JP2021062316A5 - - Google Patents

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Publication number
JP2021062316A5
JP2021062316A5 JP2019186629A JP2019186629A JP2021062316A5 JP 2021062316 A5 JP2021062316 A5 JP 2021062316A5 JP 2019186629 A JP2019186629 A JP 2019186629A JP 2019186629 A JP2019186629 A JP 2019186629A JP 2021062316 A5 JP2021062316 A5 JP 2021062316A5
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JP
Japan
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lid
main body
buffer tank
line
extends
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JP2019186629A
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English (en)
Japanese (ja)
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JP2021062316A (ja
JP7181176B2 (ja
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Priority to JP2019186629A priority Critical patent/JP7181176B2/ja
Priority claimed from JP2019186629A external-priority patent/JP7181176B2/ja
Priority to US17/061,899 priority patent/US11090619B2/en
Priority to NL2026632A priority patent/NL2026632B1/en
Priority to TW109134604A priority patent/TWI851826B/zh
Publication of JP2021062316A publication Critical patent/JP2021062316A/ja
Publication of JP2021062316A5 publication Critical patent/JP2021062316A5/ja
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Publication of JP7181176B2 publication Critical patent/JP7181176B2/ja
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JP2019186629A 2019-10-10 2019-10-10 排気システムおよび排気方法 Active JP7181176B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019186629A JP7181176B2 (ja) 2019-10-10 2019-10-10 排気システムおよび排気方法
US17/061,899 US11090619B2 (en) 2019-10-10 2020-10-02 Exhaust system and exhaust method
NL2026632A NL2026632B1 (en) 2019-10-10 2020-10-06 Exhaust System and Exhaust Method
TW109134604A TWI851826B (zh) 2019-10-10 2020-10-06 排氣系統及排氣方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019186629A JP7181176B2 (ja) 2019-10-10 2019-10-10 排気システムおよび排気方法

Publications (3)

Publication Number Publication Date
JP2021062316A JP2021062316A (ja) 2021-04-22
JP2021062316A5 true JP2021062316A5 (https=) 2022-05-30
JP7181176B2 JP7181176B2 (ja) 2022-11-30

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ID=74095999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019186629A Active JP7181176B2 (ja) 2019-10-10 2019-10-10 排気システムおよび排気方法

Country Status (4)

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US (1) US11090619B2 (https=)
JP (1) JP7181176B2 (https=)
NL (1) NL2026632B1 (https=)
TW (1) TWI851826B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2561899B (en) 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
GB2594078B (en) 2020-04-16 2024-10-16 Edwards Ltd Flammable gas dilution
JP7507042B2 (ja) * 2020-09-03 2024-06-27 株式会社荏原製作所 水素希釈装置および水素希釈方法
JP7590092B2 (ja) 2021-03-31 2024-11-26 住友重機械工業株式会社 射出成形機の制御装置、射出成形機、及び制御方法
DE102022126773A1 (de) * 2022-10-13 2024-04-18 Pilz Gmbh & Co. Kg Vorrichtung und Verfahren zur Überwachung einer Inertisierung
CN116066744B (zh) * 2023-03-07 2026-02-24 上海良薇机电工程有限公司 混合气体供应系统
CN118623326A (zh) * 2024-04-24 2024-09-10 北京京仪自动化装备技术股份有限公司 半导体废气处理系统及半导体废气处理系统的控制方法
JP7598506B1 (ja) 2024-05-20 2024-12-11 日鉄エンジニアリング株式会社 ガス均質化装置、ガス均質化方法、水素ガスの製造方法、水素ガス製造設備及びその運転方法、ガス化溶融炉設備及びその運転方法、製鉄方法、熱処理方法、並びに鉄鉱石の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0815528B2 (ja) * 1991-10-30 1996-02-21 株式会社荏原製作所 ガス中の水素の除去方法及び装置
JPH1147550A (ja) 1997-08-01 1999-02-23 Ebara Corp 排ガス処理方法
KR100778566B1 (ko) * 2006-08-08 2007-11-22 현대자동차주식회사 연료전지 차량의 수소 안전 배기 시스템
KR101160900B1 (ko) * 2010-02-11 2012-06-28 국방과학연구소 배기가스 재순환방식에 의한 폐회로 수소연소 시스템 및 방법
WO2018138918A1 (ja) 2017-01-30 2018-08-02 ギガフォトン株式会社 極端紫外光生成装置
TWI754084B (zh) * 2017-08-03 2022-02-01 日商荏原製作所股份有限公司 排氣處理裝置
JP7353022B2 (ja) * 2017-08-03 2023-09-29 株式会社荏原製作所 排ガス処理装置
CN109004252B (zh) * 2018-07-30 2024-01-12 苏州就是能源科技有限公司 一种氢能尾气处理装置

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