JP7164282B2 - 空気流量測定装置 - Google Patents

空気流量測定装置 Download PDF

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Publication number
JP7164282B2
JP7164282B2 JP2022505781A JP2022505781A JP7164282B2 JP 7164282 B2 JP7164282 B2 JP 7164282B2 JP 2022505781 A JP2022505781 A JP 2022505781A JP 2022505781 A JP2022505781 A JP 2022505781A JP 7164282 B2 JP7164282 B2 JP 7164282B2
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JP
Japan
Prior art keywords
air flow
thin film
sealing resin
resin member
lead frame
Prior art date
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Application number
JP2022505781A
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English (en)
Japanese (ja)
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JPWO2021181827A5 (enExample
JPWO2021181827A1 (enExample
Inventor
ファハナー ビンティ ハリダン ファティン
博幸 阿部
孝之 余語
望 八文字
瑞紀 伊集院
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Astemo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hitachi Astemo Ltd filed Critical Hitachi Astemo Ltd
Publication of JPWO2021181827A1 publication Critical patent/JPWO2021181827A1/ja
Publication of JPWO2021181827A5 publication Critical patent/JPWO2021181827A5/ja
Application granted granted Critical
Publication of JP7164282B2 publication Critical patent/JP7164282B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP2022505781A 2020-03-10 2020-12-25 空気流量測定装置 Active JP7164282B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020040656 2020-03-10
JP2020040656 2020-03-10
PCT/JP2020/048699 WO2021181827A1 (ja) 2020-03-10 2020-12-25 空気流量測定装置

Publications (3)

Publication Number Publication Date
JPWO2021181827A1 JPWO2021181827A1 (enExample) 2021-09-16
JPWO2021181827A5 JPWO2021181827A5 (enExample) 2022-09-26
JP7164282B2 true JP7164282B2 (ja) 2022-11-01

Family

ID=77671564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022505781A Active JP7164282B2 (ja) 2020-03-10 2020-12-25 空気流量測定装置

Country Status (5)

Country Link
US (1) US12169137B2 (enExample)
JP (1) JP7164282B2 (enExample)
CN (1) CN115176130A (enExample)
DE (1) DE112020006397T5 (enExample)
WO (1) WO2021181827A1 (enExample)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5743871B2 (ja) 2011-12-07 2015-07-01 日立オートモティブシステムズ株式会社 熱式流量計
JP6043833B2 (ja) 2015-04-27 2016-12-14 日立オートモティブシステムズ株式会社 熱式流量計
JP6134840B2 (ja) 2016-05-16 2017-05-24 日立オートモティブシステムズ株式会社 熱式流量計
JP6215502B2 (ja) 2017-04-17 2017-10-18 日立オートモティブシステムズ株式会社 熱式流量計
JP6458104B2 (ja) 2017-09-11 2019-01-23 日立オートモティブシステムズ株式会社 熱式流量計

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597673A (ja) * 1982-07-07 1984-01-14 Kaiyoushiya:Kk 自動巻線機
WO2007114191A1 (ja) * 2006-03-28 2007-10-11 Kabushiki Kaisha Kobe Seiko Sho メンブレン構造素子及びその製造方法
JP5456815B2 (ja) * 2010-10-13 2014-04-02 日立オートモティブシステムズ株式会社 流量センサおよびその製造方法
JP5676527B2 (ja) * 2012-06-15 2015-02-25 日立オートモティブシステムズ株式会社 熱式流量計
JP5755185B2 (ja) * 2012-06-15 2015-07-29 日立オートモティブシステムズ株式会社 熱式流量計
JP6096070B2 (ja) * 2013-06-20 2017-03-15 日立オートモティブシステムズ株式会社 熱式流量計の製造方法
JP6198697B2 (ja) * 2014-08-14 2017-09-20 日立オートモティブシステムズ株式会社 熱式流量計
JP2017020982A (ja) * 2015-07-15 2017-01-26 日立オートモティブシステムズ株式会社 熱式空気流量計
JP2020003440A (ja) * 2018-07-02 2020-01-09 日立オートモティブシステムズ株式会社 熱式流量測定装置
JP2020034508A (ja) * 2018-08-31 2020-03-05 日立オートモティブシステムズ株式会社 物理量検出装置
JP2021131323A (ja) * 2020-02-20 2021-09-09 サーパス工業株式会社 流量計および流量計の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5743871B2 (ja) 2011-12-07 2015-07-01 日立オートモティブシステムズ株式会社 熱式流量計
JP6043833B2 (ja) 2015-04-27 2016-12-14 日立オートモティブシステムズ株式会社 熱式流量計
JP6134840B2 (ja) 2016-05-16 2017-05-24 日立オートモティブシステムズ株式会社 熱式流量計
JP6215502B2 (ja) 2017-04-17 2017-10-18 日立オートモティブシステムズ株式会社 熱式流量計
JP6458104B2 (ja) 2017-09-11 2019-01-23 日立オートモティブシステムズ株式会社 熱式流量計

Also Published As

Publication number Publication date
US12169137B2 (en) 2024-12-17
JPWO2021181827A1 (enExample) 2021-09-16
US20230079532A1 (en) 2023-03-16
DE112020006397T5 (de) 2022-10-20
WO2021181827A1 (ja) 2021-09-16
CN115176130A (zh) 2022-10-11

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