JP7169480B1 - 露光装置用露光ヘッドおよび露光装置 - Google Patents

露光装置用露光ヘッドおよび露光装置 Download PDF

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JP7169480B1
JP7169480B1 JP2022102070A JP2022102070A JP7169480B1 JP 7169480 B1 JP7169480 B1 JP 7169480B1 JP 2022102070 A JP2022102070 A JP 2022102070A JP 2022102070 A JP2022102070 A JP 2022102070A JP 7169480 B1 JP7169480 B1 JP 7169480B1
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optical system
exposure
image
mirror
light
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JP2024002707A (ja
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隆志 奥山
義則 小林
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Orc Manufacturing Co Ltd
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Orc Manufacturing Co Ltd
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JP2022102070A 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置 Active JP7169480B1 (ja)

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JP2022102070A JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置
JP2022173236A JP2024002874A (ja) 2022-06-24 2022-10-28 露光装置用露光ヘッドおよび露光装置

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JP2022102070A JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置

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JP2024002707A JP2024002707A (ja) 2024-01-11

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JP2022173236A Pending JP2024002874A (ja) 2022-06-24 2022-10-28 露光装置用露光ヘッドおよび露光装置

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5881313B2 (ja) 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置
JP5881314B2 (ja) 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3285214B2 (ja) * 1991-03-22 2002-05-27 株式会社日立製作所 レーザ加工用光学装置
JP2009087995A (ja) * 2007-09-27 2009-04-23 Hitachi Via Mechanics Ltd マスクレス露光装置
JP2014092707A (ja) * 2012-11-05 2014-05-19 Orc Manufacturing Co Ltd 露光装置
JP6590638B2 (ja) * 2015-10-29 2019-10-16 株式会社オーク製作所 露光装置用露光ヘッドおよび露光装置用投影光学系
JP2021096300A (ja) * 2019-12-13 2021-06-24 株式会社ブイ・テクノロジー 露光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5881313B2 (ja) 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置
JP5881314B2 (ja) 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置

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JP2024002707A (ja) 2024-01-11

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