JP7210200B2 - 厚み計測装置、及び厚み計測装置を備えた研削装置 - Google Patents
厚み計測装置、及び厚み計測装置を備えた研削装置 Download PDFInfo
- Publication number
- JP7210200B2 JP7210200B2 JP2018177684A JP2018177684A JP7210200B2 JP 7210200 B2 JP7210200 B2 JP 7210200B2 JP 2018177684 A JP2018177684 A JP 2018177684A JP 2018177684 A JP2018177684 A JP 2018177684A JP 7210200 B2 JP7210200 B2 JP 7210200B2
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- layer
- wafer
- grinding
- waveform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0069—Other grinding machines or devices with means for feeding the work-pieces to the grinding tool, e.g. turntables, transfer means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/48—Caliper-like sensors for measurement of a wafer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
3:研削ユニット
4:スピンドルユニット
5:研削ホイール
7:チャックテーブル機構
71:チャックテーブル
8:厚み計測装置
8a:第一の経路
8b:第二の経路
80:計測ハウジング
81:集光器
82:光源
83:光分岐部
84、86:コリメーションレンズ
85:対物レンズ
87:回析格子
88:集光レンズ
89:イメージセンサー
10:ウエーハ
11a:LN基板
11b:SiO2膜
12:デバイス
14:保護テープ
100:制御手段
110:厚み演算手段
112:厚み算出部
114:厚み決定部
120:仕上げ厚み設定部
Claims (4)
- ウエーハを保持する保持手段と、該保持手段に保持されたウエーハに対して透過性を有する波長域の光を照射してウエーハの厚みを計測する厚み計測装置であって、
ウエーハに対して透過性を有する波長域の光を発する光源と、該保持手段に保持されたウエーハに対して該光源が発した光を照射する集光器と、該光源と該集光器とを連通する第一の光路と、該第一の光路に配設され該保持手段に保持されたウエーハから反射した反射光を第二の光路に分岐する光分岐部と、該第二の光路に配設された回析格子と、該回析格子によって波長毎に分光された光の強度を検出し分光干渉波形を生成するイメージセンサーと、該イメージセンサーが生成した分光干渉波形を演算して厚み情報を出力する厚み演算手段と、を少なくとも含み、
該厚み演算手段は、
少なくともウエーハを構成する上層のA層と、下層のB層とを光が透過して形成される理論上の分光干渉波形を該A層と該B層の厚みを変化させた複数の領域に理論上の分光干渉波形を記録した理論波形テーブルを備え、該イメージセンサーが生成した分光干渉波形と該理論波形テーブルに記憶された複数の理論上の分光干渉波形とを比較して波形が一致した際の理論上の一つの分光干渉波形に対応する該A層と該B層の厚みを適正厚みとして決定する厚み決定部を備える厚み計測装置。 - 該厚み演算手段は、該イメージセンサーが生成した分光干渉波形をフーリエ変換して少なくともウエーハを構成する該A層及び該B層のそれぞれの厚みと、該A層と該B層とが合体した厚みを算出する厚み算出部を含む請求項1に記載の厚み計測装置。
- 該厚み演算手段は、
該厚み算出部で算出される該A層の厚みが、該厚み決定部の該理論波形テーブルに記憶された理論上の分光干渉波形のA層の厚みの領域に含まれると判定される場合、該厚み決定部によって適正厚みとして決定される該A層の厚み値を該A層の厚みとする、請求項2に記載の厚み計測装置。 - 請求項1乃至3のいずれかに記載された厚み計測装置を備え、該保持手段に保持されたウエーハの該A層を研削する研削工程を実施して該ウエーハの厚みを減ずる研削装置であって、
該A層の目標仕上げ厚みを設定する仕上げ厚み設定部を備え、
該厚み演算手段は、該厚み算出部が算出した該A層の厚みが、該厚み決定部の該理論波形テーブルに記録された該A層の厚みの領域に到達した後、該イメージセンサーが生成した分光干渉波形と該仕上げ厚み設定部に設定された該A層の目標仕上げ厚みに対応する該理論波形テーブルに記憶された理論上の分光干渉波形と、を比較して両者が一致したと判定された際に該研削を終了させる研削装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018177684A JP7210200B2 (ja) | 2018-09-21 | 2018-09-21 | 厚み計測装置、及び厚み計測装置を備えた研削装置 |
KR1020190106384A KR20200034592A (ko) | 2018-09-21 | 2019-08-29 | 두께 계측 장치, 및 두께 계측 장치를 구비한 연삭 장치 |
CN201910846517.5A CN110940279B (zh) | 2018-09-21 | 2019-09-09 | 厚度测量装置和具有厚度测量装置的磨削装置 |
US16/567,109 US20200096318A1 (en) | 2018-09-21 | 2019-09-11 | Thickness measuring apparatus and grinding apparatus including the same |
DE102019214275.3A DE102019214275A1 (de) | 2018-09-21 | 2019-09-19 | Dickenmessvorrichtung und Schleifvorrichtung, welche diese beinhaltet |
TW108133945A TWI834725B (zh) | 2018-09-21 | 2019-09-20 | 厚度計測裝置、及具備厚度計測裝置之研削裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018177684A JP7210200B2 (ja) | 2018-09-21 | 2018-09-21 | 厚み計測装置、及び厚み計測装置を備えた研削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020046410A JP2020046410A (ja) | 2020-03-26 |
JP7210200B2 true JP7210200B2 (ja) | 2023-01-23 |
Family
ID=69725666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018177684A Active JP7210200B2 (ja) | 2018-09-21 | 2018-09-21 | 厚み計測装置、及び厚み計測装置を備えた研削装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20200096318A1 (ja) |
JP (1) | JP7210200B2 (ja) |
KR (1) | KR20200034592A (ja) |
CN (1) | CN110940279B (ja) |
DE (1) | DE102019214275A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020106277A (ja) * | 2018-12-26 | 2020-07-09 | 株式会社ディスコ | 厚み計測装置、及び厚み計測装置を備えた加工装置 |
JP7477433B2 (ja) | 2020-11-24 | 2024-05-01 | 株式会社荏原製作所 | 研磨方法 |
CN113305571B (zh) * | 2021-06-24 | 2023-04-14 | 长春理工大学 | 超声振动辅助激光调控磨削与在线修整装置及方法 |
