JP7261573B2 - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
- Publication number
- JP7261573B2 JP7261573B2 JP2018233827A JP2018233827A JP7261573B2 JP 7261573 B2 JP7261573 B2 JP 7261573B2 JP 2018233827 A JP2018233827 A JP 2018233827A JP 2018233827 A JP2018233827 A JP 2018233827A JP 7261573 B2 JP7261573 B2 JP 7261573B2
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- leeward
- treatment gas
- flow rate
- windward
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0068—Regulation involving a measured inflow of a particular gas in the enclosure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Description
3 扉
4 ワークエリア
5 風下部
6 風下流量調整部
7 風上部
8 風上流量調整部
9,9A,9B,9C 循環路
10 ヒータ
11 ファン(気流発生部材)
13 放熱防止部材
17 吸込口
19 供給口
27 近位部
28 遠位部
33 ベース
33a 固定孔部(貫通孔部)
34 可動部
100 被処理物
Claims (1)
- 加熱された熱処理用ガスが流入する風上部、および、前記熱処理用ガスが流出する風下部を含み、前記風上部と前記風下部との間に被処理物が配置されるワークエリアと、
前記熱処理用ガスが供給される供給口と、
前記風上部に隣接し前記供給口からの前記熱処理用ガスを貯めて前記風上部へ供給する風上チャンバと、
前記風下部を通して前記ワークエリア内の前記熱処理用ガスを吸引する吸込口と、
前記風上部に設けられ前記供給口に相対的に近い風上近位領域および前記供給口に相対的に遠い風上遠位領域と、
前記風下部に設けられ前記吸込口に相対的に近い風下近位領域および前記吸込口に相対的に遠い風下遠位領域と、
を備え、
前記供給口は、前記風上遠位領域から前記風上近位領域に向かう方向において前記風上部の位置よりも下流の位置に設置されて前記風上チャンバに接続されており、且つ、前記供給口から吹かれる前記熱処理用ガスの向きが、前記風上近位領域から前記風上遠位領域に向かう方向に沿っており、
前記風上部において、前記熱処理用ガスが通過するために前記風上近位領域に形成された孔部のガス通過面積と、前記熱処理用ガスが通過するために前記風上遠位領域に形成された孔部のガス通過面積と、の差が風上側面積差として規定されており、
前記風下部において、前記熱処理用ガスが通過するために前記風下近位領域に形成された孔部のガス通過面積と、前記熱処理用ガスが通過するために前記風下遠位領域に形成された孔部のガス通過面積と、の差が風下側面積差として規定されており、
前記風下側面積差は、前記風上側面積差よりも大きく、
前記風下部において、前記風下遠位領域における前記孔部の前記ガス通過面積は、前記風下近位領域における前記孔部の前記ガス通過面積よりも大きいことを特徴とする、熱処理装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018233827A JP7261573B2 (ja) | 2018-12-13 | 2018-12-13 | 熱処理装置 |
CN201910930690.3A CN111322859A (zh) | 2018-12-13 | 2019-09-29 | 热处理装置 |
KR1020190148556A KR20200073121A (ko) | 2018-12-13 | 2019-11-19 | 열처리 장치 |
TW108145560A TWI736059B (zh) | 2018-12-13 | 2019-12-12 | 熱處理裝置 |
KR1020210141782A KR102422184B1 (ko) | 2018-12-13 | 2021-10-22 | 열처리 장치 |
KR1020210173000A KR20210153014A (ko) | 2018-12-13 | 2021-12-06 | 열처리 장치 |
JP2022203457A JP7538206B2 (ja) | 2018-12-13 | 2022-12-20 | 熱処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018233827A JP7261573B2 (ja) | 2018-12-13 | 2018-12-13 | 熱処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022203457A Division JP7538206B2 (ja) | 2018-12-13 | 2022-12-20 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020094766A JP2020094766A (ja) | 2020-06-18 |
JP7261573B2 true JP7261573B2 (ja) | 2023-04-20 |
Family
ID=71084795
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018233827A Active JP7261573B2 (ja) | 2018-12-13 | 2018-12-13 | 熱処理装置 |
JP2022203457A Active JP7538206B2 (ja) | 2018-12-13 | 2022-12-20 | 熱処理装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022203457A Active JP7538206B2 (ja) | 2018-12-13 | 2022-12-20 | 熱処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP7261573B2 (ja) |
KR (3) | KR20200073121A (ja) |
CN (1) | CN111322859A (ja) |
TW (1) | TWI736059B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102677141B1 (ko) * | 2023-09-15 | 2024-06-20 | 퍼니스원 주식회사 | 열처리 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001012870A (ja) | 1999-06-28 | 2001-01-19 | Koyo Thermo System Kk | バッチ式オーブン |
JP2001012857A (ja) | 1999-06-28 | 2001-01-19 | Koyo Thermo System Kk | 排気型バッチ式オーブン |
CN1527015A (zh) | 2003-03-04 | 2004-09-08 | 光洋热系统株式会社 | 热处理装置 |
KR101460340B1 (ko) | 2013-08-30 | 2014-11-14 | 대한고열공업(주) | 박스 오븐 |
JP2016011776A (ja) | 2014-06-27 | 2016-01-21 | シャープ株式会社 | 蒸気発生装置および加熱調理器 |
JP2016160128A (ja) | 2015-02-27 | 2016-09-05 | AvanStrate株式会社 | ガラス基板の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2861099B2 (ja) | 1989-09-01 | 1999-02-24 | 東陶機器株式会社 | 洗浄給水装置 |
KR101019132B1 (ko) * | 2003-03-05 | 2011-03-07 | 고요 써모시스템 주식회사 | 열처리 장치 |
JP5538740B2 (ja) * | 2009-03-18 | 2014-07-02 | 光洋サーモシステム株式会社 | 熱処理装置 |
CN101979675B (zh) * | 2010-11-29 | 2012-09-12 | 苏州中门子科技有限公司 | 热处理炉用喷流冷却装置 |
CN103392108B (zh) * | 2011-03-02 | 2015-08-05 | 株式会社村田制作所 | 热风循环炉 |
