JP7260536B2 - 光放出デバイス - Google Patents
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- JP7260536B2 JP7260536B2 JP2020521915A JP2020521915A JP7260536B2 JP 7260536 B2 JP7260536 B2 JP 7260536B2 JP 2020521915 A JP2020521915 A JP 2020521915A JP 2020521915 A JP2020521915 A JP 2020521915A JP 7260536 B2 JP7260536 B2 JP 7260536B2
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Description
本願は2018年6月11日付で出願された米国仮出願番号第62/683,410号、2017年10月17日付で出願された第62/573,383号、及び“LED EMITTERS WITH INTEGRATED NANO-PHOTONIC STRUCTURES TO ENHANCE EQE”と題する2018年10月15日付で出願された米国非仮出願第16/160,738号、並びに2018年2月27日付で出願された欧州特許出願第18158917.7号による優先権を主張しており、これら全てはあたかも完全に記載されているかのように本願に援用される。
本発明は発光ダイオード(LED)エミッタに関し、特に、外部量子効率(EQE)を高めるために一体化されたナノ・フォトニック構造を有するLEDエミッタに関する。
多重量子井戸(MQW)発光ダイオード(LED)における内部量子効率(IQE)は、ドループ関連メカニズムによって制限される。従って、高い電流密度及び高い温度では、ポンプIQEは、高い発光効率に対する主な制限要因の1つである。更に、活性領域によって放射されるエネルギーは、表面波の形でトラップされることが多く、最終的にはオーミック損失に起因して散逸する。これらのメカニズムは何れも、より低いEQEを招く。従って、これらの問題に対処し、統合されたソリューションをLEDエミッタ・キャビティに提供する、改良されたLEDエミッタを求めるニーズが存在する。
Claims (15)
- 光放出デバイスであって:
多重量子井戸を有する光放出半導体構造;及び
a)前記多重量子井戸からの近接場放射をハイパボリック・メタマテリアル格子構造の表面波に結合し、前記ハイパボリック・メタマテリアル格子構造の前記表面波からの放射をアウトカップルし、前記光放出デバイスからの光出力を形成するように構成されたハイパボリック・メタマテリアル格子構造;又は
b)前記多重量子井戸からの近接場放射を表面波に結合するように構成された反射性の金属層と、前記金属層及び前記多重量子井戸の間に配置され、前記表面波からの放射をアウトカップルし、前記光放出デバイスからの光出力を提供するように構成された格子構造とを有するプラズモニック構造であって、前記格子構造は:
前記光放出半導体構造の中に配置され、1つ以上の誘電体材料から形成されている;又は
前記光放出半導体構造の外に配置され、誘電体材料に組み込まれ、前記誘電体材料により前記金属層から隔てられている、プラズモニック構造;
を有する光放出デバイス。 - 前記多重量子井戸からの近接場放射をハイパボリック・メタマテリアル格子構造の表面波に結合し、前記ハイパボリック・メタマテリアル格子構造の前記表面波からの放射をアウトカップルし、前記光放出デバイスからの光出力を形成するように構成されたハイパボリック・メタマテリアル格子構造を有する、請求項1に記載の光放出デバイス。
- 前記ハイパボリック・メタマテリアル格子構造は前記光放出半導体構造に配置されている、請求項2に記載の光放出デバイス。
- 前記ハイパボリック・メタマテリアル格子構造に隣接して配置される、前記多重量子井戸とは反対側にある反射表面を有する、請求項3に記載の光放出デバイス。
- 前記反射表面は反射金属表面である、請求項4に記載の光放出デバイス。
- 前記反射金属表面と前記ハイパボリック・メタマテリアル格子構造との間に配置される透明な導電性の金属酸化物の層を有する請求項5に記載の光放出デバイス。
- 前記透明な導電性の金属酸化物の層と前記反射金属表面との間に配置される誘電体材料の層を有する請求項6に記載の光放出デバイス。
- 反射金属表面;
前記反射金属表面と半導体ダイオード構造との間に配置される透明な導電性の金属酸化物の層;
前記透明な導電性の金属酸化物の層と前記反射金属表面との間に配置される誘電体層;
を有し、前記ハイパボリック・メタマテリアル格子構造は前記誘電体層に配置されている、請求項2に記載の光放出デバイス。 - 前記多重量子井戸からの近接場放射を表面波に結合するように構成された反射性の金属層を有するプラズモニック構造;及び
1つ以上の誘電体材料から形成され、前記光放出半導体構造の中で前記金属層と前記多重量子井戸との間に配置され、前記表面波からの放射をアウトカップルし、前記光放出デバイスからの光出力を提供するように構成された格子構造;
