JP7198353B2 - インクジェットプリンティング装置、双極子整列方法および表示装置の製造方法 - Google Patents
インクジェットプリンティング装置、双極子整列方法および表示装置の製造方法 Download PDFInfo
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- JP7198353B2 JP7198353B2 JP2021523020A JP2021523020A JP7198353B2 JP 7198353 B2 JP7198353 B2 JP 7198353B2 JP 2021523020 A JP2021523020 A JP 2021523020A JP 2021523020 A JP2021523020 A JP 2021523020A JP 7198353 B2 JP7198353 B2 JP 7198353B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04558—Control methods or devices therefor, e.g. driver circuits, control circuits detecting presence or properties of a dot on paper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/008—Controlling printhead for accurately positioning print image on printing material, e.g. with the intention to control the width of margins
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0456—Control methods or devices therefor, e.g. driver circuits, control circuits detecting drop size, volume or weight
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04586—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads of a type not covered by groups B41J2/04575 - B41J2/04585, or of an undefined type
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/21—Ink jet for multi-colour printing
- B41J2/2132—Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
- B41J2/2135—Alignment of dots
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/09—Ink jet technology used for manufacturing optical filters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/951—Supplying the plurality of semiconductor or solid-state bodies
- H01L2224/95101—Supplying the plurality of semiconductor or solid-state bodies in a liquid medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Computer Hardware Design (AREA)
- Coating Apparatus (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Quality & Reliability (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
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- Led Device Packages (AREA)
- Electroluminescent Light Sources (AREA)
Description
Claims (20)
- ステージを含むステージユニットと、
前記ステージ上に双極子および前記双極子が分散した溶媒を含むインクを噴射する少なくとも一つのインクジェットヘッドを含むインクジェットヘッドユニットと、
前記ステージ上に噴射された前記溶媒を除去する熱処理装置と、
前記インクジェットヘッドで前記ステージ上に噴射されたインクの位置を測定する第1センシングユニットと、
前記インクジェットヘッドの位置を測定する第2センシングユニットと、
前記ステージ上に噴射された前記双極子の位置を測定する第3センシングユニットを含む、インクジェットプリンティング装置。 - 前記インクジェットヘッドは互いに離隔して配置された第1インクジェットヘッドおよび第2インクジェットヘッドを含み、
前記インクジェットヘッドユニットは前記第1インクジェットヘッドと前記第2インクジェットヘッドを移動させる少なくとも一つのヘッド駆動部を含む、請求項1に記載のインクジェットプリンティング装置。 - 前記ヘッド駆動部は、前記インクジェットヘッドを第1方向に移動させる第1ヘッド駆動部および前記第1方向と垂直な方向である第2方向に移動させる第2ヘッド駆動部を含む、請求項2に記載のインクジェットプリンティング装置。
- 前記第1センシングユニットは、前記第1インクジェットヘッドで前記ステージ上に噴射された第1インクおよび前記第2インクジェットヘッドで前記ステージ上に噴射された第2インクの位置を測定する、請求項2に記載のインクジェットプリンティング装置。
- 前記第1センシングユニットは、前記第1インクおよび前記第2インクの直径を測定する、請求項4に記載のインクジェットプリンティング装置。
- 前記第3センシングユニットは、前記双極子が延びた一方向と前記第1方向とがなす鋭角を測定する、請求項3に記載のインクジェットプリンティング装置。
- 前記第3センシングユニットは、前記ステージ上に噴射された前記双極子の単位面積あたりの数を測定する、請求項6に記載のインクジェットプリンティング装置。
- 前記インクジェットヘッドユニット、前記第3センシングユニットおよび前記熱処理装置は第3方向に沿って配置され、前記ステージユニットは前記第3方向に移動する、請求項1に記載のインクジェットプリンティング装置。
- 前記インクジェットヘッドは前記第3方向に垂直である第4方向に互いに離隔して配置され、
前記第1センシングユニットは前記第4方向に移動する第1移動部を含み、
前記第2センシングユニットは前記第4方向に移動する第2移動部を含む、請求項8に記載のインクジェットプリンティング装置。 - 前記第3センシングユニットは、前記第3方向に移動する少なくとも一つの第3移動部および前記第4方向に移動する少なくとも一つの第4移動部を含む、請求項9に記載のインクジェットプリンティング装置。
- 前記ステージユニットは、前記ステージ上に電界を生成するプローブユニットをさらに含む、請求項8に記載のインクジェットプリンティング装置。
- 対象基板上に双極子および前記双極子が分散した溶媒を含むインクを噴射する段階と、
前記対象基板上に電界を生成して前記電界により前記双極子が前記対象基板上に配置される段階と、
前記溶媒を除去して前記対象基板上に配置された前記双極子の位置を測定する段階を含む、双極子整列方法。 - 前記インクはインクジェットヘッドで噴射され、
前記インクを噴射する段階前に前記対象基板上に噴射される前記インクの位置を調整する段階をさらに含む、請求項12に記載の双極子整列方法。 - 前記インクジェットヘッドは第1ヘッドおよび第2ヘッドを含み、
前記噴射されるインクの位置を調整する段階は、
前記第1ヘッドで噴射されたインクと前記第2ヘッドで噴射されたインクの位置を測定する段階と、
前記測定されたインクの位置を利用して前記第1ヘッドおよび前記第2ヘッドの位置を調整する段階を含む、請求項13に記載の双極子整列方法。 - 前記対象基板は所定の方向に延びた第1電極および第2電極を含み、
前記双極子の位置を測定する段階は、
前記双極子の配向方向を測定して前記双極子の配向方向と前記所定の方向に垂直である方向とがなす鋭角を測定する段階を含む、請求項14に記載の双極子整列方法。 - 前記双極子の位置を測定する段階は、前記対象基板上に配置された前記双極子の単位面積あたりの数を測定する段階をさらに含む、請求項15に記載の双極子整列方法。
- 前記対象基板上に配置された前記双極子の位置に対する基準設定値を設定し、前記双極子の位置を測定する段階で測定された前記鋭角および前記双極子の単位面積当たりの数と前記基準設定値を比較する段階をさらに含む、請求項16に記載の双極子整列方法。
- 第1電極および第2電極が形成された対象基板に発光素子および前記発光素子が分散した溶媒を含むインクを噴射する段階と、
前記第1電極および前記第2電極上に前記発光素子を配置し、前記対象基板上に噴射された前記溶媒を除去する段階と、
前記第1電極および前記第2電極上に配置された前記発光素子の位置を測定する段階を含む、表示装置の製造方法。 - 前記第1電極および前記第2電極は所定の方向に延び、
前記発光素子の位置を測定する段階は前記発光素子が延びた一方向と前記所定の方向に垂直である方向とがなす鋭角を測定する段階を含む、請求項18に記載の表示装置の製造方法。 - 前記対象基板は複数の画素を含み、
前記第1電極と前記第2電極は前記画素ごとに備えられ、
前記発光素子の位置を測定する段階は前記各画素に配置された前記発光素子の数を測定する段階を含む、請求項19に記載の表示装置の製造方法。
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