CN103848116A - Glass substrate transports platform truck - Google Patents
Glass substrate transports platform truck Download PDFInfo
- Publication number
- CN103848116A CN103848116A CN201310645958.1A CN201310645958A CN103848116A CN 103848116 A CN103848116 A CN 103848116A CN 201310645958 A CN201310645958 A CN 201310645958A CN 103848116 A CN103848116 A CN 103848116A
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
- B62B3/10—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape
- B62B3/108—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape the objects being plates, doors, panels, or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Combustion & Propulsion (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Buffer Packaging (AREA)
Abstract
The invention provides a glass substrate conveying trolley which can reduce the adhesion of foreign matters on a large glass substrate accommodated in a glass substrate accommodating box and can convey the glass substrate without damage. The glass substrate accommodated in the glass substrate accommodating box is a large square glass substrate with one side of at least 1000mm and the thickness of more than 10mm, and is characterized by comprising a frame body capable of being processed by a fork-shaped conveying means; a wheel part arranged at the lower part of the frame body; and an impact reducing mechanism which is composed of at least two elastic bodies with different spring constants and can reduce the impact generated by the glass substrate storage box and the square glass substrate during transportation while fixing and holding the glass substrate storage box. At least one elastic body is preferably a metal spring with the expansion and contraction amount of the substrate box being 20-30 mm when the 2G impact is received.
Description
Technical field
The present invention relates in the time of the manufacture of Liquid Crystal Display etc. as dust remover the chassis that transports that use, that particularly transport large-scale glass substrate in the manufacture of applicable photoetching dustproof film component.
Background technology
In the manufacture of quartz conductor manufacture or the Liquid Crystal Display etc. of LSI, super LSI etc.; to carry out irradiation with pattern-making with raw sheet to semiconductor crystal wafer or liquid crystal; the photomask now using or reticle mask (hereinafter referred to as " photomask ") are upper to be adhered to if any dust; this dust will absorb light, or makes bendingof light, and the pattern of transfer printing deforms thus; edge is uneven; in addition, also can cause base blackout etc., thereby make size, quality, outward appearance etc. impaired.
Therefore, such operation is carried out conventionally in dust free room, even so, remain that the clean of photomask is also difficult, so will attach as exposing except after the dustproof film component of dust on photomask surface.Under this occasion, the foreign matters such as dust just can directly not adhere on the surface of photomask, and are attached on dustproof film component, and in the time of photoetching, as long as by the pattern at photomask in focus, the foreign matter on dustproof film component has just had nothing to do with transfer printing.
Such dustproof film component generally attaches the transparent dust-proof film assembly film being made up of the good nitrocellulose of printing opacity, cellulose acetate or fluorocarbon resin etc. or then form in the upper surface of the dustproof film component framework being made up of aluminum alloy, corrosion-resistant steel, polyethylene etc.In addition, have in the lower end of dustproof film component framework in order to carry out the adhesive coating being formed by polybutene resin, polyvinyl acetate base resin, acrylic resin etc. that photomask filling and take the protection of adhesive coating as object release layer (stripping film).
Dustproof film component is although it is so actv. for preventing that foreign matter from invading the intrusion of the inside of sealing from outside after mask attaches, but as there is foreign matter to adhere at dustproof film component itself, and in the situation of the inside of this foreign matter in sealing, be difficult to prevent that foreign matter from adhering to the foreign matter of photomask.Therefore,, not only for dustproof film component itself, also require to there is high spatter property for the glass substrate using in the manufacture of dustproof film that forms dustproof film component.
Recently, due to the appearance of panel of LCD of large-scale large picture etc., there is the mask plate of photomask and etchant resist lamination on the surface of glass substrate and have film formed transfer mask of shading of patterning etc., for thering is the substrate for large molded dimension more than 700mm on one side, to this substrate carry out surperficial non-cohesive dust, dirt etc. and the substrate transporting that also do not damage to transport box be known.
