JP7163175B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法 Download PDF

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Publication number
JP7163175B2
JP7163175B2 JP2018243513A JP2018243513A JP7163175B2 JP 7163175 B2 JP7163175 B2 JP 7163175B2 JP 2018243513 A JP2018243513 A JP 2018243513A JP 2018243513 A JP2018243513 A JP 2018243513A JP 7163175 B2 JP7163175 B2 JP 7163175B2
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region
insulating film
gate
semiconductor
layer
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Japanese (ja)
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JP2020107678A (ja
JP2020107678A5 (enExample
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是文 津田
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Renesas Electronics Corp
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Renesas Electronics Corp
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Priority to JP2018243513A priority Critical patent/JP7163175B2/ja
Priority to EP19215258.5A priority patent/EP3683835B1/en
Priority to CN201911285736.7A priority patent/CN111383995B/zh
Priority to US16/719,385 priority patent/US11069581B2/en
Priority to KR1020190171498A priority patent/KR102660302B1/ko
Publication of JP2020107678A publication Critical patent/JP2020107678A/ja
Publication of JP2020107678A5 publication Critical patent/JP2020107678A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/017—Manufacture or treatment using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
    • H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B43/00—EEPROM devices comprising charge-trapping gate insulators
    • H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/021—Manufacture or treatment using multiple gate spacer layers, e.g. bilayered sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/681—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered
    • H10D64/685—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered being perpendicular to the channel plane
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0128—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0135—Manufacturing their gate conductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0144—Manufacturing their gate insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0147—Manufacturing their gate sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/8314—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET] the IGFETs characterised by having gate insulating layers with different properties
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D87/00—Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate

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  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
JP2018243513A 2018-12-26 2018-12-26 半導体装置の製造方法 Active JP7163175B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2018243513A JP7163175B2 (ja) 2018-12-26 2018-12-26 半導体装置の製造方法
EP19215258.5A EP3683835B1 (en) 2018-12-26 2019-12-11 Method of manufacturing semiconductor device
CN201911285736.7A CN111383995B (zh) 2018-12-26 2019-12-13 制造半导体器件的方法
US16/719,385 US11069581B2 (en) 2018-12-26 2019-12-18 Method of manufacturing semiconductor device
KR1020190171498A KR102660302B1 (ko) 2018-12-26 2019-12-20 반도체 장치의 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018243513A JP7163175B2 (ja) 2018-12-26 2018-12-26 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2020107678A JP2020107678A (ja) 2020-07-09
JP2020107678A5 JP2020107678A5 (enExample) 2021-07-26
JP7163175B2 true JP7163175B2 (ja) 2022-10-31

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US (1) US11069581B2 (enExample)
EP (1) EP3683835B1 (enExample)
JP (1) JP7163175B2 (enExample)
KR (1) KR102660302B1 (enExample)
CN (1) CN111383995B (enExample)

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KR102504860B1 (ko) * 2020-09-03 2023-03-02 한양대학교 산학협력단 강유전체 기반의 임베디드 시스템
US12020980B2 (en) * 2021-07-07 2024-06-25 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor structure and forming method thereof
KR102902230B1 (ko) * 2021-09-16 2025-12-18 삼성전자주식회사 반도체 장치 및 이의 제조 방법
US12040399B2 (en) * 2022-03-17 2024-07-16 Renesas Electronics Corporation Semiconductor device
US20240373639A1 (en) * 2023-05-03 2024-11-07 Western Digital Technologies, Inc., Three-dimensional memory device containing peripheral circuit with fin field effect transistors and method of making the same

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JP2007142036A (ja) 2005-11-16 2007-06-07 Sony Corp 半導体装置およびその製造方法
JP2011054718A (ja) 2009-09-01 2011-03-17 Renesas Electronics Corp 半導体装置およびその製造方法
JP2012129292A (ja) 2010-12-14 2012-07-05 Renesas Electronics Corp 半導体集積回路装置
US20140312404A1 (en) 2013-04-18 2014-10-23 International Business Machines Corporation Non-volatile memory device integrated with cmos soi fet on a single chip
US20160204128A1 (en) 2015-01-08 2016-07-14 Globalfoundries Inc. Cointegration of bulk and soi semiconductor devices
US10109638B1 (en) 2017-10-23 2018-10-23 Globalfoundries Singapore Pte. Ltd. Embedded non-volatile memory (NVM) on fully depleted silicon-on-insulator (FD-SOI) substrate

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JP2005072084A (ja) 2003-08-28 2005-03-17 Toshiba Corp 半導体装置及びその製造方法
JP2007142036A (ja) 2005-11-16 2007-06-07 Sony Corp 半導体装置およびその製造方法
JP2011054718A (ja) 2009-09-01 2011-03-17 Renesas Electronics Corp 半導体装置およびその製造方法
JP2012129292A (ja) 2010-12-14 2012-07-05 Renesas Electronics Corp 半導体集積回路装置
US20140312404A1 (en) 2013-04-18 2014-10-23 International Business Machines Corporation Non-volatile memory device integrated with cmos soi fet on a single chip
US20160204128A1 (en) 2015-01-08 2016-07-14 Globalfoundries Inc. Cointegration of bulk and soi semiconductor devices
US10109638B1 (en) 2017-10-23 2018-10-23 Globalfoundries Singapore Pte. Ltd. Embedded non-volatile memory (NVM) on fully depleted silicon-on-insulator (FD-SOI) substrate

Also Published As

Publication number Publication date
KR102660302B1 (ko) 2024-04-25
US11069581B2 (en) 2021-07-20
EP3683835B1 (en) 2024-11-20
CN111383995A (zh) 2020-07-07
JP2020107678A (ja) 2020-07-09
EP3683835A2 (en) 2020-07-22
EP3683835A3 (en) 2020-09-23
US20200211909A1 (en) 2020-07-02
CN111383995B (zh) 2024-07-16
KR20200080171A (ko) 2020-07-06

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