nanosensors, and environmental control system
KR100842247B1 (ko) * 2005-08-08 2008-06-30 한국전자통신연구원 전자후각 센서어레이, 이를 포함하는 센서시스템, 그센서어레이 제조방법 및 그 센서시스템을 이용한 분석방법
WO2008052104A2 (en) 2006-10-26 2008-05-02 Nanomix, Inc. Sensor having a thin-film inhibition layer, nitric oxide converter and monitor
WO2011148774A1 (ja) 2010-05-24 2011-12-01 独立行政法人物質・材料研究機構 表面応力センサ
JP2016128776A (ja) 2015-01-09 2016-07-14 日本特殊陶業株式会社 アンモニア検出素子及びアンモニアセンサ
JP6764281B2 (ja) * 2016-08-09 2020-09-30 太陽誘電株式会社 ガスセンサ
JP6873638B2 (ja) 2016-09-23 2021-05-19 太陽誘電株式会社 ガスセンサ及びガス検出方法
EP3633344A4 (en) 2017-05-31 2021-03-03 National Institute for Materials Science NANOMECHANICAL SENSOR RECEPTOR MADE OF LOW HYGROSCOPIC MATERIAL AND NANOMECHANICAL SENSOR AS A RECEPTOR
JP2019174268A (ja) * 2018-03-28 2019-10-10 日本電波工業株式会社 感知方法
JP2020003362A (ja) * 2018-06-28 2020-01-09 株式会社豊田中央研究所 アミン化合物検出素子及びその利用

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040040841A1 (en) 2002-09-04 2004-03-04 Anuncia Gonzalez-Martin Chemical sensors utilizing conducting polymer compositions
JP2009250896A (ja) 2008-04-09 2009-10-29 National Institute Of Advanced Industrial & Technology アンモニア測定素子、アンモニア測定装置、アンモニアの測定方法、塩素測定素子、塩素測定装置及び塩素の測定方法
JP2019015675A (ja) 2017-07-10 2019-01-31 富士通株式会社 ガスセンサ、ガスセンサシステム、及びガス検出方法

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EP3988913A1 (en) 2022-04-27
US20220291185A1 (en) 2022-09-15
JPWO2020255580A1 (https=) 2020-12-24
WO2020255580A1 (ja) 2020-12-24
EP3988913B1 (en) 2024-10-09
EP3988913A4 (en) 2023-06-28
TWI797447B (zh) 2023-04-01
TW202107059A (zh) 2021-02-16
US12130270B2 (en) 2024-10-29

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