For example, in patent documentation 1, having recorded a kind of substrate holding that makes to have wheel can receive from the side of the containing box of hermetic type the substrate that can put and transport box.Transport in box at this substrate, the bottom surface of containing box inside disposes the flexual flue of the formation such as elastomeric material, and this flue can alleviate vibrations in transporting.But flexual flue is inadequate to the alleviation effects of concavo-convex the produced impact due to floor and road, in addition, dambonite material impacts and slows down the problem that effect weakens gradually along with the variation of time has.
On the other hand, transport chassis as the glass substrate that transports large-scale glass substrate, for the concavo-convex impact being subject to due to floor and road when transporting slows down, it is also known between chassis and glass substrate receiver, slowing down as impact the chassis that transports that material sandwiches the foamed polyurethane of square.
But, even if use the impact of this foamed polyurethane to slow down the chassis that transports of material, the screws that use on lid in the time transporting etc. can adhesive dust, can adhere to a large amount of foreign matters on glass substrate, so the glass substrate using during seldom for manufacture as dustproof film component film.
In addition, foamed polyurethane, also can be aging along with the process of time, and its impact slows down effect and also can reduce gradually, can due to curved glass substrate reception box occur laterally wrong from etc., thereby there is the damage of glass substrate.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2007-250688 communique
Summary of the invention
Therefore, the present invention will solve such problem, its objective is a kind of impact producing on glass substrate receiver and glass substrate that both can reduce in the time that large-size glass substrate transports is provided, also can reduce adhering to of foreign matter, and not occur because the glass substrate of the laterally wrong glass substrate damage from producing transports chassis.
It is that the length of transporting the one side of receiving in glass substrate receiver is that the large-scale square glass substrate that at least 1000mm, thickness exceed 10mm transports chassis that glass substrate of the present invention transports chassis, it is characterized in that: have available forked framework of transporting means processing; The wheel portion arranging in the bottom of this framework; The fixing maintenance by described glass substrate receiver, the impact slowing mechanism that at least two kinds of different elastic bodys of spring constant that the impact producing on glass substrate receiver described in the time transporting and described square glass substrate is slowed down form.
In addition, the present invention is at least one elastic body at least two kinds of elastic bodys preferably, the scope that its deadweight deflection in the time loading glass substrate receiver is 10～15mm, the metal spring that stroke in the time of the impact of 2G is 20～30mm, the elastic body coordinating with metal spring, is preferably selected from metal spring, air bellow or Shockproof rubber.
Invention effect
According to the present invention, the glass substrate with impact slowing mechanism of the present invention transports chassis, in can the impact when transporting slowing down, foreign matter in can also reducing in glass substrate receiver on the large-size glass substrate of storage, and can glass substrate be taken care of with no damage and be transported.
Accompanying drawing explanation
Fig. 1 is the front elevation that the glass substrate in having carried the box-like state of substrate reception transports chassis.
Fig. 2 is the A-A section drawing of Fig. 1 of an embodiment of the invention.
Fig. 3 is the details drawing of impact slowing mechanism of the present invention.
Fig. 4 is the details drawing of the impact slowing mechanism of comparative example.
The specific embodiment
Below, an embodiment that glass substrate of the present invention is transported to chassis with reference to accompanying drawing describes, but the present invention is not limited to this.
Fig. 1 is the front elevation that transports chassis 11 of the state in having carried glass substrate receiver 41, and Fig. 2 is the planar view in the A-A cross section in Fig. 1.
In Fig. 1, glass substrate transports chassis 11, there is the box mounting portion 12 that glass substrate receiver 41 is fixed to maintenance in the time transporting, can be by forked framework 13 of transporting means processing, wheel portion 14 and the impact slowing mechanism 15 arranging between described box mounting portion 12 and described framework 13.
In addition, so-called glass substrate receiver 41 and box mounting portion 12, use fastening clips 16 and the knob screw etc. (not shown) that are called rim lock to be fixed.
Fig. 2, for impacting the planar view of configuration of slowing mechanism 15.Impact configuration and number and the elastomeric cooperation of slowing mechanism 15, can carry out suitable design according to the shape of glass substrate receiver 41 and glass substrate and weight, be not limited to the form of Fig. 2.
