JP7159212B2 - 製造プロセス欠陥を検出するための方法、コンピュータプログラム製品およびシステム - Google Patents
製造プロセス欠陥を検出するための方法、コンピュータプログラム製品およびシステム Download PDFInfo
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Description
本出願は、2017年5月17日に出願された米国仮特許出願第62/507,711号の優先権を主張するものであり、その全内容がすべての目的のために参照により本明細書に組み込まれる。
a.適応ウエハサンプリングを適用するステップ804。ステップ804は、以前の測定の結果に基づいて、システムによって照射される次の位置を選択するステップを含むことができる。例えば、他の領域よりも大きなCD変動を示す領域でより多くの測定を実行することを決定する。ステップ804の後に、ステップ802が続くことができる。
b.可能性のある製造プロセス問題に基づいて、1つまたは複数の製造プロセスの修正を提案(もしくは強制)するステップ806。ステップ806は、リソグラフィ、エッチング、堆積、CMP、エピなどの様々なノブの製造プロセスパラメータを修正するステップを含むことができる。ステップ806は、可能性のある製造プロセス問題を検出するステップを含むことができる。
c.ステップ808は、ステップ804中に取得された測定値に基づいて、測定結果を推定するステップを含むことができる。
a.ベース層992、中間層990、および複数のマンドレル920が形成される1つまたは複数の初期段階。中間層990は、ベース層992とマンドレル920との間に位置する。マンドレル920は、互いに離間している。マンドレルの1つもしくは複数の頂部エッジおよび/または1つもしくは複数の底部エッジ(例えば、頂部エッジ922および底部エッジ921)を測定することができる。
b.スペーサ層930を堆積させるステップ。スペーサの1つもしくは複数の頂部エッジおよび/または1つもしくは複数の底部エッジ(例えば、頂部エッジ932および底部エッジ931)を測定することができる。
c.以前にマンドレルを覆っていたスペーサ部分を除去することによってスペーサをエッチングし、マンドレルの側面にスペーサ部分940を残すステップ。スペーサ部分940の1つもしくは複数の頂部エッジおよび/または1つもしくは複数の底部エッジ(例えば、頂部エッジ946および942、ならびに底部エッジ944)を測定することができる。
d.マンドレル920を除去するステップ。スペーサ部分940の1つもしくは複数の頂部エッジおよび/または1つもしくは複数の底部エッジ(例えば、頂部エッジ952および954、ならびに底部エッジ951および953)を測定することができる。
e.スペーサ部分をマスクとして使用して中間層990をエッチングし、スペーサ部分940の下に中間層部分991を含む構造を形成するステップ。構造の1つもしくは複数の頂部エッジおよび/または1つもしくは複数の底部エッジ(例えば、頂部エッジ962および964、ならびに底部エッジ961および963)を測定することができる。
f.スペーサ部分940を除去し、中間層部分991を露出させるステップ。中間層部分991の1つもしくは複数の頂部エッジおよび/または1つもしくは複数の底部エッジ(例えば、頂部エッジ972および974、ならびに底部エッジ971および973)を測定することができる。
Claims (13)
- 製造プロセス欠陥を検出するための方法であって、
複数の製造段階のうちの各段階の完了後に1つまたは複数の構造要素の複数のエッジ測定値を取得するステップであって、前記複数のエッジ測定値は、限界寸法(CD)測定、エッジ粗さ測定、及びオーバーレイ測定の少なくとも1つを含んでいる、前記複数のエッジ測定値を取得するステップと、
前記複数の製造段階の各段階について、前記複数のエッジ測定値に基づいて、空間スペクトルを生成するステップと、
前記空間スペクトルの各々をセグメント化して複数の帯域を規定するステップと、
空間周波数ベースの比較を使用して前記複数の帯域の各々内で前記空間スペクトル間の関係を決定するステップと、
