JP7141229B2 - package - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a package obtained by winding a sheet into a roll and packing it in a packaging container.

Surfaces of substrates for flat panel displays, silicon wafers for semiconductor devices, etc. are processed to be extremely smooth by chemical mechanical polishing (CMP) or the like. Chemical mechanical polishing uses a polishing liquid (slurry) in which abrasive grains are dispersed in an alkaline solution or the like, a holding pad that holds a work, a polishing pad that is pressed against the work, and the like. As a holding pad, an elastic resin sheet made of urethane resin or the like formed by a wet film forming method is known. Such an elastic resin sheet has low hardness, high flexibility and is easily deformed.

When highly flexible pads and sheet holding pads are stacked and transported, as the number of these sheets increases, the weight of the sheets stacked above is applied to the sheets below. As a result, the lower sheet may be crushed and deformed. Furthermore, when the positional relationship between the stacked sheets is shifted, there is a possibility that the protruding end portion may be warped and deformed. In view of this, there has been proposed a carrying tool that rolls a sheet and carries it (see, for example, Patent Document 1).

Utility Model Registration No. 3179631

However, the compressibility (JIS L 1021) is 20% or more, the 100% modulus of the resin (JIS K 6251) is 20 MPa or less, and the thickness (JIS K 6550) is 0.5 mm or more. When an object to be packed is packed in a packaging container, the object to be packed tends to roll due to shaking during transportation. A step is formed due to the thickness of the sheet at the outer peripheral end, which is the end face on the side opposite to the center of the roll. When the outer edge of the item is sandwiched between the supporting surface that supports the weight of the item to be packed and the item to be packed, the weight of the item transfers the step at the outer edge to the surface of the item, creating a dent. , the sheet becomes uneven. Using a holding pad with a recess may adversely affect the processing accuracy of the surface to be polished.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a package that can be transported without causing a recess in the item to be packed.

A package according to an aspect of the present invention includes an item to be packaged, a packaging container, and a holding member. The object to be packed is a sheet wound into a roll and has an outer peripheral edge located farthest from the center of the roll. The packaging container has a support surface that supports the weight of the item to be packaged. The holding member holds the outer peripheral edge away from the support surface.
According to this aspect, it is possible to prevent the surface of the object to be packed from being dented by the outer peripheral edge in contact with the support surface.

In the above aspect, the object to be packed may be a holding pad used for polishing.
In polishing processing, the flatness of the holding pad is an extremely important factor that affects processing accuracy. According to this aspect, it is possible to prevent the holding pad from being recessed.

In the above aspect, the sheet has a first principal surface and a second principal surface opposite to the first principal surface, and the object to be packed is wound so that the second principal surface faces outward. The holding member may be an adhesive tape that fixes the folded outer peripheral edge to the first main surface.
According to this aspect, since the outer peripheral edge is fixed to the first main surface of the roll spaced apart from the support surface, it is possible to prevent the outer peripheral edge and the support surface from coming into contact with each other to form a recess in the object to be packed.

In the above aspect, the holding member may have its outer peripheral end fixed to the packaging container at a location different from the support surface.
According to this aspect, since the outer peripheral edge is fixed to the part spaced apart from the support surface, it is possible to prevent the outer peripheral edge and the support surface from coming into contact with each other and causing a recess in the object to be packed.

In the above aspect, the packaging container includes an outer box having a bottom plate that supports its own weight and an opening located above the bottom plate, and a loose portion that spans from one side of the opening to the other side and does not touch the bottom plate. and an interior film, wherein the support surface may be part of the top surface of the interior film.
According to this aspect, the weight of the object to be packed is supported on the upper surface of the hammock-shaped interior film. Since the interior film reduces the impact acting on the object to be packed, it is possible to more reliably prevent the object from being dented during transportation.

ADVANTAGE OF THE INVENTION According to this invention, the package which can be conveyed so that a dent may not arise in the to-be-packaged object can be provided.

FIG. 1 is a cross-sectional view showing a package according to a first embodiment of the invention. FIG. 2 is a plan view showing the unfolded object to be packed shown in FIG. 3 is a cross-sectional view showing an example of the cross-sectional structure of the seat shown in FIG. 2. FIG. FIG. 4 is a cross-sectional view showing a package according to a second embodiment of the invention. FIG. 5 is a cross-sectional view showing a modification of the first and second embodiments. FIG. 6 is a sectional view of a comparative example shown for comparison with the first and second embodiments.

Preferred embodiments of the present invention will be described with reference to the accompanying drawings. It should be noted that, in each figure, the same reference numerals have the same or similar configurations. One of the features of the package 1 of the present invention is that it includes a holding member 30 capable of holding the outer peripheral edge 123 away from the support surfaces 23A and 251 .