In addition, in transporting, for adhering to of foreign matter lowered, preferred glass substrate reception box 41 use are charged prevents that band etc. from covering.The preferred side therein of framework 13 has the beam (not shown) that can unload with fork truck, in addition, in order to prevent entering foreign matter from wheel portion 14, seben 17 is preferably installed.
Fig. 3 is the details drawing of impact slowing mechanism 15 of the present invention.Impact slowing mechanism 15 of the present invention arranges between box mounting portion 12 and framework 13, by forming transporting the elastic body A21 that the impact of about 2G degree of middle generation slows down and the elastic body B22 that can slow down impact more than 2G.
Can slow down with an elastic body although transport all impacts of middle generation, in this occasion, as large in elastomeric flexible scope change, the size of impacting slowing mechanism 15 becomes large, and center of gravity uprises, and transports chassis meeting destabilization, and this scheme is not preferred.
As elastic body, can be from metal spring, air bellow, carries out suitable selection in Shockproof rubber etc., but A21 is preferably the cheap metal spring that temporal evolution is few, and elastic body B22 selects Shockproof rubber for well.Selecting of metal spring, the metal spring of spring constant 2.61kgf/mm and 4.06kgf/mm is being installed respectively, transport on chassis, to load onto in the experiment that substrate box carries out knee-action and learn, the metal spring of 2.61kgf/mm is excessively soft, and the metal spring of 4.06kgf/mm is really up to the mark, the effect that impact slows down is bad, the occasion of the metal spring of spring constant 3.38kgf/mm, the result that can obtain.The result that the deadweight stroke of such spring constant is tested, the deadweight stroke of the occasion of spring constant 2.61kgf/mm is 15.2mm, the occasion of spring constant 4.06kgf/mm is 9.7mm, transport in chassis of the present invention, preferably by the glass substrate of storage in glass substrate receiver 41 while loading in box mounting portion 12, the metal spring of the scope that its deadweight stroke is 10～15mm.
In addition, as in the present invention, the length on the one side of receiving in glass substrate receiver is 1000mm at least, thickness exceedes the occasion of transporting chassis of the large-scale square glass substrate of 10mm, the result that impact in transit is investigated, learn as about 2G degree, the stroke when impact of 2G is take the metal spring of the scope of 20～30mm as good.
Further, for the impact effect when transporting middle glass substrate and transport chassis 11 by jog slows down, preferably slide shaft 23 is fixedly installed on to box mounting portion 12 for good.Slide shaft 23 arranges axle maintaining part 24 and in 23 first end, removal stop section 25 is set in framework 13 sides.
By the setting of this slide shaft 23, in the time transporting middle glass substrate and transport chassis 11 by jog, glass substrate receiver 41 up-and-down movement sleekly, this up-and-down movement is suppressed effectively by each elastic body A21 and B22.
Embodiment
Below, embodiments of the invention are described.
Fig. 1, the glass substrate shown in Fig. 2 transports chassis 11, and box mounting portion 12 and framework 13 are made of the extruded material of aluminum alloy system.This glass substrate transports chassis 11, and it is of a size of wide 2050mm, dark 1900mm, high 420mm (comprising wheel).
Described in being arranged on, transport the impact slowing mechanism 15 on chassis 11, made by two kinds of elastic bodys and the slide shaft 23 of elastic body A21 and elastic body B22.Elastic body A21, adopts the metal spring that spring constant is 3.38kGf/mm, elastic body B22, the high decay of employing rubber (Kurashiki Kako's system " trade name: stopper ", maximum collapse is 14mm, maximum impact force is 3.7kN).In slide shaft 23, adopt the burned product of material matter SUS440C, slip maintaining part 24 is line style bearing shell.
In addition, in the occasion that described two kinds of elastic bodys is coordinated to the impact slowing mechanism 15 forming, deflection when mounting glass substrate receiver 41 is set as 12mm, when in the time of the impact that adds 2G, stroke is set as 25mm, the impact absorption power of the height decay rubber of elastic body B22 is set as 4G, and all impact absorption power adds up to 6G.
The impact slowing mechanism 15 of so making, as shown in Figure 2, the long side that transports chassis 11 at glass substrate respectively arranges two places, at short brink, 1 place is respectively set 6 places are set altogether.
