JP7209080B2 - マルチチップモジュールの機械的構造 - Google Patents
マルチチップモジュールの機械的構造 Download PDFInfo
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- JP7209080B2 JP7209080B2 JP2021513889A JP2021513889A JP7209080B2 JP 7209080 B2 JP7209080 B2 JP 7209080B2 JP 2021513889 A JP2021513889 A JP 2021513889A JP 2021513889 A JP2021513889 A JP 2021513889A JP 7209080 B2 JP7209080 B2 JP 7209080B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/071—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next and on each other, i.e. mixed assemblies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0652—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next and on each other, i.e. mixed assemblies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4075—Mechanical elements
- H01L2023/4081—Compliant clamping elements not primarily serving heat-conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4075—Mechanical elements
- H01L2023/4087—Mounting accessories, interposers, clamping or screwing parts
Description
マルチチップコンピュータシステムは、一般に、高性能処理システムをサポートするために一般的にパッケージ化された複数の集積回路(IC)ダイを含むことが知られている。一部のマルチチップモジュールでは、複数のICが、サポートする相互接続と冷却システムを備えたアレイに取り付けられる。そのようなマルチチップモジュールの構造は、それに取り付けられた複数のIC間の信号接続を提供する集積ファンアウト(InFO)基板を備えたいくつかの層に積層された複数の構成要素を含むことができる。InFO基板は、その上に取り付けられた複数のICダイの信号接続のために効率を提供する一方で、それがサービスするマルチチップコンピュータシステムにとっては、やはり不利な点がある。InFO基板は、マルチチップモジュールの他の構成要素とは異なる温度に基づく膨張特性を有する可能性があるため、マルチチップモジュールの温度が経時的に変化する場合、InFO基板は、基板の膨張変化によって反ったり、伸びたり、縮んだり、損傷したりする可能性がある。さらに、InFO基板を使用するマルチチップモジュールから大量の熱を除去することは、状況によっては困難になる可能性がある。
Claims (9)
- 再分配層(RDL)基板と、
前記RDL基板の第1の表面に取り付けられた第1の複数の集積回路(IC)ダイと、
前記第1の表面の反対側の第2の表面に取り付けられた第2の複数のチップと、
前記第2の複数のチップに取り付けられた複数のソケットと、
前記第1の複数のICダイに取り付けられたコールドプレートと、
取り付け構造であって、
前記複数のソケットに結合された複数のソケットフレームと、
前記RDL基板を通って形成された複数の穴と、
前記RDL基板を通って形成された前記複数の穴を通って、前記複数のソケットフレームから延在し、前記コールドプレートにねじ込まれた複数のねじと、を備える取り付け構造と、
を備える、マルチチップモジュール。 - 前記RDL基板が、半導体製造プロセスで形成される、請求項1に記載のマルチチップモジュール。
- 前記複数のソケットフレームの各ソケットフレームが、単一のソケットにサービスする、請求項1に記載のマルチチップモジュール。
- 前記複数のソケットフレームの各ソケットフレームが、少なくとも2つのソケットにサービスする、請求項1に記載のマルチチップモジュール。
- 前記複数のソケットに取り付けられた複数の電圧調整モジュール(VRM)をさらに備える、請求項1に記載のマルチチップモジュール。
- 前記第2の複数のチップが、埋込型コンデンサアレイを含む、請求項1に記載のマルチチップモジュール。
- マルチチップモジュールを基板に取り付ける方法であって、
複数のチップを再分配層の第1の表面に取り付けるステップと、
取り付けられた前記チップをカプセル化するステップと、
浮動フレームまたは成形ソケット、あるいはその両方を前記再分配層上の前記チップに取り付けるステップと、
カプセル化された前記チップに熱インターフェイスモジュールを取り付けるステップと、
コールドプレートを前記熱インターフェイスモジュールに取り付けるステップと、
を含む、方法。 - 前記ソケットを前記基板にねじで固定するステップをさらに含む、請求項7に記載の方法。
- 前記基板上に電圧調整モジュールを追加するステップをさらに含む、請求項7に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862733559P | 2018-09-19 | 2018-09-19 | |
US62/733,559 | 2018-09-19 | ||
PCT/US2019/051956 WO2020061330A1 (en) | 2018-09-19 | 2019-09-19 | Mechanical architecture for a multi-chip module |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022500860A JP2022500860A (ja) | 2022-01-04 |
JP7209080B2 true JP7209080B2 (ja) | 2023-01-19 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021513889A Active JP7209080B2 (ja) | 2018-09-19 | 2019-09-19 | マルチチップモジュールの機械的構造 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11973004B2 (ja) |