In the comparative example in which the holding member 30 is not provided, as shown in FIG. 6, the object to be packed 10 may roll and the outer peripheral edge 123 and the support surface 23A may come into contact with each other. When the outer peripheral edge 123 is pressed against the support surface 23A, the step of the outer peripheral edge 123 is transferred to the object to be packed 10, resulting in a depression.

In contrast, according to the present invention, the outer peripheral end 123 can be kept apart from the support surfaces 23A and 251, so that the occurrence of recesses can be prevented. As shown in FIG. 1, the holding member 30 may be fixed by the holding member 30 by folding the outer peripheral end 123 inward (first embodiment). As shown in FIG. 4, the outer peripheral edge 123 may be fixed to the packaging container 20 with a holding member 30 (second embodiment). Hereinafter, each configuration will be described in detail with reference to FIGS. 1 to 6. FIG.

[First embodiment]
FIG. 1 is a cross-sectional view showing a package 1 according to a first embodiment of the invention. As shown in FIG. 1, the package 1 of the first embodiment includes an item to be packaged 10 formed by winding a sheet 11 into a roll, and a packaging container 20 and a holding member 30 used for transporting the item. . An example of the packaging container 20 is an exterior box 21 formed in a box shape from a flat paper material. In addition to the exterior box 21, the packaging container 20 may include an interior film 22 and the like, which will be described later.

The exterior box 21 includes a horizontally extending bottom plate 23 and a plurality of partition walls 24 erected from the bottom plate 23. - 特許庁The exterior box 21 has at least one space surrounded by partition walls 24 on all four sides. This space is divided into rectangular parallelepipeds larger than the object 10 to be packed, and can accommodate the object 10 to be packed.

In the example shown in FIG. 1, the upper end portion 241 of the partition wall 24 opens upward. The opening is covered with a lid (not shown). An upper end portion 241 of the partition wall 24 is an example of an opening and is positioned above the bottom plate 23 . It should be noted that either one of the partitions 24 surrounding the four sides may be configured to be openable. In that case, the object to be packed 10 can be taken in and out from the side of the outer box 21 instead of from above.

The packaging container 20 has a support surface that supports the weight of the object to be packed 10 housed inside. In the example shown in FIG. 1, the upper surface 23A of the bottom plate 23 of the exterior box 21 is configured as a support surface. The holding member 30 holds an outer peripheral end 123, which will be described later, in a state separated from the support surface 23A. The holding member 30 will be described later in detail.

FIG. 2 is a plan view showing the unfolded object 10 shown in FIG. As shown in FIG. 2, the object to be packed 10 before being wound is, for example, a rectangular sheet 11 having a first principal surface 11A and a second principal surface 11B opposite to the first principal surface 11A. , and an end surface 12 connecting the first and second main surfaces 11A and 11B. Note that rectangles also include squares.

The end surface (fractured surface) 12 may not be flat. For example, the end surface 12 may be a zigzag bent plane in which peaks and valleys are alternately continuous along the four sides of the sheet 11 . Alternatively, the end surface 12 may be a curved surface that smoothly meanders along the four sides of the sheet 11 . The end face 12 includes first to fourth end faces 121 , 122 , 123 and 124 located on the four sides of the sheet 11 .

The first and third end surfaces 121 and 123 are positioned, for example, on the short sides of the sheet 11 and face each other. The second and fourth end faces 122, 124 are positioned, for example, on the long sides of the sheet 11 and face each other. Alternatively, the first and third end faces 121, 123 may be positioned on the long sides, and the second and fourth end faces 122, 124 may be positioned on the short sides.

In the example shown in FIGS. 1 and 2, the sheet 11 is wound so that the first main surface 11A faces inward (centripetal direction) and the second main surface 11B faces outward (centrifugal direction). being turned. In the wound state, the first end face 121 is positioned on the inner peripheral side of the object to be packed 10 closest to the central axis of the roll, and the third end face 123 is positioned on the outer peripheral side of the object to be packed 10 farthest from the central axis. do. In the following description, the first end face 121 may be called the inner peripheral end 121 and the third end face 123 may be called the outer peripheral end 123 .

An example of sheet 11 is a retaining pad. The holding pad is used to hold the object to be polished on the surface plate of the polishing apparatus when polishing the surface of the object to be polished, such as a silicon wafer for semiconductor devices or a glass substrate for liquid crystal displays. . The polishing pad is wetted with a polishing liquid and pressed against the surface of the object to be polished in the polishing process described above.