On the other hand, the box mounting portion 12 that receiver 41 is loaded, its weight is 20kG, the glass substrate receiver 41 being loaded in addition, its size is wide 2020mm, dark 1880mm, high 195mm (removing jut), its weight is 130kG.
Then, the glass substrate receiver 41 of so making, dustless indoor interfacial agent and pure water at 10 grades are cleaned, after air-dry all dry, at the light harvesting lamp of dark indoor 400,000 Luxs to lid 41a, careful inspection of foreign substance is carried out in the inner side of box dish 41b, removes with the clean residual foreign matter adhesion zone of Visual Confirmation, obtains not having completely the state of foreign matter.
On the box dish 41b of the glass substrate receiver 41 of this state, by size 1780mm × 1620mm, thickness 17mm, the complete glass substrate (not shown) of inspection of foreign substance of weight 108kG is received, after lid 41a is carefully loaded, the adhesion zone for fitting portion (not shown) of lid 41a and box dish 41b is carried out to the sealing between zero-clearance.After this, further prevent that by charged glass substrate receiver 41 use Polythene Bag (not shown) from covering, be fixed transporting in chassis framework 13 with being with, in dust free room, take out of.
The glass substrate receiver 41 of bale packing is transported on chassis 11 fixing at glass substrate, it is transported with truck from Gao Qi city of Zhi Qunma county of Shang Yue city of Nigata county, and now, there is beam the inner side of framework 13, handling in truck vehicle can be used fork truck, can easily operate.
In addition, after transporting, glass substrate is transported to chassis 11 and open bundle cleaning, move into the dust free room of 10 grades, the lid 41a of glass substrate receiver 41 is opened, foreign matter on glass substrate is confirmed, find on glass substrate can Visual Confirmation foreign matter have 18, all can easily remove with air blower.This is in the present invention, the impact slowing mechanism that has used at least two kinds of different elastic bodys of spring constant of metal spring etc. to form, in transporting, vibrations have been carried out to actv. inhibition, it is the cause of hoot that the burnt hair dust quantity of the screw division using on the lid of substrate box etc. is suppressed.
Comparative example
Fig. 4 shows the impact slowing mechanism of comparative example.Width and the depth dimensions of the impact slowing mechanism of this comparative example are same as the previously described embodiments.For relatively, the glass substrate of making transports chassis 11 and has adopted the impact slowing mechanism of Fig. 4, and its height is 330mm.
In addition, in elastic body A21, use Shockproof rubber (Kurashiki Kako's system, " trade name: ring mount ", standard load-carrying 740N, load-carrying scope 250N～980N, loose when standard load-carrying is 15mm), deflection 8mm when glass substrate box carries, impact absorption load-carrying is 1.4G.Further, in elastic body B22, used height decay rubber same as the previously described embodiments, the impact absorption power of the height decay rubber of elastic body B22 is 1.4G, and all impact absorption power adds up to 2.8G.Except such impact slowing mechanism, identical with above-described embodiment.
Transport chassis 11 about the glass substrate of this comparative example, carry out transporting experiment with above-described embodiment is identical, foreign matter on glass substrate is confirmed by inspection method same as described above, finding has countless foreign matters on glass substrate, because this foreign matter is many, although useful air blower is removed, there is the thing that can not remove, the glass substrate transporting with the chassis of comparative example, is difficult to use in actual manufacture.This be due to, impacting slowing mechanism is that Shockproof rubber forms, compared with the occasion of embodiment, can not suppress fully vibrations, many from the burnt hair dust quantity at each positions such as the screw division of substrate box, the amount of the foreign matter on glass substrate increases, and wherein has inexpungible foreign matter.
Description of reference numerals
11 glass substrates transport chassis
12 box mounting portions
13 frameworks
14 wheel portions
15 impact slowing mechanism
16 fastening clips
17 blocking plates
21 elastic body A
22 elastic body B
23 slide shafts
24 slide shaft maintaining parts
25 anti-avulsion mechanisms
41a lid
41b box dish
Claims (3)
1. the length of transporting the one side of receiving in glass substrate receiver is at least the large-scale square glass substrate that 1000mm, thickness exceed 10mm and transports a chassis, it is characterized in that: comprising can be by forked framework of transporting means processing; The wheel portion arranging in the bottom of this framework; When described glass substrate receiver is fixed to maintenance, the impact slowing mechanism being formed by the impact at least two kinds of elastic bodys that slow down, that spring constant is different that can be when transporting described glass substrate receiver and described square glass substrate be produced.
