JP7197761B2 - 洗浄装置、その制御方法、並びに洗浄システム、その制御方法 - Google Patents

洗浄装置、その制御方法、並びに洗浄システム、その制御方法 Download PDF

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JP7197761B2
JP7197761B2 JP2018094894A JP2018094894A JP7197761B2 JP 7197761 B2 JP7197761 B2 JP 7197761B2 JP 2018094894 A JP2018094894 A JP 2018094894A JP 2018094894 A JP2018094894 A JP 2018094894A JP 7197761 B2 JP7197761 B2 JP 7197761B2
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cleaning liquid
cleaning
supply
gas
section
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JP2019198824A5 (enExample
JP2019198824A (ja
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直樹 加藤
隆 三宅
達也 横山
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Canon Marketing Japan Inc
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Canon Marketing Japan Inc
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  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Information Retrieval, Db Structures And Fs Structures Therefor (AREA)
JP2018094894A 2018-05-16 2018-05-16 洗浄装置、その制御方法、並びに洗浄システム、その制御方法 Active JP7197761B2 (ja)

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JP2019198824A JP2019198824A (ja) 2019-11-21
JP2019198824A5 JP2019198824A5 (enExample) 2021-07-26
JP7197761B2 true JP7197761B2 (ja) 2022-12-28

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7748631B2 (ja) * 2022-02-22 2025-10-03 パナソニックＩｐマネジメント株式会社 衛生管理装置、衛生管理システム、衛生管理方法、及び、除菌剤生成装置
WO2024231969A1 (ja) * 2023-05-08 2024-11-14 シャープ株式会社 気体処理装置、気体処理方法、貯蔵庫及び空気調和機

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001113119A (ja) 1999-10-19 2001-04-24 Yanmar Diesel Engine Co Ltd 排ガス脱臭装置
JP2003010798A (ja) 2001-06-29 2003-01-14 Mitsubishi Heavy Ind Ltd 洗浄液の再利用方法及びこれを使用する洗浄装置
JP2011173072A (ja) 2010-02-24 2011-09-08 Mitsubishi Heavy Ind Ltd 薬剤噴霧装置および薬剤噴霧方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001113119A (ja) 1999-10-19 2001-04-24 Yanmar Diesel Engine Co Ltd 排ガス脱臭装置
JP2003010798A (ja) 2001-06-29 2003-01-14 Mitsubishi Heavy Ind Ltd 洗浄液の再利用方法及びこれを使用する洗浄装置
JP2011173072A (ja) 2010-02-24 2011-09-08 Mitsubishi Heavy Ind Ltd 薬剤噴霧装置および薬剤噴霧方法

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