FIG. 3 is a cross-sectional view showing an example of the cross-sectional structure of the holding pad. As shown in FIG. 3, the holding pad (sheet 11) includes a polyurethane sheet 42 made of polyurethane resin having a 100% modulus of 20 MPa or less. The polyurethane sheet 42 has a holding surface 42A that abuts against the object to be polished when the object to be polished is held on the surface plate. The holding surface 42A is an example of the above-described first main surface 11A.

A back surface 42B opposite to the holding surface 42A of the polyurethane sheet 42 is buffed so that the thickness of the polyurethane sheet 42 is uniform. A skin layer 44 having dense micropores is formed in the vicinity of the holding surface 42A. Foams 43 are arranged below the skin layer 44 .

The foam 43 is tapered toward the holding surface 42A. Adjacent foams 43 are connected in a three-dimensional network by foams (not shown). A part of the foam 43 is opened toward the back surface 42B. A double-sided tape 46 having a release paper 47 is adhered to the back surface 42B. The double-sided tape 46 includes a PET film base 461 and adhesive layers 462 and 463 formed on both sides of the base 461 .

The holding pad can be manufactured, for example, by a wet deposition method. A polyurethane resin solution obtained by dissolving a polyurethane resin in an organic solvent is continuously applied to a film-forming base material, and the base material is immersed in an aqueous coagulating liquid, whereby the polyurethane resin is solidified and regenerated into a sheet. After washing and drying, cut and attach double-faced tape for fixing to the surface plate. The finished holding pad is, for example, about 0.5 to 1.5 mm thick. The thickness of the sheet 11 becomes a step at the outer peripheral edge 123 .

An example of a sheet 11 in accordance with the present invention is the retention pad previously described, including the polyurethane sheet 42 previously described. Since the polyurethane sheet 42 is soft, the sheet 11 is likely to be dented by external pressure or its own weight. As shown in FIG. 1, the sheet 11 is transported as a rolled object 10 wound with the sheet 11 .

The object to be packed 10 is wound with the holding surface 42A facing inside and the release paper 47 facing outside so as not to damage the holding surface 42A. The holding surface 42A is an example of the first main surface 11A of the sheet 11 described above. The surface of the release paper 47 is an example of the second main surface 11B of the sheet 11 . In order not to damage the holding surface 42A, the object 10 to be packed is preferably wound without using a winding core.

The number of turns of the item to be packed 10 can be appropriately selected according to the shape and size of the sheet 11 . An example of the number of turns is about 5 to 10 times. In addition, if the inner diameter is smaller than 100 mm, the sheet 11 tends to be curled. If the inner diameter is larger than 200 mm, the sheet 11 becomes bulky. In the example shown in FIG. 1, the object to be packed 10 is wound to have an inner diameter of 120 to 180 mm.

The holding member 30 that characterizes the present invention will be described below with reference to FIGS. 1 and 2. FIG. The holding member 30 holds the outer peripheral edge 123 of the sheet 11 in a state separated from the support surface 23A of the packaging container 20 . The holding member 30 in the first embodiment is configured as an adhesive tape that fixes the folded outer peripheral end 123 to the first main surface 11A.

According to the first embodiment, since the outer peripheral edge 123 is fixed to the first main surface 11A of the roll inner layer spaced apart from the support surface 23A, the outer peripheral edge 123 and the support surface 23A come into contact with each other and the object 10 is recessed. can be prevented from occurring. Since the holding member 30 is an adhesive tape, it is inexpensive and readily available. Furthermore, according to the first embodiment, rolling of the object to be packed 10 can also be suppressed.

The sheet 11 includes a base material 461 such as a PET film having a large restoring force. A looped portion (hereinafter referred to as a loop portion 13 ) formed by fixing the folded outer peripheral end 123 to the first main surface 11</b>A bulges into a teardrop shape due to the restoring force of the sheet 11 . In other words, the distance from the center of the roll in the loop portion 13 to the outer shape of the object to be packed 10 swells larger than the radius of the roll. In the first embodiment, since the contour of the object 10 to be packed is neither circular nor elliptical, rolling of the object 10 to be packed can be suppressed.

[Second embodiment]
Next, a second embodiment will be described with reference to FIG. In the second embodiment, descriptions of matters common to the first embodiment will be omitted, and only different points will be described. FIG. 4 is a sectional view showing the package 1 of the second embodiment of the invention. The second embodiment is different from the first embodiment in that the outer peripheral end 123 is held apart from the supporting surface 23A by fixing to another part instead of the first main surface 11A.

The partition wall 24 has a lower end fixed to the support surface 23A and an upper end 241 opposite to the lower end. In the example shown in FIG. 4, the outer peripheral end 123 is fixed to the upper end portion 241 located on the side opposite to the support surface 23A. The holding member 30 that fixes the outer peripheral edge 123 to the partition wall 24 may be an adhesive tape similar to that of the first embodiment, or may be a reusable clip or the like.

At this time, as shown in FIG. 4, the outer peripheral ends 123L and 123R of the pair of objects to be packed 10L and 10R adjacent to each other with the partition wall 24 interposed therebetween may be fixed by the same holding member 30. FIG. In order to reduce the portion 14 where the sheet 11 is rewound, the winding directions of the pair of items to be packed 10L and 10R are preferably opposite to each other. In the example shown in FIG. 4, one object to be packed 10L is wound clockwise, and the other object to be packed 10R is wound counterclockwise.

Alternatively, the package 1 may be configured such that the outer peripheral ends 123L, 123R of the pair of items 10L, 10R are continuous. In this configuration, the holding member 30 that holds the outer peripheral edge 123L of one of the items to be packed 10L away from the support surface 23A is the other of the items to be packed 10R. Similarly, the holding member 30 that holds the outer peripheral edge 123R of the other object to be packed 10R away from the support surface 23A is the one object to be packed 10L.

FIG. 5 is a cross-sectional view showing a modification of the first and second embodiments described so far. A packaging container 20 according to a modification includes an exterior box 21 and a hammock-shaped interior film 22 . A supporting surface for supporting the weight of the object to be packed 10 is configured as part of the inner film 22 instead of the bottom plate 23 of the outer box 21 .

As shown in FIG. 5, the plurality of partition walls 24 includes a pair of partition walls 24L, 24R arranged on both sides of the object 10 to be packed and extending in parallel along the axial direction of the object 10 to be packed. The interior film 22 extends from the upper end portion 241L of the partition wall 24L on one side to the upper end portion 241R of the partition wall 24R on the other side.

The interior film 22 has a slack portion 25 positioned below the upper end portions 241L and 241R. The slack portion 25 is suspended from the upper end portions 241L and 241R so as not to be in contact with the bottom plate 23 and is formed in a hammock shape. The object to be packed 10 accommodated in the packaging container 20 is supported by the slack portion 25 and protected from impact during transportation.

In the slack portion 25, the upper surface 22A of the interior film 22 has a contact area 251 that contacts the item to be packed 10 and non-contact areas 252 and 253 that do not contact. The contact area 251 is an example of a support surface that supports the weight of the item 10 to be packed.

On the other hand, the non-contact regions 252 and 253 are examples of portions that are not support surfaces. For example, in the second embodiment, by fixing to the non-contact areas 252 and 253 , the outer peripheral end 123 can be kept apart from the contact area 251 .

The embodiments described above are for facilitating understanding of the present invention, and are not intended to limit and interpret the present invention. Each element included in the embodiment and its arrangement, materials, conditions, shape, size, etc. are not limited to those illustrated and can be changed as appropriate. Also, it is possible to partially replace or combine the configurations shown in different embodiments.

For example, the holding member 30 may be a cushioning material attached to the outer peripheral edge 123 . If a cushioning material is interposed between the outer peripheral end 123 and the supporting surfaces 23A, 251, the outer peripheral end 123 can be kept apart from the supporting surfaces 23A, 251. FIG. As an example, if the cushioning material has a C-shaped cross section, it can be easily attached to the outer peripheral edge 123 .

DESCRIPTION OF SYMBOLS 1... Package, 10... Object to be packed, 11... Sheet, 11A... First main surface, 11B... Second main surface, 123... Peripheral edge, 20... Packaging container, 21... Outer box, 22... Inner film, 23 Bottom plate 241 Upper end (an example of opening) 241L One side of opening 241R Other side of opening 25 Slack portion 23A, 251 Support surface 30 Holding member.

Claims (2)

A roll-shaped object wound with a sheet;
a packaging container having a bottom surface supporting the weight of the object to be packaged;
a holding member that holds an outer peripheral end, which is an end face of the sheet farthest from the central axis of the object to be packed, away from the bottom surface ;
with
The sheet has a first main surface and a second main surface opposite to the first main surface,
The object to be packed is wound so that the second main surface faces outward,
The holding member fixes the outer peripheral end to the first main surface in a state in which the outer peripheral end is folded back so that the sheet forms a loop shape and the loop portion of the sheet swells into a teardrop shape due to a restoring force. is an adhesive tape,
The package, wherein the contour of the object to be packaged is in a shape deviating from a circular or elliptical shape at the loop portion . 2. The package according to claim 1, wherein said object to be packaged is a holding pad used for polishing.

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