を有する請求項1に記載の光放出デバイス。 - 前記格子構造と反射金属表面との間に透明な導電性の金属酸化物の層を有する、請求項9に記載の光放出デバイス。
- 前記透明な導電性の金属酸化物の層と前記反射金属表面との間に誘電体層を有する、請求項10に記載の光放出デバイス。
- 前記多重量子井戸からの近接場放射を表面波に結合するように構成された反射性の金属層を有するプラズモニック構造;及び
前記金属層と前記多重量子井戸との間で前記光放出半導体構造の外に配置され、誘電体材料に組み込まれ、前記誘電体材料により前記金属層から隔てられ、前記表面波からの放射をアウトカップルし、前記光放出デバイスからの光出力を提供するように構成された格子構造;
を有する請求項1に記載の光放出デバイス。 - 前記格子構造は、前記格子構造が組み込まれている前記誘電体材料とは異なる1つ以上の誘電体材料から形成されている、請求項12に記載の光放出デバイス。
- 前記格子構造は1つ以上の金属から形成されている、請求項12に記載の光放出デバイス。
- 前記格子構造が組み込まれている前記誘電体材料と前記光放出半導体構造との間に配置される導電性の金属酸化物の層を有する、請求項12-14のうちの何れか1項に記載の光放出デバイス。
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762573383P | 2017-10-17 | 2017-10-17 | |
US62/573,383 | 2017-10-17 | ||
EP18158917.7 | 2018-02-27 | ||
EP18158917 | 2018-02-27 | ||
US201862683410P | 2018-06-11 | 2018-06-11 | |
US62/683,410 | 2018-06-11 | ||
US16/160,738 US11024775B2 (en) | 2017-10-17 | 2018-10-15 | LED emitters with integrated nano-photonic structures to enhance EQE |
US16/160,738 | 2018-10-15 | ||
PCT/US2018/056024 WO2019079257A1 (en) | 2017-10-17 | 2018-10-16 | LED EMITTERS WITH INTEGRATED NANOPHOTONIC STRUCTURES TO IMPROVE THE EQE |
Publications (2)
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JP2020537825A JP2020537825A (ja) | 2020-12-24 |
JP7260536B2 true JP7260536B2 (ja) | 2023-04-18 |
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JP2020521915A Active JP7260536B2 (ja) | 2017-10-17 | 2018-10-16 | 光放出デバイス |
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US (2) | US11024775B2 (ja) |
EP (1) | EP3698413A1 (ja) |
JP (1) | JP7260536B2 (ja) |
KR (1) | KR102395612B1 (ja) |
CN (1) | CN111466034B (ja) |
TW (1) | TWI798272B (ja) |
WO (1) | WO2019079257A1 (ja) |
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TW201929261A (zh) | 2019-07-16 |
US20190115492A1 (en) | 2019-04-18 |
KR20200070330A (ko) | 2020-06-17 |
KR102395612B1 (ko) | 2022-05-09 |
US20210296539A1 (en) | 2021-09-23 |
JP2020537825A (ja) | 2020-12-24 |
CN111466034B (zh) | 2024-03-19 |
WO2019079257A1 (en) | 2019-04-25 |
US11024775B2 (en) | 2021-06-01 |
EP3698413A1 (en) | 2020-08-26 |
US11757066B2 (en) | 2023-09-12 |
CN111466034A (zh) | 2020-07-28 |
TWI798272B (zh) | 2023-04-11 |
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