CN117207056B (zh) * | 2023-11-07 | 2024-01-23 | 苏州博宏源机械制造有限公司 | 一种高精度晶片激光测厚装置及方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010216854A (ja) | 2009-03-13 | 2010-09-30 | Omron Corp | 膜厚測定装置 |
JP2011133249A (ja) | 2009-12-22 | 2011-07-07 | Yokogawa Electric Corp | 多層膜の膜厚測定方法およびその装置 |
JP5443180B2 (ja) | 2010-01-13 | 2014-03-19 | 株式会社ディスコ | 厚み検出装置および研削機 |
US20140273296A1 (en) | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Metric for recognizing correct library spectrum |
JP2016200459A (ja) | 2015-04-08 | 2016-12-01 | 株式会社荏原製作所 | 膜厚測定方法、膜厚測定装置、研磨方法、および研磨装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH074922A (ja) * | 1993-06-21 | 1995-01-10 | Jasco Corp | 半導体多層薄膜膜厚測定装置およびその測定方法 |
US6665078B1 (en) * | 1997-09-22 | 2003-12-16 | Candela Instruments | System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers |
JP2008170366A (ja) * | 2007-01-15 | 2008-07-24 | Disco Abrasive Syst Ltd | チャックテーブルに保持された被加工物の計測装置およびレーザー加工機 |
JP2012021916A (ja) * | 2010-07-15 | 2012-02-02 | Disco Abrasive Syst Ltd | 厚み検出装置および研削機 |
TWI521625B (zh) * | 2010-07-30 | 2016-02-11 | 應用材料股份有限公司 | 使用光譜監測來偵測層級清除 |
JP6730124B2 (ja) * | 2016-08-01 | 2020-07-29 | 株式会社ディスコ | 厚み計測装置 |
JP6802011B2 (ja) * | 2016-09-02 | 2020-12-16 | 株式会社ディスコ | 厚み計測装置 |
US10215693B2 (en) * | 2016-09-29 | 2019-02-26 | Kla-Tencor Corporation | Infrared spectroscopic reflectometer for measurement of high aspect ratio structures |
JP6762834B2 (ja) * | 2016-10-12 | 2020-09-30 | 株式会社ディスコ | 計測装置 |
-
2018
- 2018-09-21 JP JP2018177684A patent/JP7210200B2/ja active Active
-
2019
- 2019-08-29 KR KR1020190106384A patent/KR20200034592A/ko unknown
- 2019-09-09 CN CN201910846517.5A patent/CN110940279B/zh active Active
- 2019-09-11 US US16/567,109 patent/US20200096318A1/en active Pending
- 2019-09-19 DE DE102019214275.3A patent/DE102019214275A1/de active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010216854A (ja) | 2009-03-13 | 2010-09-30 | Omron Corp | 膜厚測定装置 |
JP2011133249A (ja) | 2009-12-22 | 2011-07-07 | Yokogawa Electric Corp | 多層膜の膜厚測定方法およびその装置 |
JP5443180B2 (ja) | 2010-01-13 | 2014-03-19 | 株式会社ディスコ | 厚み検出装置および研削機 |
US20140273296A1 (en) | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Metric for recognizing correct library spectrum |
JP2016200459A (ja) | 2015-04-08 | 2016-12-01 | 株式会社荏原製作所 | 膜厚測定方法、膜厚測定装置、研磨方法、および研磨装置 |
Also Published As
Publication number | Publication date |
---|---|
CN110940279B (zh) | 2023-08-18 |
KR20200034592A (ko) | 2020-03-31 |
CN110940279A (zh) | 2020-03-31 |
DE102019214275A1 (de) | 2020-03-26 |
JP2020046410A (ja) | 2020-03-26 |
US20200096318A1 (en) | 2020-03-26 |
TW202012876A (zh) | 2020-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7210200B2 (ja) | 厚み計測装置、及び厚み計測装置を備えた研削装置 | |
JP7210367B2 (ja) | 厚み計測装置、及び厚み計測装置を備えた加工装置 | |
JP5443180B2 (ja) | 厚み検出装置および研削機 | |
JP5752961B2 (ja) | 計測装置 | |
CN107796313B (zh) | 厚度测量装置 | |
CN107796314B (zh) | 测量装置 | |
TWI830782B (zh) | 厚度測量裝置 | |
JP7235500B2 (ja) | 厚み計測装置、及び厚み計測装置を備えた加工装置 | |
JP2018063148A (ja) | 計測装置 | |
TW201816358A (zh) | 厚度測量裝置 | |
TWI808288B (zh) | 厚度量測裝置 | |
TWI731993B (zh) | 測量裝置 | |
TWI834725B (zh) | 厚度計測裝置、及具備厚度計測裝置之研削裝置 | |
JP7358185B2 (ja) | 厚み計測装置、及び厚み計測装置を備えた加工装置 | |
JP2012132776A (ja) | 計測装置 | |
TW202333893A (zh) | 研磨裝置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210707 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220531 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220705 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220901 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221220 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230111 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7210200 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |