JPWO2020255580A5 - - Google Patents

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JPWO2020255580A5
JPWO2020255580A5 JP2021527442A JP2021527442A JPWO2020255580A5 JP WO2020255580 A5 JPWO2020255580 A5 JP WO2020255580A5 JP 2021527442 A JP2021527442 A JP 2021527442A JP 2021527442 A JP2021527442 A JP 2021527442A JP WO2020255580 A5 JPWO2020255580 A5 JP WO2020255580A5
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JP
Japan
Prior art keywords
relative humidity
purge gas
gas
measuring
ammonia
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JP2021527442A
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English (en)
Japanese (ja)
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JPWO2020255580A1 (https=
JP7262849B2 (ja
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Priority claimed from PCT/JP2020/018649 external-priority patent/WO2020255580A1/ja
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JP2021527442A 2019-06-18 2020-05-08 ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置 Active JP7262849B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019112434 2019-06-18
JP2019112434 2019-06-18
PCT/JP2020/018649 WO2020255580A1 (ja) 2019-06-18 2020-05-08 ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置

Publications (3)

Publication Number Publication Date
JPWO2020255580A1 JPWO2020255580A1 (https=) 2020-12-24
JPWO2020255580A5 true JPWO2020255580A5 (https=) 2022-02-04
JP7262849B2 JP7262849B2 (ja) 2023-04-24

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JP2021527442A Active JP7262849B2 (ja) 2019-06-18 2020-05-08 ナノメカニカルセンサを用いた加湿型高感度・高選択性アンモニア検出方法及び検出装置

Country Status (5)

Country Link
US (1) US12130270B2 (https=)
EP (1) EP3988913B1 (https=)
JP (1) JP7262849B2 (https=)
TW (1) TWI797447B (https=)
WO (1) WO2020255580A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7840896B2 (ja) * 2023-03-15 2026-04-06 株式会社東芝 ガス検出システムおよびガス検出方法
JP7799649B2 (ja) * 2023-03-22 2026-01-15 株式会社東芝 ケミカルセンサシステム

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630956A (en) * 1969-04-01 1971-12-28 Air Prod & Chem Method of producing gases with controlled concentrations of water vapor
US6123324A (en) * 1998-08-21 2000-09-26 Air Products And Chemicals, Inc. Process for humidifying a gas stream
KR20040054801A (ko) * 2001-11-26 2004-06-25 소니 인터내셔널(유로파) 게엠베하 실온에 근접한 온도에서 조작 및 제조되는, 1ｄ 반도체재료의 화학 감지 재료로서의 용도
US20050279987A1 (en) 2002-09-05 2005-12-22 Alexander Star Nanostructure sensor device with polymer recognition layer
US8152991B2 (en) * 2005-10-27 2012-04-10 Nanomix, Inc. Ammonia nanosensors, and environmental control system
US6994777B2 (en) 2002-09-04 2006-02-07 Lynntech, Inc. Chemical sensors utilizing conducting polymer compositions
KR100842247B1 (ko) * 2005-08-08 2008-06-30 한국전자통신연구원 전자후각 센서어레이, 이를 포함하는 센서시스템, 그센서어레이 제조방법 및 그 센서시스템을 이용한 분석방법
WO2008052104A2 (en) 2006-10-26 2008-05-02 Nanomix, Inc. Sensor having a thin-film inhibition layer, nitric oxide converter and monitor
JP5172442B2 (ja) * 2008-04-09 2013-03-27 独立行政法人産業技術総合研究所 アンモニア測定素子、アンモニア測定装置、塩素測定素子及び塩素測定装置
WO2011148774A1 (ja) 2010-05-24 2011-12-01 独立行政法人物質・材料研究機構 表面応力センサ
JP2016128776A (ja) 2015-01-09 2016-07-14 日本特殊陶業株式会社 アンモニア検出素子及びアンモニアセンサ
JP6764281B2 (ja) * 2016-08-09 2020-09-30 太陽誘電株式会社 ガスセンサ
JP6873638B2 (ja) 2016-09-23 2021-05-19 太陽誘電株式会社 ガスセンサ及びガス検出方法
EP3633344A4 (en) 2017-05-31 2021-03-03 National Institute for Materials Science NANOMECHANICAL SENSOR RECEPTOR MADE OF LOW HYGROSCOPIC MATERIAL AND NANOMECHANICAL SENSOR AS A RECEPTOR
JP6879091B2 (ja) * 2017-07-10 2021-06-02 富士通株式会社 ガスセンサシステム、及びガス検出方法
JP2019174268A (ja) * 2018-03-28 2019-10-10 日本電波工業株式会社 感知方法
JP2020003362A (ja) * 2018-06-28 2020-01-09 株式会社豊田中央研究所 アミン化合物検出素子及びその利用

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