JP2007112464A - Substrate storing body - Google Patents

Substrate storing body Download PDF

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JP2007112464A
JP2007112464A JP2005303785A JP2005303785A JP2007112464A JP 2007112464 A JP2007112464 A JP 2007112464A JP 2005303785 A JP2005303785 A JP 2005303785A JP 2005303785 A JP2005303785 A JP 2005303785A JP 2007112464 A JP2007112464 A JP 2007112464A
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substrate
belt
support plate
stack
substrates
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JP4910358B2 (en
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Toru Takehara
徹 竹原
Katsutoshi Kobayashi
勝利 小林
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate transporting body capable of protecting a color filter substrate used for plate glass, a liquid crystal displaying device or the like from damage or breakage, and storing and transporting the color filter substrate. <P>SOLUTION: A substrate storing body is equipped with a supporting base, a first supporting plate placed on the supporting base, a laminate in which a plurality of the substrates placed on the first supporting plate are laminated, a second supporting plate placed on the laminate, and a belt provided with a spring structure and a fastening tool and capable of fixing an end on the supporting base. The laminate is pressed and fixed to the supporting base by fastening the belt. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ガラス基板及びその加工製品である液晶表示装置に用いられるカラーフィルター基板等を輸送するための基板収納体に関するものである。   The present invention relates to a substrate container for transporting a glass substrate and a color filter substrate used in a liquid crystal display device which is a processed product thereof.

従来、ガラス基板及びその加工製品であるガラス基板表面にブラックマトリックス、着色層、透明導電膜層及びスペーサー等の突起物を形成したカラーフィルター基板を、保管、移送する際は、ガラス基板表面を傷や破損から守るため、ガラス基板同士が接触しないように、ガラス基板を所定間隔で並列収納できる、箱形の収納容器を用いていた。
特開2002−264992号公報
Conventionally, when storing and transporting a color filter substrate in which protrusions such as a black matrix, a colored layer, a transparent conductive film layer, and a spacer are formed on the surface of the glass substrate and its processed product, the surface of the glass substrate is damaged. In order to protect the glass substrates from damage, a box-shaped storage container that can store the glass substrates in parallel at a predetermined interval has been used.
JP 2002-264992 A

しかしながら、最近では、大型のガラス基板の製造が要求されており、これらを従来と同様に箱形の収納容器に所定間隔で収納すれば、より大きな、収納容器、収納スペースが必要となり、また、輸送中の振動などによりガラス基板端が溝から離脱することによる倒壊や、自重による座屈により、箱の中で隣接するガラス基板と接触して傷が付くという問題があった。   However, recently, manufacture of large glass substrates has been required, and if these are stored at predetermined intervals in a box-shaped storage container as in the past, a larger storage container and storage space are required, There has been a problem that the glass substrate edge is damaged by coming off from the groove due to vibration during transportation or buckling due to its own weight, resulting in contact with the adjacent glass substrate in the box.

そこで本発明者らは先に、基板を積み重ねて積重し、上面をエアバッグを用いて押圧固定して輸送する方法を提案した。この方法は、基板を支持する方法として優れているが、航空機による輸送等、輸送中に気圧が変化する環境下においては、不都合を生じる場合がある。   Therefore, the present inventors have previously proposed a method in which substrates are stacked and stacked, and the upper surface is pressed and fixed using an airbag. This method is excellent as a method for supporting a substrate, but may be disadvantageous in an environment where the atmospheric pressure changes during transportation, such as transportation by aircraft.

本願発明は、大型のガラス基板およびカラーフィルター基板等その加工製品を輸送時の傷、破損から守り、航空機での輸送に特に有利な基板収納体を提供するものである。   The present invention provides a substrate container that protects processed products such as large glass substrates and color filter substrates from scratches and breakage during transportation, and is particularly advantageous for transportation by aircraft.

本発明の第1の発明は、支持台と、前記支持台上に載置された第1の支持板と、前記第1の支持板上に載置された複数の基板を積み重ねてなる積重体と、前記積重体上に載置された第2の支持板と、バネ構造と締め具とを備え、端部を前記支持台に固定可能なベルトと、を具備し、前記ベルトを締め付けることにより、前記積重体が前記支持台に押し付け固定されてなることを特徴とする基板収納体である。   A first aspect of the present invention is a stack formed by stacking a support base, a first support plate placed on the support base, and a plurality of substrates placed on the first support plate. And a second support plate placed on the stack, a spring structure and a fastener, and a belt whose end can be fixed to the support base, by tightening the belt The substrate storage body is characterized in that the stack is pressed against and fixed to the support base.