前記複数の帯域の少なくとも1つにおける前記空間スペクトル間の前記関係に基づいて、前記製造プロセス欠陥の少なくとも1つを識別するステップと、
を含む、方法。 - 前記複数のエッジ測定値を前記取得するステップが、荷電粒子計測ツールによって、前記1つまたは複数の構造要素のエッジを照射するステップを含む、請求項1に記載の方法。
- 前記複数のエッジ測定値を前記取得するステップが、前記1つまたは複数の構造要素の傾斜画像を取得するステップを含む、請求項1に記載の方法。
- 前記複数のエッジ測定値を前記取得するステップが、前記構造要素の底部エッジ測定値および頂部エッジ測定値を取得するステップを含む、請求項1に記載の方法。
- 前記製造プロセス欠陥の前記少なくとも1つを発見したときに、1つまたは複数の製造プロセスパラメータの修正を強制するステップをさらに含む、請求項1に記載の方法。
- 1つまたは複数の基準空間スペクトルを受信または生成し、前記複数の帯域の各々内で前記空間スペクトルと前記1つまたは複数の基準空間スペクトルとの間の関係を決定することをさらに含む、請求項1に記載の方法。
- 前記1つまたは複数の構造要素が、マンドレルと、スペーサと、スペーサ要素と、前記スペーサ要素にエッチングプロセスを適用することによって形成される中間層要素と、を含む、請求項1に記載の方法。
- 非一時的なコンピュータプログラム製品であって、プロセッサによって実行されるときに、欠陥検出システムに、
複数の製造段階の各段階の完了後に1つまたは複数の構造要素の複数のエッジ測定値を取得するステップと、
前記複数の製造段階の各段階について、前記複数のエッジ測定値に基づいて、空間スペクトルを生成するステップと、
前記空間スペクトルの各々をセグメント化して複数の帯域を規定するステップと、
空間周波数ベースの比較を使用して前記複数の帯域の各々内で前記空間スペクトル間の関係を決定するステップと、
前記複数の帯域の少なくとも1つにおける前記空間スペクトル間の前記関係に基づいて、少なくとも1つの製造プロセス欠陥を識別するステップと、
を含むステップを実行させる命令を記憶するコンピュータプログラム製品。 - 前記複数のエッジ測定値を前記取得するステップが、
荷電粒子計測ツールによって、前記1つもしくは複数の構造要素のエッジを照射するステップ、
前記1つもしくは複数の構造要素の傾斜画像を取得するステップ、
ならびに/または
前記構造要素の底部エッジ測定値および頂部エッジ測定値を取得するステップ、
を含む、請求項8に記載のコンピュータプログラム製品。 - 前記製造プロセス欠陥の前記少なくとも1つを発見したときに、1つまたは複数の製造プロセスパラメータの修正を強制するための命令をさらに含む、請求項8に記載のコンピュータプログラム製品。
- 1つまたは複数の基準空間スペクトルを受信または生成し、前記複数の帯域の各々内で前記空間スペクトルと前記1つまたは複数の基準空間スペクトルとの間の関係を決定するための命令をさらに含む、請求項8に記載のコンピュータプログラム製品。
- 前記1つまたは複数の構造要素が、マンドレルと、スペーサと、スペーサ要素と、前記スペーサ要素にエッチングプロセスを適用することによって形成される中間層要素と、を含む、請求項8に記載のコンピュータプログラム製品。
- プロセッサおよびメモリユニットを備えるシステムであって、前記メモリユニットが複数の製造段階のうちの各段階の完了後に、1つまたは複数の構造要素の複数のエッジ測定値を記憶するように構築され配置され、前記複数のエッジ測定値は、限界寸法(CD)測定、エッジ粗さ測定、及びオーバーレイ測定の少なくとも1つを含んでおり、前記プロセッサが、(a)前記複数の製造段階のうちの各段階について、前記複数のエッジ測定値に基づいて、空間スペクトルを生成し、(b)前記空間スペクトルの各々をセグメント化して複数の帯域を規定し、(c)空間周波数ベースの比較を使用して前記複数の帯域の各々内で前記空間スペクトル間の関係を決定し、(d)前記複数の帯域の少なくとも1つにおける前記空間スペクトル間の前記関係に基づいて、少なくとも1つの製造プロセス欠陥を識別するように構築され配置されている、システム。
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