2. glass substrate according to claim 1 transports chassis, it is characterized in that the metal spring that at least one elastic body in described at least two kinds of elastic bodys is the scope that is 10～15mm of the deadweight deflection in the time carrying top glass substrate receiver, stroke in the time loading 2G and impact is 20～30mm.
3. glass substrate transports chassis according to claim 2, it is characterized in that, the elastic body coordinating with described metal spring is selected from metal spring, air bellow or Shockproof rubber.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012265972A JP5950457B2 (en) | 2012-12-05 | 2012-12-05 | Glass substrate carriage |
| JP2012-265972 | 2012-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103848116A true CN103848116A (en) | 2014-06-11 |
Family
ID=50856323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310645958.1A Pending CN103848116A (en) | 2012-12-05 | 2013-12-04 | Glass substrate transports platform truck |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5950457B2 (en) |
| KR (1) | KR20140073403A (en) |
| CN (1) | CN103848116A (en) |
| TW (1) | TW201433537A (en) |
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| CN110497944A (en) * | 2019-07-22 | 2019-11-26 | 卡拉捷物流科技泗阳有限公司 | A kind of ight logistics loading-unloading vehicle with damping |
| CN110733548A (en) * | 2019-11-26 | 2020-01-31 | 徐州铁手五金工具制造有限公司 | transportation device for universal parts |
| KR200493920Y1 (en) * | 2020-01-03 | 2021-06-28 | 김혜경 | 360˚ rotating type wheel-caster structure |
| FR3126473B1 (en) * | 2021-08-27 | 2023-07-14 | Psa Automobiles Sa | Locking device for a tool having several locking positions. |
| KR102544483B1 (en) | 2023-01-18 | 2023-06-20 | 박대득 | Glass transfer cart with suppoter height adjustment structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105253465A (en) * | 2015-09-17 | 2016-01-20 | 张家港市盛一包装有限公司 | Packing board |
| CN105692094A (en) * | 2016-02-26 | 2016-06-22 | 中国冶集团有限公司 | Photovoltaic panel transportation method and device under soft-ground condition |
| CN106429277A (en) * | 2016-12-05 | 2017-02-22 | 南京德西联智能科技有限公司 | Natural gas liquefaction device transportation device capable of improving stability |
| CN106865003A (en) * | 2017-03-03 | 2017-06-20 | 合肥海琛科技服务有限公司 | A kind of computer transport buffer protection device |
| CN106865003B (en) * | 2017-03-03 | 2019-08-20 | 北京知投家知识产权运营有限公司 | Buffer protection device is used in a kind of transport of computer |
| CN108545479A (en) * | 2018-06-08 | 2018-09-18 | 张霁圆 | There is the transport device of the slow pedestal that shakes in a kind of tempered glass production process |
| CN113439063A (en) * | 2019-02-25 | 2021-09-24 | 村田机械株式会社 | Overhead carrying vehicle |
| CN113602391A (en) * | 2021-09-03 | 2021-11-05 | 广州启研机械设备有限公司 | Sunroof moves and carries device |
| CN113602391B (en) * | 2021-09-03 | 2022-05-31 | 广州启研机械设备有限公司 | Sunroof moves and carries device |
| CN114455825A (en) * | 2022-01-19 | 2022-05-10 | 四川雄港玻璃有限公司 | Glass pusher for autoclave |
| CN114455825B (en) * | 2022-01-19 | 2023-12-08 | 四川雄港玻璃有限公司 | Glass pusher for autoclave |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014112126A (en) | 2014-06-19 |
| KR20140073403A (en) | 2014-06-16 |
| TW201433537A (en) | 2014-09-01 |
| JP5950457B2 (en) | 2016-07-13 |
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