TWI534341B (zh) * | 2011-09-26 | 2016-05-21 | Hitachi Int Electric Inc | A substrate processing apparatus, a manufacturing method of a semiconductor device, and a recording medium |
TWI749397B (zh) * | 2013-12-13 | 2021-12-11 | 日商昕芙旎雅股份有限公司 | 設備前端模組(efem)及半導體製造裝置 |
CN105960701B (zh) * | 2014-03-20 | 2019-04-05 | 株式会社国际电气 | 衬底处理装置、顶棚部及半导体器件的制造方法 |
CN107385192A (zh) * | 2017-08-24 | 2017-11-24 | 苏州鼎佳炉窑科技有限公司 | 用于圆棒和板锭热处理的均质炉 |
CN107916382B (zh) * | 2017-12-14 | 2019-12-06 | 苏州中门子科技有限公司 | 一种用于航空或军工铝材的变向喷流式热处理工艺 |
-
2018
- 2018-12-13 JP JP2018233827A patent/JP7261573B2/ja active Active
-
2019
- 2019-09-29 CN CN201910930690.3A patent/CN111322859A/zh active Pending
- 2019-11-19 KR KR1020190148556A patent/KR20200073121A/ko not_active IP Right Cessation
- 2019-12-12 TW TW108145560A patent/TWI736059B/zh active
-
2021
- 2021-10-22 KR KR1020210141782A patent/KR102422184B1/ko active IP Right Grant
- 2021-12-06 KR KR1020210173000A patent/KR20210153014A/ko not_active Application Discontinuation
-
2022
- 2022-12-20 JP JP2022203457A patent/JP7538206B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001012870A (ja) | 1999-06-28 | 2001-01-19 | Koyo Thermo System Kk | バッチ式オーブン |
JP2001012857A (ja) | 1999-06-28 | 2001-01-19 | Koyo Thermo System Kk | 排気型バッチ式オーブン |
CN1527015A (zh) | 2003-03-04 | 2004-09-08 | 光洋热系统株式会社 | 热处理装置 |
KR101460340B1 (ko) | 2013-08-30 | 2014-11-14 | 대한고열공업(주) | 박스 오븐 |
JP2016011776A (ja) | 2014-06-27 | 2016-01-21 | シャープ株式会社 | 蒸気発生装置および加熱調理器 |
JP2016160128A (ja) | 2015-02-27 | 2016-09-05 | AvanStrate株式会社 | ガラス基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN111322859A (zh) | 2020-06-23 |
JP7538206B2 (ja) | 2024-08-21 |
TWI736059B (zh) | 2021-08-11 |
JP2023027326A (ja) | 2023-03-01 |
KR102422184B1 (ko) | 2022-07-18 |
JP2020094766A (ja) | 2020-06-18 |
KR20200073121A (ko) | 2020-06-23 |
TW202022969A (zh) | 2020-06-16 |
KR20210133179A (ko) | 2021-11-05 |
KR20210153014A (ko) | 2021-12-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5307893B2 (ja) | 加熱調理器 | |
EP2706316A2 (en) | Hot wind spray nozzle of tenter and hot wind spray apparatus of tenter using the same | |
US9625162B2 (en) | Heating cooker | |
JP7538206B2 (ja) | 熱処理装置 | |
JP6572464B2 (ja) | 過熱水蒸気を用いた加熱装置及び加熱方法 | |
JP2005090952A (ja) | 対流式オーブンおよび関連するエア・フロー装置 | |
KR20060108796A (ko) | 멀티 덕트 컨벡션 오븐 레인지 | |
US9511379B2 (en) | Gas-intake-port array structure and soldering apparatus | |
JP2003322476A (ja) | 熱風循環炉 | |
TWI695152B (zh) | 烘箱、用於將氣體分佈於烘箱的排出噴嘴板、及操作烘箱的方法 | |
WO2021170402A1 (de) | Haushalts-dampfgargerät und verfahren zum betreiben eines haushalts-dampfgargeräts | |
JP6623225B2 (ja) | 特に炭素繊維原料の酸化安定化のためのモジュール炉 | |
KR101792736B1 (ko) | 건조 장치 | |
CN101906521B (zh) | 一种新型的横向热风循环装置 | |
JP6725503B2 (ja) | センターツーエンド繊維酸化炉の改良された供給プレナム | |
JP6177616B2 (ja) | 熱処理装置 | |
JP5136543B2 (ja) | 加熱炉 | |
ES2822212T3 (es) | Placa de cocción y sistema de refrigeración de la placa de cocción | |
EP3006878A1 (en) | Fuel oven and operating method for said oven | |
JP7156169B2 (ja) | 熱風加熱装置 | |
US7037106B2 (en) | Apparatus for uniform flow distribution of gas in processing equipment | |
ES2863403T3 (es) | Encimera de cocción y sistema de enfriamiento de la encimera de cocción | |
JP6378374B2 (ja) | 熱処理装置 | |
JP2009074737A (ja) | 加熱調理器 | |
JP2024024563A (ja) | 恒温恒湿装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210816 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220705 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220901 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20220920 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221220 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20221220 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20230104 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20230110 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230328 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230410 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7261573 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |