JP7181176B2 - 排気システムおよび排気方法 - Google Patents

排気システムおよび排気方法 Download PDF

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Publication number
JP7181176B2
JP7181176B2 JP2019186629A JP2019186629A JP7181176B2 JP 7181176 B2 JP7181176 B2 JP 7181176B2 JP 2019186629 A JP2019186629 A JP 2019186629A JP 2019186629 A JP2019186629 A JP 2019186629A JP 7181176 B2 JP7181176 B2 JP 7181176B2
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JP
Japan
Prior art keywords
gas
exhaust
line
buffer tank
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019186629A
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English (en)
Japanese (ja)
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JP2021062316A (ja
JP2021062316A5 (https=
Inventor
圭亮 松島
一知 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2019186629A priority Critical patent/JP7181176B2/ja
Priority to US17/061,899 priority patent/US11090619B2/en
Priority to NL2026632A priority patent/NL2026632B1/en
Priority to TW109134604A priority patent/TWI851826B/zh
Publication of JP2021062316A publication Critical patent/JP2021062316A/ja
Publication of JP2021062316A5 publication Critical patent/JP2021062316A5/ja
Application granted granted Critical
Publication of JP7181176B2 publication Critical patent/JP7181176B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
    • F01N3/18—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by methods of operation; Control
    • F01N3/22—Control of additional air supply only, e.g. using by-passes or variable air pump drives
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N13/00—Exhaust or silencing apparatus characterised by constructional features
    • F01N13/08—Other arrangements or adaptations of exhaust conduits
    • F01N13/087—Other arrangements or adaptations of exhaust conduits having valves upstream of silencing apparatus for by-passing at least part of exhaust directly to atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
    • F01N3/24—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
    • F01N3/30—Arrangements for supply of additional air
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/009—Auxiliary arrangements not involved in the plasma generation
    • H05G2/0092—Housing of the apparatus for producing X-rays; Environment inside the housing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL-COMBUSTION ENGINES
    • F01N2410/00—By-passing, at least partially, exhaust from inlet to outlet of apparatus, to atmosphere or to other device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/06—Combination of fuel cells with means for production of reactants or for treatment of residues
    • H01M8/0662—Treatment of gaseous reactants or gaseous residues, e.g. cleaning
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/10—Internal combustion engine [ICE] based vehicles
    • Y02T10/12—Improving ICE efficiencies

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Automation & Control Theory (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exhaust Gas After Treatment (AREA)
  • Treating Waste Gases (AREA)
JP2019186629A 2019-10-10 2019-10-10 排気システムおよび排気方法 Active JP7181176B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019186629A JP7181176B2 (ja) 2019-10-10 2019-10-10 排気システムおよび排気方法
US17/061,899 US11090619B2 (en) 2019-10-10 2020-10-02 Exhaust system and exhaust method
NL2026632A NL2026632B1 (en) 2019-10-10 2020-10-06 Exhaust System and Exhaust Method
TW109134604A TWI851826B (zh) 2019-10-10 2020-10-06 排氣系統及排氣方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019186629A JP7181176B2 (ja) 2019-10-10 2019-10-10 排気システムおよび排気方法

Publications (3)

Publication Number Publication Date
JP2021062316A JP2021062316A (ja) 2021-04-22
JP2021062316A5 JP2021062316A5 (https=) 2022-05-30
JP7181176B2 true JP7181176B2 (ja) 2022-11-30

Family

ID=74095999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019186629A Active JP7181176B2 (ja) 2019-10-10 2019-10-10 排気システムおよび排気方法

Country Status (4)

Country Link
US (1) US11090619B2 (https=)
JP (1) JP7181176B2 (https=)
NL (1) NL2026632B1 (https=)
TW (1) TWI851826B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2561899B (en) 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
GB2594078B (en) 2020-04-16 2024-10-16 Edwards Ltd Flammable gas dilution
JP7507042B2 (ja) * 2020-09-03 2024-06-27 株式会社荏原製作所 水素希釈装置および水素希釈方法
JP7590092B2 (ja) 2021-03-31 2024-11-26 住友重機械工業株式会社 射出成形機の制御装置、射出成形機、及び制御方法
DE102022126773A1 (de) * 2022-10-13 2024-04-18 Pilz Gmbh & Co. Kg Vorrichtung und Verfahren zur Überwachung einer Inertisierung
CN116066744B (zh) * 2023-03-07 2026-02-24 上海良薇机电工程有限公司 混合气体供应系统
CN118623326A (zh) * 2024-04-24 2024-09-10 北京京仪自动化装备技术股份有限公司 半导体废气处理系统及半导体废气处理系统的控制方法
JP7598506B1 (ja) 2024-05-20 2024-12-11 日鉄エンジニアリング株式会社 ガス均質化装置、ガス均質化方法、水素ガスの製造方法、水素ガス製造設備及びその運転方法、ガス化溶融炉設備及びその運転方法、製鉄方法、熱処理方法、並びに鉄鉱石の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100778566B1 (ko) 2006-08-08 2007-11-22 현대자동차주식회사 연료전지 차량의 수소 안전 배기 시스템
US20110192139A1 (en) 2010-02-11 2011-08-11 Agency For Defense Development Hydrogen combustion system with closed-cycle recycling of exhaust gas and method thereof
CN109004252A (zh) 2018-07-30 2018-12-14 苏州就是能源科技有限公司 一种氢能尾气处理装置
JP2019027776A (ja) 2017-08-03 2019-02-21 株式会社荏原製作所 排ガス処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0815528B2 (ja) * 1991-10-30 1996-02-21 株式会社荏原製作所 ガス中の水素の除去方法及び装置
JPH1147550A (ja) 1997-08-01 1999-02-23 Ebara Corp 排ガス処理方法
WO2018138918A1 (ja) 2017-01-30 2018-08-02 ギガフォトン株式会社 極端紫外光生成装置
TWI754084B (zh) * 2017-08-03 2022-02-01 日商荏原製作所股份有限公司 排氣處理裝置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100778566B1 (ko) 2006-08-08 2007-11-22 현대자동차주식회사 연료전지 차량의 수소 안전 배기 시스템
US20110192139A1 (en) 2010-02-11 2011-08-11 Agency For Defense Development Hydrogen combustion system with closed-cycle recycling of exhaust gas and method thereof
JP2019027776A (ja) 2017-08-03 2019-02-21 株式会社荏原製作所 排ガス処理装置
CN109004252A (zh) 2018-07-30 2018-12-14 苏州就是能源科技有限公司 一种氢能尾气处理装置

Also Published As

Publication number Publication date
JP2021062316A (ja) 2021-04-22
US20210106955A1 (en) 2021-04-15
NL2026632A (en) 2021-05-31
US11090619B2 (en) 2021-08-17
TW202123362A (zh) 2021-06-16
NL2026632B1 (en) 2021-10-14
TWI851826B (zh) 2024-08-11

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