EP (1) | EP3854186A1 (ja) |
JP (1) | JP7209080B2 (ja) |
CN (1) | CN113056963B (ja) |
WO (1) | WO2020061330A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8901823B2 (en) | 2008-10-24 | 2014-12-02 | Ilumisys, Inc. | Light and light sensor |
US11538735B2 (en) | 2018-12-26 | 2022-12-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming integrated circuit packages with mechanical braces |
WO2022159613A1 (en) * | 2021-01-22 | 2022-07-28 | Tesla, Inc. | Voltage regulating module design for the use of underfill |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090296360A1 (en) | 2008-06-02 | 2009-12-03 | Doblar Drew G | Voltage regulator attach for high current chip applications |
JP2013504894A (ja) | 2009-09-15 | 2013-02-07 | アール アンド ディー サーキッツ インコーポレイテッド | 相互接続構造における電力利得(電力供給)及び電力損失(電力消費)を改善するインターポーザ基板の内蔵部品 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3461204B2 (ja) * | 1993-09-14 | 2003-10-27 | 株式会社東芝 | マルチチップモジュール |
WO1996025839A1 (en) | 1995-02-16 | 1996-08-22 | Micromodule Systems, Inc. | Multiple chip module mounting assembly and computer using same |
US20030156400A1 (en) * | 1999-07-15 | 2003-08-21 | Dibene Joseph Ted | Method and apparatus for providing power to a microprocessor with intergrated thermal and EMI management |
US6558181B2 (en) | 2000-12-29 | 2003-05-06 | Intel Corporation | System and method for package socket with embedded power and ground planes |
US6643916B2 (en) | 2001-05-18 | 2003-11-11 | Hewlett-Packard Development Company, L.P. | Method to assemble a capacitor plate for substrate components |
US6634095B2 (en) | 2001-06-27 | 2003-10-21 | International Business Machines Corporation | Apparatus for mounting a land grid array module |
US7091586B2 (en) | 2003-11-04 | 2006-08-15 | Intel Corporation | Detachable on package voltage regulation module |
US8680670B2 (en) * | 2010-10-22 | 2014-03-25 | International Business Machines Corporation | Multi-chip module system with removable socketed modules |
-
2019
- 2019-09-19 EP EP19780482.6A patent/EP3854186A1/en active Pending
- 2019-09-19 JP JP2021513889A patent/JP7209080B2/ja active Active
- 2019-09-19 US US17/277,893 patent/US11973004B2/en active Active
- 2019-09-19 CN CN201980061338.9A patent/CN113056963B/zh active Active
- 2019-09-19 WO PCT/US2019/051956 patent/WO2020061330A1/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090296360A1 (en) | 2008-06-02 | 2009-12-03 | Doblar Drew G | Voltage regulator attach for high current chip applications |
JP2013504894A (ja) | 2009-09-15 | 2013-02-07 | アール アンド ディー サーキッツ インコーポレイテッド | 相互接続構造における電力利得(電力供給)及び電力損失(電力消費)を改善するインターポーザ基板の内蔵部品 |
Also Published As
Publication number | Publication date |
---|---|
WO2020061330A1 (en) | 2020-03-26 |
US20210351104A1 (en) | 2021-11-11 |
CN113056963B (zh) | 2022-06-24 |
JP2022500860A (ja) | 2022-01-04 |
EP3854186A1 (en) | 2021-07-28 |
CN113056963A (zh) | 2021-06-29 |
US11973004B2 (en) | 2024-04-30 |
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