JP7157044B2 - 光ビームのコヒーレンス量の調整 - Google Patents
光ビームのコヒーレンス量の調整 Download PDFInfo
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- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
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- Mounting And Adjusting Of Optical Elements (AREA)
- Eye Examination Apparatus (AREA)
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Description
この出願は、2016年9月2日に出願された米国特許出願第15/256,196号の優先権を主張し、その米国出願は、参照によりその全体において本明細書に援用される。
Claims (10)
- 光学システムのキャビティにおける利得媒体の圧力、前記キャビティにおける利得媒体の温度、及び、前記光学システムから放射されたパルス光ビームの繰り返し率、の1つ又は複数を含む、1つ又は複数の動作パラメータと、前記光学システムにおける光学素子に関係する状態情報と、によって規定される複数の動作条件を決定する方法であって、
前記光ビームの特定のパルスにおける特性の測定値にアクセスすることであって、前記特性が、前記光ビームのコヒーレンス量に関係していることと、
前記光ビームの前記特性の前記測定値を前記特性のターゲット値と比較することと、
前記比較に基づいて制御信号を生成するかどうかを決定することと、
前記制御信号が、前記比較に基づいて生成される場合に、前記特定のパルスに続くパルスのコヒーレンス量を低減するために、前記制御信号に基づいて前記光学素子の物理的特性を修正することによって、前記光ビームにおける前記コヒーレンス量を調整することと、
前記制御信号が、前記比較に基づいて生成されない場合に、前記光ビームの前記特性の前記測定値を前記動作条件用の前記特性の前記ターゲット値として宣言することと、を含み、
前記光ビームの前記特性の前記測定値を前記動作条件の前記特性の前記ターゲット値として宣言することが、前記動作条件と共に、前記測定値を含むデータを格納することを含む、方法。 - 前記光ビームの前記特性が、前記光ビームの発散度を含む、請求項1に記載の方法。
- 前記光ビームの発散度が、前記キャビティの外部で測定される、請求項2に記載の方法。
- 前記特定のパルスに続く前記パルスが、前記特定のパルスに直接続くパルスである、請求項1に記載の方法。
- 前記制御信号に基づいて前記光学システムの態様を修正することによって、前記光ビームにおける前記コヒーレンス量を調整することが、
前記光学システムの光学素子に前記制御信号を印加することであって、前記光学素子が、前記光学システムから放射された前記光ビームの前記特性の前記測定値を少なくとも部分的に決定するために、前記光学システムにおいて前記光ビームと相互作用する光学面を含み、前記制御信号の前記印加が、前記光学面を移動させるのに十分であることを含む、請求項1に記載の方法。 - 前記光学面を移動させるのに十分な前記制御信号の前記印加が、前記光学面の形状を変更するために、前記光学面の位置を変更するために、前記パルス光ビームの伝搬方向に対して前記光学面の角度を変更するために、又は、前記光学面の曲率を変更するために、十分な前記制御信号の前記印加を含む、請求項5に記載の方法。
- 前記光学面が、複数の部分を含み、
前記制御信号の印加が、前記光学面における前記複数の部分の少なくとも1つを他の部分の少なくとも1つに対して移動させるのに十分である、請求項5に記載の方法。 - 現在の動作条件に対する、前記光学システムの前記動作条件における変更の表示を受信することを更に含む、請求項1に記載の方法。
- 前記光学システムの前記動作条件における変更の前記表示が、前記光学システムから放射された前記光ビームの前記繰り返し率における、新しい繰り返し率への変更の表示を含み、
前記繰り返し率における前記変更の前記表示が、前記光学システムから前記光ビームを受信するリソグラフィ露光装置から受信される、請求項8に記載の方法。 - 光ビームの特性の測定値にアクセスすることが、初回に前記光ビームの前記特性を測定することを含み、
2回目に前記光ビームの前記特性を測定することであって、前記2回目が、初回の後で、且つ前記光ビームにおける前記コヒーレンス量を調整した後で行われること、
前記2回目における前記光ビームの前記特性の前記測定値を前記ターゲット値と比較すること、及び
前記比較に基づいて第2の制御信号を生成するかどうかを決定すること、
を更に含む、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/256,196 US9945730B2 (en) | 2016-09-02 | 2016-09-02 | Adjusting an amount of coherence of a light beam |
US15/256,196 | 2016-09-02 | ||
PCT/US2017/047449 WO2018044583A1 (en) | 2016-09-02 | 2017-08-17 | Adjusting an amount of coherence of a light beam |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2020120702A Division JP7017607B2 (ja) | 2016-09-02 | 2020-07-14 | 光ビームのコヒーレンス量の調整 |
Publications (2)
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JP2019530204A JP2019530204A (ja) | 2019-10-17 |
JP7157044B2 true JP7157044B2 (ja) | 2022-10-19 |
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CN113785453B (zh) * | 2019-06-11 | 2023-06-13 | 极光先进雷射株式会社 | 激光系统和电子器件的制造方法 |
US11297289B2 (en) * | 2019-12-26 | 2022-04-05 | Himax Technologies Limited | Structured light projector |
WO2021186488A1 (ja) * | 2020-03-16 | 2021-09-23 | ギガフォトン株式会社 | 光伝送ユニット、レーザ装置、及び電子デバイスの製造方法 |
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CN109642821A (zh) | 2019-04-16 |
KR20190040315A (ko) | 2019-04-17 |
SG11201900508UA (en) | 2019-02-27 |
KR102213153B1 (ko) | 2021-02-04 |
NL2019213A (en) | 2018-03-06 |
KR20210014228A (ko) | 2021-02-08 |
US20180180487A1 (en) | 2018-06-28 |
KR102282932B1 (ko) | 2021-07-27 |
US10267687B2 (en) | 2019-04-23 |
TWI688796B (zh) | 2020-03-21 |
WO2018044583A1 (en) | 2018-03-08 |
US9945730B2 (en) | 2018-04-17 |
TW201947266A (zh) | 2019-12-16 |
TW201812367A (zh) | 2018-04-01 |
JP7017607B2 (ja) | 2022-02-08 |
US20180066995A1 (en) | 2018-03-08 |
JP2020173476A (ja) | 2020-10-22 |
CN112444319A (zh) | 2021-03-05 |
TWI721590B (zh) | 2021-03-11 |
JP2019530204A (ja) | 2019-10-17 |
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