本発明の基板収納体は、多数の大型のガラス基板又はその加工製品を搭載し、ガラス基板の全面を気圧の変化に左右されず、均一に支持して運搬することが可能であるので、横ずれせず、基板同士の擦れや基板と離間体との擦れを防ぎ、搬送効率がよく、基板表面の傷や欠損等のダメージを回避することができる。   The substrate container of the present invention is equipped with a large number of large glass substrates or processed products thereof, and the entire surface of the glass substrate can be supported and transported uniformly without being influenced by changes in atmospheric pressure. Without rubbing, the rubbing between the substrates and the rubbing between the substrate and the separating member can be prevented, the conveyance efficiency is good, and damage such as scratches or defects on the substrate surface can be avoided.

以下、本発明の実施形態を図面を参照しながら詳細に説明する。
図1及び図2は、本発明の第1の実施形態に係る基板収納体の説明図であり、図1は、基板収納体1の斜視図であり、図2は、基板収納体1の正面図である。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 and 2 are explanatory views of a substrate housing body according to the first embodiment of the present invention, FIG. 1 is a perspective view of the substrate housing body 1, and FIG. 2 is a front view of the substrate housing body 1. FIG. FIG.

基板収納体1は、図1および図2に示すように、支持台としてのパレット3上に、支持板5が載置され、支持板5上に基板を積み重ねて構成された積重体7が載せられ、積重体7上に支持板11が載せられ、支持板5、積重体7、支持板11が、ベルト13で囲まれて締め付け固定されてなる。また、図中、一部省略したが、支持板5、積重体7、支持板11を囲んで、蓋体25が設けられる。   As shown in FIGS. 1 and 2, the substrate storage body 1 has a support plate 5 placed on a pallet 3 as a support base, and a stack body 7 formed by stacking substrates on the support plate 5. The support plate 11 is placed on the stack 7, and the support plate 5, the stack 7 and the support plate 11 are surrounded by a belt 13 and fastened and fixed. In addition, although a part of the drawing is omitted, a lid 25 is provided so as to surround the support plate 5, the stack 7 and the support plate 11.

本発明において積重体7として収納される基板は、液晶ディスプレイのカラーフィルター基板や薄膜トランジスタ(TFT)等に用いるガラス基板及びその加工製品である基板などであり、その代表的な構造を図4に概略的に示す。   The substrate accommodated as the stack 7 in the present invention is a glass substrate used for a color filter substrate of a liquid crystal display, a thin film transistor (TFT) or the like, and a substrate which is a processed product thereof. A typical structure is schematically shown in FIG. Indicate.

図4において、基板9は、ガラス板等の基板本体9aの片面に、機能層9b(例えば、カラーフィルター用の基板の場合には、ブラックマトリックス、着色画素、ITO電極などを備えた層)を備え、更にその上に、保管、運搬中等における損傷を防止するための保護膜9cを形成している。   In FIG. 4, the substrate 9 has a functional layer 9b (for example, a layer having a black matrix, colored pixels, ITO electrodes, etc. in the case of a color filter substrate) on one side of a substrate body 9a such as a glass plate. In addition, a protective film 9c for preventing damage during storage, transportation, etc. is formed thereon.

保護膜9cは容易に形成でき且つ容易に除去可能な材料で作られるものであり、水溶性の樹脂(例えば、ポリビニルアルコール)が用いられることが多い。膜厚は、3〜30μm程度が好適に用いられる。   The protective film 9c is made of a material that can be easily formed and easily removed, and a water-soluble resin (for example, polyvinyl alcohol) is often used. The film thickness is preferably about 3 to 30 μm.

通常、機能層9b、保護膜9cは、基板本体9aの周縁の数mmを除いた全領域に形成されている。本明細書では、機能層9b及びその上に保護膜9cを形成した領域を有効領域という。   Usually, the functional layer 9b and the protective film 9c are formed in the entire region except for a few mm on the periphery of the substrate body 9a. In this specification, the functional layer 9b and a region where the protective film 9c is formed thereon are referred to as an effective region.

基板9の平面サイズは、特に限定されず、例えば、幅1800mm×長さ2000mmの大きいサイズとすることも可能である。また、基板の厚さも制限されるものではないが、0.3〜1.0mm程度が好適に用いられる。   The planar size of the substrate 9 is not particularly limited, and for example, it can be a large size of 1800 mm wide × 2000 mm long. Moreover, although the thickness of a board | substrate is not restrict | limited, About 0.3-1.0 mm is used suitably.

本発明の積重体7は、基板9を複数枚積み重ねる際、各基板9の機能層9b、保護膜9cを保護することができるよう、各基板9間に離間体を挟んでいくことが好ましい。離間体を挟み込む形態は特に限定されず、少なくとも基板9の有効領域を覆う位置に離間体が存在するようにすればよいが、好ましい形態としては、図5に示すように、基板9よりも長い離間体8を、その両端が基板9よりも外に延び出すように配置する形態、或いは図6に示すように、二つ折りした状態で基板9とほぼ同一サイズとなる離間体8を、二つ折りした状態で基板9の間に挟み込む形態を挙げることができる。   In the stacked body 7 of the present invention, when stacking a plurality of substrates 9, it is preferable to sandwich a separating body between the substrates 9 so that the functional layer 9 b and the protective film 9 c of each substrate 9 can be protected. The form in which the spacer is sandwiched is not particularly limited, and it is sufficient that the spacer is present at least at a position covering the effective area of the substrate 9. However, as a preferable form, as shown in FIG. A configuration in which the spacer 8 is arranged so that both ends thereof extend out of the substrate 9 or, as shown in FIG. 6, the spacer 8 having the same size as the substrate 9 in a folded state is folded in two. In this state, it is possible to enclose the substrate 9 between the substrates 9.

図5に示す形態では、離間体8の端部が基板9の外側に延び出しているので、離間体8を剥がす際には、この延び出している部分をつかめばよく、離間体8をつかむための機構を簡単とすることができると共に確実につかむことが可能となる。   In the form shown in FIG. 5, since the end portion of the separating body 8 extends to the outside of the substrate 9, when the separating body 8 is peeled off, the extending portion may be grasped and the separating body 8 is grasped. Therefore, it is possible to simplify the mechanism and to securely grasp the mechanism.

また、図6に示す形態では、離間体8が二つ折りとなっているので、輸送中に基板9の保護膜9c(図4参照)が吸湿してそれに接している離間体の片8aに接着してしまったとしても、上側の片8bは接着しておらず、このため、離間体8を剥がす際に、上側の片8bを吸着パッド等で容易に吸着保持して持ち上げることができ、その一片を、離間体を確実に剥がすことの可能な手段(例えば、ニップロール等)にくわえさせることで、離間体を基板から確実に剥がすことができる。   Further, in the embodiment shown in FIG. 6, since the separating body 8 is folded in two, the protective film 9c (see FIG. 4) of the substrate 9 absorbs moisture during transportation and adheres to the piece 8a of the separating body in contact therewith. The upper piece 8b is not adhered even if it has been removed, and therefore, when the separating member 8 is peeled off, the upper piece 8b can be easily sucked and held by a suction pad or the like, By putting one piece into a means (for example, a nip roll or the like) that can reliably peel the spacer, the spacer can be reliably peeled from the substrate.

離間体8は、基板9を保護しうるものであれば特に限定するものではなく、紙、樹脂シートが好適に使用可能である。特に好ましい材料としては、発泡ポリエチレン、発泡ポリプロピレン又は発泡ポリウレタンからなる独立気泡を有する樹脂の発泡シート、例えば、株式会社JSP製の商品名「ミラマット」を挙げることができる。独立気泡を有する樹脂の発泡シートは、適度なやわらかさを有するので、基板表面の機能層9bの保護が確実であり、且つ通気性がないので保護膜9cが吸湿することを防止できる。   The spacer 8 is not particularly limited as long as it can protect the substrate 9, and paper or a resin sheet can be suitably used. As a particularly preferable material, a foamed sheet of resin having closed cells made of foamed polyethylene, foamed polypropylene or foamed polyurethane, for example, trade name “Miramat” manufactured by JSP Corporation may be mentioned. Since the resin foam sheet having closed cells has an appropriate softness, the protection of the functional layer 9b on the surface of the substrate is reliable, and since there is no air permeability, the protective film 9c can be prevented from absorbing moisture.

離間体8の厚さは、あまり薄いと保護効果が低下し、一方あまり厚いとコスト高となると共に嵩張るという欠点を生じるので、これらを考慮して、0.25〜1mm程度に選定することが好ましい。   If the thickness of the spacer 8 is too thin, the protective effect is lowered. On the other hand, if the thickness is too thick, there is a disadvantage that the cost increases and the bulk becomes large. preferable.

基板の収納枚数は1〜500枚程度で好適に使用でき、特に好ましくは100〜200枚程度である。   The number of substrates that can be stored is preferably about 1 to 500, and more preferably about 100 to 200.

本発明のパレット3は、図3に示すように、ベルト13を掛けるためのベルト支持具として、パレット上面に、逆U字具19を備える。ここでは、逆U字具19を用いたが、ベルトを掛けることが可能で、パレット3にしっかり固定されていれば、形状や材質は特に限定されるものではない。また、本実施形態においては、逆U字具19は、支持板3の周縁部において各辺2箇所ずつ、合計8箇所に設けたが、配置箇所や数量は適宜変更可能である。   As shown in FIG. 3, the pallet 3 of the present invention includes an inverted U-shaped tool 19 on the top surface of the pallet as a belt support for hanging the belt 13. Although the inverted U-shaped tool 19 is used here, the shape and the material are not particularly limited as long as the belt can be hung and the pallet 3 is firmly fixed. Further, in the present embodiment, the inverted U-shaped tool 19 is provided at a total of eight locations, two on each side of the peripheral edge of the support plate 3, but the arrangement location and quantity can be changed as appropriate.

支持板5は、逆U字具19が設けられた箇所が一部欠けた四角形の板状である。支持板5は、基板全面を片寄りなく支持するため、曲げ剛性の高いものが好ましく、また取り扱いを考慮するとより軽いものが好ましく、例えば、ハニカムパネル、サンドイッチパネルがある。また、支持板のサイズは基板よりも大きいことが好ましい。   The support plate 5 has a rectangular plate shape in which a portion where the inverted U-shaped tool 19 is provided is partially missing. The support plate 5 preferably has high bending rigidity in order to support the entire surface of the substrate without any deviation, and is preferably lighter in consideration of handling, such as a honeycomb panel and a sandwich panel. The size of the support plate is preferably larger than the substrate.

また、支持板11は、四角形の板状であり、支持板5と同様に、基板全面を片寄りなく押圧するため、曲げ剛性の高いものが好ましく、また取り扱いを考慮するとより軽いものが好ましく、例えば、ハニカムパネル、サンドイッチパネルがある。また、支持板のサイズは基板よりも大きいことが好ましい。   Further, the support plate 11 has a rectangular plate shape, and like the support plate 5, it presses the entire surface of the substrate without any deviation, so that a material with high bending rigidity is preferable, and a lighter material is preferable in consideration of handling, For example, there are a honeycomb panel and a sandwich panel. The size of the support plate is preferably larger than the substrate.

ベルト13a、13bは、途中にベルト13a、13bを締め付け調整するための締め具17とバネ部材15とを備え、両端部にフックを有する両端フックベルトである。ベルト13a、13bの形状は、特に限定されるものではないが、ここでは、二本の両端フックベルトをバネ部材15を介して連結させ、片方の両端フックベルトに締め具17を設けて、ベルト13a、13bとしての両端フックベルトが構成される。   The belts 13a and 13b are both-end hook belts that include a fastener 17 and a spring member 15 for adjusting and tightening the belts 13a and 13b in the middle, and have hooks at both ends. The shape of the belts 13a and 13b is not particularly limited, but here, the two end hook belts are connected via the spring member 15, the fasteners 17 are provided on one end hook belt, and the belt Both end hook belts as 13a and 13b are configured.

ベルト13a、13bの両端部のフックは、それぞれ対向位置の逆U字具19に固定され、締め具17を用いてベルト13a、13bを締め付けることにより、積重体7は、押圧固定される。   The hooks at both ends of the belts 13a and 13b are fixed to the inverted U-shaped tools 19 at the opposing positions, and the stack 7 is pressed and fixed by tightening the belts 13a and 13b using the fasteners 17.

クッション材23は、基板端部とベルト13a、13bとの間に設けられ、基板のズレや基板端部の破損を防ぐ。クッション材23の材質は、基板の振動による変位を小さい力で防止するための弾力性と復元性、および、積重体の共振倍率を小さくするために、振動のエネルギーを速やかに熱に変換しうる大きな内部損失特性とを有することが望ましい。特に限定するものではないが、発泡ポリプロピレンが好適に使用可能である。   The cushion material 23 is provided between the end portion of the substrate and the belts 13a and 13b, and prevents displacement of the substrate and damage to the end portion of the substrate. The material of the cushioning material 23 can quickly convert vibration energy into heat in order to reduce elasticity and resilience to prevent displacement due to vibration of the substrate with a small force, and to reduce the resonance magnification of the stack. It is desirable to have large internal loss characteristics. Although it does not specifically limit, a foamed polypropylene can be used conveniently.

枕材21a、21bは、支持板11の上面とベルト13a、13bとの間に設けられる。枕材21a、21bの材質は、ベルトとの摩擦が小さいことから、ステンレスまたは強化樹脂が好適である。枕材21a、21bを設けることにより、ベルト13a、13bを締め付けた際の押圧力が偏らず、支持板11全面で積重体7を押圧することができる。   The pillow materials 21a and 21b are provided between the upper surface of the support plate 11 and the belts 13a and 13b. As the material of the pillow materials 21a and 21b, stainless steel or reinforced resin is suitable because the friction with the belt is small. By providing the pillow materials 21a and 21b, the pressing force when the belts 13a and 13b are fastened is not biased, and the stack 7 can be pressed over the entire surface of the support plate 11.

本実施形態においては、図2中、横方向に掛けたベルト13aの下に配置した枕材21aの高さを、縦方向に掛けたベルト13bの下に配置した枕材21bの高さより高くしたが、枕材21a、21bの高さは適宜変更可能である。枕材21aの高さは、締め具17が、蓋体25に接触しない範囲で変更可能であり、枕材21bの高さは、バネ部材15が、ベルト13aに接触しない範囲で変更可能である。基板の積重枚数によっては梱包時に、バネ部材15とベルト13aが上下に重なる位置になるので、輸送中の振動によるベルトの損傷や、バネの破損を防止するためである。   In this embodiment, in FIG. 2, the height of the pillow material 21a arranged under the belt 13a hung in the horizontal direction is made higher than the height of the pillow material 21b arranged under the belt 13b hung in the vertical direction. However, the height of the pillow materials 21a and 21b can be changed as appropriate. The height of the pillow 21a can be changed within a range where the fastener 17 does not contact the lid 25, and the height of the pillow 21b can be changed within a range where the spring member 15 does not contact the belt 13a. . This is because, depending on the number of stacked substrates, the spring member 15 and the belt 13a overlap each other at the time of packaging, so that damage to the belt and vibration due to vibration during transportation are prevented.

蓋体25は、支持板5、積重体7、支持板11を囲んで設けられた箱状のものである。これにより、防湿、防塵が可能である。   The lid body 25 is a box-like thing provided so as to surround the support plate 5, the stack 7 and the support plate 11. Thereby, moisture proof and dust proof are possible.

また、図1に示す基板収納体1を、図示しない第2のパレット及び第2のパレットに脱着可能に取り付けられる第2の蓋体からなる外箱に、更に収納することも好適である。これにより、基板収納体は外箱で覆われるため、ごみ、ほこり等が付着せず、基板を使用する工場内等の清浄さを要求される場所に基板収納体を搬入してもトラブルを生じることがない。   Further, it is also preferable that the substrate storage body 1 shown in FIG. 1 is further stored in an outer box including a second pallet (not shown) and a second lid body detachably attached to the second pallet. As a result, since the substrate storage body is covered with the outer box, dust, dust, etc. do not adhere to it, and even if the substrate storage body is carried into a place where cleanliness is required such as in a factory where the substrate is used, trouble occurs. There is nothing.

次に、積重体7を収納する方法を説明する。まず、パレット3上に支持板5を乗せ、次いで支持板5の上面に最初に離間体8を載せ、以後、基板9と離間体8とを交互に積み重ねて積重体7を形成する。なお、別の場所で積重体7を形成しておき、それをパレット3上に載置することは、基板9が軽量であるか、あるいは積み重ね枚数が少なく、積重体が軽量であって、支持板5をパレット3から取外し可能に構成すれば可能である。パレット3上に積重体7を載置した後は、その上に支持板11を載せる。次に、バネ部材15と締め具17とを備えたベルト13の一端のフックをパレット3上の逆U字具19に掛け、クッション材23、枕材21を所定の位置に配置し、ベルト13の他端のフックを対向位置の逆U字具19に掛け、その後、締め具17により、ベルト13を締め付け、積重体7を押圧固定する。
ベルト13の締め付けの程度は、支持板11の下面の基板押し圧力が、1平方cmあたり10g〜300gである。
Next, a method for housing the stack 7 will be described. First, the support plate 5 is placed on the pallet 3, then the separation body 8 is first placed on the upper surface of the support plate 5, and thereafter, the stacks 7 are formed by alternately stacking the substrates 9 and the separation bodies 8. It is to be noted that forming the stack 7 in another place and placing it on the pallet 3 means that the substrate 9 is light or the number of stacks is small and the stack is light and is supported. This is possible if the plate 5 is configured to be removable from the pallet 3. After the stack 7 is placed on the pallet 3, the support plate 11 is placed thereon. Next, a hook at one end of the belt 13 provided with the spring member 15 and the fastener 17 is hung on the inverted U-shaped tool 19 on the pallet 3, and the cushion material 23 and the pillow material 21 are arranged at predetermined positions. The hook at the other end is hooked on the inverted U-shaped tool 19 at the opposite position, and then the belt 13 is fastened by the fastener 17 and the stack 7 is pressed and fixed.
The degree of tightening of the belt 13 is such that the substrate pressing pressure on the lower surface of the support plate 11 is 10 g to 300 g per 1 cm 2.

このように、第1の実施の形態によれば、ベルト13により積重体を押圧支持して運搬することが可能であるので、搬送効率がよく、基板表面の傷や欠損等のダメージを回避することができる。締め具17によりベルト13の押圧力の調整が容易であり、バネ部材15を備えているので、離間体7の圧縮によって、輸送中に積重体の厚さが減少することがあっても、ベルト13が緩むことが無く、所定の範囲内の押圧力を維持することが可能である。   As described above, according to the first embodiment, the stacked body can be pressed and supported by the belt 13 and transported. Therefore, the transport efficiency is good, and damage such as scratches and defects on the substrate surface is avoided. be able to. Since the pressing force of the belt 13 can be easily adjusted by the fastener 17 and the spring member 15 is provided, even if the thickness of the stacked body may be reduced during transportation due to the compression of the separating body 7, the belt 13 does not loosen, and it is possible to maintain a pressing force within a predetermined range.

尚、本発明の技術的範囲は、前述した実施の形態に限定されるものではなく、実施の形態の種々の改変、変形等も本発明の技術的範囲に含まれる。
例えば、前述した実施の形態では、基板はカラーフィルター基板であったが、カラーフィルター基板以外の各種基板等を搬送する場合にも適用することができる。
Note that the technical scope of the present invention is not limited to the above-described embodiments, and various modifications and variations of the embodiments are also included in the technical scope of the present invention.
For example, in the above-described embodiment, the substrate is a color filter substrate. However, the present invention can also be applied to a case where various substrates other than the color filter substrate are transported.

本発明の基板収納体の一例を示す斜視図である。It is a perspective view which shows an example of the board | substrate storage body of this invention. 図1の基板収納体の側面図である。It is a side view of the board | substrate storage body of FIG. 図1の一部を示す部分説明図である。It is a partial explanatory view showing a part of FIG. 基板を示す説明図である。It is explanatory drawing which shows a board | substrate. 本発明の積重体の一例を示す説明図である。It is explanatory drawing which shows an example of the stacked body of this invention. 本発明の積重体の一例を示す説明図である。It is explanatory drawing which shows an example of the stacked body of this invention.

符号の説明Explanation of symbols

1………基板収納体
3………パレット
5………支持板
7………積重体
8………離間体
9a………基板本体
9b………機能層
9c………保護膜
11………支持板
13………ベルト
15………バネ部材
17………締め具
19………逆U字具
21………枕材
23………クッション材
25………蓋体
DESCRIPTION OF SYMBOLS 1 ......... Substrate housing 3 ......... Pallet 5 ......... Support plate 7 ......... Stacking body 8 ......... Separating body 9a ......... Substrate body 9b ......... Functional layer 9c ......... Protective film 11 ... …… Support plate 13 ……… Belt 15 ……… Spring member 17 ……… Clamp 19 ……… Inverted U-shaped tool 21 ……… Pillow material 23 ……… Cushion material 25 ……… Cover body

Claims (3)

支持台と、
前記支持台上に載置された第1の支持板と、
前記第1の支持板上に載置された複数の基板を積み重ねてなる積重体と、
前記積重体上に載置された第2の支持板と、
バネ構造と締め具とを備え、端部を前記支持台に固定可能なベルトと、
を具備し、
前記ベルトを締め付けることにより、前記積重体が前記支持台に押し付け固定されてなることを特徴とする基板収納体。
A support base;
A first support plate placed on the support table;
A stack formed by stacking a plurality of substrates placed on the first support plate;
A second support plate placed on the stack;
A belt comprising a spring structure and a fastener, the end of which can be fixed to the support;
Comprising
The substrate storage body, wherein the stack is pressed and fixed to the support base by tightening the belt.
前記積重体の基板端部と前記ベルトとの間にクッション材を備えることを特徴とする請求項1記載の基板収納体。   The substrate container according to claim 1, further comprising a cushion material between a substrate end portion of the stack and the belt. 前記第2の支持板と前記ベルトとの間に枕材を具備することを特徴とする請求項1または請求項2記載の基板収納体。   The substrate storage body according to claim 1, further comprising a pillow material between the second support plate and the belt.
JP2005303785A 2005-10-19 2005-10-19 Substrate housing Active JP4910358B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011046415A (en) * 2009-08-27 2011-03-10 Toppan Printing Co Ltd Board transfer pallet
WO2012005105A1 (en) * 2010-07-06 2012-01-12 旭硝子株式会社 Plate packaging structure and plate transporting method
CN103848116A (en) * 2012-12-05 2014-06-11 信越化学工业株式会社 Glass substrate transport carriage
CN106742541A (en) * 2016-12-31 2017-05-31 重庆煌固包装制造有限公司 One kind transport packaging box for motorcycle engine bunk

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002145316A (en) * 2000-11-10 2002-05-22 Fuji Photo Film Co Ltd Packing method for lithographic printing plate
JP2003183058A (en) * 2001-12-13 2003-07-03 Nippon Sheet Glass Co Ltd Tool for carrying plate-like body
JP2007039110A (en) * 2005-08-04 2007-02-15 Kyokuhei Glass Kako Kk Glass carrying pallet

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002145316A (en) * 2000-11-10 2002-05-22 Fuji Photo Film Co Ltd Packing method for lithographic printing plate
JP2003183058A (en) * 2001-12-13 2003-07-03 Nippon Sheet Glass Co Ltd Tool for carrying plate-like body
JP2007039110A (en) * 2005-08-04 2007-02-15 Kyokuhei Glass Kako Kk Glass carrying pallet

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011046415A (en) * 2009-08-27 2011-03-10 Toppan Printing Co Ltd Board transfer pallet
WO2012005105A1 (en) * 2010-07-06 2012-01-12 旭硝子株式会社 Plate packaging structure and plate transporting method
JPWO2012005105A1 (en) * 2010-07-06 2013-09-02 旭硝子株式会社 Packing structure of plate-like body and method of conveying plate-like body
JP2014122074A (en) * 2010-07-06 2014-07-03 Asahi Glass Co Ltd Plate body transport method
CN103848116A (en) * 2012-12-05 2014-06-11 信越化学工业株式会社 Glass substrate transport carriage
CN106742541A (en) * 2016-12-31 2017-05-31 重庆煌固包装制造有限公司 One kind transport packaging box for motorcycle engine bunk

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